SUNFEST 2009 PATTERNING METHODS OF ORGANIC FIELD-EFFECT TRANSISTORS SUNFEST 2009
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1 AMPLIFICATION CIRCUITS AND PATTERNING METHODS OF ORGANIC FIELD-EFFECT TRANSISTORS Hank Bink SUNFEST 2009 University of Pennsylvania
2 Organic Field-Effect Transistors Doped Si bottom gate and SiO2 dielectric layer Pentacene semiconductor Self-Assembled Molecules on source and drain for ambipolar characteristics Mobility around 0.25cm2/Vs Maximum drain currents near 30μA Source Semiconductor Dielectric Layer Gate
3 Background OFETs hold great promise for the future of brain-computer interfaces Conformal Small feature size Greater neural selectivity Devices placed directly on surface rather than wired Current techniques 3mm diameter sensors 1cm spacing between sensors Around 150, neurons/mm2 Bulky wire arrays attaching to machinery J.J. Van Gompel, G.A. Worrell, M.L. Bell, T.A. Patrick, G.D. Cascino and C. Raffel et al., Intracranial Electroencephalography with Subdural Grid Electrodes: Techniques, Complications, and Outcomes, Neurosurgery, 63 (2008)
4 What needs to be done Amplification Brain signals are very low voltage, order of microvolts Need to amplify these signals for use in electronics Organic transistors can be made in amplifying configuration 3.5 SUNFEST
5 Patterning via holes Brain is in aqueous environment Parylene aye eca can serve e as encapsulant capsua for devices Parylene can also act as a dielectric between transistor and sensor Electrodes must be placed from sensor in brain to gate Holes must be etched through parylene and transistor layers to make this connection What needs to be done SUNFEST 2009 Source Sensor Parylene Pentacene Dielectric Gate
6 FET Amplifiers Gate Source Transistors in amplifying topology can generate small signal gain DC voltage applied to gate Transistor, in saturation, draws drain current Small perturbation of gate voltage (AC signal) causes corresponding small change in drain current Take T k advantage of this drain current oscillation
7 AC Small Signal Gate Source Output Voltage Common Source Amplifier DC Gate Bias -50V Resistor Source is grounded is connected to power supply by resistor Small drain current perturbation now causes a small voltage signal at the drain Amount of gain is determined by the device characteristics, resistance, and DC biasing
8 Common Source Amplifier Calculations SUNFEST 2009 Gain = g m R d = μc ox ( V gs - V t )R d Gain (V/V) Resistance (MΩ) Used constant mobility and threshold voltage
9 DC Analysis Gain Predictions 50 to Sourc ce Voltage (V) Gate Voltage (V) 4.7MΩ 6.9MΩ 10MΩ 14.7MΩ 20MΩ 24.7MΩ 30MΩ 34.7MΩ 40MΩ 44.7MΩ 50MΩ Resistance Slope 4.7MΩ MΩ MΩ MΩ MΩ MΩ MΩ MΩ MΩ MΩ MΩ
10 The image cannot be displayed. Your computer may not have enough memory to open the image, or the image may have been corrupted. Restart your compute SUNFEST 2009 Gain (V/V) Small Signal Gain Results Resistance (MΩ) Resistance Maximum (Mohm) Gain (V/V) Used 1Vpp small signal input at 15Hz About half as much as calculated; only slightly less than DC prediction
11 The image cannot be displayed. Your computer may not have enough memory to open the image, or the image may have been corrupted. Restart your compute SUNFEST Frequency Response ) Gain (db) Logarithmic Frequency (Hz) -3dB point near 35Hz Higher frequencies severely limited gain due to high gate capacitance Rolls off greater than -20dB/decade
12 Further Investigation Why calculations were off (determining how mobility and threshold voltages change with gate voltage) Source Gate Different amplifying circuits to take advantage of ambipolar characteristics ti Gate Output Voltage Source Ambipolar active load
13 Patterning Methods Parylene was etched using oxygen plasma Glass and silicon substrates measured well on profilometer 100W, 500mTorr showed a rate of 0.2μm/minute Kapton samples gave no decent measurements BCB and spin-on-glass were etched with SF6 BCB and spin on glass were etched with SF6 Spin-on-glass did not exhibit etching with O2 SF6 etching did not give any consistent resuslts BCB results could not yet be measured
14 Further Investigation Using polyimide to avoid SoG and Kapton etching problems Attempt etching using photoresist in hole pattern, then test with deposited electrode H. Kawaguchi, T. Sakurai, High Mobility of Pentacene Field-Effect Transistors with Polyimide Gate Dielectric Layers, Appl. Phys. Lett., 84 (2004)
15 Dr. Cherie Kagan Sangam Saudari Dr. Jan Van der Spiegel The entire Kagan group NSF Acknowledgements
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