Worldwide Distribution

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2 Worldwide Distributio Visit our web site at: Copyright 2015 by Aalborg. All rights reserved. Prited i the Uited States of America.

3 About the Compay Fouded i 1972, AALBORG is well-kow throughout the world as a primary maufacturer of precisio istrumetatio for flow measuremet ad cotrol. We operate two divisios: The Electroics Divisio produces aalog ad digital mass flow meters ad cotrollers, as well as a diverse lie of wafer ad isertio type vortex flow meters for steam, liquid or gases. I additio a lie of peristaltic pumps, steppig motor drive valves made i this departmet are highly useful i processig ad OEM applicatios. The Variable Area Divisio maufactures a complete lie of glass tube rotameters. These flow meters are available with alumium, brass, stailess steel or PTFE wetted compoets. AALBORG also maufactures a uique lie of PFA tube meters for ultrapure or corrosive applicatios. Precisio barstock stailess steel or brass eedle valves, as well as PTFE valves, are also maufactured i this divisio. NIST Traceability Accredited Calibratio Services Techical Assistace ISO9001/2008 Certificatio All equipmet used for flow calibratios are traceable to NIST. AALFA-KAL Metrology Laboratory, divisio of Aalborg Istrumets & Cotrols is accredited by A2LA i coformace to ISO17025/2005 ad to Z50-1/199. Gas flow calibratios up to 50L/mi are performed accordig to Scope of Accreditatio - Certificate Number: Techical Assistace is readily available. Customers are ivited to cotact the compay or our distributors to discuss idividual requiremets. OEM applicatios are welcome. AALBORG has bee ISO 9001 certified sice April of We are very proud of the desig features ad the exceptioally high quality for which our products which have bee kow sice It is our policy that through strict eforcemet of exactig maufacturig stadards the AALBORG brad ame cotiues to be associated with a reputatio of high quality ad reliability. Our products are backed by meticulous iovative egieerig combied with efficiet maufacturig practices ad a highly skilled work force guarateeig total customer satisfactio. Our Missio It is the policy of AALBORG to develop, produce ad deliver products ad services which cosistetly coform to or exceed customer requiremets. Our commitmet is to provide cuttig-edge techology combied with a sicere desire to serve our customers ad produce the highest quality products attaiable. BULLETIN EM

4 Table of Cotets CAL Calibratios, Services ad Certificates Page 1 GFM Mass Flow Meters Page 13 XFM Digital Mass Flow Meters Page 18 ZFM Digital Mass Flow Meters Page 25 GFC Mass Flow Cotrollers Page 31 TIO Totalizer Iput/Output Flow Moitor/Cotroller Page 36 DFC Digital Mass Flow Cotrollers Page 1 DFM Multi-Parameter Digital Mass Flow Meters Page 9 AFC Aalog Mass Flow Cotrollers Page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

5 SDPROC Microprocessor Drive Commad Modules Page 61 PWM Paddle Wheel Flow Meters Page 65 PWE Digital Paddle Wheel Flow Meter Page 66 VX Vortex Flow Meters Page 71 PSV Liquid ad Gas Flow Regulators Page 92 SMV Steppig Motor Valves Page 97 CON Coversio Factors Page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

6 CALIBRATION, SERVICES AND CERTIFICATES CAL NIST Traceable Calibratios Our laboratories are fully equipped to perform NIST traceable flow calibratios for Rotameters, Mass Flow Meters ad Mass Flow Cotrollers. We offer calibratio services o meters ad cotrollers of other maufacturers products as well. AALFA-KAL laboratory is equipped to calibrate Molboxes. Our techicias are traied ad certified by the maufacturer of Molboxes ad Moblocs. For fast cost effective service please cotact our customer service departmet. A2LA Accredited Calibratios AALFA-KAL Metrology Laboratory, divisio of Aalborg Istrumets & Cotrols is accredited by A2LA i coformace to ISO17025/2005 ad to Z50-1/199. Gas flow calibratios up to 50L/mi are performed accordig to Scope of Accreditatio - Certificate Number: Compliace Qualificatios Extesive set of Molbox/Molblocs esure coveietly overlappig calibratio rages. ANSI/NCSL Z ISO9001/2008 CERTIFIED MIL-STD-5662A ISO17025 Accredited Partial view of the gas calibratio laboratory. Techicias calibratig Mass Flow Cotrollers usig Molbox/Molblocs techology ad Bell Provers ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

7 CAL CALIBRATION, SERVICES AND CERTIFICATES Close-up view of Molbox/Molblocs equipmet supported by COMPASS software for calibratig GFM flow meters. BULLETIN EM CAL Lik for a explaatio how to use Molbox/Molblocs method of calibratios of flow meters ad cotrollers ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

8 CALIBRATION, SERVICES AND CERTIFICATES CAL Pressure Limits Of Calibratios Up to 500 PSIG for routie gases (Air, N2, He ad Ar) with a maximum flow of 250 L/mi. Up to 80 PSIG for Air, with a maximum flow of 1000 L/mi. Customer calibratios are represeted by primary SI flow uits. Gas calibratios for up to 1000 L/mi ad water calibratios up to L/mi available. Calibrated to NIST traceable stadards. Bell prover used by techicia i calibratig high flow capacity flow meter ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

9 CAL CALIBRATION, SERVICES AND CERTIFICATES BULLETIN EM CAL Termial show for low-flow Flow Cotroller calibratio supported by Aalborg SDPROC software ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

10 CALIBRATION, SERVICES AND CERTIFICATES CAL Pisto Gauge, model 7601 with gas operated, gas lubricated pisto-cylider module. It supports defiitio of pressure agaist a vacuum referece. OPERATING MODES: Gauge, Absolute ad Differetial. OVERALL SPECIFICATION FOR PRESSURE MEASUREMENT: SUITABLE FOR MOLBOX 1+ A350/A700 Sesitivity: 0.02Pa +0.5 ppm Reproducibility: +/- ppm Measuremet Ucertaity (k=2): +/-(0.5Pa + 20 ppm) ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

11 CAL CALIBRATION, SERVICES AND CERTIFICATES Our gas calibratio laboratory has NIST traceable approved i-house equipmet to certify our calibratio devices. Molbox/Molblocs based calibratio for GFC Flow Cotroller. BULLETIN EM CAL Our techicias are traied ad certified ad our Laboratory is equipped to calibrate Molboxes. I additio, our laboratory ca calibrate NIST traceable approved I-House equipmet to certify our primary calibratio devices. We also calibrate ad certify customers Molboxes. For fast cost effective service please cotact our customer service departmet ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

12 CALIBRATION, SERVICES AND CERTIFICATES CAL Gas flow calibratio laboratory is capable of performig calibratios from 1 ml/mi to 1000 L/mi at 21.1 F C / kpa (70 F F, 1.69 PSI abs). Accordig to state of the art calibratig practices, calibratios are performed based o to 1 ucertaity ratio ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

13 CAL CALIBRATION, SERVICES AND CERTIFICATES Specialized software applied to calibratio of Flow Meter. BULLETIN EM CAL - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

14 CALIBRATION, SERVICES AND CERTIFICATES CAL EUROPEAN SERVICE FACILITY Authorized Repair ad Service Facility for Aalborg Thermal Mass Flow Systems aalborg - MESSTECHNIK GMBH Klosterrusstraße 18 P.O. Box 1321 Müllheim D Germay Telefo: +9 (0) Fax: +9 (0) Website: ifo@aalyt-mtc.de 175, aveue d Alsace COLMAR Tel: Fax: ANALYT_MTC@T-olie.de ASIAN SERVICE FACILITY Authorized Repair ad Service Facility for Aalborg Thermal Mass Flow Systems aalborg - Beijig Comity MEASURE & CONTROL CO. Floor 1 Tower B Jidayua Office Buildig Xisaqi, Hai Dia District, Beijig, Chia Phoe: , Fax: Website: Typical Bell Prover used for NIST traceable calibratios ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

15 CAL CALIBRATION, SERVICES AND CERTIFICATES BULLETIN EM CAL - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

16 CALIBRATION, SERVICES AND CERTIFICATES CAL Accredited Laboratory A2LA has accredited AALFA - KAL METROLOGY LABORATORY, DIVISION OF AALBORG INSTRUMENTS & CONTROLS, INC. Orageburg, NY for techical competece i the field of Calibratio This laboratory is accredited i accordace with the recogized Iteratioal Stadard ISO/IEC 17025:2005 Geeral requiremets for the competece of testig ad calibratio laboratories. This laboratory also meets the requiremets of ANSI/NCSLI Z ad ay additioal program requiremets i the field of calibratio. This accreditatio demostrates techical competece for a defied scope ad the operatio of a laboratory quality maagemet system (refer to joit ISO-ILAC-IAF Commuiqué dated 8 Jauary 2009). Preseted this 6 th day of Jauary Seior Director of Quality & Commuicatios For the Accreditatio Coucil Certificate Number Valid to April 30, 2018 For the calibratios to which this accreditatio applies, please refer to the laboratory s Calibratio Scope of Accreditatio ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CAL

17 CAL CALIBRATION, SERVICES AND CERTIFICATES Parameter Rage CMC 2, 3 (+) Commets Flow Gas Up to 10 SCCM 0.18 % ( to 50) SCCM 0.18 % (8 to 100) SCCM 0.18 % (80 to 1000) SCCM 0.18 % (160 to 2000) SCCM 0.18 % (800 to ) SCCM 0.18 % (200 to ) SCCM 0.19 % (000 to ) SCCM 0.27 % DHI Molbox-1 (Air, He, Arg, CO 2, O 2, N 2 ) BULLETIN EM CAL - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

18 MASS FLOW METERS GFM Desig Features Priciples of Operatio Rigid metallic costructio. Maximum pressure of 1000 psig (70 bars). Leak itegrity 1 x 10-9 of helium. NIST traceable certificatio. Built-i tiltable LCD readout. 0-5 Vdc ad -20 ma sigals. Circuit protectio. Ca be used as a portable device. Egieerig uits or 0 to 100% displays. TIO Totalizer optio. Typical Alumium GFM Mass Flow Meter Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. Output sigals of 0 to 5Vdc ad to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. Flow rates are uaffected by temperature ad pressure variatios withi stated limitatios. Geeral Descriptio Compact, self-cotaied GFM mass flow meters are desiged to read flow rates of gases. The rugged desig coupled with istrumetatio grade accuracy provides versatile ad ecoomical meas of flow measuremet. Alumium or stailess steel models with readout optios of either egieerig uits (stadard) or 0 to 100 percet displays are available. 13 NIST Traceable Calibratio The mechaical layout of the desig icludes a LCD readout built ito the top of the trasducer. This readout module is tiltable over 90 degrees to provide optimal readig comfort. It is coected to the trasducer by a stadard modular plug, ad is also readily removable for remote readig istallatios ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM GFM

19 BULLETIN EM GFM GFM MASS FLOW METERS GFM 57, 67 ad 77 High Flow Mass Flow Meters NIST Traceable Calibratio TABLE 1 - SPECIFICATIONS FOR GFM ACCURACY: CALIBRATIONS: REPEATABILITY: RESPONSE TIME: GFM 17, 37 ad 7: ±1.0% of full scale. GFM 57, 67 ad 77: ±1.5% of full scale. OPTIONAL ENHANCED ACCURACY: ±1.0% of full scale. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise requested. ±0.25% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / F C. PRESSURE COEFFICIENT: MAXIMUM PRESSURE DROP: See Table 3. GAS ad AMBIENT TEMP.: OUTPUT SIGNALS: TRANSDUCER INPUT POWER: TIME CONSTANT: GAS PRESSURE: ** MATERIALS IN FLUID CONTACT: ATTITUDE SENSITIVITY: Geerally 2 secods to withi ±2% of actual flow rate over 25 to 100% of full scale. 0.01% of full scale / psi (0.07 bar). 32 F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. Liear 0-5 Vdc ohms mi. load impedace ad -20 ma Ohms loop resistace.. Uiversal +12 to +26 VDC, 200 ma maximum. 800 ms psig (70 bars) maximum GFM 17, 37, psig (1. bars) optimum. 500 psig (3.5 bars) GFM 57, 67, psig (1. bars) optimum. a. Alumium models GFM Series: aodized alumium, 316 stailess steel, brass ad Vito O-rigs. b. Stailess steel models GFM17S, 37S,7S, 57S, 67S ad 77S: 316 stailess steel ad Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. No greater tha +15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. CONNECTIONS: GFM 17: 1/" compressio fittigs. Optioal: 6mm, 3/8" ad 1/8" compressio fittigs or 1/" VCR. GFM 37: 1/" compressio fittigs. Optioal: 6mm ad 3/8" compressio fittigs or 1/" VCR. LEAK INTEGRITY: CE COMPLIANT: GFM 7: GFM 57: GFM 67: GFM 77: 3/8" compressio fittigs. 3/8" compressio fittigs. 1/2" compressio fittigs. 3/" FNPT fittigs or 3/" compressio fittigs. 1 x 10-9 sml/sec of helium maximum to the outside eviromet. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

20 BULLETIN EM GFM MASS FLOW METERS GFM Trasducers without LCD readout are offered for OEM applicatios. GFM mass flow meters are available with flow rages from 10 ml/mi to 1000 L/mi N2. Gases are coected by meas of 1/" 3/8" 1/2" compressio fittigs ad 3/" FNPT fittigs. Optioal fittigs are available. These meters may be used as bech top uits or mouted by meas of screws i the base. Trasducer power supply ports are fuse ad polarity protected. TABLE 2 - FLOW RANGES FOR GFM GFM 17 LOW FLOW MASS FLOW METERS CODE ml/mi [N2] 01 0 to to to to to to 500 CODE L/mi [N2] 07 0 to to to to 10 GFM 37 MEDIUM FLOW MASS FLOW METERS 11 0 to to to to to 50 GFM 7 HIGH FLOW MASS FLOW METERS 0 0 to to to 100 GFM 57 HIGH FLOW MASS FLOW METERS 50 0 to 200 GFM 67 HIGH FLOW MASS FLOW METERS 60 0 to 500 GFM 77 HIGH FLOW MASS FLOW METERS 70 0 to 1000 Leak Itegrity 1 x 10-9 sml/sec of helium max to outside eviromet. TABLE 3 - MAXIMUM PRESSURE DROP FOR GFM MODEL FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] GFM 17 up to GFM GFM GFM GFM GFM TABLE - ACCESSORIES FOR GFM POWER SUPPLY - BATTERY PACK - CABLES PS-GFM-110NA-2 PS-GFM-110NA- PS-GFM-230EU-2 PS-GFM-230EU- PS-GFM-20UK-2 PS-GFM-20UK- PS-GFM-20AU-2 PS-GFM-20AU- BP110 BP220 CBL-D CBL-D5 17/3RC Power Supply, 110 V / 12 Vdc /North America Power Supply, 110 V / 2 Vdc /North America Power Supply, 220 V / 12 Vdc /Europe Power Supply, 220 V / 2Vdc /Europe Power Supply 20 V / 12 Vdc /Uited Kigdom Power Supply 20 V / 2 Vdc /Uited Kigdom Power Supply 20 V / 12 Vdc /Australia Power Supply 20 V / 2 Vdc /Australia Battery Pack, 110 V (icludes case) Battery Pack, 220 V (icludes case) Cable with 9-pi D-coector, ( - 20 ma) Cable with 9-pi D-coector, (0 to 5 Vdc) 17/3RC Remote cable, 3 ft log 17/R 17/R Remote LCD readout with 3 ft log cable TIO-LAA2 TIO-LAA5 KIT-TM-DD Totalizer I/O Moitor, RS-232 Digital Iterface Totalizer I/O Moitor, RS-85 Digital Iterface GFM Flow Meter Moutig Kit with Two 9 Pi D-Coectors For Totalizer Iput/ Output Flow Moitor/ Cotroller optios see page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

21 GFM MASS FLOW METERS GFM Mass Flow Meters NO LCD VERSION FLOW A H B J D E *D *E G C *C DASHED LINE FOR HIGH FLOW UNITS F TABLE 5 - DIMENSIONS FOR GFM DIMENSION (INCH) MODEL CONNECTION Compressio Fittig (except model GFM 77) LCD VERSION NO LCD MOUNTING HOLE A B C/*C D/*D E/*E F G H J GFM 17 1/" Tube O Diameter GFM 37 1/" Tube O Diameter BULLETIN EM GFM GFM 7 3/8" Tube O Diameter GFM 57 3/8" Tube O Diameter GFM 67 1/2" Tube O Diameter /-20 GFM 77 3/" NPT Female /-20 For Specific Flow Rages Cotact Aalborg Customer Service Departmet ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

22 ORDERING INFORMATION FOR MASS FLOW METERS GFM GFM MODEL MAX FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio GFM 17, 37 B 1/8" Compressio GFM 17 C 1/" VCR GFM 17, 37 D 3/8" Compressio GFM 17, 37, 7, 57 E 1/2" Compressio GFM 67 F 3/" FNPT GFM 77 G 3/" Compressio GFM 77 H 6mm Compressio GFM 17, 37 DISPLAY N No Display L LCD Readout POWER 6 Uiversal +12 to +26 VDC OUTPUT SIGNAL A 0-5 VDC B -20 ma DIGITAL INTERFACE 0 Noe GFM 17 S V A L 6 A 0 17 EXAMPLE: GFM17S-VAL6-A0 5 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE *.a. = ot applicable. GFM17 stailess steel, Vito seals, 1/" compressio fittigs, display, 12 to 26 Vdc power, 0-5 Vdc, output sigal, o digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM GFM

23 BULLETIN EM XFM XFM DIGITAL MASS FLOW METER Desig Features Supports up to 23 Egieerig Uits (icludig User Defied). Stores calibratio data for up to 10 gases. Programmable Totalizer idicates total gas quatity. High ad low gas flow Alarm limits with preset delay iterval. Two sets of user-programmable electromechaical SPDT relays with latch optio. User-selectable aalog 0-5 Vdc or -20mA outputs. Iteral Coversio factors for up to 32 gases. Digital Iterface (RS-232 / RS-85, Profibus DP available). Multi-Drop Capability of up to 256 uits (RS-85 optio). Optioal Profibus DP iterface with I&M fuctioality. Automatic sesor zero offset adjustmet (via digital iterface or local push butto). Self-Diagostic Tests. Local 2 x 16 characters LCD display* with adjustable back light (optioal). XFM with Profibus Iterface XFM without Readout With I & M Fuctioality XFM with Readout Optio XFM Digital Mass Flow Meters Alumium ad Stailess Models Show * LCD display is ot available for Profibus DP iterface optio ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

24 DIGITAL MASS FLOW METER XFM 19 XFM Digital Mass Flow Meters The flow rate ca be displayed i 23 differet volumetric flow or mass flow egieerig uits icludig user specific. Flow meters ca be programmed remotely via RS-232 /RS-85 or optioal Profibus DP iterface. XFM flow meters support various fuctios icludig: programmable flow totalizer, high ad low flow alarm, automatic zero adjustmet, 2 relay outputs, jumper selectable 0-5 Vdc or -20 ma aalog outputs, status LED diagostic, capable to store calibratio for up to 10 differet gases, iteral or user-specific K-factors. Optioal local 2 x 16 characters LCD display* with adjustable back light provides Flow, Total ad diagostic readig simultaeously. Priciple Of Operatio The stream of gas eterig the Mass Flow trasducer is split by shutig a small portio of the flow through a capillary stailess steel sesor tube. The remaider of the gas flows through the primary flow coduit. The geometry of the primary coduit ad the sesor tube are desiged to esure lamiar flow i each brach. Accordig to priciples of fluid dyamics, the flow rates of a gas i the two lamiar flow coduits are proportioal to oe aother. Therefore, the flow rates measured i the sesor tube are directly proportioal to the total flow through the trasducer. I order to sese the flow i the sesor tube, heat flux is itroduced at two sectios of the sesor tube by meas of precisio-woud heater sesor coils. Heat is trasferred through the thi wall of the sesor tube to the gas flowig iside. As gas flow takes place, heat is carried by the gas stream from the upstream coil to the dowstream coil widigs. The resultat temperature depedet resistace differetial is detected by the electroic cotrol circuit. The measured temperature gradiet at the sesor widigs is liearly proportioal to the istataeous rate of flow takig place. A output sigal is geerated that is a fuctio of the amout of heat carried by the gases to idicate mass molecular based flow rates. Additioally, the XFM model Mass Flow Meter icorporates a Precisio Aalog Microcotroller (ARM7TDMI MCU) ad o-volatile memory that stores all hardware specific variables ad up to 10 differet calibratio tables. * LCD display is ot available for Profibus DP iterface optio. Iterface The digital RS85 or RS-232 iterface (optioal Profibus DP iterface is available) provides access to applicable iteral data icludig: flow, CPU temperature, auto zero, totalizer ad alarms settigs, gas table, coversio factors ad egieerig uits selectio, dyamic respose compesatio ad liearizatio table adjustmet. The aalog iterface provides 0 to 5Vdc or to 20 ma (jumper selectable) outputs for flow readig. Auto Zero The XFM supports automatic sesor zero offset adjustmet which ca be activated locally via the maiteace push butto or remotely via digital iterface. The auto zero feature ecessitates a coditio of absolutely o flow through the meter durig the adjustmet process. Provisios are made to either start, read, or save the curret auto zero value via digital commads. Totalizer The total volume of the gas is calculated by itegratig the actual gas flow rate as a fuctio of time. THE DIGITAL INTERFACE COMMANDS ARE PROVIDED TO: - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada SET THE TOTALIZER TO ZERO. START THE TOTALIZER AT A PRESET FLOW. ASSIGN ACTION AT A PRESET TOTAL VOLUME. START/STOP TOTALIZING THE FLOW. READ TOTALIZER. Totalizer coditios become true whe the totalizer readig ad the Stop at Total volumes are equal. I additio, the provisio is made to automatically disable Totalizer durig sesor warm up period. Flow Alarm High ad Low gas flow ALARM limits ca be preprogrammed via digital iterface. ALARM coditios become true whe the curret flow readig is equal or higher/lower tha correspodig values of high ad low alarm levels. Alarm actio ca be assiged with preset delay iterval ( secods) to activate the cotact closer (separate for High ad Low alarm). Latch Mode cotrol feature allows each relay to be latched o or follow the correspodig alarm status. BULLETIN EM XFM

