Leveraging Opportunities for Capital Investment
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1 UGIM June 2016 Salt Lake City, Utah Leveraging Opportunities for Capital Investment Karl D. Hirschman & Scott P. Blondell Semiconductor & Microsystems Fabrication Laboratory Electrical & Microelectronic Engineering Department Rochester Institute of Technology UGIM 2016 Rochester Institute of Technology 1
2 RIT SMFL back then ( ) Lynn Fuller set the path Founder of the RIT Microelectronic Engineering Department (1982) Raised funds for building and cleanroom (opened 1986) $3M endowed to support lab operation & maintenance Strong Industrial Affiliate support Approx. 20 active industrial affiliate members 10,000 ft 2 class 1000 cleanroom, bay & chase design 3 technical staff members 4-in wafer process tools Kasper aligners, GCA wafertrac, GCA 5x steppers Varian 400 ion implanter Diffusion/oxidation furnace LPCVD poly-si, nitride, LTO Plasma etchers Metal sputter & evap MEBES-I e-beam maskwriter Laboratory instruction Lithography, thin-films PMOS, NMOS & BJT processes Senior design projects 1 st CMOS process developed UGIM 2016 Rochester Institute of Technology 2
3 & now 26 years later (2016) Full CMOS & MEMS process capabilities 6-in wafer process tools (silicon CMOS) Complete changeover of toolset III-V materials processing 8 technical staff members including 2 process engineers Supports teaching labs Supports faculty research Serves industrial users UGIM 2016 Rochester Institute of Technology 3
4 Acquisitions & Upgrades Intimate connection with academic programs Industrial Affiliate support Remained strong through 90 s Equipment donations (6-in tooling) Large cash awards from IBM (TQM program) and Motorola (professorship) RIT Capital Allocations Supported facility and tool upgrades Fewer programs, less competition for capital requests By 2000 a complete 6-in submicron CMOS toolset was in place MEBES-III, Bruce Furnaces, ASM LPCVD, Canon FPA-2000 i1 i-line stepper, Varian 350D implanter, Drytek Quad RIE, etc. UGIM 2016 Rochester Institute of Technology 4
5 IT Collaboratory Investment RIT-led proposal to NYSTAR written in 2001 Office of VPR New Ph.D. program in Microsystems Engineering Jumpstart in MEMS/Microsystems & NanoTech Leveraged to acquire $500K in process tools (2003) New and previously enjoyed tools for MEMS fabrication and system upgrades & replacement Expansion of building including ~ 1000 ft 2 additional class 100 cleanroom space for nanolithography research (2006) UGIM 2016 Rochester Institute of Technology 5
6 SMFL Typical Annual Budget Annual Expenses ~ $1M SMFL operating budget ~ $400K Endowment spending ~ $250K Revenue ~ $250K Shortfall ~ $100K Aside from limited replacements of low-cost items (e.g. hand spinners, hotplates, computers) we have no budget for capital equipment Must leverage all opportunities to enable facility upgrades, equipment replacements and new process capabilities UGIM 2016 Rochester Institute of Technology 6
7 Hmm??? Q: One-time big investments give you a nice jumpstart, but how do you make infrastructure improvements and replace aging process tools? The facility isn t getting any younger Large donations typically support bricks & mortar Equipment acquisition programs want to support leading edge research A: Make opportunities happen! Justify internal capital equipment requests Develop and evolve relationships with companies Microfab must have a standing entry for instrumentation proposals Facility space and support for infrastructure upgrades Pool resources for common needs of investigators UGIM 2016 Rochester Institute of Technology 7
8 Internal Capital Allocations Not as easy as it used to be Central Administration or College Establish and maintain strong connections to academic & research programs Show clear benefits to multiple PI s and academic teaching labs Get faculty to lobby for internal support Department requests outside of microfab Facility requests are more likely to get approved rather than capital equipment Safety first! Wet bench upgrades, toxic gas monitoring Critical need to overcome capacity/performance limits Cooling water, process exhaust UGIM 2016 Rochester Institute of Technology 8
9 Select Equipment Donations Companies will donate equipment Does it work? Is it right-sized? Can you afford it? (cost of ownership) Don t forget about chillers, pumps, spare parts tools, etc. Tropel Air Products Corning Inc. Micron Ortho Clinical Diagnostics Freescale UGIM 2016 Rochester Institute of Technology 9
10 Industrial Affiliate Support Increasingly difficult to convince companies to provide cash support Micron continues to support the Micron Professorship in Microelectronic Engineering at RIT ($75K/yr) Unrestricted gift which supports graduate TA s, electrical test equipment, SMFL upgrades, consumables, etc. Examples: ASML stepper installation & start-up Lab supplies and equipment maintenance Leveraged with other funding resources for large-ticket items UGIM 2016 Rochester Institute of Technology 10
11 Instrumentation Awards NSF & DURIP instrumentation programs NSF Major Research Instrumentation (MRI) proposals should target the needs of lab users and align with research investigations Rommel: LEO/Zeiss EVO 50 Gupta: Bruker highresolution XRD Hirschman: Heidelberg DWL 66+ Hirschman: Veeco Wyko NT1100 w/dmems UGIM 2016 Rochester Institute of Technology 11
12 2013 NSF MRI Award * Hubbard: Aixtron MOCVD III-V system Large space requirement Limited user base May not seem to be a good fit for a microlab user facility what are the benefits? Become critically important to a leading-edge research initiative Trade space & support for facility upgrades * acquisition also supported by NYS ESD and ONR UGIM 2016 Rochester Institute of Technology 12
13 MOCVD-related Facility Upgrades New Toxic Gas Leak Detection System DoD ChemLogic 96 point monitoring system Replacing our MDA system after 30 years of service Funding sources included instrumentation grant(s), College of Engineering, Office of VPR, and Micron Professorship Complete toxic gas leak detection throughout the lab! N 2 generator for supplemental N 2 Up-sized to decrease the load on our LN2 supply UGIM 2016 Rochester Institute of Technology 13
14 Pool Resources Sponsored research projects Start-up packages (new faculty) Discretionary funds Retirement accounts New Ultratech Savannah 200 ALD system Acquisition supported by: Micron Professorship Microsystems Engineering NASA Corning Incorporated Faculty overhead return UGIM 2016 Rochester Institute of Technology 14
15 Summary Understand what resources are needed Facility upgrades Research support Academic program support Recognize opportunities but don t wait for them make them happen! Leverage opportunities for maximum benefits to the lab and its users: Enhanced process capabilities Improved laboratory experience UGIM 2016 Rochester Institute of Technology 15
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