KEY FEATURES OVERVIEW

Transcription

1 1.0 μm Process Family: XDM10 Modular 1.0μm 350V Trench Insulated BCD Process DESCRIPTION XDM10 is X-Fab s dielectric trench insulated smart power technology. Main target applications are analog switch ICs, driver ICs for capacitive, inductive and resistive loads and EL / piezo driver ICs for applications using 110V net supply. The typical breakdown voltage of the HV-DMOS devices is >350 V or >275V. The modular process combines DMOS, bipolar and processing steps that are compatible with dielectric insulation to provide a wide variety of MOS and bipolar devices with different voltage levels within a dielectric bi-directional high voltage trench insulation on the same die. The 14 layers main process s are available for 350V breakdown voltage of the HV DMOS. These process s provide trench insulation, single level poly with thick gate oxide, a third level metal with power metal. With these main s an optimised self-aligned poly-gate n-channel quasi-vertical DMOS transistor and some bipolar transistors can be made, other process s can be added to integrate transistors, high voltage PMOS transistors, further bipolar elements and a third poly for poly-poly capacitors and high value resistors. KEY FEATURES OVERVIEW Trench (dielectric) insulated thick 6 inch SOI wafers are the base for the XDM10 process. With the dielectric insulation the necessary area needed for 350V insulation is significantly smaller then with junction insulation (especially for high voltage applications) leading to smaller chip sizes. Use of dielectric insulation insures a bi-directional insulation between adjacent components. The quasi vertical DMOS transistor is the basic HV component of the XDM10 technology. The device structure and process parameters are optimised to obtain a drain breakdown voltage of >350V and >275V respectively and maximum drain saturation current with a low on-resistance. The electrical characteristics depend on channel width and length, drift-layer length, drift-layer doping and extended-source field-plate effect. The DMOS device is fabricated with a double-diffused process with a deep p-tub to prevent secondary breakdown. A wide variety of different voltage levels is possible on the same die. The XDM10 process comes with two choices of main s, Single Trench Isolation (SITRIS), and Multiple Trench Isolation (MUTRIS). The SITRIS allows the voltage of up to 350V per single trench. While the MUTRIS s utilizes multiple trenches to allow 350V A high number of different devices are available: High and medium voltage n-channel DMOS Medium voltage PMOS transistors with different voltage levels NPN and PNP transistors with different voltages DEPLTRA (N channel depletion transistors), PODCAP (Poly on diffusion resistor) Scaleable DMOS & PMOS transistors with different numbers of centrepiece NEW: IGBT transistors NEW: HV depletion DMOS transistors NEW: Handle wafer contact resistor OTP option: Zener Zap High voltage and zener diodes Gate oxide and high voltage capacitors Poly resistors with different sheet resistivity Triple level metal, third metal 2.3μm Optional third poly for high value resistor or poly-poly capacitor Doped oxide / polyimide passivation 1μm design rules enable the integration of complex logic 1

2 APPLICATIONS Driver ICs for capacitive Inductive and resistive loads Analog switch ICs Driver ICs for EL and piezo elements High voltage DMOS arrays Half and full bridges with driver and logic High input voltage linear regulators QUALITY ASSURANCE X-FAB spends a lot of effort to improve the product quality and reliability and to provide competent support to the customers. This is maintained by the direct and flexible customer interface, the reliable manufacturing process and complex test and evaluation conceptions, all of them guided by strict quality improvement procedures developed by X-FAB. This comprehensive, proprietary quality improvement system has been certified to fulfill the requirements of the ISO 9001, ISO TS and other standards. DELIVERABLES PCM tested wafers Optional engineering services: Multi Project Wafer (MPW) and Multi Layer Mask Service (MLM) Optional design services: feasibility studies, Place & Route, synthesis, custom block development XDM10 BASIC DESIGN RULES Mask width [µm] Spacing [µm] TRENCH = DIFFD POLYD DIFF POLY CAPRES CONT MET VIA MET VIA MET