25 XFM DIGITAL MASS FLOW METER TABLE 6 - SPECIFICATIONS FLOW MEDIUM: CALIBRATIONS: ENVIRONMENTAL (PER IEC 66): Please ote that XFM Mass Flow Meters are desiged to work oly with clea gases. Never try to measure flow rates of liquids with ay XFM. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise requested. Istallatio Level II; Pollutio Degree II. FLOW ACCURACY REPEATABILITY: FLOW TEMPERATURE COEFFICIENT: FLOW PRESSURE COEFFICIENT: FLOW RESPONSE TIME: MAXIMUM GAS PRESSURE: MAXIMUM PRESSURE DROP: GAS AND AMBIENT TEMPERATURE: ±1% of FS at calibratio temperature ad pressure. ±0.25% of full scale. RELATIVE GAS HUMIDITY: Up to 70%. LEAK INTEGRITY: ATTITUDE SENSITIVITY: OUTPUT SIGNALS: CONNECTIONS: TRANSDUCER INPUT POWER: 0.15% of full scale/ F C or better. 0.01% of full scale/psi (6.895 kpa) or better. 600ms time costat; approximately 2 secods to withi ±2% of set flow rate for 25% to 100% of full scale flow. 500 psig (37 kpa gauge) PSID (at 10 L/mi flow). psi (at 50 L/mi flow). See Table 9 for pressure drops associated with various models ad flow rates. 32 F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. 1 x 10-9 sml/sec He maximum to the outside eviromet. Deviatio of up to 1% from stated accuracy, after re-zeroig. Liear 0-5 Vdc (3000 ohms mi load impedace); Liear -20 ma (500 ohms maximum loop resistace). Maximum oise 20mV peak to peak (for 0-5 Vdc output). XFM 17 ad 37: Optioal: XFM 7: 1/" compressio fittigs. 6mm compressio, 1/" VCR, 3/8" or 1/8" compressio fittigs. 3/8" compressio fittigs. 11 to 26 Vdc, 100 mv maximum peak to peak output oise. POWER CONSUMPTION: +12Vdc (200 ma maximum); +2Vdc (100 ma maximum); Circuit board have built-i polarity reversal protectio, 300mA resettable fuse provide power iput protectio. WETTED MATERIALS: CAUTION: DISPLAY: CALIBRATION OPTIONS: Alumium Models: Stailess Steel Models: Aodized alumium, brass, 316 stailess steel, Vito O-rigs. 316 stailess steel, Vito O-rigs. Optioal O-rig Materials: Bua-N, EPR (Ethylee Propylee), or Kalrez. Aalborg makes o expressed or implied guaratees of corrosio resistace of mass flow meters as pertais to differet flow media reactig with compoets of meters. It is the customers' sole resposibility to select the model suitable for a particular gas based o the fluid cotactig (wetted) materials offered i the differet models. *Optioal local 2x16 characters LCD with adjustable backlight (2 lies of text). Stadard is oe 10 poits NIST traceable calibratio. Optioal, up to 9 additioal calibratios may be ordered at additioal charge. BULLETIN EM XFM CE COMPLIANCE: * LCD display is ot available for Profibus DP iterface optio. EMC Compliace with 89/336/EEC as ameded. Emissio Stadard: EN 55011:1991, Group 1, Class A Immuity Stadard: EN : ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

26 BULLETIN EM XFM DIGITAL MASS FLOW METER XFM Multi-Gas Calibratio The XFM is capable of storig primary calibratio data for up to 10 gases. This feature allows the same XFM to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 32 gases are stored i the XFM. I additio, provisio is made for a user-defied coversio factor. Coversio factors may be applied to ay of the te gas calibratios via digital iterface commads. Cotact Closure Two sets of electromechaical SPDT relay outputs are provided to actuate user-supplied equipmet. These are programmable via digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value) or may be directly cotrolled by user. TABLE 7 - STANDARD FLOW CAPACITIES FOR XFM XFM 17 XFM 37 XFM 7 ml/mi [N2] L/mi [N2] L/mi [N2] L/mi [N2] Leak Itegrity 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. Egieerig Uits The measured gas flow ad associated totalizer data are scaled directly i egieerig uits via the digital iterface. THE FOLLOWING 23 UNITS OF MEASURE ARE SUPPORTED: TABLE 8 - UNITS OF MEASURE FOR XFM NUMBER INDEX FLOW RATE ENGINEERING UNITS TOTALIZER ENGINEERING UNITS DESCRIPTION 1 0 % %s Percet of full scale 2 1 ml/sec ml Milliliter per secod 3 2 ml/mi ml Milliliter per miute 3 ml/hr ml Milliliter per hour 5 L/sec Ltr Liter per secod 6 5 L/ mi Ltr Liter per miute 7 6 L/hr Ltr Liter per hour 8 7 m 3 /sec m 3 Cubic meter per secod 9 8 m 3 / mi m 3 Cubic meter per miute 10 9 m 3 /hr m 3 Cubic meter per hour ft 3 /sec f 3 Cubic feet per secod ft 3 /mi f 3 Cubic feet per miute ft 3 /hr f 3 Cubic feet per hour 1 13 g/sec g Grams per secod 15 1 g/mi g Grams per miute g/hr g Grams per hour kg/sec kg Kilograms per secod kg/mi kg Kilograms per miute kg/hr kg Kilograms per hour Lb/sec Lb Pouds per secod Lb/mi Lb Pouds per miute Lb/hr Lb Pouds per hour User UD User defied TABLE 9 - MAXIMUM PRESSURE DROP FOR XFM MODEL FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [kpa] XFM 17 up to XFM 37 up to XFM 7 up to ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

27 BULLETIN EM XFM XFM DIGITAL MASS FLOW METER Profibus Optio TABLE 10 - DIMENSIONS FOR XFM [INCH] MODEL *CONNECTION Compressio Fittig (tube OD) LCD ad NO LCD VERSIONS PROFIBUS CAPABILITY A B C D E F G H I XFM 17 1/" XFM 37 1/" XFM 7 3/8" TABLE 11 - DIMENSIONS FOR XFM [MM] MODEL *CONNECTION Compressio Fittig (tube OD) LCD ad NO LCD VERSIONS PROFIBUS CAPABILITY A B C D E F G H I XFM 17 1/" XFM 37 1/" XFM 7 3/8" * For optioal fittigs see table ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

28 DIGITAL MASS FLOW METER XFM TABLE 12 - XFM ACCESSORIES CBL-XFM CBL-DGS PS-XFM-110NA-2 PS-XFM-110NA-2-A PS-XFM-230EU-2 PS-XFM-230EU-2-A PS-XFM-20AU-2 PS-XFM-20AU-2-A PS-XFM-20UK-2 PS-XFM-20UK-2-A D-SUB F 15 pis coector with two 6 feet log braches with stripped eds for user supplied power supply ad digital commuicatio iterface (o support for aalog iterface ad relays). This cable is icluded with each istrumet. D-SUB F 15 pis coector with 6 feet log shielded cable (stripped eds). Ca be used with user supplied power supply, allows access to all XFM peripherals. (Optioal) Power Supply / cable assembly 110VAC NA PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 110VAC NA PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 230VAC EU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 230VAC EU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 20VAC AU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 20VAC AU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 20VAC UK PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 20VAC UK PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM XFM

29 BULLETIN EM XFM XFM ORDERING INFORMATION FOR DIGITAL MASS FLOW METER XFM MODEL MAX FLOW (N2) L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio XFM 17, 37 B 1/8" Compressio XFM 17 C 1/" VCR XFM 17, 37 D 3/8" Compressio XFM 37, 7 H 6mm Compressio XFM 17, 37 DISPLAY N NO Display L LCD Readout POWER 6 Uiversal 11 to 26 VDC OUTPUT SIGNAL A 0-5 VDC B -20 ma DIGITAL INTERFACE 2 RS232 5 RS85 9 PROFIBUS XFM 17 S V A L 6 A 2 EXAMPLE: XFM17S-VAL6-A2 5 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS, ad PRESSURE *.a. = ot applicable. XFM17 stailess steel, Vito seals, 1/" compressio fittigs with LCD readout, 11 to 26 VDC, 0-5 Vdc output sigal with RS232 digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

30 BULLETIN EM ZFM DIGITAL MASS FLOW METER ZFM ZFM ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

31 BULLETIN EM ZFM ZFM DIGITAL MASS FLOW METER Desig Features Multi-gas/Multi-rage fuctioality up to 8 bar (curretly for 6 gases). Full scale covered flow rages from sml/mi to 10 sl/mi are available i seve models. Stadard accuracy ± (0.5% RD + 0.2% FS) based o actual calibratio. Uiversal 1-2 Vdc power supply iput. Supports up to 6 Egieerig Uits (icludig User-defied). Stores additioal user- calibratio table data for up to 10 gases. Two programmable Totalizers idicate total gas quatity. User-programmable Pulse Output (via SSR). High ad low gas flow Alarm limits with preset delay iterval. Oe user-programmable solid-state relays with latch optio. User-selectable aalog 0-5 Vdc, 0-10 Vdc, or -20mA outputs. Iteral coversio factors for up to 26 gases. Digital iterface (RS-232 or RS-85) test/cofiguratio port, optioal Modbus RTU with Isolated RS-85 trasceiver). Multi-Drop capability of up to 27 uits (RS-85 optio). Optioal Modbus RTU etwork iterface with Isolated RS-85 trasceiver. Automatic sesor zero offset adjustmet (via digital iterface or local push butto). Extesive Self- diagostic with status LED or OLED (optioal) idicatio. Local 128 x 6 high cotrast OLED (optioal) graphic display with joystick cotrol. Free, easy-to-use cofiguratio ad calibratio software (RS-232/RS-85). User Features ZFM Meters, with the ew Multi-Gas/ Multi-Rage (MGMR) features, cover flow rages from sml/mi to 0-10 sl/mi are available i seve stadard cofiguratios ad maitai their high accuracy with turdow rages up to to 1. OEM users ca sigificatly reduce the umber of istrumets kept i stock, storage space, ad cost of owership. ZFM users ca rescale their istrumets to the desired gas ad full scale rage o site savig time ad moey. Save o cosiderable istallatio costs, istrumet re moval from the factory floor, ad recalibratio service which are o loger applicable. TABLE 13 - FLOW RANGES FOR ZFM CODE ZFM LOW FLOW MASS METERS Nomial Flow Rage sl/mi [N2] Recofigurable Full Scale Flow Rages [Mi Max] sl/mi (N2) Aalborg provides each ZFM meter with free ad easyto-use ZFM Cofiguratio Utility Software. By coectig the istrumet to the RS232 port of a PC or lap-top ad ruig this cofiguratio utility, the user ca select differet gas types ad flow rages withi a few miutes without removig the istrumet from the istallatio. Each istrumet comes with the stadard userselectable (0-5Vdc, 0-10 Vdc, or -20 ma) aalog output sigals ad the RS232 or RS-85 digital iterface. Optioal Modbus iterface is also available ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

32 DIGITAL MASS FLOW METER ZFM TABLE 1 - ZFM SPECIFICATIONS FLOW MEDIUM: CALIBRATIONS: ENVIRONMENTAL (PER IEC 66): FLOW ACCURACY (INCLUDING LINEARITY): REPEATABILITY: FLOW TEMPERATURE COEFFICIENT: FLOW PRESSURE COEFFICIENT: FLOW RESPONSE TIME: Please ote that ZFM Mass Flow Meters are desiged to work oly with clea gases. Never try to measure flow rates of liquids with ay ZFM. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise requested or stated. Istallatio Level II; Pollutio Degree II. ±(0.5% RD + 0.2% FS) based o actual calibratio (at calibratio temperature ad pressure). ±0.15% of full scale. 0.05% of full scale/ F C or better. 0.01% of full scale/psi (6.895 kpa) or better. 1000ms time costat; approximately 2 secods to withi ±2% of set flow rate for 0% to 100% of full scale flow. MAXIMUM PRESSURE: MAXIMUM PRESSURE DROP: GAS AND AMBIENT TEMPERATURE: RELATIVE GAS HUMIDITY: Up to 70%. LEAK INTEGRITY: 1000 PSIG (689 kpa gauge). About 0.8 psi at 10 L/mi flow (TBD). 32 F F to 122 F F (0 F C to 50 F C). 1 x 10-9 sccs He maximum to the outside eviromet. ATTITUDE SENSITIVITY: OUTPUT SIGNALS: METER INPUT POWER: WETTED MATERIALS: Icremetal deviatio of up to 0.5% FS from stated accuracy, after re-zeroig. Liear 0-5 Vdc (3000 ohms mi load impedace); Liear 0-10 Vdc (5000 ohms mi load impedace); Liear -20 ma (500 ohms maximum loop resistace). Maximum oise 10mV peak to peak (for 0-5 Vdc output). 1 to 26 Vdc, 100 mv maximum peak to peak oise. Power cosumptio: maximum 100 2Vdc; Circuit board have built-i polarity reversal protectio, 300mA resettable fuse provide power iput protectio. Alumium Models: Aodized alumium, brass, 316 stailess steel, Vito O-rigs. Stailess Steel Models: 316 stailess steel, Vito O-rigs. Optioal O-rig Materials: Bua-N, EPR (Ethylee Propylee), or Kalrez. Aalborg makes o expressed or implied guaratees of corrosio resistace of mass flow meters as pertais to differet flow media reactig with compoets of meters. It is the customers' sole resposibility to select the model suitable for a particular gas based o the fluid cotactig (wetted) materials offered i the differet models. 27 CONNECTIONS: DISPLAY: CALIBRATION OPTIONS: CE COMPLIANCE: Model ZFM 17/37 stadard 1/" compressio fittigs. Optioal 6mm, 1/8" or 3/8" compressio fittigs ad 1/" VCR fittigs are available. Optioal local 128x6 graphic yellow OLED with Esc butto ad Joystick iterface. Build-i support based o empirical K-Factors for additioal 5 gases (Air, CO2, O2, Argo, ad Helium) icluded. Optioal, up to 10 additioal custom calibratios (with calibratio certificate) may be ordered at additioal charge. EMC Compliace with 200/108/EC as ameded. CISPR 11. Emissio Stadard: IEC Immuity Stadard: IEC ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM ZFM

33 BULLETIN EM ZFM ZFM DIGITAL MASS FLOW METER.69 (119.0 mm).81 (122.2 mm) 1/ Compressio Fittig 1.00 (25. mm) 2.70 (65 mm).9 (11.0 mm) 1.00 (25. mm) 1.18 (29.9 mm) 6-32 UNC -2B (18.3 mm) 2.2 (61.5 mm) 0.1 (3.6 mm) 0.1 (3.6 mm) - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

34 BULLETIN EM ZFM DIGITAL MASS FLOW METER ZFM TABLE 15 - ZFM ACCESSORY'S MODEL NO. DESCRIPTION POWER SUPPLIES PS-ZFM-110NA- PS-ZFM-230EU- PS-ZFM-20UK- PS-ZFM-20AU- ZFM power supply 110VAC North America plug 2vdc with DC jack power adapter. ZFM power supply 230VAC Europe plug 2VDC with DC jack power adapter. ZFM power supply 20VAC U.K. plug 2VDC with DC jack power adapter. ZFM power supply 20VAC Australia plug 2VDC with DC jack power adapter. CABLES ZFM-APW-BX CSM9MF-5 CSM9MF-10 CSM9MF-15 CSM9MF-25 CSM9MF-50 KIT-ZFM-2.5FT CBL-A232 CBL-A85 Adapter for ZFM DC Power DB9 M/F 2.1 mm DC jack i the box (for user supplied power supply). Shielded cable D-Sub M/F 9 pis 5.0 feet log. Shielded cable D-Sub M/F 9 pis 10.0 feet log. Shielded cable D-Sub M/F 9 pis 15.0 feet log (recommeded for -20 ma aalog output optio oly). Shielded cable D-Sub M/F 9 pis 25.0 feet log (recommeded for -20 ma aalog output optio oly). Shielded cable D-Sub M/F 9 pis 50.0 feet log (recommeded for -20 ma aalog output optio oly). ZFM Electrical Coectio Kit: 2.5 feet M/F shielded cable ad screw termial with cover for field termiatio (icluded with each ZFM). Commuicatio Cable for ZFM with RS-232 Iterface 6 FT 3.5mm stereo audio co. with 3-wire to 9 pis female D-coector (icluded with each ZFM equipped with RS-232 port). Commuicatio Cable for ZFM with RS-232 Iterface 6 FT 3.5mm stereo audio co. with 3-wire to stripped eds (icluded with each ZFM equipped with RS-85 port). COMMUNICATION PORT ACCESSORIES USB-RS232 USB-RS85 RBA098F USB to RS232 coverter. USB to RS85 coverter. Adapter RJ5 TO DB9 female (8X8) for ZFM Modbus iterface cable to usb/rs85 coverter (USB-RS85). MODBUS INTERFACE ACCESSORIES ECS803-1 TDG1026-8C MOD27T JMODS-1 TRD815BL-2 TRD815BL-10 TRD815BL-25 RJ5 shielded Y-adapter (Passive TAP). RJ5 Modular Coupler. RJ5 Lie Termiator (100 Ohm 0.25 W). RJ5 Splitter fully shielded (5xRJ5, 1 iput outputs). Category 5E Patch Twisted Pair Cable, RJ5 / RJ5, Blue 2.0 feet. Category 5E Patch Twisted Pair Cable, RJ5 / RJ5, Blue 10.0 feet. Category 5E Patch Twisted Pair Cable, RJ5 / RJ5, Blue 25.0 feet ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

35 ZFM ORDERING INFORMATION FOR DIGITAL MASS FLOW METER ZFM MODEL MAX FLOW (N2) L/mi L/mi (Future) L/mi (Future) MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio ZFM 17, 37 B 1/8" Compressio ZFM 17 C 1/" VCR ZFM 17, 37 D 3/8" Compressio ZFM 37, 7 H 6mm Compressio ZFM 17, 37 DISPLAY N NO Display L LCD Readout POWER 6 Uiversal 1 to 26 VDC OUTPUT SIGNAL A 0-5 VDC B -20 ma M 0-10 VDC DIGITAL INTERFACE 2 RS232 5 RS85 3 RS232 with ModBus BULLETIN EM ZFM ZFM 17 S V A L 6 A 2 EXAMPLE: ZFM17S-VAL6-A2 5 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS, ad PRESSURE *.a. = ot applicable. ZFM17 stailess steel, Vito seals, 1/" compressio fittigs with LCD readout, 1 to 26 VDC, 0-5 Vdc output sigal with RS232 digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

