Computer Exercises Manual: Device Parameters in SPICE. Interactive MATLAB Animations for Understanding Semiconductor Devices

Transcription

1 Computer Exercises Manual: Device Parameters in SPICE This manual is provided as a PDF le { just click on cem.pdf to open it. This can be done from the CD (using Windows Explorer, click on the CD-drive symbol to see the les, and double click on cem.pdf), although you may wish to copy the le to a selected folder/directory on your hard disk, and to run it from there. Interactive MATLAB Animations for Understanding Semiconductor Devices This tool is in the form of linked \M les" that can be run by typing usd in the MATLAB control window. The \M les" are placed in the MATLAB folder/directory of this CD. The minimum requirement is the Student Edition of MATLAB 5., and obviously the new Student VersionofMATLABand any professional version higher than 5. canbeused.moreinformationonmatlabisavailablefrom The MathWorks, Inc. 3 Apple Hill Drive Natick, MA

2 Type usd <ENTER> in the MATLAB control window, and a properly setup MATLAB will respond with the following control window for the animations: INTERACTIVE MATLAB ANIMATIONS FOR Understanding Semiconductor Devices Oxford University Press, New York,. Sima Dimitrijev Griffith University The next page provides setup instructions/suggestions, whereas the following pages provide illustrations of selected animations. Complete list of the animations appears on the last page.

3 INSTRUCTIONS/SUGGESTIONS FOR SETUP OF THE MATLAB \M FILES". It is suggested to create a new folder/directory on your hard disk for the \M les" (*.m les). For example, using the Windows Explorer create a new folder on the c: drive, called usd (File! New! Folder, andthentypeusd to rename it.). Copy the \M les" from the matlab folder/directory on this CD to the newly created folder/directory on your hard disk. NOTE for UNIX users: Make sure that the lenames are in lower-case font (bjt usd.m is correct; BJT USD.M will not be found by the master le). 3. Setup a path in MATLAB so that it can nd the newly copied les: Open MATLAB and select File! Set Path from the MATLAB control window. This will open Path Browser window, where you select Path! Add to Path,and typethedirectorytobeadded(c:nusd). 4. Run the animations by typing usd in the control window of MATLAB.

4 ILLUSTRATIONS OF SELECTED ANIMATIONS (The complete list of the Interactive MATLAB Animations appears on the last page.) Section.3.: The Concept of Di usion (illustration only)

5 Section.3.3: Making an IC Resistor (illustration only)

6 Section.3.4: Visualization of Di usion Models and Process Simulation (illustration only) Depth (um) Lateral Distance (um) log (Concentration in cm 3 ) Depth (um)

7 Section.5.: Fermi-Dirac Distribution and Fermi Level (illustration only) f=/ [+exp((e E F )/kt)] f h = f.5.5 E F ENERGY E i (ev).5.5 E C E V PROBABILITY

8 Section.: P{N Junction Energy Bands and Capacitance (illustration only) P type E C E F E V N type.8 x 3 C (F/m ) V (V) R

9 Section.4: SPICE Model and Parameters of P{N Junction Capacitor (illustration only) log(c meas C p ) (C in pf) C d =C meas C p (pf) REVERSE BIAS VOLTAGE, V (V) R V R (V) C meas (pf) SPICE MODEL C d =CJO(+V R / VJ) M SPICE PARAMETERS CJO= F M= VJ= V C = p pf V R max = V EXPERIMENTAL DATA log(+v R /VJ)

10 Sections : MOS Capacitor (illustration only) CAPACITANCE (mf/mm ) GATE VOLTAGE (V) E C E F E V

11 Section 3.: Diode Principles (illustration only) E C E F E V 5 I D (ma) V D (V) x 4 9

12 Sections 5../5..3: MOSFET Principles (illustration only) SOURCE DRAIN BULK DRAIN CURRENT (ma) DRAIN VOLTAGE (V) 4 GATE VOLTAGE (V) DRAIN CURRENT (ma)

13 Sections 5../5..3: MOSFET Principles (illustration only) BULK SOURCE DRAIN CURRENT (ma) DRAIN VOLTAGE (V) DRAIN 4 GATE VOLTAGE (V) DRAIN CURRENT (ma)

14 Section 5.4.: MOSFET Calculator (illustration only) 4 3 V SB = V GEOMETRIC VARIABLES L= m W= m I D (ma) 3 V (V) DS PRINCIPAL PARAMETERS Vto= V KP= A/V Phi= V Gamma= V / Tox= m Uo= cm /Vs CHANNEL RELATED PARAMETERS V DS = THETA= V Vmax= m/s Nsub= cm 3 KAPPA= I D (ma) V DEPLETION LAYER RELATED PARAMETERS ETA= Nss= cm TPG= (/ /) PB= V Xj= m Ld= m V GS (V) DELTA= NFS= cm

15 Sections 6. and 6.3: BJT Principles and Modeling (illustration only) 4 I ne 3 I E I C I B (A/cm ) I pe I pc I B..4.6 V BE (V) E C E F E V I C (A/cm ) V CE (V)

16 The List of Interactive MATLAB Animations SECTION ANIMATION.3. The Concept of Di usion.3.3 Making an IC Resistor.3.4 Visualization of Di usion Models and Process Simulation.4. Drift Velocity.4./.4.3 Mobility Dependence on Temperature and Doping.4.4 Haynes-Shockley Experiment.5. Fermi-Dirac Distribution and Fermi Level.5.3 Drift Current in Energy-Band Presentation. P{N Junction Energy Bands and Capacitance.4 SPICE Model and Parameters of P{N Junction Capacitor MOS Capacitor 3. Diode Principles 3.. Stored-Charge Related Transient E ects 3. Diode Calculator (SPICE Model) 5../5..3 MOSFET Principles 5.. Ion Implantation Models and Process Simulation 5.4. MOSFET Calculator (SPICE LEVEL 3 Model) 6. and 6.3 BJT Principles and Modeling 6.4 BJT Calculator (SPICE Model)