Recent Activities of the Actinic Mask Inspection using the EUV microscope at Center for EUVL

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1 Recent Activities of the Actinic Mask Inspection using the EUV microscope at Center for EUVL Takeo Watanabe, Tetsuo Harada, and Hiroo Kinoshita Center for EUVL, University of Hyogo

2 Outline 1) EUV actinic mask inspection using EUV Microscope 2) EUV Microscope using a highmagnification objective with three multilayer mirrors

3 EUV actinic mask inspection using EUV Microscope Takeo Watanabe, Tetsuo Harada, Hiroo Kinoshita, Center for EUVL, LASTI, University of Hyogo Tsuyoshi Amano, Osamu Suga, Selete* * Present affiliation: EIDEC

4 Outline 1) EUV microscope 2) Phase defect observation 3) Defect repairing using FIB and its observation 4) Conclusions

5 Background Total 11 sets of the commercial steppers for EUV Lithography will be delivered in 2013 ~ Mask pattern defect Electric circuit error Device error EUV mask repair and the mask inspection for the repaired mask is required 5

Mask inspection method Inspection by exposure wavelength EUV Mask Defect EUV

New SUBARU SR BeamLine 3 Schwarzschild 光学系 (NA0.

6 Mask inspection method Inspection by exposure wavelength EUV Mask Defect EUV mask defect inspection tool ALS Zone Plate 型 Amplitude defect Phase defect hp100 nm Glass Affected with Intensity profile Glass Affected with the phase profile (pit defect) Pit and bump defects of 1 nm depth are printable. New SUBARU SR BeamLine 3 Schwarzschild 光学系 (NA0.3 倍率 30X) ロードロックサンプル除振台 EUV 顕微鏡 X 線ズーミング管 (10~200X) CCD NewSUBARU Schwarzschild 型 hp150 nm Difficult to inspect using DUV and SEM.

7 Specification of EUV Microscope New SUBARU SR BeamLine 3 Schwarzschild optics (Multilayer mirror, NA 0.3, 30X) front-end turning mirror (Multilayer mirror) back-end turning mirror (Multilayer mirror) (c) CCD camera Load-lock chamber Schwarzschild optics Magnification : 30X Numerical aperture: 0.3 Vibration isolator X-Y-Z sample stage X-ray zooming tube (10~200X) Light source Bending magnet Total magnification 300~6000x Resolution 10 nm Method Bright field Defect observation Amplitude and phase defects

8 Mask defect inspection by EUVM 600X 500nm 3um Absorber 150nm L/S Contamination 1um Dot Dark area Mo/Si ML ULE Substrate Amplitude Phase Finished mask Blanks

Resolution of mask defect by EUVM 12000 1200X

units) 10000 8000 6000 4000 2000 50 nm Isolated line

9 Resolution of mask defect by EUVM X Intensity (arb. units) nm Isolated line of 300 nm width pixels Pattern edge profile of light intenisty By 25% and 75% of maximum light intensity light for the absorber edge pattern, the resolution of 50nm is obtained.

Printability of Mask Defect Printability of phase defect under the absorber

printability depends on the position of the programmed defect.

20 30 40 50 60 70 80 90 100 110 120 130 140 150 Width (nm) Line-pit defects

of point and line programmed defects Controlled the width and height of the

10 Printability of Mask Defect Printability of phase defect under the absorber pattern 400 nm L/S,programmed defect height of 12 nm Hp 400 nm The printability depends on the position of the programmed defect. Depth (nm) Printability Non-printable area Printable area Width (nm) Line-pit defects Resolved Not resolved Hole-pit defects Resolved Not resolved Printability of point and line programmed defects Controlled the width and height of the programmed defect. Depth: 1~4 nm Width: 20~140 nm The printability criteria was clarified using EUVM.

11 Repair of clear defect Clear defect (Reflected region) SEM image Absorber ML Lack of absorber Resist image EUVM image Lack of circuit pattern 11 Clear defect

12 Conventional repairing method of clear defect by CVD Demerrit: CVD layer contains carbon. Thickness loss by cleaning. CVD layer has to be large height. Affected with shadowing effect

13 Mask defect repair using FIB Abs. ML By removing of the ML under the Clear defect by the Ga ion beam of FIB, the EUV light will not be reflected.

14 Pattern inspection by EUVM for the repaired clear defect by FIB Narrow width SEM image 225 nm L/S FIB irradiation area Wide width 500nm ML removal area EUVM 像 Clear defect Not completely removed Narrow width for repairing Completely removed 14

15 Pattern inspection by EUVM for the repaired clear defect by FIB Narrow width EUVM image 128 nm L/S FIB irradiation area Wide width 500 nm The clear defect which was repaired by FIB was observed using EUVM.