36 BULLETIN EM GFC MASS FLOW CONTROLLERS GFC Model GFC thermal Mass Flow Cotrollers are desiged to idicate ad cotrol set flow rates of gases. The GFC combies the characteristics ad accuracy of covetioal mass flow devices ito a uique compact desig at low costs previously uattaiable. Each of these cotrollers icorporates a advaced straight tube sesor i cojuctio with flow passage elemets costructed of alumium ad brass for o-corrosive gases or 316 stailess steel for corrosive applicatios. Zero ad spa adjustmets are accessible from the outside of trasmitters. Priciples of Operatio Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. Desig Features Rigid metallic costructio. Maximum pressure of 1000 psig (70 bars). Leak itegrity 1 x 10-9 sml/sec of helium. NIST traceable certificatio. Built-i tiltable LCD readout. Local or remote setpoit cotrol. 0-5 Vdc ad -20 ma sigals. Circuit protectio. TIO Totalizer optio. Geeral Descriptio Compact, self-cotaied GFC mass flow cotrollers are desiged to idicate ad cotrol flow rates of gases. The rugged desig coupled with istrumetatio grade accuracy provides versatile ad ecoomical meas of flow cotrol. Alumium or stailess steel models with readout optios of either egieerig uits (stadard) or 0 to 100 percet displays are available. The built-i electromagetic valve allows the flow to be set to ay desired flow rate withi the rage of the particular model. NIST Traceable Calibratio A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. Output sigals of 0 to 5Vdc ad to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. The combied gas streams flow through a proportioatig electromagetic valve with a appropriately selected orifice.the closed loop cotrol circuit cotiuously moitors the mass flow output ad maitais it at the set flow rate. Flow rates are uaffected by temperature ad pressure variatios withi stated limitatios. Typical Stailess Steel GFC Mass Flow Cotroller ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

37 GFC MASS FLOW CONTROLLERS Setpoits are cotrolled either locally or remotely. The valve is ormally closed as a safety feature to esure that gas flow is shut off i case of a power outage. The LCD readout built ito the top of the trasducer is tiltable over 90 degrees to provide optimal readig comfort. It is coected to the trasducer by a stadard modular plug, ad is readily removable for remote readig istallatios. Trasducers without LCD readout are offered for OEM applicatios. GFC mass flow cotrollers are available with flow rages from 10 ml/mi to 1000 L/mi N2.Gases are coected by meas of 1/", 3/8", or optioal 1/8" compressio fittigs ad 3/" FNPT fittigs. Optioal fittigs are available. These cotrollers may be used as bech top uits or mouted by meas of screws i the base.trasducer power supply ports are fuse ad polarity protected. Leak Itegrity 1 x 10-9 ml/sec of helium maximum to the outside eviromet. TABLE 16 - SPECIFICATIONS ACCURACY: ACCURACY %FS OPTIONAL ENHANCED ACCURACY %FS BULLETIN EM GFC CALIBRATIONS: MODEL: GFC 17, 37, 7 GFC 57, 67, 77 MODEL: GFC 57, 67, 77 FLOW RANGE: 0-100% % 0-20% FLOW RANGE: % 0-20% ACCURACY: ±1.0% ±1.5% ±3% ACCURACY: ±1% ±1.0% REF DATA with ±1% Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise requested. REPEATABILITY: ±0.25% of full scale. RESPONSE TIME: Geerally 2 secods to withi ±2% of actual flow rate over 25 to 100% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / F C. PRESSURE COEFFICIENT: 0.01% of full scale / psi (0.07 bar). PRESSURE DROP: See Table 1. OPTIMUM GAS PRESSURE: 25 psig (1.73 bars). MAX. GAS PRESSURE: 1000 psig (70 bars) maximum GFC 17, 37, psig (3.5 bars) GFC 57, 67, 77. TURN DOWN RATIO: 0:1. MAX. DIFF. PRESSURE: 50 psi for GFC 17/37/57/67 ad 77 (3. bars), 0 psi for 7 (2.7 bars). GAS ad AMBIENT TEMP: 32 F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. **MATERIALS FLUID CONTACT: a. Alumium models GFC Series: aodized alumium, 316 stailess steel, brass ad Vito O-rigs. ATTITUDE SENSITIVITY: OUTPUT SIGNALS: COMMAND SIGNALS: b. Stailess steel models GFC17S, 37S, 7S, 57S, 67S ad 77S: 316 stailess steel ad Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. No greater tha + 15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. Liear 0-5 Vdc. (1000 ohms mi. load impedace); -20 ma (0-500 ohms loop resistace) Max oise ±20mV. Aalog 0-5 Vdc or -20 ma for remote set poit mode; NPN compatible purge /valve off. CONNECTIONS: GFC 17: 1/" compressio fittigs. Optioal: 6mm, 3/8" ad 1/8" compressio fittigs or 1/" VCR. LEAK INTEGRITY: TRANSDUCER INPUT POWER: CIRCUIT PROTECTION: DISPLAY: CE COMPLIANT: GFC 37: 1/" compressio fittigs. Optioal: 6mm ad 3/8" compressio fittigs or 1/" VCR. GFC 7: GFC 57: GFC 67: GFC 77: 3/8" compressio fittigs. 3/8" compressio fittigs. 1/2" compressio fittigs. 3/" FNPT fittigs. Optioal: 3/" compressio fittigs. 1 x 10-9 sml/sec of helium maximum to the outside eviromet. GFC 17, 37 ad 7: Uiversal +12 Vdc to 26 Vdc, 650 ma maximum. GFC 57, 67 ad 77: +12 Vdc, 800 ma; +2 Vdc, 650 ma optioal. Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. 3-1/2 digit LCD, 0.5" high characters. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

38 MASS FLOW CONTROLLERS GFC 33 TABLE 17 - FLOW RANGES FOR GFC GFC 17 LOW FLOW MASS FLOW CONTROLLER CODE ml / mi [N2] 01 0 to to to to to to 500 CODE liters / mi [N2] 07 0 to to to to 10 GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER 11 0 to GFC 7 /57 /67 /77 HIGH FLOW MASS FLOW CONTROLLER TABLE 18 - MAXIMUM PRESSURE DROP FOR GFC MODEL FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] GFC 17 UP to GFC 37 GFC GFC GFC GFC GFC 57, 67 ad 77 Series Alumium ad Stailess Mass Flow Cotrollers TABLE 19 - ACCESSORIES FOR GFC POWER SUPPLY - BATTERY PACK - CABLES PS-GFC-110NA-2 PS-GFC-110NA- PS-GFC-230EU-2 PS-GFC-230EU- PS-GFC-20UK-2 PS-GFC-20UK- Power Supply, 110 V/12 Vdc /North America Power Supply, 110 V/2 Vdc /North America Power Supply, 220 V/12 Vdc /Europe Power Supply, 220 V/2 Vdc /Europe Power Supply 20 V/12 Vdc /Uited Kigdom Power Supply 20 V/2 Vdc /Uited Kigdom PS-GFC-20AU-2 Power Supply 20 V/12 Vdc /Australia PS-GFC-20AU- Power Supply 20 V/2 Vdc /Australia CBL-DGS Cable, Shielded 15-pi D-coector /ed termiated 17/ 3RC Remote Cable, 3 feet log 17/ R Remote LCD readout with 3 feet log cable For Totalizer Iput/Output Flow Moitor/ Cotroller optios see page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM GFC

39 BULLETIN EM GFC GFC MASS FLOW CONTROLLERS NO LCD VERSION A H B J * D E D E G * C C DASHED LINE FOR HIGH FLOW UNITS F GFC Mass Flow Cotroller TABLE 20 - DIMENSION FOR GFC MODEL CONNECTION COMPRESSION FITTING (except model GFC 77) LCD VERSION DIMENSION (INCH) NO LCD MOUNTING HOLE A B C/*C D/*D E/*E F G H J GFC 17 1/" Tube O Diameter GFC 37 1/" Tube O Diameter GFC 7 3/8" Tube O Diameter GFC 57 3/8" Tube O Diameter GFC 67 1/2" Tube O Diameter /-20 GFC 77 3/" NPT Female / ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

40 ORDERING INFORMATION MASS FLOW CONTROLLERS GFC GFC MODEL MAX. FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE/ Kalrez FITTINGS MODEL A 1/" Compressio GFC 17, 37 B 1/8" Compressio GFC 17 C 1/" VCR GFC 17, 37 D 3/8" Compressio GFC 17, 37, 7, 57 E 1/2" Compressio GFC 67 F 3/" FNPT GFC 77 G 3/" Compressio GFC 77 H 6mm Compressio GFC 17, 37 DISPLAY N No display L LCD readout POWER MODEL 6 Uiversal +12 Vdc to 26 Vdc GFC 17, 37 ad Vdc GFC 57, 67 ad 77 2 Vdc GFC 57, 67 ad 77 INPUT/OUTPUT SIGNAL A Local 0-5 Vdc B Local -20 ma C 0-5Vdc/0-5Vdc D 0-5Vdc/-20mA E -20mA/-20mA F -20mA/0-5Vdc DIGITAL INTERFACE 0 Noe 35 GFC 17 S V A L 2 C 0 EXAMPLE: GFC17S-VAL2-C0 10 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE GFC17 stailess steel, Vito seals, 1/" compressio fittigs with display, 12Vdc, 0-5 Vdc. Out put sigal, No digital iterface - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM GFC

41 BULLETIN EM TIO TIO TOTALIZER INPUT/OUTPUT FLOW MONITOR/CONTROLLER GFM TIO GFM with TIO Mouted GFC TIO GFC with TIO Mouted Desig Features Displays istataeous, total ad accumulated flow rates. Built-i Flow Liearizer (10 poit liearizatio of the flow curve). Up to 7 differet volumetric ad mass flow egieerig uits. Large 13mm (0.51") digits for flow rate ad 5.5mm (0.21") for Total. Digital RS-232 or RS-85 iterface (multi-drop capability of up to 6 devices.) Compact desig for uit mout, pael mout, wall mout or field mout applicatios. User-programmable, optically-isolated pulse output. Two programmable, optically-isolated, digital outputs. Flow cotrollers, set poit commad cotrol via local LCD or digital iterface. Programmable set poit table with rampig up/dow capability up to 16 steps. Free Cofiguratio ad Moitorig Utility software ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

42 BULLETIN EM TIO TOTALIZER INPUT/OUTPUT FLOW MONITOR/CONTROLLER TIO Sigal Iput ad Sigal Output Applicatios For flow meters ad cotrollers with aalog 0-5 (5-10) (0-10)Vdc, - 20mA iput output iterface, where flow idicatios / cotrol ad totalizers or alarm fuctios are required. Also whe re-trasmissio of the flow rate ad/or totalizer fuctios via optically-isolated pulse output or serial commuicatio is desired. Local or programmable set poit cotrol for flow cotrollers (o host PC presece required). Activatio of user-supplied equipmet via programmable optically-isolated digital outputs whe flow alarms or totalizers evets are active. Display The graphical LCD display has large 13mm (0.51") digits for flow rate ad 5.5mm (0.21") for total ad ca be set by user to simultaeously show differet combiatio of the flow parameters: flow rate, totalizers, flow alarms, ad diagostic evets. All cofiguratio parameter settigs are easily accessed via a simple user-iterface meu drive by a 6 butto key-pad which ca be password-protected. 0-5 Vdc (Iput/Output) 5-10 Vdc (Output oly) 0-10 Vdc (Iput/Output) -20 ma (Iput/Output) For flow meters ad / or flow cotrollers, TIO provides jumpers selectable for 0-5 Vdc or -20 ma aalog set poit cotrol sigals. The flow rate set poit ca be adjusted locally via key-pad, remotely via host PC usig digital commuicatio iterface, or programmed i advace usig built-i 16 steps batch table with rampig up/dow support. Programmable Pulse Output The programmable flow pulse output is operatig idepedetly from totalizers ad based o cofiguratio settigs ca provide pulse frequecy proportioal to istataeous fluid flow rate. The LCD/keypad ad digital commuicatio iterface commads are provided to: Eable/Disable Pulse Output. Cofigure Pulse Output start flow rate (i % of full scale). Cofigure the Uit/Pulse value (i curret volumetric or mass flow uits). Cofigure Pulse Active O Time ( ms). Programmable Totalizers TIO provides two idepedet programmable flow totalizers. Both totalizers are updated every 100 ms ad ca be set to activate differet evets. Mai totalizer accumulated total is backed-up i EEPROM memory every secod. The LCD/keypad ad digital commuicatio iterface commads are provided to: Eable/Disable totalizig the flow. Start the totalizer at a preset flow rate (i % of full scale). Assig actio at a preset total volume (Evet Volume). Cofigure power o delay (i secods). Cofigure Auto Reset at preset volume. Cofigure Auto Reset delay (i secods). Reset the totalizer to ZERO ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

43 TIO TOTALIZER INPUT/OUTPUT FLOW MONITOR/CONTROLLER Programmable Alarms TIO provides the user with a flexible alarm/warig system that moitors the fluid flow for coditios that fall outside cofigurable limits as well as visual feedback for the user via the LCD or via a optically-isolated output. The flow alarm has several attributes which ca be cofigured by the user via LCD/Keypad or digital commuicatio iterface: Eable/Disable flow alarm. Low flow alarm settigs (i % of full scale). High flow alarm settigs (i % of full scale). Flow alarm actio delay. Flow alarm actio latch mode. Digital Commuicatio All process data ad settigs ca be read ad modified maually via local LCD Key-pad or through the digital RS-232 or RS-85 commuicatio iterface. Proprietary ASCII software iterface commad set ad free Commuicatio Utility software are provided. TABLE 21 - SPECIFICATIONS ADC/DAC RESOLUTION: ANALOG INPUTS ANALOG OUTPUTS: LCD: KEY-PAD: PULSE OUTPUT: DIGITAL OUTPUT: DIGITAL INTERFACE: PROTOCOL: SPEED: CONFIGURATION: ADDRESSING: TYPE: 12 bit 0-5 Vdc, -20 ma, 5-10 Vdc (jumper-selectable), 0-10 Vdc (special order) 0-5 Vdc, -20 ma (jumper-selectable) 128x6 graphic LCD with istataeous Flow readig ad Total volume idicatio. Adjustable LCD cotrast ad back light. Local 6 tactical push buttos. User-programmable, optically-isolated, with preset active low time iterval ( ms). Two programmable, optically-isolated, 0Vdc, 150 ma (Voltage Isolatio: 250 Vrms). RS-232 or RS-85 (multidrop capability up to 6 devices) Proprietary ASCII software iterface commad set baud (user selectable). Stop bit: 1 Data bits: 8 Parity: Noe Flow Cotrol: Noe Maximum 255 addresses (for RS-85 optio oly). RS232 or RS85 2-wire. POWER REQUIREMENTS: Vdc (up to 60 ma maximum). INTERFACE CONNECTORS: Process I/O sigals ad Digital RS-232/RS-85 iterface miiature 9 pi female D-SUB coector. Digital optically-isolated outputs: TERM BLOCK HEADER POS 3.5MM Male Pis, Shrouded. ENVIRONMENT: Istallatio Level II, Pollutio Degree II, (Per IEC 66). ELECTROMAGNETIC COMPATIBILITY: OPERATING TEMPERATURE: Compliat ref. 89/336/EEC as ameded. Emissio Stadard: EN 55011:1991, Group 1, Class A Immuity Stadard: EN : C to +70 C (1 F to +158 F). BULLETIN EM TIO DIMENSIONS: 86. x 76.2 x 19.1 mm (3." x 3.0" x 0.75") - W x H x D. WEIGHT: Appr. 125g / 0.3 lbs - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

44 BULLETIN EM TIO TOTALIZER INPUT/OUTPUT FLOW MONITOR/CONTROLLER ACCESSORIES TIO TABLE 22 - TIO ACCESSORY'S PART NUMBER DESCRIPTION WHEN REQUIRED KIT-TM-DD KIT-TM-RD KIT-TM-FD KIT-TC-110NA-2C KIT-TC-110NA-2N KIT-TC-110NA-C KIT-TC-110NA-N KIT-TC-230EU-2C KIT-TC-230EU -2N KIT-TC-230EU -C KIT-TC-230EU -N KIT-TC-20AU-2C KIT-TC-20AU-2N KIT-TC-20AU-C KIT-TC-20AU-N KIT-TC-20UK-2C KIT-TC-20UK -2N KIT-TC-20UK -C KIT-TC-20UK-N KIT-TC-20UK-2AC KIT-TC-20UK-AC GFM flow meter moutig kit, shielded cable with two 9 pis D-coectors for process sigals ad commuicatio brach. GFM flow meter moutig kit, wire cable betwee GFM RJ11 ad TIO 9 pi D-coector. GFM flow meter moutig kit, flat wire cable betwee GFM ad TIO 9 pi D-coectors. GFC flow cotroller moutig kit, shielded cable with North America plug 110 Vac to 12 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with North America plug 110 Vac to 12 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with North America plug 110 Vac to 2 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with North America plug 110 Vac to 2 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with EUROPE plug 230 Vac to 12 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with EUROPE plug 230 Vac to 12 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with EUROPE plug 230 Vac to 2 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with EUROPE plug 230 Vac to 2 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with AUSTRALIA plug 20 Vac to 12 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with AUSTRALIA plug 20 Vac to 12 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with AUSTRALIA plug 20 Vac to 2 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with AUSTRALIA plug 20 Vac to 12 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 12 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 12 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 2 Vdc power supply, commuicatio brach. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 2 Vdc power supply. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 12 Vdc power supply, commuicatio brach, aalog -20 ma output brach from GFC. GFC flow cotroller moutig kit, shielded cable with UK plug 20 Vac to 2 Vdc power supply, commuicatio brach, aalog -20 ma output brach from GFC. GFM + digital commuicatio with Host PC or PLC. GFM (12 Vdc power optio oly), 5-10 Vdc iput, o digital commuicatio. GFM, 0-5Vdc iput o digital commuicatio. GFC, 0-5 Vdc iput, North America 12 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, North America 12 Vdc power supply. GFC, 0-5 Vdc iput, North America 12 Vdc power supply. GFC, 0-5 Vdc iput, North America 2 Vdc power supply. GFC, 0-5 Vdc iput, Europe 12 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, Europe 12 Vdc power supply. GFC, 0-5 Vdc iput, Europe 2 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, Europe 2 Vdc power supply. GFC, 0-5 Vdc iput, Australia 12 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, Australia 12 Vdc power supply. GFC, 0-5 Vdc iput, Australia 2 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, Australia 2 Vdc power supply. GFC, 0-5 Vdc iput, UK 12 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, UK 12 Vdc power supply. GFC, 0-5 Vdc iput, UK 2 Vdc power supply, digital commuicatio. GFC, 0-5 Vdc iput, UK 2 Vdc power supply. GFC, 0-5 Vdc iput, UK 12 Vdc power supply, digital commuicatio, aalog -20 ma output brach from GFC. GFC, 0-5 Vdc iput, UK 2 Vdc power supply, digital commuicatio, aalog -20 ma output brach from GFC. KIT-TM GFM flow meter moutig kit, o cables. GFM, user-supplied custom cables. KIT-TC GFC flow cotroller moutig kit, o cables. GFC, user-supplied custom cables. CBL-DA9-X 9 coductor roud shielded cable cosistig of a 9 pi Female D Sub-Coector (plug) o oe ed, ad loose wires o the other ed. For TIO stad aloe optio, user-supplied power supply. 39 Note: X represet the legth of the cable i feet - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

45 TIO ORDERING INFORMATION FOR TOTALIZER FLOW MONITOR / CONTROLLER TIO MODEL DISPLAY / KEYPAD N No Display / No Key Pad L LCD / Key Pad INPUT SIGNAL A 0-5 VDC B -20 ma C 0-10 VDC D 5-10 VDC OUTPUT SIGNAL A 0-5 VDC B -20 ma C 0-10 VDC DIGITAL INTERFACE 2 RS RS-85 TIO L A A 2 BULLETIN EM TIO EXAMPLE: TIO-LAA2 Totalizer I/O Flow Moitor / Cotroller with LCD Key Pad, 0-5 VDC Iput, 0-5 VDC Output ad RS-232 Digital Iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

46 DIGITAL MASS FLOW CONTROLLERS DFC Programmable Mass Flow Cotroller with Digital Sigal Processig Microprocessor drive digital flow cotrollers allow oe to program, record, ad aalyze flow rates of various gases with a computer via a RS-85 iterface. Optioal RS-232 is available. Cotrollers ca be programmed for various cotrol fuctios icludig flow set poit, totalizer, stop totalizer, read totalizer, totalizer from preset flow, stop at preset total, auto zero, ad more. DFC with optioal LCD readout 1 PROG RS ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada NIST Traceable Calibratio BULLETIN EM DFC

