GFM. Typical Aluminum GFM Mass Flow Meter NIST MASS FLOW METERS. Principles of Operation. Design Features. n n n n n n n n n n

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1 Desig Features Priciples of Operatio Rigid metallic costructio. Maximum pressure of 1000 psig (70 bars). Leak itegrity 1 x 10-9 of helium. NIST traceable certificatio. Built-i tiltable LCD readout. 0-5 Vdc ad 4-20 ma sigals. Circuit protectio. Ca be used as a portable device. Egieerig uits or 0 to 100% displays. TIO Totalizer optio. Typical Alumium Mass Flow Meter Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. Output sigals of 0 to 5Vdc ad 4 to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. Flow rates are uaffected by temperature ad pressure variatios withi stated limitatios. Geeral Descriptio Compact, self-cotaied mass flow meters are desiged to read flow rates of gases. The rugged desig coupled with istrumetatio grade accuracy provides versatile ad ecoomical meas of flow measuremet. Alumium or stailess steel models with readout optios of either egieerig uits (stadard) or 0 to 100 percet displays are available. 13 NIST Traceable Calibratio The mechaical layout of the desig icludes a LCD readout built ito the top of the trasducer. This readout module is tiltable over 90 degrees to provide optimal readig comfort. It is coected to the trasducer by a stadard modular plug, ad is also readily removable for remote readig istallatios ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM

2 BULLETIN EM , 67 ad 77 High Flow Mass Flow Meters NIST Traceable Calibratio TABLE 1 - SPECIFICATIONS FOR ACCURACY: CALIBRATIONS: REPEATABILITY: RESPONSE TIME: 17, 37 ad 47: ±1.0% of full scale. 57, 67 ad 77: ±1.5% of full scale. OPTIONAL ENHANCED ACCURACY: ±1.0% of full scale. Performed at stadard coditios [14.7 psia (101.4 kpa) ad 70 F F (21.1 F C)] uless otherwise requested. ±0.25% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / F C. PRESSURE COEFFICIENT: MAXIMUM PRESSURE DROP: See Table 3. GAS ad AMBIENT TEMP.: OUTPUT SIGNALS: TRANSDUCER INPUT POWER: TIME CONSTANT: GAS PRESSURE: ** MATERIALS IN FLUID CONTACT: ATTITUDE SENSITIVITY: Geerally 2 secods to withi ±2% of actual flow rate over 25 to 100% of full scale. 0.01% of full scale / psi (0.07 bar). 32 F F to 122 F F (0 F C to 50 F C). 14 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. Liear 0-5 Vdc ohms mi. load impedace ad 4-20 ma Ohms loop resistace. Uiversal +12 to +26 VDC, 200 ma maximum. 800 ms psig (70 bars) maximum 17, 37, psig (1.4 bars) optimum. 500 psig (34.5 bars) 57, 67, psig (1.4 bars) optimum. a. Alumium models Series: aodized alumium, 316 stailess steel, brass ad Vito O-rigs. b. Stailess steel models 17S, 37S,47S, 57S, 67S ad 77S: 316 stailess steel ad Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. No greater tha +15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. CONNECTIONS: 17: 1/4" compressio fittigs. Optioal: 6mm, 3/8" ad 1/8" compressio fittigs or 1/4" VCR. 37: 1/4" compressio fittigs. Optioal: 6mm ad 3/8" compressio fittigs or 1/4" VCR. LEAK INTEGRITY: CE COMPLIANT: 47: 57: 67: 77: 3/8" compressio fittigs. 3/8" compressio fittigs. 1/2" compressio fittigs. 3/4" FNPT fittigs or 3/4" compressio fittigs. 1 x 10-9 sml/sec of helium maximum to the outside eviromet. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

3 BULLETIN EM Trasducers without LCD readout are offered for OEM applicatios. mass flow meters are available with flow rages from 10 ml/mi to 1000 L/mi N2. Gases are coected by meas of 1/4" 3/8" 1/2" compressio fittigs ad 3/4" FNPT fittigs. Optioal fittigs are available. These meters may be used as bech top uits or mouted by meas of screws i the base. Trasducer power supply ports are fuse ad polarity protected. TABLE 2 - FLOW RANGES FOR 17 LOW FLOW CODE ml/mi [N2] 01 0 to to to to to to 500 CODE L/mi [N2] 07 0 to to to to MEDIUM FLOW 11 0 to to to to to HIGH FLOW 40 0 to to to HIGH FLOW 50 0 to HIGH FLOW 60 0 to HIGH FLOW 70 0 to 1000 Leak Itegrity 1 x 10-9 sml/sec of helium max to outside eviromet. TABLE 3 - MAXIMUM PRESSURE DROP FOR FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] 17 up to TABLE 4 - ACCESSORIES FOR POWER SUPPLY - BATTERY PACK - CABLES PS--110NA-2 PS--110NA-4 PS--230EU-2 PS--230EU-4 PS--240UK-2 PS--240UK-4 PS--240AU-2 PS--240AU-4 BP110 BP220 CBL-D4 CBL-D5 17/3RC Power Supply, 110 V / 12 Vdc /North America Power Supply, 110 V / 24 Vdc /North America Power Supply, 220 V / 12 Vdc /Europe Power Supply, 220 V / 24Vdc /Europe Power Supply 240 V / 12 Vdc /Uited Kigdom Power Supply 240 V / 24 Vdc /Uited Kigdom Power Supply 240 V / 12 Vdc /Australia Power Supply 240 V / 24 Vdc /Australia Battery Pack, 110 V (icludes case) Battery Pack, 220 V (icludes case) Cable with 9-pi D-coector, (4-20 ma) Cable with 9-pi D-coector, (0 to 5 Vdc) 17/3RC Remote cable, 3 ft log 17/R 17/R Remote LCD readout with 3 ft log cable TIO-LAA2 TIO-LAA5 KIT-TM-DD Totalizer I/O Moitor, RS-232 Digital Iterface Totalizer I/O Moitor, RS-485 Digital Iterface Flow Meter Moutig Kit with Two 9 Pi D-Coectors For Totalizer Iput/ Output Flow Moitor/ Cotroller optios see page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

4 2.38 Mass Flow Meters 0.95 NO LCD VERSION FLOW A H B D E *D *E C *C J G F TABLE 5 - DIMENSIONS FOR DIMENSION (INCH) CONNECTION Compressio Fittig (except model 77) LCD VERSION NO LCD MOUNTING HOLE A B C D E F G H J 17 1/4" Tube O Diameter *C *D *E 37 1/4" Tube O Diameter BULLETIN EM /8" Tube O Diameter /8" Tube O Diameter /2" Tube O Diameter / /4" NPT Female /4-20 For Specific Flow Rages Cotact Aalborg Customer Service Departmet ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

5 ORDERING INFORMATION FOR MAX FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS A 1/4" Compressio 17, 37 B 1/8" Compressio 17 C 1/4" VCR 17, 37 D 3/8" Compressio 17, 37, 47, 57 E 1/2" Compressio 67 F 3/4" FNPT 77 G 3/4" Compressio 77 H 6mm Compressio 17, 37 DISPLAY N No Display L LCD Readout POWER 6 Uiversal +12 to +26 VDC OUTPUT SIGNAL A 0-5 VDC B 4-20 ma DIGITAL INTERFACE 0 Noe 17 S V A L 6 A 0 17 EXAMPLE: 17S-VAL6-A0 5 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE *.a. = ot applicable. 17 stailess steel, Vito seals, 1/4" compressio fittigs, display, 12 to 26 Vdc power, 0-5 Vdc, output sigal, o digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM