Algorithmic Design Methodologies and Design Porting of Wireline Transceiver IC Building Blocks Between Technology Nodes

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1 Algorithmic Design Methodologies and Design Porting of Wireline Transceiver IC Building Blocks Between Technology Nodes S.P. Voinigescu1, T.O. Dickson1, T. Chalvatzis1, A. Hazneci1, E. Laskin1, R. Beerkens2, and I. Khalid2 1) University of Toronto 2) STMicroelectronics, Ottawa, Canada CICC, San Diego, Sept.19, 2005

2 Outline Introduction Low-noise broadband input comparators Mm-wave VCOs High-speed logic gates Circuits beyond 40 Gb/s Summary

3 Si(Ge Bi)CMOS speed is free... if you can afford the mask costs! MOS-HBT (BiCMOS) Cascode MAG > 8 65 GHz in HBTs and MOSFETs HBT-based cascodes have highest gain Benefits of the MOS cascode questionable at 65 GHz

4 Fundamental limitations of dynamic range Voltage Breakdown voltage Dynamic Range Dynamic range compressed as data rates increase Noise floor Bandwidth Emphasizes need for low-noise design methodologies

5 Power dissipation a major limitation in circuits beyond 40 Gb/s Bipolar only implementations suffer from VCC >= 3.3V 40 GHz latch consumes more than 50 mw CMOS has lower supply voltage and lower power dissipation but 40 GHz latch has yet to be demonstrated - must design in 90/65 nm with first pass success Emphasizes need for new low-voltage, high-speed logic topologies and robust design methodologies

6 Goal of this presentation Prove that algorithmic design methodologies exist for optimal solutions for all wireline building blocks Broadband input amplifiers VCOs (Bi)MOS-CML logic gates Prove that CMOS implementations are portable between technology nodes and foundries

7 Key enablers Invariance of characteristic current densities in MOSFETs Low-noise broadband matching, biasing, and sizing Low-voltage (Bi)CMOS topologies Small footprint (less than 20 mm per side) inductors with SRF> 100 GHz

8 MOSFET characteristic current densities invariant across nodes & foundries Peak 0.3 ma/mm Peak 0.2 ma/mm 0.15 ma/mm

9 Characteristic MOSFET current densities invariant over CS and cascode topologies The peak ft current density of a MOSFET cascode stage remains 0.3 ma/mm Cascode stage can be treated as a composite transistor in circuit design (ft, fmax, NFMIN) ft of MOSFET cascode is < 60% of MOSFET ft

10 Vertically stacked, multi-metal inductors for CML logic Q is not important Size is important Maximize L*SRF to trade-off tail current for bandwidth Use 3-7 metals T. Dickson et al. IMS-2004

11 Low-noise broadband amplifiers VCC VCC VCC Z0 RC Z0 RC RC L0 LC L0 LC LC VOUT VIN VIN Q1 Q2 VOUT Q1 Q2 VIN LF RE VDD = 1.2 V VDD = 1.2 V Z0 RC VOUT Q1 W = 40 um RF VDD = 1.2 V W = 120 um W = 40 um 3mA L0 LC 180 ph 180 ph 200 Ohm M1 200 Ohm 600 ph 650 ph W = 40 um W = 40 um IT W = 60 um W = 20 um

12 Transistor low-noise design (S. Voinigescu et al., BCTM 1996) 130nm MOSFET HBT JOPT JOPT Lowest noise achieved when transistor biased at JOPT (0.15mA/mm). Transistor noise parameters scale with emitter length/ gate width. RN = R/LE RN = R/W GN = G 2LE GN = G 2W GCOR = GC 2LE GCOR = GC 2W BCOR = B LE BCOR = B W Optimal biasing and sizing of BW3dB is key to low noise design.

13 Sizing SiGe HBT TIA & INV designs for noise matching TIA requires much smaller transistor size: Higher bandwidth Broadband input match leopt Lower power consumption

14 Broadband CMOS LNA topology scaling VDD = 1.2 V VDD = 1.2 V Z0 RC W = 40 um VDD = 1.2 V W = 120 um W = 40 um 3mA L0 LC 180 ph 180 ph 200 Ohm M1 200 Ohm 600 ph 650 ph W = 40 um W = 40 um IT W = 60 um W = 20 um Biased at 0.15 ma/mm W, IDS do not change with nodes NF50 and BW3dB improve as technology scales

15 Algorithmic design methodology for broadband low-noise TIAs 1. Bias HBT(MOSFET) at optimal noise current density JOPT (0.15 ma/mm) at 3dB frequency 2. Choose the DC voltage drop across RC for linearity requirements. This fixes the loop gain T = gmrc (=gm*ro) 3. Set the feedback resistance RF for 50 input match. 4. Size the emitter length (gate width) of Q1 for lownoise, such that the TIA noise impedance is Add inductors to extend bandwidth and filter highfrequency noise.

