Using Large-Signal Measurements for Transistor Characterization and Model Verification in a Device Modeling Program

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1 Using Large-Signal Measurements for Transistor Characterization and Model Verification in a Device Modeling Program Maciej Myśliński1, Giovanni Crupi2, Marc Vanden Bossche3, Dominique Schreurs1, and Bart Nauwelaers1 1 Katholieke Universiteit Leuven, Belgium, 2 University of Messina, Italy, 3 NMDG N.V., Belgium. 1

2 Outline Introduction Large-signal measurement data in a device modeling program Transistor characterization Example: IC-CAP Example: MOSFET Model verification Example: Angelov model Conclusions 2

3 Introduction Large-signal network analyzer (LSNA) Amplitude and phase of all harmonics and intermods up to 50 GHz Realistic signals: 1-tone, 2-tone, N-tone up to +40 dbm DC, small-signal, large-signal behavior Non-50 Ω environment Sampler/Mixer-based 3

4 LSNA data in IC-CAP Large-signal on-wafer measurements Device: De-embedding structures: Frequency sweep RF power sweep DC bias sweep Frequency sweep Device Open Short 4

5 LSNA data in IC-CAP Large-signal on-wafer measurements Data processing De-embedding Transformation to the program specific format MDM files Yij Y-parameters of open Zij Z-parameters of short, after deembedding of open effects. i1dut = i1 v1(y11 + Y12 ) (v2 v1)y12 = i1 v1y11 v2y12 i2 dut = i2 v2 (Y22 + Y12) (v1 v2 )Y12 = i2 v2y22 v1y12 v 1dut = v 1 i 1dut Z11 i2 dut Z12 v2 dut = v2 i2 dut Z 22 i1dut Z12 5

6 LSNA data in IC-CAP Large-signal on-wafer measurements Data processing Fundamental Frequencies Implementation in the device modeling program Sweep Plan Measured Data Measured data 6

7 LSNA data in IC-CAP Large-signal on-wafer measurements Data processing Implementation in the device modeling program Measured data Data processing routines 7

8 LSNA data in IC-CAP Large-signal on-wafer measurements Data processing Implementation in the device modeling program Measured data Data processing routines Link to simulator CITI files 8

9 LSNA data in IC-CAP Large-signal on-wafer Selecting display domain measurements Selecting measurement conditions Data processing Implementation in the device modeling program Measured data Data processing routines Link to simulator Graphic user interface CITI files 9

10 Transistor Characterization On-wafer DUT: MOSFET Open & Short deembedding structures LSNA measurements: f0: 2, 4, 5 GHz Pin: dbm VGS: 0.3, 0.6, 0.9 V VDS: 0.1, 0.6, 0.9 V 10

11 Model verification Angelov MOSFET model: Neglected self-heating and intrinsic non quasi static effects, intrinsic circuit Igd gate Lg Rg Cpg + Cgd Vgdc Tuned around: VGS=0.6 V, VDS=0.9 V, f0=4 GHz Rd drain Ids Igs + Cgs Vgsc Capacitance mode, Extracted from DC and S-parameter measurements Cds Cpd Rs source model AngelovM1 Angelov Idsmod=1 Igmod=1 Capmod=1 Ipk0= Vpks=0.84 Dvpks=0.027 P1=2.5 P2=0.1 P3=6.2 Alphar=2.5 Alphas=0.5 Vkn=0.5 Lambda=0.1 Lambda1=0.07 Lvg=0 B1=0 B2=3.92 Lsb0=0 Vtr=4 Vsb2=0 Cds=28.331fF Cgspi=2.6fF Cgs0=5fF Cgdpi=4.5446fF Cgd0= fF Cgdpe=0fF P10=1 P11= P20=0.2 P21= P30=0.25 P31= P40=1.2 P41= P111=0.001 Ij= Pg= Vjg=0.9 Rg=22.4 Rd=10.7 Rs=11.2 Ri=0 Rgd=0 Lg=0pH Ld=0 Ls=0 Tau=0ps Rcmin=0kOhm Rc=0kOhm Crf= fF Rcin=0kOhm Crfin=0fF Rth=50 Cth=0 Tcipk0=0 Tcp1=0 Tccgs0=0 Tccgd0=0 Tclsb0=0 Tcrc=0 Tccrf=0 Tnom=25 11

12 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 12

13 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 13

14 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 14

15 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 15

16 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 16

17 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 17

18 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 18

19 f0 = 4 GHz, VGS = 0.6 V, VDS = 0.9 V, RF power: dbm igs(t) vs. vgs(t) ids(t) vs. vgs(t) 19

20 Self biasing effect igs(t) vs. vvs. (t)pin gs ids(t) vs. vgs(t) 20

21 Self biasing effect Harmonic distortion AM-AM AM-PM igs(t) vs. vvs. (t)pin gs Power domain ids(t) vs. vgs(t) 21

22 22

23 23

24 24

25 25

26 26

27 Dynamic Trajectories igs(t) vs. vgs(t) ids(t) vs. vgs(t) ids(t) vs. vds(t) 27

28 Dynamic Trajectories igs(t) vs. vgs(t) ids(t) vs. vgs(t) ids(t) vs. vds(t) 28

29 Dynamic Trajectories igs(t) vs. vgs(t) ids(t) vs. vgs(t) ids(t) vs. vds(t) 29

30 Time Domain 30

31 31

32 32

33 Model tuning conditions 33

34 Conclusions Large-signal measurements + device modeling program = Complete large-signal device characterization and model accuracy assessment under realistic signals, Simple access and improved usability of the measured data, Model comparison and optimization. 34

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