47 BULLETIN EM DFC DFC DIGITAL MASS FLOW CONTROLLERS Desig Features Digital ad Aalog modes operate simultaeously. Programmable Flow Cofiguratios. Multi-Drop Capability of up to 256 uits. Stores calibratio data for up to 10 gases. Auto Tue fuctio for optimum cotrol respose. Free PC Software with Gas Bledig ad Programmable Flow fuctios. Totalizer idicates total gas quatity. Alarm limits for high ad low gas flow. Coversio factors for up to 256 gases. Self-Diagostic Tests. Priciples of Operatio Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. The output of the Wheatstoe bridge is coverted to digital format with a 12 Bit ADC (aalog to digital coverter). A o-board microprocessor ad o-volatile memory store all calibratio factors ad directly cotrol a proportioatig electromagetic valve. The digital closed loop cotrol system cotiuously compares the mass flow output with the selected flow rate. Deviatios from the set poit are corrected by compesatig valve adjustmets, with PID algorithm thus maitaiig the desired flow parameters with a high degree of accuracy. Output sigals of 0 to 10Vdc, 0 to 5Vdc or to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. Iterface The digital RS-85 (optioal RS-232) iterfaceprovides access to applicable iteral data icludig FLOW SET POINT, ACTUAL FLOW, ZERO ADJUSTMENTS, ad LINEARIZATION TABLE ADJUSTMENTS. The aalog iterface provides 0 to 5Vdc, 0 to 10Vdc ad to 20 ma iputs ad outputs. Auto Zero The DFC automatically ulls the sesor zero offset wheever the flow set poit is below 2% of full scale. To accommodate this feature the cotrol valve must fully close uder that coditio. Provisios are made to either disable, force or store the curret auto zero via digital commads. Totalizer The firmware for the DFC provides fuctios to register total gas quatity. The total mass of gas is calculated by itegratig the actual gas flow rate with respect to time. Digital iterface commads are provided to: Set the totalizer to zero. Start /stop totalizig the flow. Read the totalizer. Start the totalizer at a preset flow. Stop the flow at a preset total ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

48 BULLETIN EM DFC DIGITAL MASS FLOW CONTROLLERS DFC Multi-Gas Calibratio The DFC is capable of storig primary calibratio data for up to 10 gases. This feature allows the same DFC to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 256 gases are stored i the DFC. Coversio factors may be applied to ay of the te gas calibratios via digital iterface commads. Flow Alarms High ad Low gas flow ALARM limits are programmed usig the digital iterface. Alarm coditios are reported via the digital iterface or ca activate the cotact closure outputs. Gas Bledig Feature Aalborg free software allows cotrollig flow of the Gas mixture of up to eight differet gases (for RS-85 bus with 8 DFC cotrollers) with preset values of the ratio i % for each chael. The flow rate of the Gas Mixture ca be icremeted or decremeted withi allowable rage (based o Full Scale rage of all DFC cotrollers i the mixture system) by chagig the Gas Mixture set poit settigs. The software will automatically adjust idividual set poit for each device accordig to set ratios. Programmable Flow Aalborg software supports programmable flow modes, allowig executio of custom programmig of up to te steps. Various flow cofiguratios iclude rampig, liearized icreasig ad decreasig modes. Auto Tue The AUTO TUNE fuctio allows the DFC to automatically optimize cotrol respose for the gas uder actual process coditios. Durig the AUTO TUNE process, the istrumet adjusts PID gais for optimum step respose ad determie key cotrol valve characteristics (oly available o uits with less tha 80 L/mi maximum flow). Cotact Closure Two sets of dry cotact relay outputs are provided to actuate user supplied equipmet. These are programmable via the digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value). Valve Override Meas are provided to force the cotrol valve fully ope (purge) or fully closed via either the aalog or digital iterfaces. Self-Diagostics Wheever power is first applied, the DFC rus a series of SELF-DIAGNOSTIC TESTS to esure that it is i optimum workig coditio. Egieerig Uits The flow set poit, measured gas flow ad associated totalizer data is scaled directly i egieerig uits via digital iterface commads. The followig uits of measure are supported:% of FS, ml/mi, ml/hr, scfm, scfh, L/mi, L/hr, lbs/hr, lbs/mi, ad oe user defied uit of measure. Leak Itegrity 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. Balaced Power Supply The DFC operates o ±15Vdc. The curret requiremets for the positive ad egative power supplies are balaced such that the curret i the power supply commo coectio is miimized. Maximum power cosumptio is 13.5 watts at ±15Vdc ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

49 BULLETIN EM DFC DFC DIGITAL MASS FLOW CONTROLLERS TABLE 23 - SPECIFICATIONS ACCURACY: CALIBRATIONS: REPEATABILITY: RESPONSE TIME: TEMPERATURE COEFFICIENT: PRESSURE COEFFICIENT: OPTIMUM GAS PRESSURE: MAXIMUM GAS PRESSURE: ±1% of FS at calibratio temperature ad pressure. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise requested. ±0.15% of full scale. 1.0 to 2.0 secod to withi ±2% of set poit over 20% to 100% of full scale. 0.05% of full scale/ F F or better. 0.01% of full scale /psi (0.07 bar) or better. 25 psig (1.73 bars) psig (70 bars). MAXIMUM DIFFERENTIAL PRESSURE: 50 psig (3. bars) for DFC 26 ad DFC 36 0 psig (2.8 bars) for DFC 6 MAX PRESSURE DROP: Refer to Table 2. GAS ad AMBIENT TEMP: COMMUNICATION INTERFACE: OUTPUT SIGNALS: CIRCUIT PROTECTION: 32 F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. RS85 - Stadard. RS232 - Optioal. Liear 0-5 Vdc (2000 ohms mi load impedace); 0-10Vdc (000 ohms mi impedace); -20 ma optioal (0-500 ohms\ loop resistace). Maximum oise 20mV peak to peak. Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. **MATERIALS IN FLUID CONTACT: 316 stailess steel, 16 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. ATTITUDE SENSITIVITY: CONNECTIONS: No greater tha +15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. Model DFC 26/36: Stadard 1/" compressio fittigs. Optioal: 6mm compressio fittigs or 3/8" compressio fittigs or 1/" VCR or 1/8" compressio fittigs (DFC 26). Model DFC 6: stadard 3/8" compressio fittigs. LEAK INTEGRITY: TRANSDUCER INPUT POWER: CALIBRATION OPTIONS: CE COMPLIANCE: 1 x 10-9 sml/sec of helium maximum to the outside eviromet. +15Vdc, 50 ma maximum. Stadard 10 poit NIST traceable calibratio. Optioal up to 9 additioal 10 poit calibratios may be ordered for a additioal charge. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

50 DIGITAL MASS FLOW CONTROLLERS DFC DFC 26 Mass Flow Cotroller 2-PIN D-CONNECTOR MALE DFC 36/6 Mass Flow Cotroller 25-PIN D-CONNECTOR MALE 5 * FOR HIGH FLOW MASS FLOW CONTROLLERS * - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM DFC

51 BULLETIN EM DFC DFC DIGITAL MASS FLOW CONTROLLERS TABLE 2 - FLOW RANGES FOR DFC TABLE 26 - MAXIMUM PRESSURE DROP FOR DFC DFC 26 LOW FLOW CONTROLLERS DFC 36 MEDIUM FLOW CONTROLLERS DFC 6 HIGH FLOW CONTROLLERS MODEL NO. MAX. FLOW (N2) MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] CODE Uits [Nitroge] CODE L/mi [N2] CODE L/mi [N2] 01 0 to 10 ml/mi 11 0 to 15 L/mi 0 0 to 60 L/mi 02 0 to 20 ml/mi 30 0 to 20 L/mi 1 0 to 80 L/mi 03 0 to 50 ml/mi 31 0 to 30 L/mi 2 0 to 100 L/mi 0 0 to 100 ml/mi 32 0 to 0 L/mi 05 0 to 200 ml/mi 33 0 to 50 L/mi 06 0 to 500 ml/mi 07 0 to 1 L/mi 08 0 to 2 L/mi 09 0 to 5 L/mi 10 0 to 10 L/mi DFC 26 up to DFC DFC TABLE 25 - ACCESSORIES AND READOUTS FOR DFC CBL-DFC CBL-DFC-DPM-AI CBL-DFC-DPM-AIO CBLDFC-PROC PS-DFC-110NA-5-S PS-DFC-110NA-5-A PS-DFC-230EU-5-S PS-DFC-230EU-5-A PS-DFC-20AU-5-S PS-DFC-20AU-5-A PS-DFC-20UK-5-S PS-DFC-20UK-5-A BCKUPDFC PS-DFC-110NA-5-S-D PS-DFC-110NA-5-A-D PS-DFC-230EU-5-S-D 25 pi D-coector with 6 ft. wire to computer port stripped, Brach 6ft. wire to customers power supply. Cable stripped for DFC w/lcd jack ad aalog iput for set poit oly. Cable stripped for DFC with LCD jack ad aalog iput/output. 25 pi D-coector with 6ft. wire to 15 pi DM, Brach 6ft. wire to computer port stripped. Power supply with 25 pi female D-coector 110/vac (±15Vdc.) Brach 6ft wire to computer port stripped /North America. Power supply with 25 pi D-coector, aalog iterface 110/vac (+ - 15Vdc.) (North America). Power supply with 25 pi female D-coector 230/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Europe. Pwr sply, 25 pi D-coector, aalog iterface 230/vac (+ - 15Vdc.) (Europe). Power supply with 25 pi female D-coector 20/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Australia. Pwr sply, 25 pi D-coector, aalog iterface 20/vac (+ - 15Vdc.) (Australia). Power supply with 25 pi female D-coector 20/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Uited Kigdom. Pwr Sply, 25 pi D-coector, aalog iterface 20/vac (+ - 15Vdc.) (U.K). Digital pael meter / led backlight. Power supply DFC 110/Vac ±15Vdc stadard iterface ad LCD jack. (Uited States). Power supply DFC 110/Vac ±15Vdc aalog iterface ad LCD jack. (Uited States). Pwr sply DFC 230/vac +/-15Vdc stadard iterface ad LCD jack. (Europe) PS-DFC-230EU-5-A-D Pwr sply DFC 230/vac +/-15Vdc aalog iterface ad LCD jack. (Europe) PS-DFC-20AU-5-S-D Pwr sply DFC 20/vac +/15Vdc stadard iterface ad LCD jack. (Australia) PS-DFC-20AU-5-A-D Pwr sply DFC 20/vac +/-15Vdc aalog iterface ad LCD jack. (Australia) PS-DFC-20UK-5-S-D Pwr sply DFC 20/vac +/-15Vdc stadard iterface ad LCD jack. (Uited Kigdom) PS-DFC-20UK-5-A-D Pwr sply DFC 20/vac +/-15 Vdc aalog iterface ad LCD jack. (Uited Kigdom) - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

52 BULLETIN EM DFC DIGITAL MASS FLOW CONTROLLERS DFC Cable Optios Stadard Cable (supplied with Trasducer) CBL-DFC D FC C 25 PINS 6 FEET 3 3 POWER SUPPLY COMPUTER COMMUNICATION D FC C 25 PINS 6 FEET CBL-DFC-SDPROC 15 PINS 3 COMMAND MODULE PROC COMPUTER COMMUNICATION PS-DFC-110NA-5-S 230EU /20UK /20AU D F C 25 PINS 6 FEET POWER SUPPLY 3 3 COMPUTER COMMUNICATION POWER 110/230/20V D F C PS-DFC-110NA-5-A 230EU /20UK /20AU 25 PINS 6 FEET POWER SUPPLY ANALOG SETPOINT ANALOG OUTPUT PURGE CLOSE RELAY OTHER-SEE MANUAL COMPUTER COMMUNICATION POWER 110/230/20V ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

53 BULLETIN EM DFC DFC ORDERING INFORMATION DIGITAL MASS FLOW CONTROLLERS DFC MODEL MAX. FLOW (N2) L/mi L/mi L/mi MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio DFC 26, 36 B 1/8" Compressio DFC 26 C 1/" VCR DFC 26, 36 D 3/8" Compressio DFC 26, 36, 6 H 6mm Compressio DFC 26, 36 DISPLAY N No Display L LCD Readout (Special iterface cable is required). POWER Vdc INPUT / OUTPUT SIGNAL C 0-5Vdc/ 0-5Vdc D 0-5Vdc/ -20mA E -20mA/ -20mA F -20mA/ 0-5Vdc H 0-5 Vdc/ 0-10Vdc I 0-10Vdc/ 0-5 Vdc J 0-10Vdc/ 0-10 Vdc K -20 ma/ 0-10 Vdc L 0-10 Vdc/ -20 ma DIGITAL INTERFACE 2 RS232 5 RS85 DFC 36 S V A N 5 C 5 EXAMPLE: DFC36S-VAN5-C5 50 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE. DFC 36 stailess steel, Vito seals, 1/" compressio fittigs, No display, +15 Vdc power, 0-5 Vdc/0-5 Vdc iput output sigal, RS85 digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

54 MULTI PARAMETER DIGITAL MASS FLOW METERS DFM Multi Parameter flow meters provide accurate data o three differet fluid parameters: flow pressure temperature The flow rate ca be displayed i volumetric flow or mass flow egieerig uits for stadard or actual (temperature, pressure) coditios. Flow meters ca be programmed locally by the four butto keypad ad LCD or remotely via RS-232/RS-85 iterface. DFM flow meters support various fuctios icludig: flow totalizer, flow, temperature, pressure alarms, automatic zero adjustmet, 2 relay outputs, 0-5 Vdc / 0-10 Vdc / -20 ma aalog outputs for flow, pressure ad temperature. DFM's are offered either as Digital Mass Flow Meters, Model Numbers: DFM26, 36, & 6 or as a Digital Multi-Parameter Meters, Model Numbers, DFM27, 37 & 7. Model Numbers are displayed i Table 27. THERE ARE 3 VOLTAGE (POWER) OPTIONS: +15Vdc, 12Vdc, & 2Vdc. Iterface All features of the flow meter ca be accessed via the local four butto keypad ad LCD. The digital iterface operates via RS85 (optioal RS-232 is available) ad provides access to applicable iteral data icludig: flow, temperature, pressure readig, auto zero, totalizer ad alarms settigs, gas table, coversio factors ad egieerig uits selectio, dyamic respose compesatio ad liearizatio table adjustmet. The aalog iterface provides 0 to 5Vdc or 0 to 10Vdc or to 20 ma outputs for flow, pressure ad temperature (jumper selectable). Totalizer The total volume of the gas is calculated by itegratig the actual gas flow rate with respect to time. Both keypad meu ad digital iterface commads are provided to: set the totalizer to ZERO. start the totalizer at a preset flow. assig actio at a preset total volume. start/stop totalizig the flow. read totalizer. Totalizer coditios become true, whe the totalizer readig ad the Stop at Total volumes are equal. Flow Alarm 9 Auto Zero High ad Low gas flow ALARM limits ca be preprogrammed via keypad or remotely via digital The DFM supports automatic sesor zero offset iterface. ALARM coditios become true whe the adjustmet which ca be activated locally via the keypad curret flow readig is equal or higher/lower tha or remotely via digital iterface. The auto zero correspodig values of high ad low alarm levels. Alarm feature requires absolutely o flow through the meter actio ca be assiged with preset delay iterval ( durig auto zero process. Provisios are made to secods) to activate the cotact closer (separate for High either start, read, or save the curret auto zero value ad Low alarm). via digital commads ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM DFM

55 DFM MULTI PARAMETER DIGITAL MASS FLOW METERS Pressure Alarm High ad Low gas pressure ALARM limits ca be preprogrammed via the keypad or remotely via digital iterface. Pressure alarm coditios become true whe the curret pressure readig is equal or higher tha correspodig values of high pressure alarm settigs or equal or lower tha correspodig values of low pressure alarm settigs. Alarm actio ca be assiged to activate the cotact closer (separate for High ad Low pressure alarm). Temperature Alarm High ad Low gas temperature ALARM limits ca be preprogrammed via the keypad or remotely via digital iterface. Temperature alarm coditios become true whe the curret temperature readig is equal or higher tha correspodig values of high temperature alarm settigs or equal or lower tha correspodig values of low temperature alarm settigs. Alarm actio ca be assiged to activate the cotact closer (separate for High ad Low temperature alarm). TABLE 27 -SPECIFICATIONS BULLETIN EM DFM ACCURACY: CALIBRATIONS: PRESSURE RANGE (MEASUREMENT): PRESSURE ACCURACY: TEMPERATURE RANGE (MEASUREMENT): TEMPERATURE ACCURACY: ±1 F C. REPEATABILITY: RESPONSE TIME: TEMPERATURE COEFFICIENT: PRESSURE COEFFICIENT: OPTIMUM GAS PRESSURE: MAXIMUM GAS PRESSURE: MAXIMUM BURST PRESSURE: ±1% of FS at calibratio temperature ad pressure. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise stated. 5 to 100 psia (0.3 to 6.8 bars). ±1% of FS. 32 F F to 122 F F (0 F C to 50 F C). ±0.25% of full scale. 0.6 to 1.0 secod to withi ±2% of set flow over 20% to 100% of full scale. 0.15% / F C or better. 0.01% of full scale/ 1 psi (0.07 bar) or better. 25 psig (1.73 bars). MAXIMUM PRESSURE DROP: See table 26. DFM 26/36/6: 1000 psig (68 barg, 6895 kpag). DFM 27/37/7: 100 psia (6.8 barabs, 689 kpaabs). DFM 26/36/6: 1000 psig (68 barg, 6895 kpag). DFM 27/37/7: 200 psig (13.6 barg, 1379 kpag). GAS ad AMBIENT TEMP: 32 F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. OUTPUT SIGNALS: Liear 0-5 Vdc (3000 ohms mi load impedace); 0-10Vdc (6000 ohms mi impedace); -20 ma optioal (500 ohms max loop resistace). Maximum oise 20mV peak to peak. INPUT POWER: May be cofigured for three differet optios: ±15Vdc (±200 ma maximum); +12Vdc (300 ma maximum); +2Vdc (250 ma maximum); Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. **MATERIALS IN FLUID CONTACT: 316 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. CONNECTIONS: Model DFM26/27: Stadard 1/" compressio fittigs. Optioal: 6mm compressio fittigs, 3/8" or 1/8" compressio fittigs ad 1/" VCR fittigs. DISPLAY: CALIBRATION OPTIONS: CE COMPLIANCE: ENVIRONMENTAL (PER IEC 66): Model DFM36/37: Optioal: Model DFM6/7: Stadard 1/" compressio fittigs. 6mm compressio fittigs, 3/8" compressio fittigs ad 1/" VCR fittigs. Stadard 3/8" compressio fittigs. 128 x 6 graphic LCD with backlight (up to 8 lies of text). Stadard oe 10 poits NIST traceable calibratio. Optioal up to 9 additioal calibratios may be ordered for a additioal charge. EN class 1, class B; EN Istallatio Level II; Pollutio Degree II. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

56 BULLETIN EM DFM MULTI PARAMETER DIGITAL MASS FLOW METERS DFM Egieerig Uits TABLE 28 - FLOW RANGES FOR DFM The measured gas flow ad associated totalizer data are scaled directly i egieerig uits via the frot pael keypad or digital iterface. CODE DFM 26 / 27 LOW FLOW MASS METERS ml/mi [N2] THE FOLLOWING UNITS OF MEASURE ARE SUPPORTED: %F.S., L/mi, L/h, ml/mi, ml/h, scuft/h, scuft/mi, lb/h, lb/mi, oe user defied egieerig uit. Multi-Gas Calibratio The DFM is capable of storig primary calibratio data for up to 10 gases. This feature allows the same DFM to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 32 gases are stored i the DFM. I additio provisio is made for a user defied coversio factor. Coversio factors may be applied to ay of the te gas calibratios via keypad or digital iterface commads. Cotact Closure Two sets of dry cotact relay outputs are provided to actuate user supplied equipmet. These are programmable via the local keypad or digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow, pressure or temperature alarm limit is exceeded or whe the totalizer reaches a specified value) to to to to to to 500 CODE L/mi [N2] 07 0 to to to to 10 DFM 36 / 37 MEDIUM FLOW MASS FLOW METERS CODE L/mi [N2] 11 0 to DFM 6 / 7 HIGH FLOW MASS FLOW METERS CODE L/mi [N2] Leak Itegrity 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. TABLE 29 - PRESSURE DROP FOR DFM MODEL FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP FOR DFM [mm H 2 O] [psid] [kpa] DFM 26 /27 up to DFM 36 /37 DFM 6 / ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

57 BULLETIN EM DFM DFM MULTI PARAMETER DIGITAL MASS FLOW METERS Multi Parameter Mass Flow Meter with Digital Sigal Processig Desig Features Multi-Drop Capability of up to 255 uits (for RS-85 optio). Stores calibratio data for up to 10 differet gases. Supports 10 differet egieerig uits icludig user defied. Programmable 12 digits Totalizer idicates total gas volume. Flow Alarm limits for high ad low gas flow with relay output. Pressure Alarm limits for high ad low gas pressure with relay output. Temperature Alarm limits for high & low gas temp. with relay output. Four butto keypad ad large 128x6 graphical LCD with back light. Digital (RS-232 or RS-85) ad Aalog outputs operate simultaeously. Iteral Coversio factors for up to 32 gases. Automatic Zero Adjustmet. Self-Diagostic Tests ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