16 Measured single-ended 50-Ohm noise figure VCC VCC VCC Z0 RC Z0 RC RC L0 LC L0 LC LC VOUT VIN Q1 RE VIN Q2 VOUT Q1 Q2 VIN VOUT Q1 LF RF Differential versions of three circuits implemented Measured single-ended noise figure in 50 Ohm TIA has low noise over entire measured bandwidth

17 40-Gb/s eye diagrams 20-mV single-ended input (10-mV per side) EF-INV TIA Eye quality better for TIA (7.0) than EF-INV (5.8)

18 90-nm SOI TIA 40mm 10 Gb/s 8-dB noise figure 1V supply 6 mw p-mos load 15 Gb/s

19 VCOs

20 HBT VCOs Differential Colpitts topology gm Neg. Res. = Rb - 2 ω C1C 2 f osc 1 C1C 2 =, C EQ = C1 + C2 2π LB CEQ

21 SiGe HBT oscillator measurements Impact of: 1. base (tank) inductor 2. inductive emitter degeneration (LE) C. Lee et al. CSICS-2004

22 CMOS VCOs VDD = 1 V VDD = 1 V ISS L 2L C C L Von Vop Q2 Q1 Vop Von Q2 Q1 ISS osc, CMOS 2 3 g ' m Q eff CL C ' gs 4 C ' gd C ' db W osc, n MOS g ' m Q eff CL C ' gs 4 C ' gd C ' db W 1 W n MOS,cross 2 osc L [C ' gs 4 C ' gd C ' db ]

23 Colpitts CMOS/BiCMOS VCOs VDD = 1 V 100 ph 80 ph LD LD Von 100 ph Q2 30x1mmx65nm C1 40 ff C2 100 ph LT LT ff 200 ph C1 40 ff C2 80 ph Q1 200 ph RSS Vop 3x9mm Q4 Q3 3x9mm 200 ph Q2 33x1mmx130nm C1 30 ff C2 LT 230 ff 415 ph CSS =0.5 pf 1 C ' gs C ' sb 2 osc L k C ' gd C ' gs C ' sb [ Colpitts has higher fosc and built-in buffering over X-coupled LT C1 30 ff C2 Q1 33x1mmx130nm VCON 415 ph LS LS ] 200 ph 230 ff RSS W n MOS, Colpitts 100 ph Von Vop LS LSS 200 ph LS LD 30x1mmx65nm ff VCON VDD = 2.5 V LD A E, HBT, Colpitts CSS =1 pf [ 1 C var AE 2 osc L k C jca C var C ' jba AE C jba ]

24 BiCMOS cascode oscillator measurements Measured phase noise at 35 GHz and simulated NFMIN of SiGe MOS-HBT cascode stage as a function of gate voltage

25 VCO design methodology VCOs treated as LNAs matched to the source impedance Rp. This is generally not possible in cross-coupled VCOs! VCO topology (CS/CE or cascode) biased at optimum NFMIN current density (0.15 ma/mm in FETs) Vosc must be set close to VMAX to minimize phase noise Lower inductance, higher bias current, better L(fm) HBT-VCOs have db better phase noise due to larger VMAX L In 2 C1 L f m = V1 VOSC RS R<0 C2 2 V osc 1 f m2 1 C1 2 C1 1 C2 2

26 High-Speed Logic

27 Logic families RL Wp DV kwp RL DV RL OUTP Wn kwn DV DV IT RL OUTN INN IT INP IT Fig. 9. Inverters in various CMOS and SiGe BiCMOS logic families. Unlike conventional CMOS, gate & subthreshold leakage is not a problem in MOS-CML In MOS-CML low-vt is desirable MOS-CML with peaking is > 3x faster than CMOS

28 MOS/BiCMOS CML device sizing & biasing VDD = 1.8 V VDD = 1.8 V nh 1 nh 1 nh nh OUT OUT OUT Q1 Q3 Q2 DATA DATA Q1 Q4 Q3 Q2 DATA CLK CLK IT IT 2 Veff V 2 Veff C R L p= L L scales with L CL V 2 Lp = 3.1 IT2 Q4 W= IT 1.5 J peakfmax BW 3 db= = IT 0.3 ma / m 1.6 IT 2 V CL ; AE = ITmin= V IT 1.5 J peakfmax CL 3.1 Lpmax For a given speed and technology there is a maximum realizable Lpmax Speed improvement as CMOS scales is due solely to Veff (DV) scaling.