3 XDM10 CORE CROSS SECTION XDM10 PROCESS FLOW CORE Module Additional Modules Thick SOI Wafer Trench Trench Cover DMOS Active Area DMOS Polysilicon DMOS Pwell N+ implant P+ Implant Contact Metal 1 Via Metal 2 Via 2 Metal 3 Pads PCM test Back side grinding (on customer request) Final control Handle wafer contact ND Implant n-well p-well active area B Implant ND Implant P Implant polysilicon 1 polysilicon 2 B Implant HWCNT HVDDMOS DEPLTRA PODCAP CAPRES IGBT mask steps 3

4 XDM10 CORE MODULE Module Descriptions Masks No. SITRIS DIMOS up to 350V, single trench 14 XDM10 ADDITIONAL MODULES Module Descriptions Masks No. 5 CAPRES Capacitor / resistor 1 DEPLTRA Depletion transistor 1 PODCAP Polysilicon on diffusion capacitor 1 HVDDMOS High voltage depletion 1 HWCNT Handle wafer contact 1 IGBT IGBT devices 1 XDM10 RESTRICTIONS FOR MODULE COMBINATIONS Module name CAPRES DEPLTRA PODCAP HVDDMOS IGBT Use of the also requires use of the following (s) SITRIS +SITRIS Use of the is not available with the use of the following (s) Active s XDM10 MOS CORE TRANSISTORS VT IDS [µa/µm] BVDS VDS Max VGS 5V NMOS ne > V NMOS nea > V PMOS pe > V PMOS pea > XDM10 MEDIUM VOLTAGE TRANSISTORS VT BVDS RON [kω.µm] VDS Max VGS 20V NMOS nme 0.8 > V PMOS pme 0.75 > V NMOS nmea 0.78 > V PMOS pmea 0.62 > V NMOS nmeb 0.8 >

5 Active s (Continued) XDM10 HV TRANSISTORS VT BVDS RON [Ω] VDS VGS 275V PMOS pha 0.85 > V PMOS phc 0.85 > V PMOS, scalable phes * - > * This is a scalable devices, where the number of centrepieces can be varied. Please refer to process specification documents for details XDM10 DMOS TRANSISTORS VT RON [Ω] BVDS VDS VGS Max ID [ma] 350V DMOS, 360Ω nd32a1 SITRIS > V DMOS, scalable nd32cs1 * SITRIS - - > V DMOS, 2kΩ nd25a SITRIS > V DMOS, scalable nd25ds * SITRIS - - > V DMOS, 370Ω nd34a SITRIS > V DMOS, scalable nd34bs * SITRIS > V DMOS, scalable, wide metal connection nd34bsw * SITRIS - - > V DMOS, 580Ω nd31a SITRIS > V DMOS, scalable nd31bs * SITRIS > V DMOS, scalable, wide metal connection nd31bsw* SITRIS - - > V DMOS, scalable nd22as* SITRIS > * These are scalable devices, where the number of centrepieces can be varied. Please refer to process specification documents for details. * The values shown for nd34bs, nd31bs devices are with 2 centrepieces; nd22as, device is with 32 centrepieces. * The parameter values of nd34bsw, nd31bsw with x centerpieces is equivalent to the nd34bs, nd31bs with x+4 centerpieces respectively. These devices features a wider source metal connection in order to allow for a higher drain current operating condition. XDM10 DEPLETION TRANSISTORS Available with VT IDS [µa/µm] BVDS VDS VGS Max ID [ma] N-channel depletion ndep DEPLTRA > V depl DMOS, scalable ndd37as* HVDDMOS > V depl DMOS, scalable ndd27as* HVDDMOS > * The values shown for ndd37as device is with 5 centrepieces; and ndd27as device is with 4 centrepieces. XDM10 IGBT TRANSISTORS VT BVCE ICE leak [na] VCE VGE Max IC [ma] 400V IGBT ni34a IGBT 1.7 > 400 < V IGBT ni34b IGBT 1.7 > 400 <

