The Cornell NanoScale Facility: NNCI Overview
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1 The Cornell NanoScale Facility: NNCI Overview Prof. Christopher Ober Lester B. Knight Director CNF: founded 1977
2 CNF Highlights 2017 is CNF s 40 th Anniversary as an NSF funded User Facility Using NNCI definitions: 53% Non-traditional 23 (20.7 FTE) scientific and technical staff - (+4 admin) provide on-site user support (~4000 training sessions/year) 15 NNCI Technical Experts among staff First meeting of external advisory board
3 CNF Highlights 2017 is CNF s 40 th Anniversary as an NSF funded User Facility Using NNCI definitions: 53% Non-traditional 23 (20.7 FTE) scientific and technical staff - (+4 admin) provide on-site user support (~4000 training sessions/year) 15 NNCI Technical Experts among staff First meeting of external advisory board
4 CNF Staff
5 External Advisory Board Bob Celotta, NIST (Chair) Chuck Black, BNL Alice White, Boston University Advisory board met this past November Steve Turner PacBiosystems
6 Key Technologies and Experience Advanced Lithography: 3 Steppers, EBL -> JEOL 9500, JEOL 6300 In-House mask making Plasma Processing (17 plasma etchers) Strong Local Emphasis: Silicon Photonics Magnetic Materials Fluidics-> Life Sciences; NanoAg MEMS, NEMS 2-D Materials Proximity to other NSF centers: CCMR (MRSEC), PARADIM (MIP), CHESS 468 years of Staff Tech Experience Success commercializing research (17/12) JEOL 9500
7 CNF Equipment Resources Equipment highlights (> 120 major tools): 2 state-of the-art electron-beam lithography systems. DUV Stepper, i-line, g-line, contact and proximity photolithography. In-house mask making capabilities. 5 hot-process banks (20 tubes) for growth and deposition Comprehensive set of etching tools (~16) including DSE, ICP etchers Plasma Enhanced deposition High resolution SEMs, AFM, Optical Metrology Chemical Mechanical Polishing Ion Implantation Molecular Vapor Deposition (SAMs) Atomic Layer Deposition Materials Ink Jet Printing 3D Printing NanoImprint Lithography and Hot Embossing
8 2-D Electronic Materials The Park group at Cornell University successfully demonstrated batch fabrication of high performance field-effect transistors from monolayer molybdenum disulfide (MoS 2 ) at the full 4-inch wafer scale. Transfer of the monolayer films allows multi-level fabrication of vertically stacked transistor devices for three-dimensional circuitry. This work is a step towards the realization of atomically-thin integrated circuitry.
9 Listening to the Brain with a Transistor In Nature Communications Khodagholy et al from NYU and Ecole des Mines reported recording the electrical activity of a large number of neurons providing a pathway to understand the brain and its information-processing capabilities. Such neural recordings are used in clinics for diagnosis in patients with epilepsy and brain tumors, and to help paralyzed people control prosthetic limbs. A solution to the challenges of probing these signals is to use a biocompatible and flexible organic transistor as the recording device. This transistor, which operates in a manner similar to that found in microprocessors, amplifies the signal while recording it. As a result, recordings show a 10 fold improvement in signal quality. c d Flexible organic brain probe(a) with integrated amplifier (b) implanted in a rat brain(c) used to record (d) a bicuculline-induced epileptiform spike from a transistor (pink), a surface electrode (blue) and penetrating electrodes (black).
10 Outreach & Workforce Training CNF Fellows and Ambassadors Technology and Characterization at the NanoScale Short Course held in January and June Going on this week. NNCI Intranetwork Plasma Processing Workshop GenISys Workshop for users & staff Annual Symposium held in September REU program 5 interns, 10 weeks; mini convocation held jointly with PARADIM interns Revised Promotional Brochures Produced 20 Nanonuggets for NNCO 10-9 NanoDay
11 Educational Outreach - LEGO Annual 1 Day Event brings ~ 20 teams of elementary school age participants
12 4H 2 Events Annually: 4H Leaders Program (Cornell is NYS HQ) and Career Exploration Program (HS age groups)
13 REU Rapidly spun up program for 5 Interns Combined some events with PARADIM REU to reach critical mass Organized a miniconvocation Rathbun successful IRES grant to initiate ireu sent 5 past REUs to Japan
14 Disney NSF Award supplement to Update Exhibit
15 Partnerships & Commercialization Company News: 1 New Start up Esper Biosciences 2 Small Company applicants for FuzeHub Manufacturing Innovation Grants 1 StartUp CNF Award NYS program 2 Commercialization Foundry Partners Key Partnerships: JEOL electron beam lithography GenISys CAD Oxford Instruments Plasma Processing & ALD Suss Alta Spray, SCIL PARADIM NSF funded material innovation platform, a materials user facility
16 Research to Commercialization -energy harvester chip MicroGen Systems, is designing and manufacturing nanotechnology/microelectromechanical Systems micro-power and micro-sensor products for wireless sensor and mobile electronics. MicroGen developed its baseline piezoelectric vibrational energy harvester (PZEH) technology at the Cornell NanoScale Facility and is now manufacturing its platform technology at the X-FAB foundry in Germany. Output voltage OCV > 10 Volts, and output power Pload f1 and 0.1 G Where f1 is Hz
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