29 BiCMOS ECL latches (> 49 GHz) 2.5 V supply, IT=2.. 4mA 3.3 V supply, IT=2.. 4mA BiCMOS cascode with EF (SF) EF vs. SF: higher gain, lower E-S capacitance VBE > VGS

30 Evolution to 1-V, 40-GHz latch DUMMY VDD = 1 V nh 1 nh DUMMY OUT LVT QUAD Q3 S D1 S D2 S S D1 S S D1 S D2 S D1 S D2 S D2 S G1 Dummy G1 G2 G2 G2 G2 G1 HVT Pair G1 HVT Dummy CLK HVT D1 S S D2 S G1 Dummy G1 G2 G2 G2 G2 G1 G1 Dummy G1 Dummy G2 D2 G1 G2 G2 G2 LVT G1 LVT Q4 G1 DATA Q2 Dummy Q1 D1 S

31 Wireline circuits beyond 40 Gb/s

32 2.5-V, Broadband 49-GHz MS DFF BiCMOS D-Flip Flop Data In D Q Transimpedance Preamplifier Data Out 45 Gbs 50- Output Driver CLK Buffer CLK 12 Gb/s 40 Gb/s

33 2.5-V, 80-GHz driver with pre-emphasis and gain control VDD = 2.5 V ph 27.5 Q2 50 ph 50 ph 3x4.8mm Q1 3x4.8mm Q3 33x2mmx130nm 2x4.8mm 10 ma 10 ma Von 2x4.8mm 4x4.8mm Q ma Vop 10 ma 10 ma 10 ma 20 ma Adjustable gain with peaking Gain > 0 94 GHz S22<-12 db up to 94 GHz 130-nm MOS-HBT cascode

34 31 80-Gbs SiGe BiCMOS 2-1 PRBS Generator T. Dickson et al. ISSCC-2005

35 Selector: BiCMOS 80-Gb/s D1 D2 EF2 & series-shunt peaking for highest speed 3-D stacked inductor for reduced area and high SRF VCC = 3.3V DOUT RL LP1 CLK D2 CLK VGTAIL D1 RL LP1 LP2 DOUT LP2

36 40-Gb/s Feed Forward Equalizer core of each gain stage is a Gilbert cell tail current of the differential pair controls the tap weight (GAIN pad) SP/N pads control the tap sign A. Hazneci et al. CSICS-2004

37 40 Gb/s over 9-ft SMA cable + 3dB attn. input output

38 10 Gb/s equalization over 24-ft SMA cable +6dB attn.

39 100-Gb/s transmission over 5cm of on-chip interconnect possible in 90nm SiGe BiCMOS Model extracted from meas. on 3.6-mm long line 7-tap FFE equalizer

40 Summary Key design ideas: Optimal solutions exist for LNA, TIA, VCO, (Bi)CMOSCML gate topologies Biasing at minimum noise figure current density Matching noise impedance to signal source (tank) impedance Key MOSFET circuit scaling ideas FETs should be biased at constant current density Circuit size and bias current invariant over nodes while performance improves with scaling Circuits in the GHz range Sub-3W, 100 Gb/s Ethernet transceiver possible in 250GHz, 90-nm SiGe BiCMOS technology

41 Acknowledgments Bernard Sautreuil for his support over many years STMicroelectronics for fabrication Micronet, NSERC, Gennum Corporation and STMicroelectronics for financial support OIT and CFI for equipment grant CMC for CAD licenses

42 Backup

43 Impact of scaling in deep-submicron MOSFETs (500nm to 50nm) As a result of the constant-field scaling rules being applied to every new CMOS technology node: Voltages scale by factor S Vertical & lateral electric fields remain constant Charge per unit gate width and current per unit gate width remain constant The classical MOSFET I-V square law remains valid only at very low Veff beyond which it becomes linear

44 Mobility degradation Mobility degradation due to the vertical gate field dominates behaviour (based on Intel data, S. Thompson, IEDM'99 Short Course). eff = [ ] [ ] ac sr ac sr [ ] [ ] ac cm 2 MV 330 E eff 1/3 Vs cm sr cm MV 1450 E eff Vs cm The lateral field (due to VDS bias) is about 50 times smaller than the vertical field

45 Measured transfer & subthreshold characteristics in 90-nm n-mosfets

46 Measured small signal gm, Cgs, Cgd characteristics in 90-nm n-mosfets

47 Si vs. III-V FETs: ft, fmax S. Voinigescu et al. JHSES, March 2003 peak ft: 0.3 ma/mm peak fmax: 0.2 ma/mm

48 Consequences of constant-field scaling in 500 nm to 50 nm MOSFET channels: C'gs, C'gd, C'db constant over nodes down to 130 nm then decreasing as scaling of tox stopped at 1.2 nm g'm, g'ds, ft, fmax increase FMIN, Rn decrease RF & high-speed performance (except output swing) improves with scaling Constant current density biasing ensures design robustness over bias current, VT, process variation, nodes & foundries Scaling is good for high-speed digital/wireline