6 Active s (Continued) XDM10 BIPOLAR TRANSISTORS BETA VA BVCEO VBE [mv] max. VCE 80V vertical NPN qna SITRIS > V lateral PNP qpc SITRIS > V high gain vertival NPN qnb > V lateral PNP qpd > V vertical NPN qnvc > V vertical NPN qnvd > Passive s XDM10 DIFFUSION RESISTORS RS[Ω/ ] Temp. Coeff. [10-3 /K] Max VTB PWELLD rpwd SITRIS NDIFF rdiffn PDIFF rdiffp PWELL rpw XDM10 POLY RESISTORS RS[Ω/ ] Temp. Coeff. [10-3 /K] Max VTB POLYD, P+ impl. rpd, rpd_3* SITRIS POLY1, N+ impl. rp1, rp1_3* SITRIS High resistive POLY2 rp2hr, rp2hr_3* CAPRES HV high resistive POLY2 rp2hrhv, rp2hrhv_3* CAPRES Low TC POLY2 rp2ltc rp2ltc_3* CAPRES * Improved decription of bulk voltage dependency model XDM10 METAL RESISTORS RS [Ω/ ] Thickness [µm] Max J/W [ma/µm] Temp. Coeff. [10-3 /K] Max VTB MET1 rm1 SITRIS /350 * MET2 rm2 SITRIS /350 * MET3 rm3 SITRIS /350 * * MET/MET_MV values XDM10 PIP CAPACITORS Area Cap [ff/µm²] Perimeter Cap [ff/µm] BV VCC Poly1-Poly2 cpp CAPRES >

7 Passive s (Continued) XDM10 SANDWICH CAPACITOR BV Area Cap [ff/µm²] Perimeter Cap. [ff/µm] VTB VCC PolyD-M2-M3 Sandwich csandwt SITRIS > XDM10 POD CAPACITOR Area Cap [ff/µm²] Perimeter Cap [ff/µm] Temp coeff [10-3 /K] VCC Poly1-gate oxide-n+ cpod PODCAP XDM10 PROTECTION DIODE BV Forward Voltage V temp coeff [mv/k] Ibd[mA] 4.8V zener dzeb SITRIS V dnda SITRIS V dpda SITRIS * 200V dpwda SITRIS > * 505V with 2 centerpieces dpwdb SITRIS * 495V with 2 centerpieces dpwdc SITRIS * * max Ibd for 100ms XDM10 SCHOTTKY DIODES Forward Voltage I leakage [na] BV Vreverse 30V Schottky dsa SITRIS 0.72 < V Schottky dsb 0.72 < XDM10 DIFFUSION DIODES Area junc. cap. [ff/µm²] Sidewall Cap. [ff/µm] BV Junc. Potential Vreverse NDIFF/PWELL dn PDIFF/NWELL dp PWELL/NSUB-NWELL dpw PDIFFD/NSUB dpd SITRIS PWELLD/NSUB dpwd SITRIS OTP XDM10 ZENER ZAP DIODE Avaialble with BV, unzap Ileak, unzap [na] Rzapped [Ω] Max Iread [ma] Zener Zap dzap * < 50 1 * The zener zap diode, dzap is only intended as a programmable element. 7

8 Standard Cells Libraries XDM10 LOGIC LIBRARY Voltage range Category Density * r_factor ** Main features D_CELLS 3.3V & 5.0V trench isolated, standard ML2: 0.5 ML2: 2.86 Trench isolated, standard speed & power * library density: kge/mm 2 at given routing factor (GE = NAND2 Gate Equivalent) ML2: 2 metal layer routing ** r_factor = Routing_factorPlace&Route_area = Cell_area * Routing_factor(averaged value: because routing factor, means wiring overhead, is netlist dependent)utilization [%] = 1/ routing_factor * 100, e.g. r_factor = 2.68; utilization = 1/2.86 * 100 = 35% I/O Libraries XDM10 I/O LIBRARY Library Feature Voltage Range Application benefits IO_CELLS_F Standard 3.3V & 5.0V Core limited, trench isolated ANALOG LIBRARIES XDM10 A_CELLS ANALOG LIBRARY Library Cell Operating conditions Required Operational Amplifier aopac01 VDD: 4.5V to 5.5V; T: C, CAPRES Bias Cells abaic02 abiac04 acsoc02 VDD: 4.5V to 5.5V; T: C Bias Cells abiac06 VDD: 4.5V to 5.5V; T: C, CAPRES Comparators acmpc01 acmpc02 acmpc03 acmpc04 VDD: 4.5V to 5.5V; T: C ADC aadcc01 VDDA: 4.5V to 5.5V; T: C, CAPRES DAC adacc01 adacc02 adacc03 VDDA: 4.5V to 5.5V; T: C, CAPRES RC Oscillators arcoc01 arcoc02 arcoc03 VDD: 4.5V to 5.5V; T: C, CAPRES RC Oscillators arcoc04 VDD: 4.5V to 5.5V; T: C Power-On-Reset aporc01 aporc02 aporc03 VDD: 4.5V to 5.5V; T: C 8

