General Explanation Ⅲ 1 Ⅲ 2

Transcription

1 General Explanaion 1 2

2 Selecion of Precision Posiioning Table Selecion of Precision Posiioning Table Precision Posiioning Table should be seleced aking he poins relaed o he required condiions ino careful consideraion. Typical selecion procedure is shown below. 1 Check for operaional condiion Sroke lengh o be used Mouning space (heigh, widh, lengh) Mouning direcion Applied load size and direcion Operaion paern Operaing environmen 8 Final checking Re-check for operaional condiion Cos and delivery Addiional machining Special able 2 Check for he required accuracy Posiioning accuracy Posiioning repeaabiliy Parallelism in able moion A, B Sraighness Squareness 7 Consideraion of sysem Selecion of conroller Wih or wihou sensor Connecion cord Inerface wih exernal devices Deerminaion 3 Temporary selecion of able model Feeding mechanism of slide able Size Sroke lengh Number of axes 6 Re-consideraion Consideraion of operaion paerns Marginal acceleraion ime Effecive orque Ineria Posiioning ime 4 Temporary selecion of moor Type and size of moor 5 Consideraion of maximum speed and resoluion Ball screw lead Maximum number of revoluions of he moor Encoder specificaion Characerisics of Precision Posiioning Table Series Model Sroke lengh mm Posiioning repeaabiliy Posiioning accuracy High speed Rigidiy Feeding mechanism Applied moor Wih or wihou sensor Linear moion rolling guide Applicaions Precision Posiioning Table TE Precision Posiioning Table TU Precision Posiioning Table L Precision Posiioning Table LH Super Precision Posiioning Table TX Cleanroom Precision Posiioning Table TC Micro Precision Posiioning Table TM Precision Posiioning Table TS/CT Precision Posiioning Table LB Nano Linear NT Alignmen Sage SA Linear Moor Table LT Alignmen Module AM TE B TU TSL M TSLH M CTLH M TX M CTX M TCEB TM TS CT TSLB NT, XZ, XZH NT H SA DE/X LT CE LT LD LT H AM C-Lube ball screw Ball screw C-Lube ball screw Ball screw Timing bel Ball screw AC servomoor/ Sepper moor AC servomoor AC servomoor/ Sepper moor Sepper moor AC linear servomoor AC servomoor/sepper moor Selecion Provided as sandard Selecion Provided as sandard U-shaped Track Rail Linear Way wih C-Lube buil in U-shaped Track Rail Linear Way C-Lube Linear Way C-Lube Linear Roller Way Super MX U-shaped Track Rail Linear Way wih C-Lube buil in Linear Way Ani-Creep Cage Crossed Roller Way Crossed Roller Way Linear Way C-Lube Linear Way Linear Way Ani-Creep Cage Crossed Roller Way C-Lube Linear Way Parallel arrangemen of 2 ways Parallel arrangemen of 2 ways Parallel arrangemen of 2 ways Parallel arrangemen of 2 ways Parallel arrangemen of 2 ways Parallel arrangemen of 2 ways U-shaped Track Rail Linear Way Assembler, Processing machine, Measuring equipmen Assembler, Processing machine, Measuring equipmen Assembler, Processing machine, Measuring equipmen Precision processing machine, Precision measuring equipmen Machine ool, Assembler Precision processing machine, Precision measuring equipmen Machine ool, Assembler Semiconducor relaed device, LCD relaed device Precision measuring equipmen, Assembling machine Precision measuring equipmen, Prober Image processing uni, Exposure equipmen High speed conveyor, Palee changer Semiconducor relaed device, Medical equipmen Semiconducor relaed sysem, Precision measuring equipmen Semiconducor relaed device, Medical equipmen Semiconducor relaed device, High speed conveyor Semiconducor relaed device, LCD relaed device 3 4