58 BULLETIN EM DFM MULTI PARAMETER DIGITAL MASS FLOW METERS DFM 25-PIN D-CONNECTOR MALE 5.00 [127.0] 0.50 [12.7] 0.63 [15.9] 1.63 [1.3].25 [108.0] 6.27 [159.3] B 0.15 DEEP 0.28 [7.1] DFM26 ad DFM [17.5] 0.53 [13.5] 2.69 [68.3] 25-PIN D-CONNECTOR MALE 5.25 [133.] 0.50 [12.7] 0.63 [15.9] 2.00 [50.8] 5.25 [133.] 7.27 [18.6] 7.9 [190.2] * B 0.15 DEEP DFM36 ad DFM37 DFM6 ad DFM [8.3] 0.69 [17.5] * FOR HIGH FLOW MASS FLOW METER 0.80 [20.3] 2.69 [68.3] ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

59 DFM ORDERING INFORMATION MULTI PARAMETER DIGITAL MASS FLOW METERS DFM MODEL SERIES MAX FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio DFM 26, 27, 36, 37 B 1/8" Compressio DFM 26 & 27 C 1/" VCR DFM 26, 27, 36, 37 D 3/8" Compressio DFM 26, 27, 36, 37, 6, 7 H 6mm Compressio DFM 26, 27, 36, 37 DISPLAY L LCD readout POWER 2 12 Vdc 2 Vdc Vdc OUTPUT SIGNAL A 0-5 Vdc B -20 ma C 0-10 Vdc BULLETIN EM DFM TEMP & PRESSURE OUTPUT SIGNAL (A oly 26, 36, 6) CODE TEMP OUT PRESSURE OUT A.a..a. B 0-5Vdc 0-5Vdc C 0-5Vdc -20mA D 0-5Vdc 0-10Vdc E -20mA 0-5Vdc F -20mA -20mA G -20mA 0-10Vdc H 0-10Vdc 0-5Vdc I 0-10Vdc -20mA J 0-10Vdc 0-10Vdc *.a. = ot applicable. DFM 36 S V A L 5 A A 5 **DIGITAL INTERFACE 2 RS232 5 RS85 **RS85 is stadard. No cost optioal RS232 is selected by chagig the last digit of part umber from 5 to 2. EXAMPLE: DFM36S-VAL5-AA5 50 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE DFM36 stailess steel, Vito seals, 1/" compressio fittigs, LCD readout display, ±15 Vdc power, 0-5Vdc output sigal, RS85 digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

60 BULLETIN EM AFC ANALOG MASS FLOW CONTROLLERS AFC Model AF mass flow cotrollers are desiged to idicate flow rates ad cotrol set flow rates of gases. Each of these uits icorporates a advaced straight tube sesor i cojuctio with flow passage elemets costructed of stailess steel. LCD readouts of commad modules are supplied with 0 to 100 percet calibratios. Zero ad spa adjustmets are coveietly accessible from outside of the trasmitters. Desig Features Rigid metallic costructio. Maximum pressure of 1000 psig (70 bars). 0-5 Vdc or -20mA sigals. Leak itegrity 1 x 10-9 sml/sec of helium. Accuracy of ±1% F.S. Totalizer optio. Circuit protectio. Priciples of Operatio Metered gases are divided ito two lamiar flow paths - oe through the primary flow coduit ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. Output sigals of 0 to 5Vdc or to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. SDPROC ad AFC Aalog Mass Flow Cotroller ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

61 BULLETIN EM AFC AFC ANALOG MASS FLOW CONTROLLERS I AFC mass flow cotrollers the combied gas streams flow through a proportioatig electromagetic valve with a appropriately selected orifice. The closed loop cotrol circuit cotiuously moitors the mass flow output ad maitais it at the set flow rate. Flow rates are uaffected by temperature ad pressure variatios withi stated limitatios. Trasducer power supply ports are fuse ad polarity protected. AFC mass flow cotrollers iclude a electromagetic cotrol valve that allows the flow to be set to ay desired flow rate withi the rage of the particular model. The valve is ormally closed as a safety feature to esure that gas flow is shut off i case of a power outage. AF mass flow cotrollers are desiged to meter ad cotrol flow rates of gases. AF mass flow cotrollers are available with flow rages from 10 ml/mi to 100LPM [N2]. Gases are coected by meas of 1/", 3/8", or optioal 1/8" compressio fittigs. These cotrollers may be used as bech top uits or mouted by meas of screws i the base. TABLE 30 - SPECIFICATIONS ACCURACY: CALIBRATIONS: REPEATABILITY: TIME CONSTANT: RESPONSE TIME: TEMPERATURE COEFFICIENT: PRESSURE COEFFICIENT: OPTIMUM GAS PRESSURE: MAXIMUM GAS PRESSURE: MAX. PRESSURE DROP: (at full scale flow) GAS AND AMBIENT TEMPERATURE: LEAK INTEGRITY: **MATERIALS IN FLUID CONTACT: ATTITUDE SENSITIVITY: ±1% of FS at calibratio temperature ad pressure. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F F (21.1 F C)] uless otherwise stated. ±0.25% of full scale. AFC26: (Qmax = 10 L/mi): 300 ms. AFC36: (Qmax = 50 L/mi): 600 ms. AFC6: (Qmax = 100 L/mi): 600 ms. AFC26: (Qmax = 10 L/mi): Approximately 1 secod to withi ±2% of set flow rate for 25% to 100% of full scale flow. AFC36: (Qmax = 50 L/mi) ad AFC6: (Qmax=100 L/mi): Approximately 2 secod to withi ±2% of set flow rate for 25% to 100% of full scale flow. 0.1% of full scale/ F C. 0.01% of full scale/psi (0.07 bar). 25 psig (1.73 bars) psig (70 bars) maximum. Stadard calibratio is at 20 psig (1. bars) ilet pressure. Refer to Table F F to 122 F F (0 F C to 50 F C). 1 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. 1 x 10-9 sml/sec of helium maximum, to the outside eviromet. 316 stailess steel, 16 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. No greater tha +15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. OUTPUT SIGNALS: Liear 0-5 Vdc (2000 W mi. load impedace); - 20 ma optioal (0-500 Ω loop resistace); maximum oise 20 mv peak to peak. CONNECTIONS: AFC26: 1/" compressio fittigs. Optioal: 6mm, 3/8" ad 1/8" compressio fittigs or 1/" VCR. AFC36: 1/" compressio fittigs. Optioal: 6mm ad 3/8" compressio fittigs or 1/" VCR. AFC 6: 3/8" compressio fittigs. TRANSDUCER INPUT POWER: CIRCUIT PROTECTION: AFC 26: +15 ±5% Vdc, 80 ma max, 1.2W; -15 ± 5% Vdc, 200 ma max, 3W; AFC 36 /AFC 6: +15 ±5% Vdc, 220 ma max, 3.3W; -15 ±5% Vdc, 600 ma max, 9W. Circuit boards have built-i polarity reversal protectio. Replaceable fuses provide power iput protectio. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

62 BULLETIN EM AFC ANALOG MASS FLOW CONTROLLERS AFC Leak Itegrity 1 x 10-9 sml/sec of helium max to outside eviromet. TABLE 32 - MAXIMUM PRESSURE DROP FOR AFC FLOW RATE [liters/mi] [psid] AFC SERIES [bars] Mass Flow Systems Complete Mass Flow Systems iclude Commad Modules, trasducers ad cables. Commad modules cotai appropriate power supplies, 2x2 alpha-umeric dot matrix display readout, ad four pael buttos which provide complete cotrol over all the various fuctios ecessary to measure ad/or cotrol flow. Optioal built i Etheret iterface allows accessig ay Iteret-coected SDPROC from a browser o your work statio, PC, or laptop computer. NIST Traceable Calibratio up to up to up to up to up to up to up to AFC Aalog Mass Flow Cotroller TABLE 31 - FLOW RANGES FOR AFC AFC 26 CODE UNITS [NITROGEN] 01 0 to 10 ml/mi 02 0 to 20 ml/mi 03 0 to 50 ml/mi 0 0 to 100 ml/mi 05 0 to 200 ml/mi 06 0 to 500 ml/mi 07 0 to 1 L/mi 08 0 to 2 L/mi 09 0 to 5 L/mi 10 0 to 10 L/mi AFC to 15 L/mi 30 0 to 20 L/mi 31 0 to 30 L/mi 32 0 to 0 L/mi 33 0 to 50 L/mi AFC to 60 L/mi 1 0 to 80 L/mi 2 0 to 100 L/mi ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

63 BULLETIN EM AFC AFC ANALOG MASS FLOW CONTROLLERS AFC26 Aalog Mass Flow Cotroller - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

64 BULLETIN EM AFC ANALOG MASS FLOW CONTROLLERS AFC AFC36 / AFC6 Mass Flow Cotroller ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

65 BULLETIN EM AFC AFC ORDERING INFORMATION ANALOG MASS FLOW CONTROLLERS MODEL AFC SERIES MAX. FLOW (N2) L/mi L/mi L/mi MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/" Compressio AFC 26, 36 B 1/8" Compressio AFC 26, 36 C 1/" VCR AFC 26, 36 D 3/8" Compressio AFC 26, 36, 6 H 6mm Compressio AFC 26, 36 DISPLAY N No Display POWER Vdc INPUT / OUTPUT SIGNAL C 0-5Vdc / 0-5Vdc D 0-5Vdc / -20mA DIGITAL INTERFACE 0 NONE AFC 36 S V A N 5 C 0 EXAMPLE: AFC36S-VAN5-A0 50 L/mi [N2] 20 psig SPECIFY: GAS, FLOW RANGE ad PRESSURE. AFC36 stailess steel, Vito seals with 1/" compressio fittigs, without a display, +15 Vdc, 0-5Vdc iput/output sigal, ad o digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

66 BULLETIN EM SDPROC MICROPROCESSOR DRIVEN COMMAND MODULES SDPROC Smart Digital Commad Module SDPROC Microprocessor drive digital Commad Modules are used i cojuctio with ay aalog or digital mass flow cotrollers with 0-5 Vdc iput /output sigals. Oe, two, three ad four chael Commad Module cofiguratios are available. Commad Modules cotai appropriate power supplies, 2x2 alpha-umeric dot matrix display readout, ad four pael buttos which provide complete cotrol over all the various fuctios ecessary to measure ad/or cotrol flow. Programmig It is easy to program the SMART DPROC usig a logically orgaized, modular meu. The operator quickly accesses a desired fuctio by brachig through the multi-level tree structure, rather tha scrollig through the etire meu. RS-232 serial commuicatio iterface is stadard for all models ad supported via a 9 pi D - coector o the back pael of the Commad Module. RS-232 Software iterface commads set allows commuicatios with the uit usig either a custom software program or a dumb termial ad provide complete cotrol over all modes ad fuctios. PROGRAMMABLE BATCH FLOW CONTROL The Batch Flow Cotrol allows executio of custom, user preset program of up to sixtee steps. Durig executio of the program the user ca activate or deactivate the LOOP mode. Various flow cofiguratios may be preprogrammed: rampig, pulsig, liearized icreasig ad/or decreasig of the flow. Optioal built-i Etheret iterface allows accessig ay Iteret-coected SDPROC from a browser o your work statio, PC, or laptop computer. Regardless of where you are, your Commad Module is as close as the earest browser! There are two levels of Etheret based Remote Cotrols: HTML web server ad TELNET. The HTML web server, which is hosted o the Commad Module lets oe view CURRENT FLOW RATE, CONTROL VALVE MODE ad/or SET POINT, MONITOR TOTALIZER READING FOR SELECTED CHANNEL. The TELNET cosole provides complete cotrol over all modes ad fuctios ad usig the same Software iterface commads set as the RS-232 commuicatio iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

67 SDPROC MICROPROCESSOR DRIVEN COMMAND MODULES Desig Features ENGINEERING UNITS The flow set poits, measured gas flow ad associated totalizer data are scaled directly i egieerig uits via frot pael keypad, RS-232 or Etheret iterface. The followig uits of measure are supported: %F.S., SLPM, L/s, ml/mi, ml/h, SCFM, SCFH, SCMM, SCMH, LBPM, LBPH, GRPM, GRPH. FLOW ALARMS High ad Low gas flow ALARM limits ca be preprogrammed for each chael. ALARM coditios become true whe the differece betwee curret readigs ad istalled set poits are equal or more tha correspodig values of high ad low alarm levels. Alarm actio ca be assiged with preset delay iterval ( secods) to oe of the followig: USER SELECTABLE REFERENCE FOR SET POINT The INTERNAL, EXTERNAL, PROGRAM refers to the poit of origi for the Set Poit sigal. Cotact closer (separate for High ad Low alarm). Buzzer audible sigal. Valve shut dow (Close). I INTERNAL REFERENCE MODE, the user sets the cotrol sigal with SDPROC cotrols (via frot pael keypad, RS-232 or Etheret iterface). I EXTERNAL REFERENCE MODE, the user sets the cotrol sigal from a remote locatio (via the DATA IN/OUT 25-pi D -coector o the rear pael). I PROGRAM MODE the set poit sigal will be drive by user's custom program stored i the EEPROM. There are three Program modes: BATCH, TIMER ad RATIO*. *RATIO mode ot available for oe chael module. PROGRAMMABLE TIMER FLOW CONTROL The Timer Flow Cotrol allows executio of custom, user preset program of up to 96 steps. Each step ca be preprogrammed for a particular date, time, ad set poit value. Every step has two fields: startig date, time ad set poit i % F.S. RATIO FLOW CONTROL CONTACT CLOSURES Two sets of dry cotact relay outputs for each chael are provided to actuate user supplied equipmet. The relays ca be assiged to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value). TOTALIZER The total volume of the gas is calculated by itegratig the actual gas flow rate with respect to time. Both keypad meu ad digital iterface commads are provided to: Set the totalizer to ZERO. Start the totalizer at a preset flow. Assig actio at a preset total volume. Start/Stop totalizig the flow. Read totalizer. Totalizer coditios become true, whe the totalizer, ad the Stop at Total volumes are equal. BULLETIN EM SDPROC The Ratio Flow allows cotrollig flow of the mixture of up to four differet gases (for chael Commad Module) with preset values of the ratio i % for each chael. The flow rate of the mixture ca be icremeted or decremeted by chagig the set poit of the master chael #1. Totalizer actio ca be assiged to oe of the followig: - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada Cotact closer. Buzzer audible sigal. Valve shut dow (Close). 62

68 BULLETIN EM SDPROC MICROPROCESSOR DRIVEN COMMAND MODULES SDPROC aalborg 7 COMMAND MODULE.38 [111.2] ESC UP DOWN ENTER 6.75 [171.5] 7.75 [196.8] DIMENSIONS SHOWN IN BRACKETS ARE IN MILLIMETERS TABLE 33 - SPECIFICATIONS ENVIRONMENTAL (per IEC 66) POWER SUPPLY: FUSE: DISPLAY: ADC/DAC RESOLUTION: 12 bits (0.025%). COMMUNICATION STANDARD: OPTIONAL: DIMENSIONS: WEIGHT: INTERFACE CABLE: DATA PORT AND RELAY CABLE: Istallatio Level II; Pollutio degree II. 85 to 20 VAC (7 to 0 Hz); 120 to 370 VDC 2A max. 2A o iput power lie. Whe chagig, uplug the device from power source. Replace oly with fuse 5mm 2A/250V FF. 2 x 2 LCD dot matrix with backlight; 2x2 Vacuum Fluorescet display optioal. RS baud rate, 8 bits, two stop bits, o parity (8,2.N). Etheret TCP/IP. (HTML Server or TELNET Cosole). Legth: 7.75" (19.5 cm), width: 6.75" (17 cm), height:.5" (11cm)..5 lbs (2 kg). Flat cable with male 15-pi D coector ad female 15-pi D coector o the eds is stadard. Optioal roud shielded cable is available with male/female 15-pi D coector eds. [Cable legth may ot exceed 9.5 feet (3 meters)] Optioal shielded cable with male 25-pi D coector to coect to commad module data ad relay ports. [Cable legth may ot exceed 9.5 feet (3 meters)] ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

69 BULLETIN EM SDPROC SDPROC ORDERING INFORMATION MICROPROCESSOR DRIVEN COMMAND MODULES MODEL SDPROC CHANNELS CONFIGURATION A AFC D DFC G GFM /GFC C CUSTOM DIGITAL INTERFACE 1 RS232 2 RS232 Etheret AC INPUT VOLTAGE NA VAC North America EU VAC Europe AU VAC Australia UK VAC Uited Kigdom DISPLAY L LCD V VFD SDPROC A 2 NA L EXAMPLE: SDPROC-A2-NAL Smart Digital Commad Module, -Chael, AFC cofiguratio, RS232 with Etheret, VAC North America plug, LCD display ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

70 BULLETIN EM PWM PADDLE WHEEL FLOW METERS PWM Desig Features Flow meters for liquid flow applicatios. Jewel bearigs allow for very low miimum flow rates. Easy to istall ad operate. Mouted horizotally or vertically. Oly oe movig part. Flow idicatio via trasparet acrylic cover. Versatile square wave flow output sigal. Female NPT ports. Multiparameter: flow ad temperature *outputs. Four wires platium RTD optio. Polypropylee ad chemically resistat PVDF models. * PWM provides oly raw pulse output sigals. I order to get actual flow ad temperature readigs, user has to implemet additioal sigal processig. Priciples of Operatio FOR LIQUIDS ONLY Fluid flowig through the uit causes the paddle wheel to spi. As the magets embedded i the paddle spi past the sesor, electrical pulses are produced i which frequecy is proportioal to the flow rate. The umber of pulses per desired time iterval ad the K-factor (umber of pulses/gallo) make it is possible to calculate the flow rate ad volume passig through the uit. TABLE 3 - FLOW RATE FOR PWM METER SIZES FLOW RATE H 2 0 Ilet/Outlet Ports Max Pressure Drop [L/mi] [gal/mi] Female NPT Bar PSI PWM /8" 1 15 PWM /2" PWM /" PWM " TABLE 36 - PADDLE WHEEL MODEL NUMBERS POLYPROPYLENE POLYPROPYLENE with RTD PVDF PVDF with RTD PWM0P PWM0PR PWM0T PWM0TR PWM06P PWM06PR PWM06T PWM06TR PWM08P PWM08PR PWM08T PWM08TR PWM10P PWM10PR PWM10T PWM10TR TABLE 35 - SPECIFICATIONS ACCURACY MAX TEMPERATURE MAX PRESSURE POWER OUTPUT SIGNAL DIMENSIONS CABLE ±1% FS. 60 C (10 F). 10 barg (150 psig). 5 to 2 2 ma. NPN ope collector (load 30 ma max). 56H x 108L x 53D [mm] (2.2 x.25 x 2.2") Without RTD ad flow sesors. Flow sigal 1.8 m (6') or optioal 3.7m (12') [ft.] RTD 12 [i.] log cable. RTD Platium TCR, meets EN 60751, Class B. TABLE 37- WETTED MATERIALS POLYPROPYLENE MODELS BODY Polypropylee PVDF LID Acrylic PVDF PADDLE WHEEL PVDF PVDF SHAFT PVDF UNITS MODELS Nickel Tugste Carbide Zircoia Ceramic BEARINGS Sapphire Jewels Sapphire Jewels O-RINGS EPDM PTFE PLATINUM RTD 316 ss casig 316 ss casig ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

71 BULLETIN EM PWE PWE DIGITAL PADDLE WHEEL FLOW METER FOR LIQUIDS ONLY Desig Features PLEASE NOTE: POWER CORD WITH MALE PLUG IS NOT INCLUDED. ORDER SEPARATELY: CAT NO. CBL-PWE Jewel bearigs allow for very low miimum flow rates. Multiparameter: flow ad optioal temperature measuremets. Polypropylee ad chemically resistat PVDF models. Supports up to 29 Egieerig Uits (icludig User Defied). Two programmable Totalizers ad Flow Pulse output (3.3Vdc CMOS). Programmable High/Low Flow ad optioal Temperature Alarms with preset actio delay iterval. Two sets of user-programmable optically isolated outputs. User-selectable (via jumpers) aalog 0-5 Vdc or -20mA flow ad optioal temperature outputs. RS-232 or RS-85 Digital Iterface with Multi-Drop Capability of up to 256 uits (RS-85 optio). Local key pad ad 2x16 characters LCD display with adjustable back light (optioal). Eclosure weather tight to IP65 stadards. Free commuicatio software with temperature ad flow data log-i capability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

