membrane sample EUV characterization
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1 membrane sample EUV characterization Christian Laubis, PTB
2 Outline PTB's synchrotron radiation lab Scatter from structures Scatter from random rough surfaces Measurement geometries SAXS Lifetime testing Wrap-up 2 Pellicle-TWG 21-Feb-2016
3 PTB - the National Metrology Institute About PTB: PTB the national metrology institute providing scientific and technical services What are PTB's capabilities? PTB measures with the highest accuracy and reliability metrology as the core competence 3 Pellicle-TWG 21-Feb-2016
4 Storage Rings in Berlin-Adlershof BESSY II 4 Pellicle-TWG 21-Feb-2016
5 BESSY I, II, MLS : BESSY I BESSY II: circumference 250 m electron energy 1.7 GeV since 1999: BESSY II since 2008: MLS PTB: 10 beamline branches from 400 nm (3 ev) to 0.02 nm (60 kev) UV EUV X ray Metrology Light Source MLS circumference 48 m electron energy MeV 8 beamlines from 8 mm to 4 nm (300 ev) THz UV EUV 5 Pellicle-TWG 21-Feb-2016
6 Experimental stations at the MLS VUV irradiation EUV Undulator 1a IR radiation 1b dfl deflected tddirect beam 1c Compton backscatter 1d VUV/EUV monochrom. bending magnet 2a calculable radiation 2b UV/VUV monochrom. (source calibration) 3 EUV radiometry 4 VUV radiometry 5 THz beamline 6 IR beamline 7 diagnostics front end 6 Pellicle-TWG 21-Feb-2016
7 PTB s EUV Reflectometer 7 Pellicle-TWG 21-Feb-2016
8 Optics for EUV Sources 5 sr collector, 670 mm outer diameter design coating mounted for measurements at PTB 8 Pellicle-TWG 21-Feb-2016
9 EUV-Ellipso-Scatterometer Detector azimuthal polar l flip X Y Z rot. X rot. Y rot ZZ rot. SSample l 100 mm 100 mm 25 mm sample size: weight: 0.5 µm 0.5 µm 0 5 µm x 190 x 70 up to 5 kg no lubricants used ((no organic g contaminants)) 9 Pellicle-TWG 21-Feb-2016
10 Soft X-ray radiometry beamline at BESSY II wavelength range 1 nm to 25 nm EUV ellipso scatterometer 10 Pellicle-TWG 21-Feb-2016
11 at-wavelength reflectometry 11 Pellicle-TWG 21-Feb-2016
12 EUV reflectance reflectance of reference membranes => clear thickness oscillations => minor differences between fields 12 Pellicle-TWG 21-Feb-2016
13 EUV transmittance transmittance of reference membranes => rather SiN instead of Si 3 N 4 transmittance broad spectral range grey curves: CXRO data solid line: SiN dashed line: Si 3 N 4 CXRO data shifted by nm to account for chemical shift 13 Pellicle-TWG 21-Feb-2016
14 at-wavelength scatter measurements scatter in reflection geometry 14 Pellicle-TWG 21-Feb-2016
15 EUV Scatterometry geometrical properties: structure width structure height edge angles edge profiles.. test pattern: Scheme of scatterometry measurements semi dense bright lines CD 180 nm, duty cycle 1:3 15 Pellicle-TWG 21-Feb-2016
16 EUV Scatterometry Diffraction of semi dense 180 nm bright lines at 1:3 duty cycle. fix angle of incidence, 6 3 wavelengths: 13.65, 13.92, nm 16 Pellicle-TWG 21-Feb-2016
17 Comparison: Scatterometry vs. AFM CD blue: scatterometry, red: AFM offset scatterometry: 2.7(18) nm 17 Pellicle-TWG 21-Feb-2016
18 PSD from scatter measurements 4000 s 200 s 0.2 s 18 Pellicle-TWG 21-Feb-2016
19 Membranes: EUV scatter in reflectance scatter in reflectance Scale is log 10 of CCD counts /100 s the reflected beam indicates severe distortions of the membrane for fields 2 and 4 19 Pellicle-TWG 21-Feb-2016
20 at-wavelength scatter measurements scatter in transmission geometry 20 Pellicle-TWG 21-Feb-2016
21 EUV scatter in transmission geometry 21 Pellicle-TWG 21-Feb-2016
22 Membranes: EUV scatter in transmission membrane broken scatter in transmission Scale is log 10 of CCD counts /100 s 22 Pellicle-TWG 21-Feb-2016
23 SAXS 23 Pellicle-TWG 21-Feb-2016
24 X-ray Beamline energy range: 1.75 kev to 10 kev (0.7 nm to 0.1 nm) 24 Pellicle-TWG 21-Feb-2016
25 SAXS / GISAXS set-up at X-ray beamline HZB SAXS set-up: length about 3 m weight about 3 t Sample detector distance: 1.4 m to 4.3 m 25 Pellicle-TWG 21-Feb-2016
26 X-ray detector PILATUS Pilatus 1M Vacuum version, 320 µm Si thickness 981 x 1043 pixels, pixel size 172 x 172 µm², area 169 x 179 mm² 26 Pellicle-TWG 21-Feb-2016
27 SAXS measurement geometry Intense monochromatic radiation, photon energy E Sample 2D detector Radial integration ti Scattered intensity it 4 as function of momentum transfer q = 4 hc E sin 27 Pellicle-TWG 21-Feb-2016
28 SAXS: position sensitivity the X ray beam cross section is 0.5 x 0.5 mm² data in center of membrane data 0.6 mm off center 28 Pellicle-TWG 21-Feb-2016
29 SAXS radial integral scheme of the reciprocal grid: unit vectors indicated in red length: a pitch pitch adapted to measured peaks: 28.2 nm indicated dare 7 vectors seen in the scatter image <1,0>; <1,1>; <2,0>; <2,1>; <3,0>; <2,2>; <3,1> note that the unit vectors are not orthogonal here: length^2 = h^2 + k^2 + hk 29 Pellicle-TWG 21-Feb-2016
30 Lifetime testingti 30 Pellicle-TWG 21-Feb-2016
31 Irradiation beamline setup The irradiation beamline is designed to capture and focus the available radiation from a bending magnet of BESSY II 31 Pellicle-TWG 21-Feb-2016
32 Irradiation beamline: Spectral distribution blue dashes: spectrum after mirror red line: with additional Si filter integral power : W (no filter) nj / pulse 0.15 W (Si Filter) 0.4 nj / pulse 32 Pellicle-TWG 21-Feb-2016
33 Irradiation testing Chamber with gas supply system and load lock distance "161" distance "334" Power density for different chamberpositions. Two scalings for best depiction of 'Hot ' and 'Cold' spot. 33 Pellicle-TWG 21-Feb-2016
34 wrap-up PTB offers EUV scatterometry measurements in transmission and reflection geometry on membrane samples and surfaces Structures as well as random rough surfaces can be investigated SAXS measurements are available at PTB PTB operates an EUV lifetime testing facility 34 Pellicle-TWG 21-Feb-2016
35 Thank you! Physikalisch-Technische Bundesanstalt Braunschweig and Berlin Abbestraße Berlin Christian Laubis Telefon: tb
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