49 60-GHz, single metal inductor for VCOs Planar spiral inductor: C. Lee et al. CSICS-2004 Diameter = 27 mm Turns = 1 ¾ S = 2 mm, W = 2.5 mm Slide 49

50 Applying negative feedback for noise matching Negative feedback has similar impact on noise and input impedance Use Y-matrix to analyze noise params of: Multifinger MOSFETs CMOS inverter topology Parallel (transimpedance) feedback circuits Use Z-matrix to analyze noise params of: Differential stage Series feedback circuits: Tuned LNA with L (xfmr) degeneration EF input Inverter with resistive degeneration

51 Series feedback for noise matching r z CORF Z 11 F g NF 2 z SOP = r SOPA NF 2 r CORA ℜ Z 11 F ℜ2 Z 11F j [X SOP ℑ Z 11 F ] g NA g NA F MIN =1 2 g NA [r CORA r SOP ℜ Z 11 F ] 2

52 Parallel feedback for noise matching G NF Y CORF Y 11 F R NF 2 2 Y SOP = G SOPA 2G CORA ℜ Y 11 F ℜ Y 11 F j [B SOP ℑ Y 11 F ] R NA R NA F MIN =1 2R NA [G CORA G SOP ℜ Y 11 F ] 2

53 Inverter noise matching F Zo =1 Z R Y G N 0 N COR 2 Z 0 L 0 1 Z0 l E W OPT = 1 2 Z0 1 G G C2 B 2 R TIA noise matching 2 Z j 0 F Zo =1 R NA Z 0 Y CORA Z 0 G NA Z 0 R F 1 02 R F l E W OPT = Z 0 R F 1 02 R F G G C2 B 2 R ZIN= RF 1 RC IT RF > Z0 for 50 match, resulting in lower noise & smaller transistor size than low-noise INV design

54 CMOS topology In 90-nm CMOS, the p-mosfet is low-noise and fast enough for most applications up to 40 Gb/s Use CMOS inverter to improve gm/i, Rn to save current over NMOS-only implementations

55 Si CMOS, SiGe BiCMOS, InP low-noise broadband preamps IN+ OUT+ IN- OUT- OUT+ IN OUT+

56 Low-noise broadband preamps: InP vs. SiGe BiCMOS (H. Tran et al. GaAs IC Symp for InP TIA) SiGe: 40 Gbs NF at 10 Ghz CMOS 16.5 db SiGe-HBT 10 db InP-HBT 11.5 db InP: 40 Gbs Data Rate 20 Gb/s 40 Gb/s 40 Gb/s Sensitivity 20 mvpp 20 mvpp 8 mvpp

57 Push-Push VCO measurements (con t) Tuning characteristics: Tuning: 10 GHz (10.2%) Tuning: 15 GHz (21%) C. Lee et al. CSICS-2004 Slide 57

58 CMOS VCO design scaling and porting As technology scales to next node, g'm increases but VMAX decreases, Ideally W and IDS are fixed to maintain VOSC In reality W and IDS must be reduced in sync with VMAX maximum fosc increases hence larger Cvar can be used Scaling allows for smaller IDS&W but not necessarily better L(fm)

59 High-Speed Logic FoM: CML Gate Delay I DpeakfT SL FET = C gd Cdb I CpeakfT SL HBT = C bc C cs C 1 AV C bc C bc C cs Rb HBT V k V IT RL IT C gd C db Rg C gs 1 AV C gd FET V k V IT RL IT BiCMOS V C C cs IT Rg C gs C gd k V RL IT

60 Scaling of MOS/BiCMOS CML logic Table 1: fanout-of-1 latches ideal i.e. no parasitics, *) measured Latch Family Rate:Gbs VDD (V) DV (V) IT (ma) PD(mW) Ind (nh) 130nm MOSCML (2.4) nm BiCMOS (1.6) 1.5 (2.9) 1 CML 130nm BiCMOS CML *) 130nm BiCMOS (12.5) 18(30) 0.25 ECL *) 90nm MOSCML nm BiCMOS CML 90nm BiCMOS CML extracted 65-nm MOSCML Assumes maximum inductor SRF of 80 GHz*nH and SRF=2*Bitrate Numbers in brackets include emitter(source) followers

61 49 Gb/s over 6-ft cable 49 Gbs 43 Gbs

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