72 DIGITAL PADDLE WHEEL FLOW METERS PWE 67 Geeral Descriptio PWE flow meters support various fuctios icludig: two idepedetly programmable flow totalizers, user programmable low, high or rage flow ad temperature alarm, two sets of user programmable optically isolated outputs, self diagostic alarm, flow pulse output. The flow rate ca be displayed i 29 differet volumetric or mass flow egieerig uits. Flow meter parameters ad fuctios ca be programmed locally via optioal key pad ad LCD or remotely via the RS-232/RS-85 iterface. Optioal local 2x16 LCD readout with adjustable back light provides flow rate, temperature, total volume readig i curretly selected egieerig uits, diagostic evets idicatio ad feature a password protected access to the process parameters to esure agaist tamperig or resettig. ( - optioal feature) Priciples of Operatio Liquid flowig through the uit causes the paddle wheel to spi. As the magets embedded i the paddle spi past the sesor, electrical pulses are produced i which frequecy is proportioal to the flow rate. The umber of pulses per desired time iterval ad the K-factor (umber of pulses/gallo) make it is possible to calculate the flow rate ad volume passig through the uit. O board CPU ad sigal coditioer circuitry perform accurate flow ad total computatio, digital commuicatio ad aalog 0-5 Vdc or -20 ma output sigals. No-volatile memory stores all hardware specific ad user programmable variables, icludig flow liearizatio table. Totalizer The total volume of the liquid is calculated by itegratig the actual liquid flow rate with respect to time. The optioal LCD/keypad ad digital iterface commads are provided to: set the totalizer to ZERO start the totalizer at a preset flow assig actio at a preset total volume start/stop totalizig the flow read totalizer Totalizer coditios become true, whe the totalizer readig ad the Stop at Total volumes are equal. Mai Totalizer readig is stored i the o volatile memory (EEPROM). The pilot Totalizer readig is stored i volatile memory (SRAM) ad will be lost if flow meter is powered dow. Egieerig Uits The measured flow ad associated totalizer data are scaled directly i egieerig uits via the digital iterface. THE FOLLOWING 29 UNITS OF MEASURE ARE SUPPORTED: TABLE 38 - UNITS OF MEASURE NUMBER - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada INDEX FLOW RATE ENGINEERING UNITS TOTALIZER ENGINEERING UNITS DESCRIPTION 1 0 % %s percet of full scale 2 1 ml/s ml milliliter per secod 3 2 ml/mi ml milliliter per miute 3 ml/h ml milliliter per hour 5 l/s ltr liter per secod 6 5 l/mi ltr liter per miute 7 6 l/h ltr liter per hour 8 7 m 3 /s m 3 cubic meter per secod 9 8 m 3 /mi m 3 cubic meter per miute 10 9 m 3 /h m 3 cubic meter per hour ft 3 /s ft 3 cubic feet per secod ft 3 /mi ft 3 cubic feet per miute ft 3 /h ft 3 cubic feet per hour 1 13 gal/s gal gal per secod 15 1 gal/mi gal gal per miute gal/h gal gal per hour g/s g grams per secod g/mi g grams per miute g/h g grams per hour kg/s kg kilograms per secod kg/mi kg kilograms per miute kg/h kg kilograms per hour lb/s lb pouds per secod 2 23 lb/mi lb pouds per miute 25 2 lb/h lb pouds per hour t/s to to (metric) per sec t/mi to to (metric) per miute t/h to to (metric) per hour User UD user defied BULLETIN EM PWE

73 BULLETIN EM PWE PWE DIGITAL PADDLE WHEEL FLOW METERS Flow ad Temperature Alarms High ad Low flow ALARM limits ca be preprogrammed via digital iterface or optioal LCD/Keypad. ALARM coditios become true whe the curret readig is equal or higher/lower tha correspodig values of high ad low alarm levels. Alarm actio ca be assiged with preset delay iterval (0-3600secods) to activate the optically isolated output (separate for High ad Low alarm). Latch Mode cotrol feature allows each optical output to be latched o or follow the correspodig alarm status. ( - optioal feature) Optically Isolated Outputs Two sets of optically isolated outputs are provided to actuate user supplied equipmet. These are programmable via digital iterface or optioal LCD/Keypad such that the outputs ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value) or may be directly cotrolled by user. TABLE 39 - FLOW RATE FOR PWE METER SIZES MAXIMUM FLOW RATE H 2 0 INLET/OUTLET PRESSURE DROP PORTS FEMALE [L/mi] [gal/mi] NPT Bar PSI PWE /8" 1 15 PWE /2" PWE /" PWE " TABLE 0 - WETTED MATERIALS POLYPROPYLENE MODELS BODY Polypropylee PVDF LID Acrylic PVDF PADDLE WHEEL PVDF PVDF PVDF MODELS SHAFT Nickel Tugste Carbide Zircoia Ceramic BEARINGS Sapphire Jewels Sapphire Jewels O-RINGS EPDM PTFE PLATINUM RTD 316 stailess steel casig 316 stailess steel casig TABLE 1 - DIGITAL PADDLE WHEEL FLOW METER ACCESSORIES MODEL NO. CBL-PWE PS-PWE-110NA-2 PS-PWE-230EU-2 PS-PWE-20AU-2 PS-PWE-20UK-2 DESCRIPTION Cable 12 Pis stripped ed 6 foot shielded Power Supply PWE 110 Vac North America Plug Power Supply PWE 230 Vac Cotietal Plug Power Supply PWE 20 Vac Australia Plug Power Supply PWE 20 Vac UK Plug TABLE 2 - DIGITAL PADDLE WHEEL METER FEATURES FOR POLYPROPYLENE MODELS NO KEY PAD & LCD - NO RTD WITH RTD - NO KEY PAD & LCD KEY PAD & LCD - NO RTD KEYPAD & LCD - RTD PWE0P(*)NN PWE0P(*)NR PWE0P(*)LN PWE0P(*)LR PWE06P(*)NN PWE06P(*)NR PWE06P(*)LN PWE06P(*)LR PWE08P(*)NN PWE08P(*)NR PWE08P(*)LN PWE08P(*)LR PWE10P(*)NN PWE10P(*)NR PWE10P(*)LN PWE10P(*)LR TABLE 3 - DIGITAL PADDLE WHEEL METER FEATURES FOR PVDF MODELS NO KEY PAD & LCD - NO RTD WITH RTD - NO KEY PAD & LCD KEY PAD & LCD - NO RTD KEYPAD & LCD - RTD PWE0T(*)NN PWE0T(*)NR PWE0T(*)LN PWE0T(*)LR PWE06T(*)NN PWE06T(*)NR PWE06T(*)LN PWE06T(*)LR PWE08T(*)NN PWE08T(*)NR PWE08T(*)LN PWE08T(*)LR PWE10T(*)NN PWE10T(*)NR PWE10T(*)LN PWE10T(*)LR (*) FOR COMPLETE MODEL NUMBERS SEE PAGE ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

74 DIGITAL PADDLE WHEEL FLOW METERS PWE TABLE - SPECIFICATIONS FOR PWE FLOW MEDIUM: CALIBRATIONS: VISCOSITY: ENVIRONMENTAL (PER IEC 66): FLOW ACCURACY (INCLUDING LINEARITY): REPEATABILITY: LIQUID TEMPERATURE MEASUREMENT RANGE : TEMPERATURE ACCURACY (INCLUDING LINEARITY) : FLOW RESPONSE TIME: MAXIMUM PRESSURE: MAXIMUM PRESSURE DROP: AMBIENT TEMPERATURE RANGE: OUTPUT SIGNALS: FLOW PULSE OUTPUT: Please ote that PWE Flow Meters are desiged to work oly with liquids. Never try to measure flow rates of dry gas. Performed at stadard coditios [1.7 psia (101. kpa) ad 70 F (21.1 C)] uless otherwise requested or stated. Calibrated to 1 cst (water) meters with display ca be used for liquids up to 50 cst with field calibratio (maximum flow rage may be affected). Istallatio Level II; Pollutio Degree II. ±1% of FS. ±0.25% of full scale. 3 F to 10 F (1 C to 60 C). ±0.5 C. Approximately 1 secods (above 10% of full scale flow), approximately 2 secods (below 10% of full scale flow). 10 barg (150 psig). 1. bar (20 psi) at L/mi flow. See table 3 for pressure drops associated with various models ad flow rates. 1 F to 10 F (-10 C to 60 C). Liear 0-5 Vdc (3000 ohms mi load impedace); Liear -20 ma (500 ohms maximum loop resistace). Maximum oise 20mV peak to peak (for 0-5 Vdc output). 3.3 Vdc amplitude (3000 ohms mi load impedace). OPTICALLY ISOLATED OUTPUTS: UCE 0Vdc, ICE 150 ma. FLOW METER INPUT POWER: 11 to 26 Vdc, 100 mv maximum peak to peak output oise. Power cosumptio: +12Vdc (150 ma maximum); +2Vdc (100 ma maximum); COMMUNICATIONS PARAMETERS (RS-232/RS-85): ELECTRICAL CONNECTIONS: DISPLAY : KEY PAD : Circuit board have built-i polarity reversal protectio, 300mA resettable fuse provide power iput protectio. Baud rate: baud. Stop bit: Data bits: Parity:... Noe. Flow Cotrol:... Noe. Built-i female 12 pi M16, IP67 coector. To be mated with 12 pi M16 male EMI shielded IP67 coector. (Bider-USA P/N: ) ot icluded. Optioal cable available. Cable icludig male coector available. Optioal local 2x16 characters LCD with adjustable backlight (2 lies of text). Optioal push butto key pad. CE COMPLIANT: EMC Compliace with 89/336/EEC as ameded. Emissio Stadard: EN 55011:1991, Group 1, Class A Immuity Stadard: EN :1992 ( - optioal feature) ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM PWE

75 BULLETIN EM PWE PWE ORDERING INFORMATION FOR DIGITAL PADDLE WHEEL METER PWE MODEL ORIFICE SIZE (Maximum Flow Rage) 0 5 gal / mi ( L/mi) gal / mi ( L/mi) gal / mi ( L/mi) gal / mi ( L/mi) MATERIAL LOWER BLOCK P Polypropylee T PVDF SEALS E EPDM T PTFE B Bua V Vito DISPLAY / KEYPAD N No Display / No Key Pad L LCD / Key Pad RTD OPTION N No RTD R RTD OUTPUT SIGNAL A 0-5 VDC B -20 ma DIGITAL INTERFACE 2 RS RS-85 PWE 0 P E L N A 2 EXAMPLE: PWE0P-ELN-A2 Digital Paddle Wheel Meter, Maximum Flow 5 Gal. per miute, Polypropylee Lower Block, EPDM Seals, LCD Key Pad, No RTD, 0-5 Output Sigal with RS-232 Digital Iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

76 Desig Features VORTEX IN-LINE FLOW METERS For Multi-Parameter Meters see mvx Priciples of Operatio VX No movig parts to wear or fail. Electroics ca be remotely mouted up to 30.5 m (100 ft). No fluid to sesor cotact. No holes to clog. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy. High flow turdow ratio up to 10:1. Dual sigal processig techology improves accuracy at low flows. Accuracy of + 1% of rate. Noise cacellatio techology. Extesive Diagostics. Password protected data etry. Volumetric ad mass flow iformatio simultaeously displayed. Selectable egieerig uits. O board computer calculates desity ad mass flow. Two programmable totalizers. Vortex I-lie Flow Meter Show with Wafer Moutig Vortices are created whe a fluid passes aroud a bluff body as show i Figure 1. Vortices are alterately shed o each side of the body, 180 degrees out of phase to each other, resultig i a oscillatig pressure gradiet. As flow icreases the frequecy of vortices icreases i proportio to the icreased flow thereby creatig a liear relatioship. Geeral Descriptio Costructed of type 316 stailess steel, wafers may be istalled i-lie by customer provided or built-i flages. Key pad or commuicatio iterface fuctioalities iclude measurig uits, programmable flow alarm, two programmable totalizers, programmable flow rate pulse output, two programmable optically isolated outputs, battery backed real time clock (RTC), digital commuicatio iterface (RS-232 or RS-85), programmable diagostic evets log ad register with date ad time stamp, programmable process variable log with date stamp, calibratio ad flowig fluid parameters adjustmet, extesive diagostics. Our exclusive dual sigal processig techology idepedetly measures each vortex o either side of the bluff body ad filters out o-flow oise. This results i less oise ad higher accuracy throughout the flow rage. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy, improvig the quality of flow measuremets. Local 2x16 LCD readout provides flow rate ad total flow volume readig i selectable egieerig uits, diagostic evets idicatio ad feature a password protected access to the process parameters to esure agaist tamperig or resettig. 71 Vortex I-lie Flow Meter Show with Flage Moutig TABLE 5 - FUNCTIONAL SPECIFICATIONS FLUID TYPES MAXIMUM PRESSURE FLUID TEMPERATURE Steam, Gas, Liquid. 69 bar (1000 psig) with wafer mout See Table 51 for flage mout. -20 F to 232 F C std./to 260 F C opt. (- F to 50 F F std./to 500 F F opt). LOW FLOW CUT-OFF Adjustable: mi. per Tables 6 to 50. HIGH FLOW CUT-OFF Adjustable: max. per Tables 6 to 50. VOLTAGE FREQUENCY OUTPUTS 15 to 30 VDC stadard. 115 or 230 VAC optioal. 50 /60 Hz. Two user programmable aalog -20 ma outputs (600 Ohms or less load), two sets of user-programmable optically isolated outputs, oe user programmable optically isolated flow pulse output, RS-232 or RS-85 Digital Iterface with Multi-Drop Capability of up to 255 uits (RS-85 optio). LINEAR RANGE Reyolds umber of >10, ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM VX

77 BULLETIN EM VX VX VORTEX IN-LINE FLOW METERS Figure 1 TABLE 6 - PERFORMANCE SPECIFICATIONS FLOW ACCURACY FLOW REPEATABILITY + 1% of rate % of rate. FLOW TURNDOWN RATIO See Tables 5 to 50. RESPONSE TIME Adjustable based o NRF ad Dampig settigs (miimum 1000 ms). DAMPING Adjustable: 1 to 99 sec. VELOCITY RANGE Liq.: 1.32 or 10000µ to 30 ft/sec. ñd 12 Steam & Gas: (1/ñ)1/3 to 250 ft/sec. ñ= desity (lb/ft3). d= pipe diameter (i). µ= viscosity (cp). AGENCY APPROVALS* TABLE 7 - PHYSICAL SPECIFICATION **MATERIALS OF CONSTRUCTION SHEDDER BAR ELECTRODES METERING TUBE FLANGES ELECTRONICS HOUSING FM ad CSA Class 1 Div 2 Groups B,C,D. 316 SS. 316 SS ecapsulated ceramic. 316 SS. 316L SS. Epoxy coated alumium. TABLE 8 - ELECTRONIC SPECIFICATIONS AMBIENT TEMPERATURE TRANSMITTER DISPLAY FUNCTIONS OUTPUT SIGNAL ENCLOSURE PROTECTION ENCLOSURE APPROVALS POWER SUPPLY -12 F to 65 F C (-15 F to 19 F F). Microprocessor-based. Two lies, 16 alphaumeric characters each, programmable for differet process variable rate ad total. Measurig Uits, Programmable Flow Alarm, Two Programmable Totalizers, Programmable Flow Rate Pulse Output, Two Programmable Optically Isolated Outputs, Two Programmable aalog -20 ma outputs, Battery Backed Real Time Clock [RTC], Digital commuicatio iter face (RS-232 or RS-85), Programmable Diagostic evets Log ad register with date ad time stamp, Programmable Process Variable Data Log (total records) with date ad time stamp, Calibratio ad Flowig Fluid parameters adjustmet, Extesive Diagostic. Two programmable aalog -20 ma ito 600 Ohms or less load, two programmable digital optically isolated 0Vdc, 150 ma), oe programmable optically isolated flow pulse output 60Vdc, 50 ma). NEMA X. UL, CSA, FM Class I Groups B, C, D Class II Groups E, F, G KEMA/CENELEC EEx d IIB VDC stadard 115 or 230 VAC (optioal). CONNECTIONS AND MOUNTINGS MOUNTING POSITION TYPICAL STRAIGHT PIPE REQUIREMENTS TEMPERATURE TAP (BY CUSTOMER) PRESSURE TAP (BY CUSTOMER) PROCESS CONNECTIONS ELECTRICAL CONNECT Vertical, horizotal, agle. Upstream: 20 x D. Dowstream: 5 x D. Dowstream: 3.5 x D. Upstream: 3.5 x D. ANSI Class 150 RF, 300 RF, 600 RF, Wafer. 3/" FNPT. * Desiged to meet. Cotact Aalborg for status of the agecy approval. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

78 VORTEX IN-LINE FLOW METERS VX Flow Rages Miimum ad maximum flow rates to achieve accuracy i gal/mi, L/mi. Pipe ID based o schedule 80 steel. TABLE 9 - WATER FLOW RATES AT 60 F F SIZE (INCH) 3/" 1" 1.5" 2" 3" " mi max mi max mi max mi max mi max mi max gal/mi L/mi Miimum ad maximum flow rates to achieve accuracy lb/hr. Pipe ID based o schedule 80 steel. TABLE 50 - SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) SIZE (INCH) 3/" 1" 1.5" 2" 3" " PRESSURE (psig) mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM VX

79 BULLETIN EM VX VX VORTEX IN-LINE FLOW METERS Miimum ad maximum flow rates to achieve accuracy i (kg/hr) Pipe ID based o schedule 80 steel. TABLE 51 - SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Metric) Size (mm) Pressure (bara) mi max mi max mi max mi max mi max mi max Miimum ad maximum flow rates to achieve accuracy i CFPM (1.7 psia 70 F F) CFM at actual process temperature = mi. or max values below *530/ (Actual Temp. ( F F) + 60) Pipe ID based o schedule 80 steel. Flow Temp. 70 F F. TABLE 52 - AIR FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) Size (ich) 3/" 1" 1.5" 2" 3" " Desity (lb/ft3) Pressure (psig) mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

80 VORTEX IN-LINE FLOW METERS VX Miimum ad maximum flow rates to achieve accuracy i M 3 /mi ( F C, bar). M 3 /mi at actual process temperature = miimum or maximum values below x 273 (actual temp ( F C) + 273). Pipe ID based o schedule 80 steel. Flow Temp 0 F C. TABLE 53 - AIR FLOW RATES AT SELECTED PROCESS PRESSURES (Metric) Size (mm) Desity (kg/m3) Pressure (barg) mi max mi max mi max mi max mi max mi max Ambiet Temperature Rage for Electroics ANSI Flage Pressure - Temperature Ratigs. Maximum Pressure i psig. TABLE 5 - FLOW METER PRESSURE RATING TEMP. F F MATERIAL -100 to L SS 150# RF L SS 300# RF L SS 600# RF BULLETIN EM VX ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

81 BULLETIN EM VX VX VORTEX IN-LINE FLOW METERS TABLE 55 Flage Moutig Meter Size Flage Ratig Bolt diameter Bolts I.D. O.D. W H i. psi i. o. i. i. i. i. 3/ /2 5/8 5/8 7/8 1/2 5/8 5/8 1 1/2 3/ 3/7 1-1/8 5/8 5/8 5/8 1 5/8 3/ 3/ 1 5/8 3/ 7/8 1-1/ Wafer Moutig TABLE 56 Meter Size Flage Ratig Bolt diameter Bolts I.D. O.D. W H i. psi i. o. i. i. i. i. 3/ /2 5/8 5/ /2 5/8 5/ /2 3/ 3/ /8 5/8 5/ /8 3/ 3/ /8 3/ 7/ ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

82 ORDERING INFORMATION VORTEX IN-LINE FLOW METERS VX MODEL VX STYLE U Wafer - SCH 0 W Wafer - SCH 80 E Flage - SCH 0 F Flage - SCH 80 SIZE: WAFER or FLANGE 07 3/" (20mm) " (25mm) " (0mm) " (50mm) " (80mm) 0.0" (100mm) FLUID TYPE G Gas L Liquid S Steam To allow us to cofirm selectio please retur completed applicatio data sheet foud o Aalborg's web site at 1. Select style (wafer or flage). 2. Select meter size to match iteral pipe diameter 3. Cofirm miimum ad maximum flow rages to maitai stated accuracy from liquid, steam, or air from Tables 6 to 8 are withi your requiremets.. For other gas applicatios cosult factory. 5. Select fluid type. 6. Select maximum temperature capability. 7. Select desired **Material of Costructio. 8. Select moutig coectio. 9. Cofirm maximum pressure capability of flage/meter ratig with process coditios ad select flage ratig from Table Cofirm suitability of stadard local mouted electroics. 11. Select desired trasmitter power. 12. Provide: Fluid, Fluid Viscosity, Miimum & Maximum Operatig Pressure, Miimum & Maximum Operatig Temperature, Desity/Specific Gravity or Specific Volume. 13. Provide miimum ad maximum flow rage. Optios: Remote mout electroics up to 100 ft. (30.5 m). MAX TEMP. 50 F F MATERIAL SS = Wafer ad Flage Style for Aligmet Rig Selectio. ** = The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. MOUNTING CONNECTION A Wafer. Usig Customer Flages B Flage Moutig F Other FLANGE RATING A 150# ANSI RF (Aligmet Rigs Not Required for Wafer Style) B 300# ANSI RF (Wafer Style Icludes Aligmet Rigs) C 600# ANSI RF (Wafer Style Icludes Aligmet Rigs) D OTHER N NONE 77 VX W 10 L 6 A B L2 22 DISPLAY L2 Local with RS232 R2 Remote with RS232 L Local with RS85 R Remote with RS25 POWER 0 2VDC VAC VAC EXAMPLE: VXW-10L-AB-L222 SPECIFY: FLUID NAME or MEASURING DENSITY, FLOW RATE, TEMPERATURE ad PRESSURE (STEAM, GASES). Vortex meter, Wafer style, 10" diameter size, Liquid at maximum 50 F, 316 stailess steel, Customer flages, Flage 300# ANSI RF, Local display with RS232, 220V power ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM VX