16 Conclusions 1) Printability criteria of the programmed defect width and height was obtained using EUVM mask defect inspection. 2) It is confirmed that the clear defect repairing by FIB is found to be usable using the EUVM observation.

17 Acknowledgement This research was supported by NEDO. And the mask sample was prepared by Selete.

18 EUV Microscope using a high magnification objective with three multilayer mirrors M. Toyoda, K. Yamasoe, T. Hatano, M. Yanagihara Lab. of Soft X-ray microscopy, IMRAM, Tohoku University A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita LASTI, University of Hyogo

19 Outline 1. Motivation Early studies and technical issues 2. Experimental Innovative optics utilizing high magnification 3. Highlight data EUVL mask images with improved resolution 4. Summary and future plans

20 1. Motivation

21 Benefit of using high-magnification mirror as an objective In the x-ray zooming tube, CsI thin film was utilized as the photoelectric conversion element. However, the grain size of the CsI affected with the resolution of the EUVM imaging. Thus the high-magnification-mirror objective is selected for the EUVM imaging.

22 At wavelength inspection of EUVL mask absorber <100nm defects Mo/Si substrate defects Requirements for an inspection tool At wavelength observation (λ=13.5nm) High spatial resolution (δ<40nm) Wide field of view for a rapid whole mask inspection

electron lens H. Kinoshita Jpn. J. Appl. Phys. 49(2010)06GD07.

23 Early study: EUV Microscope on NewSUBARU SR EUV light Schwarzschild objective(30x) NA=0.3 EUV zooming tube (200x) photo cathode Line width 480nm (120nm on wafer) mask sample electron lens H. Kinoshita Jpn. J. Appl. Phys. 49(2010)06GD07. EUV electron Bright field image at λ=13.5 nm Rayleigh s limit δ=30 nm Field of view Φ=20μm Actual resolution δ>100 nm

24 Technical issues of the EUV Microscope Degraded resolution resulting from aberrations of Schwarzschild objective. Small field of view limited by an electron lens of the zooming tube. Aim of this work Innovative EUV imaging facility realizing both high spatial resolution for 22-nm node mask, wider field of view for practical inspection time.

25 2. Experimental

26 Two stage imaging system for high magnification sample 1st stage CCD camera δ=40μm 2nd stage Rayleigh s limit δ=33nm NA=0.25 m=30 intermediate image δ=1μm NA=0.01 m=40 M.Toyoda, AIP Conf. Proc. 1365, 176(2011) Higher magnification (m>1200) 30nm resolution with EUV-CCD camera Good correction of off-axis aberrations Large field of view over Φ>160μm

27 Experimental setup of the novel facility illumination optics SR EUV 2nd stage mirror intermediate image NewSUBARU BL3 2nd stage mirror CCD camera turning mirror 600 mm Schwarzschild objective EUVL mask Schwarzschild objective load lock system

28 Instrumentation of the imaging optics Concave mirror 50mm Convex mirror 5.5nm 9.3nm Substrates (5 sets) were polished in IMRAM. Mo/Si multilayer was coated with IBS. Mirrors were aligned using Zygo interferometer. Wavefront error W=2.2 nm rms. (on-axis)

29 3. Highlight data

30 Confirmation of the magnification enhancement 50μm 5μm Intermediate image (m=30) Exp. time: 0.25 sec. Final image (m=1460) Line width: 240nm (60nm) Exp. time: 36 sec. EUV CCD camera: pixel size 13.5μm, pixels

31 Resolution measurement with L/S patterns High magnification images (m=1460) 5μm Line width: 225nm (56nm) Exp. time: 10s Line width: 88nm (22nm) Exp. time:100s

32 Resolution measurement with L/S patterns 5μm contrast: 0.54 Intensity 1μm Position (μm) 88nm width L/S pattern was clearly observed. The capability of inspecting 22nm node masks.

33 Conclusions 1) High magnification of 1460x was achieved using three mirror objective. 2) High magnification enhancement was confirmed by the observation of the actinic EUV mask. 3) 88 nm mask pattern was observed using high magnification objective in EUVM.

34 Summaries 1) Printability criteria of the programmed defect was confirmed by EUVM. 2) The benefit of the clear defect repairing method using FIB was confirmed by EUVM. 3) 88 nm mask pattern was observed using high magnification objective in EUVM.

Development of ultra-fine structure t metrology system using coherent EUV source

2009 International Workshop On EUV Lithography, July 13-17,2009 Development of ultra-fine structure t metrology system using coherent EUV source University of Hyogo 1, Hiroo Kinoshita 1,3, Tetuo Harada