LPP collector mirrors coating, metrology and refurbishment
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1 LPP collector mirrors coating, metrology and refurbishment 2013 International Workshop on EUV and soft X-Ray Sources Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler optix fab GmbH Christian Laubis, Frank Scholze PTB Berlin Dublin, November 5, 2013
2 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 2 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
3 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 3 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
4 Team and organization Organization: Mission: Team: GmbH (limited liability company) Fabrication of customized optics and optical components for EUV 13.5 nm, synchrotron and FEL beamlines, metrology, R&D applications, etc. Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler 4 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
5 Contact information mailing address optix fab GmbH Hans-Knöll-Str Jena Germany phone fax President and CEO info@optixfab.com Torsten.Feigl@optixfab.com Dr. Torsten Feigl 5 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
6 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 6 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
7 Multilayer coated collector optics for LPP sources 7 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
8 First p sr multilayer collector realized in 2004 Measured EUV reflection and angle of incidence on EUV collector mirror (R-measurement: PTB Berlin) Reflectivity, % AOI, deg N = 60 AOI, deg Substrate tilt, deg. 8 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
9 First 300 mm multilayer collector realized in 2006 R CA > 66.5 % (s-pol) l = nm FWHM > nm s l = nm Measurements: PTB Berlin reflectivity mm, axis mm, axis mm, axis mm, axis mm, axis mm, axis wavelength, nm 9 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
10 High-temperature multilayer collectors realized in 2008 R CA > 58 % (s-pol) New Mo/X/Si/X coating with superior thermal stability up to 600 C Measurements: 60% PTB Berlin, BESSY II reflectance 50% 40% 30% 20% r = 40mm r = 50mm r = 60mm r = 70mm r = 80mm r = 90mm r = 100mm r = 110mm r = 120mm r = 130mm 10% 0% wavelenght, nm 10 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
11 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 11 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
12 LPP collector coating challenges R > 50 % (uncapped ML) l = (13.50 ± 0.03) nm Dd = nm = 15 pm Diameter: > 660 mm Lens sag: > 150 mm Tilt: > 45 deg Weight: > 40 kg 12 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
13 NXE: Improved collector lifetime in the field. Champion lifetime in the field ~11 months (~120 billion pulses) Six collectors with >6 months lifetime Update given at SPIE in February Cap layer development has greatly increased average collector lifetime 13 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
14 Collector damage and degradation mechanisms Impact of particles, ions, radiation onto the collector Degradation mechanisms on the surface: tin accumulation, ion damage, oxidation, blistering, Tin deposition is the dominant mechanism Damage occurs only at the top section of the coating With additional coating protection, the collector field performance has become much more mature Huge lifetime improvements were achieved by the introduction of new and improved cap layers 14 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
15 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 15 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
16 EUV reflectance mapping after coating Measurement of s-polarized EUV reflectance at nm over full collector CA (3360 measurement points) Average reflectance <R s-pol > = 53.5 % <R upol > = 44.7 % Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , , % 5 % -200 EUV reflectance 13.5 nm: -300 Measurements: PTB Berlin X /mm 16 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
17 EUV reflectance mappings at different stages of refurbishment Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , ,05000 Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , ,05000 Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , , X /mm X /mm X /mm Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , ,05000 Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , ,05000 Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , , X /mm X /mm X /mm 17 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
18 Averaged EUV reflectance at different stages of refurbishment 70% 60% Average s-pol EUVR Average unpol EUVR 50% 40% 30% 20% 10% 0% as-deposited end of life 1st step 2nd step 3rd step 4th step 5th step 18 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
19 BB04: EUV reflectance after coating of capping layer Measurement of s-polarized EUV reflectance at nm over full collector CA (3360 measurement points) Average reflectance <R s-pol > = 47.7 % <R upol > = 39.8 % Y /mm ,6500 0,6300 0,6100 0,5900 0,5700 0,5500 0,5300 0,5100 0,4900 0,4700 0,4500 0,4300 0,4100 0,3900 0,3700 0,3500 0,3300 0,3100 0,2900 0,2700 0,2500 0,2300 0,2100 0,1900 0,1700 0,1500 0,1300 0,1100 0, , , % 5 % -200 EUV reflectance 13.5 nm: -300 Measurements: PTB Berlin X /mm 19 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
20 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 20 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
21 Complete multilayer stripping and recoating initial reflectance Initial coating Average reflectance <R upol > = 39.8 % EUV reflectance 13.5 nm: 21 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
22 Complete multilayer stripping and recoating Complete ML stripping + recoating Average reflectance <R upol > = 43.8 % EUV reflectance 13.5 nm: 22 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
23 Outline Introduction to optix fab History of LPP collector mirror coating at IOF / optix fab NXE:3100 LPP collector lifetime Refurbishment of EUV collector mirrors - top layer refurbishment - multilayer stripping and recoating Summary and acknowledgement 23 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
24 Summary Collector lifetime: 120 Billion pulses with new collector coating It is possible to refurbish multilayer LPP collector mirrors! Collector refurbishment: - keeping initial ML coating: 90 % of initial EUVR - stripping initial ML coating and ML recoating: no EUVR loss 24 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
25 Acknowledgements EUV source development Cymer ASML EUV collector Fraunhofer IOF: Christoph Damm, Andreas Gebhardt, Tobias Herffurth, Robert Jende, Johannes Paul Jobst, Thomas Müller, Michael Scheler, Thomas Peschel, Stefan Risse, Steffen Schulze, Ronald Schmidt, Sven Schröder, Mark Schürmann, Marcus Trost, Sergiy Yulin, Uwe Zeitner, and many others EUV reflectivity measurement PTB Berlin: Christian Buchholz, Annett Barboutis, Martin Biel, Benjamin Dubrau, Andreas Fischer, Anne Hesse, Jana Puls, Christian Stadelhoff 25 I 2013 International Workshop on EUV and soft X-Ray Sources, November 5, 2013
26 optix fab.
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