83 BULLETIN EM VX mvx VORTEX MULTI-PARAMETER IN-LINE FLOW METERS Desig Features Temperature, pressure, desity, volumetric ad mass flow measuremets. No movig parts to wear or fail. Electroics ca be remotely mouted up to 30.5 m (100 ft). No fluid to sesor cotact. No holes to clog. High flow turdow ratio up to 10:1. Dual sigal processig techology improves accuracy at low flows. Accuracy of + 1% of rate. Noise cacellatio techology. Built i platium RTD ad solid state pressure sesor. O board computer calculates desity, volumetric ad mass flow. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy. Extesive Diagostics log with date ad time register. Password protected data etry. Volumetric ad mass flow iformatio simultaeously displayed. Selectable egieerig uits. Two programmable totalizers. Digital commuicatio iterface: RS-232 or RS-85. Priciples of Operatio Vortices are created whe a fluid passes aroud a bluff body as show i Figure 1. Vortices are alterately shed o each side of the body, 180 degrees out of phase to each other, resultig i a oscillatig pressure gradiet. As flow icreases the frequecy of vortices icreases i proportio to the icreased flow thereby creatig a liear relatioship. Geeral Descriptio Costructed of type 316 stailess steel, wafers may be istalled ilie by customer provided or built-i flages. Key pad or commuicatio iterface fuctioalities iclude measurig uits, programmable flow alarm, two programmable totalizers, programmable flow rate pulse output, two programmable optically isolated outputs, battery backed real time clock (RTC), digital commuicatio iterface (RS- 232 or RS-85), programmable diagostic evets log ad register with date ad time stamp, programmable process variable log with date stamp, calibratio ad flowig fluid parameters adjustmet, extesive diagostics. Our exclusive dual sigal processig techology idepedetly measures each vortex o either side of the bluff body ad filters out o-flow oise. This results i less oise ad higher accuracy throughout the flow rage. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy, improvig the quality of flow measuremets. Local 2x16 LCD readout provides flow rate ad total flow volume readig i selectable egieerig uits, diagostic evets idicatio ad feature a password protected access to the process parameters to esure agaist tamperig or resettig. Vortex I-lie Flow Meter Show with Wafer Moutig Vortex I-lie Flow Meter Show with Flage Moutig TABLE 57 - FUNCTIONAL SPECIFICATIONS FLUID TYPES MAXIMUM PRESSURE FLUID TEMPERATURE Steam, Gas, Liquid. 69 bar (1000 psig) with wafer mout See Table 63 for flage mout. -20 F to 232 F C std./to 260 F C opt. (- F to 50 F F std./to 500 F F opt). LOW FLOW CUT-OFF Adjustable: mi. per Tables 58 to 62. HIGH FLOW CUT-OFF Adjustable: max. per Tables 58 to 62. VOLTAGE 15 to 30 VDC stadard. 115 or 230 VAC optioal. FREQUENCY OUTPUTS 50 /60 Hz. Two user programmable aalog -20 ma outputs (600 Ohms or less load). Each ca be assiged to oe of the followig process variables: volumetric flow, mass flow, temperature or pressure. Two sets of user programmable digital optically isolat ed outputs to actuate user supplied equipmet whe various diagostic or system evets occurs. Oe user programmable optically isolated flow pulse output, RS-232 or RS-85 Digital Iterface with Multi-Drop Capability of up to 255 uits (RS-85 optio). LINEAR RANGE Reyolds umber of >10, ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

84 BULLETIN EM VX VORTEX MULTI-PARAMETER IN-LINE FLOW METERS mvx TABLE 58 - PERFORMANCE SPECIFICATIONS FLOW ACCURACY + 1% of rate. FLOW REPEATABILITY % of rate. FLOW TURNDOWN RATIO See Tables 58 to 62. Figure 1 RESPONSE TIME TABLE 59 - PHYSICAL SPECIFICATION **MATERIALS OF CONSTRUCTION SHEDDER BAR 316 SS. ELECTRODES 316 SS ecapsulated ceramic. METERING TUBE 316 SS. FLANGES 316 SS. ELECTRONICS HOUSING Epoxy coated alumium. CONNECTIONS AND MOUNTINGS MOUNTING POSITION Vertical, horizotal, agle. TYPICAL STRAIGHT PIPE REQUIREMENTS Upstream: 20 x D. Dowstream: 5 x D. PROCESS CONNECTIONS ANSI Class 150 RF, 300 RF, 600 RF, Wafer. ELECTRICAL CONNECT 3/" FNPT. Adjustable based o NRF ad Dampig settigs (miimum 1000 ms). DAMPING Adjustable: 1 to 99 sec. VELOCITY RANGE Liq.: 1.32 or 10000µ to 30 ft/sec. ñd 12 Steam & Gas: (1/ñ)1/3 to 250 ft/sec. ñ= desity (lb/ft3). d= pipe diameter (i). µ= viscosity (cp). AGENCY APPROVALS* FLUID TEMPERATURE MEASUREMENT RANGE TEMPERATURE ACCURACY (INCLUDING LINEARITY) FLUID PRESSURE MEASUREMENT RANGE PRESSURE ACCURACY (INCLUDING LINEARITY) FLUID PROOF PRESSURE FLUID BURST PRESSURE FM ad CSA Class 1 Div 2 Groups B,C,D. 20 to 260 F C (- to 500 F F) F C Ca be ordered for the followig optios: PSIA PSIA PSIA PSIA PSIA PSIA % of full scale. 3 X F.S. 10 X F.S. TABLE 60 - ELECTRONIC SPECIFICATIONS AMBIENT TEMPERATURE TRANSMITTER DISPLAY FUNCTIONS OUTPUT SIGNAL ENCLOSURE PROTECTION ENCLOSURE APPROVALS POWER SUPPLY -12 F to 65 F C (-15 F to 19 F F). Microprocessor-based. Two lies, 16 alphaumeric characters each, programmable for differet process variable rate ad total. Measurig Uits, Programmable Flow, Temperature ad Pressure Alarms, Two Programmable Totalizers, Programmable Flow Rate Pulse Output, Two Programmable Optically Isolated Outputs, Two Programmable aalog -20 ma outputs, Battery Backed Real Time Clock [RTC], Digital commuicatio iterface (RS-232 or RS-85), Programmable Diagostic evets Log ad register with date ad time stamp, Programmable Process Variable Data Log (total records) with date ad time stamp, Calibratio ad Flowig Fluid parameters adjustmet, Extesive Diagostic. Two programmable aalog -20 ma ito 600 Ohms or less load, two programmable digital optically isolated 0Vdc, 150 ma), oe programmable optically isolated flow pulse output 60Vdc, 50 ma). NEMA X. UL, CSA, FM Class I Groups B, C, D Class II Groups E, F, G KEMA/CENELEC EEx d IIB VDC stadard 115 or 230 VAC (optioal). * Desiged to meet. Cotact Aalborg for status of the agecy approval. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

85 BULLETIN EM VX mvx VORTEX MULTI-PARAMETER IN-LINE FLOW METERS Flow Rages Miimum ad maximum flow rates to achieve accuracy i gal/mi, L/mi. Pipe ID based o schedule 80 steel. TABLE 61 - WATER FLOW RATES AT 60 F F SIZE (INCH) 3/" 1" 1.5" 2" 3" " mi max mi max mi max mi max mi max mi max gal/mi L/mi Miimum ad maximum flow rates to achieve accuracy lb/hr. Pipe ID based o schedule 80 steel. TABLE 62- SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) SIZE (INCH) 3/" 1" 1.5" 2" 3" " PRESSURE (psig) mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

86 BULLETIN EM VX VORTEX MULTI-PARAMETER IN-LINE FLOW METERS mvx Miimum ad maximum flow rates to achieve accuracy i (kg/hr) Pipe ID based o schedule 80 steel. TABLE 63 - SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Metric) Size (mm) Pressure (bara) mi max mi max mi max mi max mi max mi max Miimum ad maximum flow rates to achieve accuracy i CFPM (1.7 psia 70 F F) CFM at actual process temperature = mi. or max values below *530/ (Actual Temp. ( F F) + 60) Pipe ID based o schedule 80 steel. Flow Temp. 70 F F. TABLE 6 - AIR FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) Size (ich) 3/" 1" 1.5" 2" 3" " Desity (lb/ft3) Pressure (psig) mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

87 mvx VORTEX MULTI-PARAMETER IN-LINE FLOW METERS Miimum ad maximum flow rates to achieve accuracy i M 3 /mi ( F C, bar). M 3 /mi at actual process temperature = miimum or maximum values below x 273 (actual temp ( F C) + 273). Pipe ID based o schedule 80 steel. Flow Temp 0 F C. TABLE 65 - AIR FLOW RATES AT SELECTED PROCESS PRESSURES (Metric) Size (mm) Desity (kg/m3) Pressure (barg) mi max mi max mi max mi max mi max mi max Ambiet Temperature Rage for Electroics ANSI Flage Pressure - Temperature Ratigs. Maximum Pressure i psig. BULLETIN EM VX TABLE 66 - FLOW METER PRESSURE RATING TEMP. F F MATERIAL -100 to L SS 150# RF L SS 300# RF L SS 600# RF ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

88 BULLETIN EM VX VORTEX MULTI-PARAMETER IN-LINE FLOW METERS mvx TABLE 67 Flage Moutig Meter Size Flage Ratig Bolt diameter Bolts I.D. O.D. W H i. psi i. o. i. i. i. i. 3/ /2 5/8 5/8 7/8 1/2 5/8 5/8 1 1/2 3/ 3/7 1-1/8 5/8 5/8 5/8 1 5/8 3/ 3/ 1 5/8 3/ 7/8 1-1/ FOR DIMENSIONS CONTACT AALBORG CUSTOMER SERVICE DEPARTMENT Wafer Moutig TABLE 68 Meter Size Flage Ratig Bolt diameter Bolts I.D. O.D. W H i. psi i. o. i. i. i. i. 3/ /2 5/8 5/8 1/2 5/8 5/8 1/2 3/ 3/ 5/8 5/8 5/8 5/8 3/ 3/ 5/8 3/ 7/ FOR DIMENSIONS CONTACT AALBORG CUSTOMER SERVICE DEPARTMENT ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

89 mvx ORDERING INFORMATION VORTEX MULTI-PARAMETER IN-LINE FLOW METERS BULLETIN EM VX MODEL VX STYLE S T C D Wafer - SCH 0 Pressure, Temperature Wafer - SCH 80 Pressure, Temperature Flage - SCH 0 Pressure, Temperature Flage - SCH 80 Pressure, Temperature SIZE: WAFER or FLANGE 07 3/" (20mm) " (25mm) " (0mm) " (50mm) " (80mm) 0.0" (100mm) FLUID TYPE G Gas L Liquid S Steam MAX TEMP. / PRESSURE A 50 F F / 100 PSIA B 50 F F / 200 PSIA C 50 F F / 300 PSIA D 50 F F / 500 PSIA E 50 F F / 750 PSIA F 50 F F / 1000 PSIA G 500 F F / 100 PSIA H 500 F F / 200 PSIA J 500 F F / 300 PSIA K 500 F F / 500 PSIA L 500 F F / 750 PSIA M 500 F F / 1000 PSIA To allow us to cofirm selectio please retur completed applicatio data sheet foud o Aalborg's web site at 1. Select style (wafer or flage). 2. Select meter size to match iteral pipe diameter 3. Cofirm miimum ad maximum flow rages to maitai stated accuracy from liquid, steam, or air from Tables 58 to 62 are withi your requiremets.. For other gas applicatios cosult factory. 5. Select fluid type. 6. Select maximum temperature capability. 7. Select desired **Material of Costructio. 8. Select moutig coectio. 9. Cofirm maximum pressure capability of flage/meter ratig with process coditios ad select flage ratig from Table Cofirm suitability of stadard local mouted electroics. 11. Select desired trasmitter power. 12. Provide: Fluid, Fluid Viscosity, Miimum & Maximum Operatig Pressure, Miimum & Maximum Operatig Temperature, Desity/Specific Gravity or Specific Volume. 13. Provide miimum ad maximum flow rage. = Flage ad Wafer Style for Aligmet Rig Selectio. ** = The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. MATERIAL SS MOUNTING CONNECTION A Wafer. Usig Customer Flages. B Flage Moutig. F Other. FLANGE RATING A 150# ANSI RF (Aligmet Rigs Not Required for Wafer Style) B 300# ANSI RF (Wafer Style Icludes Aligmet Rigs) C 600# ANSI RF (Wafer Style Icludes Aligmet Rigs) D OTHER N NONE DISPLAY L2 Local with RS232 L Local with RS85 POWER 0 2VDC VAC VAC VX D 10 L F 6 A B L2 22 EXAMPLE: VXD-10L-6AB-L222 SPECIFY: FLUID NAME or MEASURING DENSITY, FLOW RATE, TEMPERATURE ad PRESSURE (STEAM, GASES). Vortex meter, Flage style, 1.0" diameter size, Liquid at maximum 50 F, 1000 PSIA, 316 stailess steel, Customer flages, Flage 300# ANSI RF, Local display with RS232, 220V power ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

90 VORTEX INSERTION FLOW METERS ivx Desig Features Priciples of Operatio 85 Wide rage of available isertio iside diameter applicatios. Istallatio by portig ito pipig without eed to legtheig lie. Optioal istallatio ad servicig removal of meter without shuttig off lie. No movig parts to wear or fail Electroics ca be remotely mouted up to 30.5 m (100 ft). No holes to clog. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy. High flow turdow ratio up to 10:1. Dual sesor sigal processig techology improves accuracy at low flows. Accuracy of + 1% of rate. Noise cacellatio techology. Extesive Diagostics. Password protected data etry. Volumetric ad mass flow iformatio simultaeously displayed. Selectable egieerig uits. O board computer calculates desity ad mass flow. Two programmable totalizers. Vortex Isertio Flow Meter Show with Fixed Moutig Vortex Isertio Flow Meter Show with Retractable Moutig Vortices are created whe a fluid passes aroud a bluff body as show i Figure 1. Vortices are alterately shed o each side of the body, 180 degrees out of phase to each other, resultig i a oscillatig pressure gradiet. As flow icreases the frequecy of vortices icreases i proportio to the icreased flow thereby creatig a liear relatioship. Geeral Descriptio Costructed of type 316 stailess steel, Vortex meters may be iserted ito pipe coduits carryig gases, liquids or steam. Isertio applicatios facilitate iside diameters from " to 12 feet! By portig directly ito pipig, coduit lies eed ot be legtheed. Optioal isolatio valve permits istallatio, servicig, or removal of vortex meters without havig to shut gas, liquid or steam processig operatios. Key pad or commuicatio iterface is provided to access the followig parameters: measurig uits; programmable flow alarm; two programmable totalizers; programmable flow rate pulse output; two programmable optically isolated outputs; battery backed real time clock (RTC); digital commuicatio iterface (RS-232 or RS-85); programmable diagostic evets log ad register with date/time stamp; programmable process variable log with date/time stamp; calibratio ad flowig fluid parameters adjustmet; extesive diagostics. Our exclusive dual sigal processig techology idepedetly measures each vortex o either side of the bluff body ad filters out o-flow oise. This results i less oise ad higher accuracy throughout the flow rage. Aalborg s proprietary DSP algorithm accurately filters vortex frequecy, improvig the quality of flow measuremets. User preset temperature ad pressure iformatio processed by a o board computer to calculate desity ad mass flow. Local 2x16 LCD readout provides simultaeous volumetric ad mass flow readigs, total flow volume readig i selectable egieerig uits, diagostic evets idicatio, ad password protected - user etered parameters ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM VX

91 BULLETIN EM VX ivx VORTEX INSERTION FLOW METERS TABLE 69 - FUNCTIONAL SPECIFICATIONS FLUID TYPES MAXIMUM PRESSURE FLUID TEMPERATURE LOW FLOW CUT-OFF HIGH FLOW CUT-OFF VOLTAGE FREQUENCY OUTPUTS *Desiged to meet. Cotact Aalborg for status of the agecy approval. TABLE 70 - PHYSICAL SPECIFICATIONS **MATERIALS OF CONSTRUCTION SHEDDER BAR ELECTRODES METERING TUBE FLANGES ELECTRONICS HOUSING 316 SS. 316 SS ecapsulated ceramic. 316 SS. 316L SS. CONNECTIONS AND MOUNTINGS MOUNTING POSITION TYPICAL STRAIGHT PIPE REQUIREMENTS PROCESS CONNECTIONS ELECTRICAL CONNECT Steam, Gas, Liquid. 69 bar (1000 psig) with wafer mout See Table 70 for flage mout. -20 F to 232 F C std./to 260 F C opt. (- F to 50 F F std./to 500 F F opt). Adjustable: mi. per Tables 71 to 7. Adjustable: max. per Tables 71 to to 30 VDC stadard. 115 or 230 VAC optioal. 50 /60 Hz. Two user programmable aalog -20 ma outputs (600 Ohms or less load), two sets of userprogrammable optically isolated outputs, oe user programmable optically isolated flow pulse output, RS-232 or RS-85 Digital Iterface with Multi-Drop Capability of up to 255 uits (RS-85 optio). LINEAR RANGE Reyolds umber of >10,000. Epoxy coated alumium. Vertical, horizotal, agle. Upstream: 20 x D. Dowstream: 5 x D. MNPT, ANSI Class 150 RF, 300 RF, 600 RF, Welded Flage. 3/" FNPT. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. TABLE 71 - PERFORMANCE SPECIFICATIONS FLOW ACCURACY FLOW REPEATABILITY FLOW TURNDOWN RATIO RESPONSE TIME + 1% of rate % of rate. See Tables 71 to 7. Adjustable based o NRF ad Dampig settigs (miimum 1000 ms). DAMPING Adjustable: 1 to 99 sec µ VELOCITY RANGE Liq.: 1.32 or to 30 ft/sec ñd 12 Steam & Gas: (1/ñ)1/3 to 250 ft/sec ñ= desity (lb/ft3) d= pipe diameter (i) µ= viscosity (cp) AGENCY APPROVALS* FM ad CSA Class 1 Div 2 Groups B,C,D. TABLE 72 - ELECTRONIC SPECIFICATIONS AMBIENT TEMPERATURE TRANSMITTER DISPLAY FUNCTIONS OUTPUT SIGNAL ENCLOSURE PROTECTION ENCLOSURE APPROVALS POWER SUPPLY -12 F to 65 F C (-15 F to 19 F F). Microprocessor-based. Two lies, 16 alphaumeric characters each, programmable for differet process variable rate ad total. Measurig Uits, Programmable Flow Alarm, Two Programmable Totalizers, Programmable Flow Rate Pulse Output, Two Programmable Optically Isolated Outputs, Two Programmable aalog -20 ma outputs, Battery Backed Real Time Clock [RTC], Digital commuicatio iterface (RS-232 or RS-85*), Programmable Diagostic evets Log ad register with date ad time stamp, Programmable Process Variable Data Log (total records) with date ad time stamp, Calibratio ad Flowig Fluid parameters adjustmet, Extesive Diagostic. Two programmable aalog -20 ma ito 600 Ohms or less load, two programmable digital optically isolated 0Vdc, 150 ma), oe programmable optically isolated flow pulse out put 60Vdc, 50 ma). NEMA X. UL, CSA, FM Class I Groups B, C, D Class II Groups E, F, G KEMA/CENELEC EEx d IIB VDC stadard, 115 or 230 VAC (optioal) ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

92 VORTEX INSERTION FLOW METERS ivx Ambiet Temperature Rage for Electroics Figure 2 Figure 1 Dual sigal processig techology idepedetly measures each vortex providig icreased accuracy ad turdow. Flow Meter Pressure Ratig ANSI Flage Pressure - Temperature Ratigs. Maximum Pressure i psig. TABLE 73 - FLOW METER PRESSURE RATING MATERIAL TEMP. F F -100 to L SS 150# RF L SS 300# RF L SS 600# RF Flow Rages Miimum ad maximum flow rates to achieve accuracy. Pipe ID based o schedule 0 steel. TABLE 7 - WATER FLOW RATES AT 70 F F " 5" 6" 8" 10" 12" 1" mi max mi max mi max mi max mi max mi max mi max gal/mi L/mi " 18" 20" 2" 30" 36" mi max mi max mi max mi max mi max mi max gal/mi L/mi ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM VX