9 EXAMPLES FOR MEASURED AND MODELED PARAMETER CHARACTERISTICS nd32a: Output characteristic of a typical wafer VGS = 2.5, 3.0, 3.5, 4.0, 4.5, 5.0V, + = measured, solid line = BSIM3v3 model nd25b: Output characteristic of a typical wafer VGS = 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0V, + = measured, solid line = BSIM3v3 model nd32cs: On resistance vs. Number of centrepieces of a typical wafer phes: On resistance vs. Number of centrepieces of a typical wafer ndep: Output characteristic of a typical wafer W/L=20/20 VGS = 0.0, 1.0, 2.0, 3.0, 4.0, 5.0V, VSB = 0V + = measured, solid line = BSIM3v3 model dzap: Reverse characteristic of a typical wafer + = measured unzapped, solid line = model unzapped, x = measured zapped, dashed line = model zapped 9

10 XDM10 SUPPORTED EDA TOOLS Synthesis Frontend Design Environment Digital Simulation Timing, Power, Signal-Integrity Analysis Mixed-Signal- Simulators Analog Simulators Mixed Signal Environment Floorplanning, Place & Route Layout / Chip assembly drawing Verification & SignOff Tape Out / GDSII Note: Diagram shows overview of reference flow at X-FAB. Detailed information of supported EDA tools for major vendors like Cadence, Mentor and Synopsys can be found on X-FAB s online technical information center X-TIC. X-FAB'S IC DEVELOPMENT KIT "THEKIT" The X-FAB IC Development Kit is a complete solution for easy access to X-FAB technologies. TheKit is the best interface between standard CAE tools and X-FAB s processes and libraries. TheKit is available in two versions, the Master Kit and the Master Kit Plus. Both versions contain documentation, a set of software programs and utilities, digital and I/O libraries which contain full front-end and back-end information for the development of digital, analog and mixed signal circuits. Tutorials and application notes are included as well. The Master Kit Plus additionally provides a set of general purpose analog functions mentioned in section Analog Library Cells and is subject to a particular license. CONTACT Marketing & Sales Headquarters X-FAB Semiconductor Foundries AG Haarbergstr. 67, Erfurt, Germany Tel.: Fax: info@xfab.com Web: Technology & Design Support hotline@xfab.com Silicon Foundry Services sifo@xfab.com DISCLAIMER Products sold by X-FAB are covered by the warranty provisions appearing in its Term of Sale. X-FAB makes no warranty, express, statutory, implied, or by description regarding the information set forth herein or regarding the freedom of the described devices from patent infringement. X-FAB reserves the right to change specifications and prices at any time and without notice. Therefore, prior to designing this product into a system, it is necessary to check with X-FAB for current information. This product is intended for use in normal commercial applications. Applications requiring extended temperature range, unusual environmental requirements, or high reliability applications, such as medical life-support or life-sustaining equipment are specifically not recommended without additional processing by X-FAB for each application. The information furnished by X-FAB is believed to be correct and accurate. However, X-FAB shall not be liable to recipient or any third party for any damages, including but not limited to personal injury, property damage, loss of profits, loss of use, interrupt of business or indirect, special incidental or consequential damages, of any kind, in connection with or arising out of the furnishing, performance or use of the technical data herein. No obligation or liability to recipient or any third party shall arise or flow out of X-FAB s rendering of technical or other services by X-FAB Semiconductor Foundries AG. All rights reserved. 10