3 Selecion of Precision Posiioning Table Size of Precision Posiioning Table Sroke Lengh of Precision Posiioning Table Models and Sizes of Precision Posiioning Table TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M TX120M TX220M TX320M TX420M TC50EB TC60EB TC86EB TM15 TS/CT TSLB NT NTH NT80XZ NT90XZH SADE LT AT AM Models and Sizes of Precision Posiioning Table TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M TX120M TX220M TX320M TX420M TC50EB TC60EB TC86EB TM15 TS/CT TSLB NT NTH NT80XZ NT90XZH SADE LT AM Table widh mm Sroke lengh mm How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. Lengh of a bar represens a sandardized range of sroke lengh. 5 6

4 Selecion of Precision Posiioning Table Posiioning Repeaabiliy of Precision Posiioning Table Posiioning Accuracy of Precision Posiioning Table Models and Sizes of Precision Posiioning Table TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M CTLH120M CTLH220M CTLH320M TX120M TX220M TX320M TX420M CTX120M CTX220M TC50EB TC60EB TC86EB TM15 TS/CT TSLB NT NTH NT80XZ NT90XZH SADE LT AM 0 ±1 ±2 ±3 ±4 ±5 ±6 ±20 ±40 ±60 ±80 ±100 Models and Sizes of Precision Posiioning Table TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M CTLH120M CTLH220M CTLH320M TX120M TX220M TX320M TX420M CTX120M CTX220M TC50EB TC60EB TC86EB TM15 TS/CT TSLB NT NTH NT80XZ NT90XZH SADE LT AM Posiioning repeaabiliy m Posiioning accuracy m How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. For models of ball screw drive, he value of he case seleced ground ball screw is indicaed. When wo or more values are indicaed for a model, his means ha he applicable value depends on he sroke lengh. For TU, he value of he sandard able is indicaed. CTLHM, CTXM and CT are ables of wo-axis specificaion. SA DE represens value in X-axis. How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. For models of ball screw drive, he value of he case seleced ground ball screw is indicaed. When wo or more values are indicaed for a model, his means ha he applicable value depends on he sroke lengh. For TU, he value of he sandard able is indicaed. CTLHM, CTXM and CT are ables of wo-axis specificaion. 7 8

5 Selecion of Precision Posiioning Table Maximum Speed of Precision Posiioning Table Carrying Mass of Precision Posiioning Table Models and Sizes of Precision Posiioning Table TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M TX120M TX220M TX320M TX420M TC50EB TC60EB TC86EB TM15 TS CT TSLB90 TSLB120 TSLB170 NT38 NT55 NT80 NT88H NT80XZ NT90XZH SA65DE SA120DE LT100CEG LT150CEG LT130LDG LT170LDG LT170LD LT130H LT170H AM25 AM40 AM60 AM86 0 TE50B TE60B TE86B TU25 TU30 TU40 TU50 TU60 TU86 TU100 TU130 TSL90M TSL120M TSL170M TSL170SM TSL220M TSLH120M TSLH220M TSLH320M TSLH420M TX120M TX220M TX320M TX420M TC50EB TC60EB TC86EB TM15 TS/CT TSLB NT NTH NT80XZ NT90XZH SA65DE SA120DE SA200DE LT100CEG LT150CEG LT130LDG LT170LDG LT170LD LT130H LT170H AT120 AT200 AT300 AM25 AM40 AM60 AM Models and Sizes of Precision Posiioning Table Maximum speed mm/s Maximum carrying mass kg How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. For models of ball screw drive, he value wih he longes ball screw lead allowable is indicaed. The upper secions indicae values of AC servomoor, whereas he lower secions indicae values of sepper moor specificaion. The ball screw drive ype may someimes be resriced by he allowable number of revoluion of ball screw depending on he sroke lengh. 9 How o see he above graph The values shown in he graph are for reference. For deails, see he explanaion of each model. alues of LT, NT, NT H, NT XZ, NT XZH, and SA DE indicae he maximum load masses. 10