93 BULLETIN EM VX ivx VORTEX INSERTION FLOW METERS Miimum ad maximum flow rates to achieve accuracy i (lb/hr). Pipe ID based o schedule 0 steel. TABLE 75 - SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) Pressure " 6" 8" 10" 12" 1" 16" 18" 20" (psig) mi max mi max mi max mi max mi max mi max mi max mi max mi max Miimum ad maximum flow rates to achieve accuracy i (kg/hr). Pipe ID based o schedule 0 steel. TABLE 76 - SATURATED STEAM FLOW RATES AT SELECTED PROCESS PRESSURES (Eglish) Pressure 100mm 150mm 200mm 250mm 300mm 350mm 00mm 50mm 500mm (bar abs) mi max mi max mi max mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

94 BULLETIN EM VX VORTEX INSERTION FLOW METERS ivx Miimum ad Maximum Flow Rates to achieve Accuracy i CFPM (1.7 PSIA ad 70 F F). PipeID Based o Schedule 0 Steel. TABLE 77 - AIR FLOW RATES AT 60 F F CONDITIONS Desity (lb/ft3) Pressure (PSIG) " 6" 8" 10" 12" 1" mi max mi max mi max mi max mi max mi max Desity (lb/ft3) Pressure (PSIG) 16" 18" 20" 2" 30" 36" mi max mi max mi max mi max mi max mi max ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

95 BULLETIN EM VX ivx VORTEX INSERTION FLOW METERS Flaged Isertio Meter 1-1/2" MNPT Isertio Meter Note 1 Note 1 1-1/2" Isertio Meter Assembly with Isertio Tool ad Ball Valve 1-1/2" Welded Isertio Meter Note 1 Note 1: Legth depedet o pipe diameter, thickess, ad moutig ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

96 BULLETIN EM VX ORDERING INFORMATION VORTEX INSERTION FLOW METERS ivx MODEL VX STYLE I Isertio SIZE: PIPE I.D. / MAX. INSERTION DEPTH * 12 "-2" / 12" 2 25"-36" / 18" 36 37"-72" / 2" 8 73"-1" / 36" FLUID TYPE G Gas L Liquid S Steam MAX TEMP. 50 F F F F MATERIAL SS To allow us to cofirm selectio please retur completed applicatio data sheet foud o Aalborg's web site at 1. Style Isertio. 2. Select meter size to match iteral pipe diameter (for isertio style select pipe diameter). 3. Cofirm miimum ad maximum flow rages to maitai stated accuracy from liquid, steam, or air from Tables 72 to 75 are withi your requiremets.. For other gas applicatios cosult factory. 5. Select fluid type. 6. Select maximum temperature capability. 7. Select desired **Material of Costructio. 8. Select moutig coectio. 9. Cofirm maximum pressure capability of flage/meter ratig with process coditios ad select flage ratig from Table Cofirm suitability of stadard local mouted electroics. 11. Select desired trasmitter power. 12. Provide: Fluid, Fluid Viscosity, Miimum & Maximum Operatig Pressure, Miimum & Maximum Operatig Temperature, Desity/Specific Gravity or Specific Volume. 13. Provide miimum ad maximum flow rage. Optios: Remote mout electroics up to 100 ft. (30.5 m). = Isertio Style for Aligmet Rig Selectio. * = Depeds o pipe wall thickess ad moutig. ** = The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. MOUNTING CONNECTION C Isertio with Flage. D Isertio. With 1.5 MNPT Thread. E Isertio, Welded. F Other. FLANGE RATING A 150# ANSI RF B 300# ANSI RF C 600# ANSI RF D OTHER N NONE 91 VX I 12 L 5 6 E N L2 22 DISPLAY L2 Local with RS232 R2 Remote with RS232 L Local with RS85 R Remote with RS25 POWER 0 2VDC VAC VAC ACCESSORIES MODEL NO. DESCRIPTION VTX Isertio Tool Log VTX Isertio Tool Short VTX76-F Ball Valve 1.5 NPT 30 SS VTX Ball VLV 1.5 NPTF Broze VTX Ball VLV 1.5 NPTF Carbo Steel EXAMPLE: VXI-12L-5EB-L222 SPECIFY: FLUID NAME or MEASURING DENSITY, FLOW RATE, TEMPERATURE ad PRESSURE (STEAM, GASES). Vortex meter, Isertio style, 10" diameter size, Liquid at maximum 500 F, 316 stailess steel, Isertio Welded Moutig Coectio, Flage 300# ANSI RF, Local display with RS232, 220V power ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

97 PSV LIQUIDS AND GAS FLOW REGULATORS PSV Proportioatig Electromagetic Valves are desiged to respod to variable power iputs to proportioately regulate the flow of liquids ad gases. PSV Proportioatig Electromagetic Valve For added safety PSV valves are ormally closed (NC) whe de-eergized. They ca also serve as ON-OFF valves. For cotrol fuctios see the PSV-D Driver Module. Flow is cotrolled by icreasig or decreasig the voltage applied to the coil. This causes a magetic force which raises the core ad allows gas to flow. PSV valves, costructed of stailess steel are available i five differet sizes coverig flow rages from 3.5 L/mi L/mi air ad 125 ml/mi L/mi H 2 O. Desig Features TABLE 78 - MAX FLOW RATES AND CV VALUES FOR PSV Leak Itegrity 1 x 10-9 ml/sec Rigid metallic costructio Gas ad liquids. Max pressure of 1000 psig (68.9 bars) MODEL NUMBER *MAXIMUM FLOW ORIFICE SIZE Cv [ml/mi] [i] [mm] AIR WATER PSV1S-VA PSV2S-VA PSV3S-VA PSVS-VA PSV5S-VA *Based o 10 psig (690 mbar) differetial pressure. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. Priciple of Operatio A variable stroke electromagetic valve featurig a valve seat desig which permits icreasig or decreasig flow rates of liquids or gases through it i proportio to variable iput power. Regulator Systems Complete flow regulatig systems iclude a PSV electromagetic valve coected to a pulse width modulated PSV-D Driver Module. For details see Driver Module de scriptio. TABLE 79 - SPECIFICATIONS POWER INPUT: 0-30Vdc. MAXIMUM POWER REQUIRED: 00 ma. TYPE OF OPERATION: Normally closed (NC) whe de-eergized. CONNECTIONS: 1/" Compressio fittigs optioal 3/8" (1/8" with PSV1, 2 or 3). BULLETIN EM PSV DIMENSIONS: 3.5" (87.6mm) high x 3.25" (82.6mm) log (icludig compressio fittigs) x 1.00" (25.mm) deep. ** MATERIALS IN FLUID CONTACT: Types 316 ad 16 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. MAXIMUM PRESSURE: 1000 psig (6897 kpa). MAXIMUM DIFFERENTIAL PRESSURE: 50 psid (35 kpa). LEAK INTEGRITY: 1 X 10-9 sml/sec Helium idividually tested. MAXIMUM TEMPERATURE (typical): 17 F F (79 F C) iside, 130 F F (5 F C) outside surface at 2Vdc ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

98 BULLETIN EM PSV LIQUIDS AND GAS FLOW REGULATORS PSV Pressure Drops Across PSV Valves Cross Sectioal View PSV Valve PSI PRESSURE DROP PSV1 PSV2 PSV3 PSV PSV5 Air Flow L/mi Water Flow L/mi PSV Proportioatig Electromagetic Valves ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

99 PSV ORDERING INFORMATION LIQUIDS AND GAS FLOW REGULATORS MODEL PSV SERIES MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS A 1/" Compressio B 1/8" Compressio (1/8" with PSV1, 2 or 3) D 3/8" Compressio X Special PSV S V A EXAMPLE: PSVS-VA PSV stailess steel, Vito seals with 1/" compressio fittigs. BULLETIN EM PSV - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

100 BULLETIN EM PSVD PULSE WIDTH MODULATED DRIVER MODULES PSVD PSV-D Pulse width modulated PSV-D Driver Modules regulate the power supplied to PSV Regulatig valves based o a referece sigal. Set-poit sigals, 0-5 Vdc or -20 ma, iput are employed to cotrol the output pulse width modulated voltage at a fixed frequecy ( 30KHz) ad amplitude. Icomig power to the valve coil is applied ad discotiued for predetermied periods of time by a low loss solid state switchig elemet. As icomig power is applied, eergy i the iductive coils icreases ad whe it is discotiued eergy stored i the coil maitais the magetic flux level required to hold flow at the cotrolled rate. This cycle takes place may thousads of times per secod. The wide rage of power iput features coveietly accommodates 12 to 32 Vdc sources. Pulse Width Modulated Driver Module Show with PSV Valve Dimesios Pulse Width Modulated Driver Module The Auto-Select feature of the Driver Module recogizes the type of referece sigal received ad defaults to 0-5 Vdc if both sigals are provided ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

101 PSVD ORDERING INFORMATION PULSE WIDTH MODULATED DRIVER MODULES V3 V2 v Valve Voltage Volts PSV-D Output vs. Iput Cotrol Sigal 29VDC Output Voltage Jumper selectable output power allows a choice of dc voltage rage for cooler more efficiet operatio, as a fuctio of flow rates. Iteral resettable fuse protects electroics ad rectifier circuits, prevets polarity reversal damage. V1 0 V1 5 22VDC Output Voltage 15VDC Output Voltage CONTROL SIGNAL VOLTS The maximum output voltage supplied to the PSV Valve ca be set or chaged i the field to allow for optimal use of the iput referece sigal to output voltage based o the specific flow rate ad operatig pressure applied to the valve. TABLE 79 - SPECIFICATIONS CONNECTION: POWER INPUT REQUIRED: INPUT SIGNAL: TTL ON/OFF: VALVE OUTPUT POWER: FUSE RATING: POLARITY PROTECTION: OPERATING TEMPERATURE: DIMENSIONS: CE COMPLIANCE : 9-pi male D subcoector for iput/output sigals. +12 to 30 Vdc 12 Vdc, 0.5A (ot 2 Vdc via 9-pi D -coector or dc power jack (ceter positive). Auto-Select feature allows circuit to recogize which aalog iput referece (0 to 5 Vdc or -20 ma) sigal is provided. Jumper selectable LOW (0 Vdc) OFF-HIGH (5 Vdc) o, or reverse, to select valve ON/OFF status. Jumper selectable to +15, +22, ad +29 Vdc with adjacet potetiometer to obtai ±2 Vdc. A iteral resettable 1.6A fuse protects the electroics o the power iput. Iteral rectifier circuit protects from reversed polarity o the power iput. 32 F F (0 F C) to 122 F F (50 F C). 3" (7.62mm) wide x 3" (7.62mm) deep x 1" (25.mm) high. EMC Directive 89/336/EEC EN55011:1991 Group 1, Class A EN :1995. BULLETIN EM PSVD ORDERING INFORMATION FOR PSV-D TABLE 80 - ACCESSORIES FOR FOR PSVD DRIVER MODULE MODEL PS-PSV-110NA- Power Supply, 110vac/2 Vdc /North America PSV-D Proportioatig Soleoid Valve Driver PS-PSV-230EU- Power Supply, 230vac/2 Vdc /Europe PS-PSV-20AU- Power Supply 20vac/2 Vdc /Australia PS-PSV-20UK- Power Supply 20vac/2 Vdc /Uited Kigdom PSV-D CBL-DP9-6 Female 9 pi D-coector with 6 ft.cable - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

102 BULLETIN EM SMV STEPPING MOTOR VALVES SMV Desig Features High precisio two-way meterig valves i alumium or 316 SS for air/water. Uparalleled precisio ad resolutio i cotrollig flow rates ( " per step resolutio stadard, " optioal). Operate cotiuously without overheatig. Elimiates coil heatig problems associated with soleoid desigs. SMV Steppig Motor Valves Dimesios SMV Steppig Motor Valves 6.25" 163 mm 1.125" 29 mm cotrol valve SMV20 3/8" compressio fittig 1.500" 38.1 mm 6.800" 22 mm cotrol valve SMV30 1/2" compressio fittigs 6.800" 22 mm cotrol valve SMV0 3/" FNPT 1.500" 38.1 mm depth mm mm 5.16" 131 mm depth mm mm mm depth mm ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

103 BULLETIN EM SMV SMV STEPPING MOTOR VALVES TABLE 81 - SPECIFICATIONS ALUMINUM MODELS: STAINLESS STEEL / PTFE MODELS: MAXIMUM FLOW RATES: CONNECTIONS: ELECTRICAL CONNECTIONS: POWER INPUT: DIRECTIONAL CONTROL SIGNAL: SPEED CONTROL SIGNAL: RESPONSE TIME: PRESSURE DROP AT MAX. FLOW: MAXIMUM OPERATING PRESSURE: MAXIMUM DIFFERENTIAL PRESSURE: GAS & AMBIENT TEMPERATURE: Alumium housigs ad valve blocks, Vito O-Rigs, PFA closig pis. 316 stailess steel valve blocks, PTFE-lied alumium housig blocks, Vito O-Rigs, ad PFA closig pis L/mi (air), 28 L/mi (H 2 O). 3/8", 1/2", compressio ad 3/" FNPT. 9-pi D -coector, located at the side of the valve. 800 ma, or ma, protected by a 1600mA resettable fuse. 12Vdc CMOS compatible logic level sigal (10K iput impedace). (Logic High >= 7.5 Vdc, Low <2.3 Vdc). Aalog 0 to 2.5 Vdc (100K iput impedace). ON/OFF override: 12 Vdc CMOS low active level to pis 7 ad 3 (10K iput impedece). 100ms time costat. (700 to 1000) mbars 10 to 15 psid. 500 psig (35 bars). 0 psig (2.7 bars). 32 F to 122 F (0 C to 50 C). Operatio Whe the DIRECTION is set LOW (GND) the valve spidle travels dowward (closes), whe it is set HIGH, the valve spidle moves upward (opes). The SPEED voltage o pi determies how quickly the valve opes or closes. The sigal amplitude for the SPEED cotrol sigal must remai withi the limits of 0 to +2.5 VDC. It may be ecessary to override DIRECTION ad SPEED sigals with the preset (2.75 Vdc) speed cotrol sigal. This ca be accomplished with valve CLOSE ad PURGE cotrol sigals (ope collector NPN compatible). I order to CLOSE the valve, pi 3 o the 9-pi D - coector has to be coected to GND (pi 2). A GREEN light o the top of the valve will idicate a CLOSED valve coditio. I order to PURGE the valve, pi 7 o the 9-pi D -coector has to be coected to GND (pi 2). A RED light o the top of the valve will idicate a fully OPEN valve coditio. Durig ormal operatio the valve remais i the last positio as it is deeergized. After powerig up, the valve will be automatically closed withi the first 10 secods ad after that resumes cotrol operatio. Operatig power ad valve cotrol sigals are supplied via the D -coector. Geeral Descriptio A lie of electroic two-way meterig eedle valves is preseted. High precisio liear steppig motors drive the valve spidle. The resolutio of the steppig motor drive eedles is "/step stadard. Optioal " /step resolutio available. Low differetial pressure valves, may be operated cotiuously (100% duty cycle). Valves stay i positio as whe de-eergized. Advatages over soleoid operated valves iclude cool operatios, i.e. there are o cotrol operatig problems due to coils heatig up, extremely fie resolutio, very low differetial pressures ad high operatig pressures. Valves are cotrollable by CMOS 12 Vdc compatible logic level ad aalog 0 to 2.5 Vdc sigals. TABLE 82 - FLOW RATE FOR SMV MODEL NUMBERS MAXIMUM FLOW RATE AIR H 2 0 [L/mi] [scfh] [L/mi] gal/mi Cv CONNECTIONS MATERIAL SMV20-A /8" compressio Alumium SMV20-S /8" compressio Stailess Steel SMV30-A /2" compressio Alumium SMV30-S /2" compressio Stailess Steel SMV0-A /" FNPT Alumium SMV0-S /" FNPT Stailess Steel - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

104 CONVERSION FACTORS CON TABLE 83 - CONVERSION FACTORS MULTIPLY BY TO OBTAIN atm 1.70 lbs/sq. i atm kg/sq. cm lbs/sq. i kg/sq. cm ml/mi liters/mi ml/mi X 10-5 cu. ft/mi ml/mi x 10-2 gal/hr cu. ft/hr 72 ml/mi gal/mi 3785 ml/mi g/ml 62.3 lbs/cu. ft g/ml lbs/cu. i cc/mi 1 ml/mi cfm (ft 3 /mi) L/mi cfm (ft 3 /mi) m 3 /hr oz/mi ml/mi TABLE 8 - PRESSURE CONVERSION FACTORS MULTIPLY BY TO OBTAIN psi i. H2O psi i. Hg psi mm/h2o psi mm/hg psi.0703 kg/cm 2 psi.0689 bar psi mbar psi 6895 Pa psi kpa TABLE 85 - TEMPERATURE F F = (1.8 x F C) + 32 F C = ( F F - 32) x F Kelvi = F C TABLE 86 - LENGTH MULTIPLY BY TO OBTAIN ich 2.5 cm ich 12 foot ft meter yard 1.91 meter Agstrom meter 99 Aalborg -is a registered trademark of Aalborg Istrumets & Cotrols. Bua-N -is a registered trademark of DuPot Dow Elastometers. Kalrez -is a registered trademark of DuPot Dow Elastomers. TRADEMARKS VCR -is a registered trademark of Swagelock Marketig Compay. Vito -is a registered trademark of DuPot Dow Elastomers. NOTE: The compay reserves the right to chage all dimesios without otice. For certified dimesios please cotact Aalborg Istrumets ad Cotrols. US PATENT NUMBERS,862,750 ad 5,561, ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM CON

105 EUROPEAN SERVICE CENTER Authorized Repair ad Service Facility for Aalborg Thermal Mass Flow Systems AALBORG-MESSTECHNIK GMBH Klosterrusstraße 18 P.O. Box 1321 Müllheim D Germay Telefo: +9 (0) = Fax: +9 (0) Website: = ifo@aalyt-mtc.de 175, aveue d Alsace COLMAR Tel: = Fax: ANALYT_MTC@T-olie.de ASIAN SERVICE FACILITY Authorized Repair ad Service Facility for Aalborg Thermal Mass Flow Systems aalborg- Beijig Comity MEASURE & CONTROL CO. Floor 1 Tower B Jidayua Office Buildig Xisaqi, Hai Dia District, Beijig, Chia Phoe: , Fax: Website: Products Maufactured By Aalborg ROTAMETERS Sigle Tube Alumium / Brass / Stailess = Iterchageable Glass Flow Tubes = Optioal Valves Multiple Tube Two to Six Chaels = Alumium or Stailess PTFE Sigle ad Multiple Tube Chemically Iert = 1 to Chaels = Iterchageable Glass Flow tubes PTFE - PFA Chemically Iert = Low to Medium Flow of Corrosive Liquids with PFA Flow Tube Kits Alumium / Stailess / PTFE = Icludig Five Glass Flow Tubes ad a Set of Floats Gas Proportioers Alumium / Stailess = Used for Bledig Two or Three Gases Medium Rage Glass Safety Shield = Dual Air ad Water Scale Optical Sesor Switch No-Ivasive Meas for Detectio of a High or Low Flow High Flow Idustrial Stailess Steel Flow Meters Heavy Duty Stailess Steel = Direct Readig Air ad Water Scales ELECTRONIC METERS & CONTROLLERS Low Cost Mass Flow Meters Alumium or Stailess = With or Without LCD Readout Low Cost Mass Flow Cotrollers Alumium or Stailess = With or Without LCD Readout Mass Flow Cotrollers Stailess = Oe to Four Chael Systems Digital Mass Flow Cotrollers Auto Zero = Totalizer = Alarms = Built i RS85 Multi Parameter Digital Mass Flow Meters Displays Flow Pressure ad Temperature Paddle Wheel Meters For Liquids = Optioal Temperature Measuremets Vortex I-Lie ad Isertio Flow Meters Steam / Liquid ad Gas Service Smart Rate / Totalizer / Sigal Coditioer LCD Keypad = RS232 / 85 = Pulse Output = Alarms VALVES Barstock Brass or Stailess = Stadard or High Precisio PTFE Chemically Iert = Needle or Meterig Proportioatig Soleoid Stailess = For Cotrollig Gas or Liquid Flow = Pulse width Modulated SMV = Steppig Motor Valve PERISTALTIC PUMPS Fixed RPM Pumps Pump Heads Tubig Pumps Variable Speeds Dispesig Pumps Flexible Tubigs - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada