Revolutionary Technology for Lithography. Vadim Rakhovskiy Nanotech SWHL Gmbh Dubendorf, Switzerland

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1 Revolutionary Technology for Lithography Vadim Rakhovskiy Nanotech SWHL Gmbh Dubendorf, Switzerland

2 WHAT WE OFFER Revolutionary photolithography for production of IC, MEMS, Sensors Based on unique mathematical apparatus Generates images not possible with traditional projection lithography Offers much lower cost of ownership 2

3 TRADITIONAL LITHOGRAPHY OUR SOLUTION Illuminator Complicated and expensive Illuminator Very simple and less expensive (4x) Projection mask complicated and expensive Projection lens extremely complicated and expensive Holographic mask simple and less expensive (10x) No projection lens

4 OUR ADVANTAGES Traditional Lithography Exhausted its potential New topologies (MEMS, Sensors) require complicated techniques Further miniaturization only at very high costs Our Solution Offers new opportunities New topologies are easy to produce Further miniaturization at low cost Very high entry barrier for new players Opportunities for new players 4

5 BUSINESS MODEL There are several business models to monetize the technology: Licensing business model Sale to a strategic buyer Production business model Nanotech SWHL intends to remain an asset-light company and use licensing business model Revenue streams: Steppers: licensing IP to lithography tool manufacturers Masks: licensing software and Mask Calculator to photomask manufacturers, or calculate masks internally for a fee

6 Low High Barriers to entry TARGET CUSTOMERS AND MARKET SIZE Developers of chip designs, eg: High-end segment Manufacturers of MEMS-devices and Logic ICs, eg: Captive producers of electronic components, eg: Manufacturers of memory chips and ICs with high degree of integration, eg: Manufacturers of microprocessors, eg: Low-end segment Semiconductor market Lithography equipment Masks $340Bln $20Bln $3,5Bln Gartner, Inc. Nanotech SWHL preferred segment: Low barriers to entry High rate of market growth Lower competition relative to highend market Presence of strategic and technological partners Low High Cost of lithography equipment and photomasks

7 TECHNOLOGY COMMERCIALIZATION MILESTONES Achievements up to date Theoretically and experimentally proven physical concept of SWHL Test topology produced on photo resist 4 RF Patents and 1 US Patent received; 2 US Patents Application approved; 2 US Patent Applications pending Partnerships established with several leading European semiconductor companies that have expressed interest in the project

8 TECHNOLOGY COMMERCIALIZATION MILESTONES Next steps Stage Result Required funding Duration Laboratory stage Experimental stand and Demonstrator 500k EURO (available from EMPA and own funding) 6 months Α- tool stage * Working prototype without capacity 3-5 mln EURO 18 months β-tool stage Production machine with capacity acceptable for HVP Prepayment for orders tbd * Exit is possible after α-tool stage 8

9 MANAGEMENT TEAM Name Biography Professor Vadim Rakhovsky, CTO Professor V. Rakhovsky founded Project SWHL in 2002 and serves as a CTO Ph.D. degree in physical electronics from the All-Union Electrotechnical Institute Doctor of Science Degree in Plasma Physics from the Leningrad State University in 1974 In 1975 he became full Professor in plasma physics and chemistry Holds more than 90 patents in the field of high-voltage technology, physical electronics, surface analysis, microelectronics and nanotechnology Professor Alexei Shamaev Chief Mathematician Professor A. Shamaev serves as a Chief Mathematician at Project SWHL since 2007 Ph.D. and Doctor of Science in the Ishlinsky Mechanics Problems Since 1995 serves as a Professor of Differential Equations at Moscow State University Dr. Michael Borisov Chief Optician Dr. M. Borisov serves as a Chief Optician at Project SWHL since 2007 Ph.D. degree in optical and optoelectronic devices and systems from Bauman Moscow State Technical University Dr. M. Borisov holds 3 patents Manager, Finance Natasha Ivanova has over 20 years of experience as a corporate banker working for such banks as Dresdner Bank, ABN AMRO, Royal Bank of Scotland on Debt and Equity Financing and M&A transactions Since 2012 Natasha works as an independence financial advisor helping companies to raise debt and equity financing