6 Accuracy Accuracy sandard of precision posiioning able varies depending on models and measuremen mehods are described below. In addiion, model esing according o he use condiions such as dynamics esing may be conduced on reques. Please conac for deails. Precision posiioning able is supplied wih an inspecion shee or cerificae of passing inspecion regarding accuracy sandard of each model. Posiioning repeaabiliy Repea posiioning o any one poin from one direcion 7 imes o measure he sop posiion and obain 1/2 of he maximum reading difference. In principle, perform his measuremen a he cener and each end of he sroke lengh and ake he maximum obained value as he measuremen value. Indicae he 1/2 of he maximum difference wih. Posiioning accuracy Perform posiioning successively in he cerain direcion from he reference posiion, measure he difference beween acual ravel disance a each posiion and he heoreical ravel disance, and indicae he maximum difference wihin he sroke lengh as an absolue value. L Reference posiion /2 of larges difference in measuremen values, 1, 2, 7 Traveling disance L Measuremen inerval Parallelism in able moion B Refers o parallelism (indicaor ravel) of he slide able moion and fla surface (able mouning surface). Fix he indicaor a he cener of he slide able, apply he es indicaor on he sool on which he precision posiioning able is mouned, make a measuremen across almos whole area of he sroke lengh in X and Y direcions, and ake he maximum reading difference as a measuremen value. Sraighness Refers o an exen of deviaion from he ideal sraigh line of he slide able moion, which should be linear. Sraighness in horizonal: Moion of he slide able ravel axis in lef and righ (horizonal) direcion. Sraighness in verical: Moion of he slide able ravel axis in up and down (verical) direcion. These are measured by a es bar and indicaor or laser running sraighness measuremen sysem. The measuremen value is represened by he inerval beween wo sraigh lines in parallel wih each oher, when placed so ha he inerval becomes minimal. Squareness of XY moion Refers o squareness of X-and Y-axis moions. Fix a square scale on he slide able aking eiher ravel axis direcion as a reference, apply he es indicaor perpendicular o he reference ravel axis and ake he maximum reading difference wihin he sroke lengh of he axis as a measuremen value. Y X Sraighness L Disance acually raveled Command value for raveling disance Backlash Parallelism in able moion A Refers o parallelism (indicaor fix) of he slide able moion and fla surface (precision posiioning able mouning surface). When he sroke is shorer han he slide able lengh Fix he es indicaor on he sool on which he precision posiioning able is mouned, place he sraigh-edge on he slide able, and apply he es indicaor a he cener of he slide able. Make a measuremen across almos whole area of he sroke lengh in X and Y direcions, and ake he maximum reading difference as a measuremen value. When he sroke is longer han he slide able lengh Fix he es indicaor on he sool on which he precision posiioning able is mouned, place he sraigh-edge on he slide able, and apply he es indicaor a he cener of he slide able. Make a measuremen across almos whole area of he sroke lengh while moving he able by he lengh of he able during srokes in X and Y direcions, and ake he maximum reading difference as a measuremen value. X Y Feed o he slide able and ake reading of he es indicaor when i is moved slighly as a reference. Then, move he slide able in he same direcion wih he given load from such condiion wihou he feed gear and release he load. Obain he difference from he reference value a his poin. Perform his measuremen a he cener and each end of he sroke lengh and ake he maximum obained value as he measuremen value. Los moion Perform posiioning in he forward direcion for one posiion and measure he posiion ( 1 in he figure). Then give a command o move i in he same direcion and give he same command in he backward direcion from he posiion o perform posiioning in he backward direcion. Measure he posiion ( 1' in he figure). Furher, give a command o move i in he backward direcion and give he same command in he forward direcion from he posiion o perform posiioning in he forward direcion. Measure he posiion ( 2 in he figure). Subsequenly, repea hese moions and measuremens and obain he difference beween average values of sop posiion of he 7 posiionings in forward and backward direcions. Perform his measuremen a he cener and each end of he moion and ake he maximum obained value as he measuremen value. Measuremen value of los moion 1 7 R1R2R71 7 R1R2R7 max

7 Accuracy Carrying Mass, Load Mass, Allowable Load Measuremen of parallelism during able elevaing Maximum carrying mass A he lower mos sep of he able (Hmin), align he indicaor wih 0 value a he measuremen poin E on he able upper surface wih he able mouning surface as a reference, and measure heighs a he remaining 8 poins (A o I) wih he value as a reference. Lif up he able and perform he same measuremen a middle (Hmid) and upper (Hmax) seps. Then obain each maximum difference beween measuremen values a he same poin a lower, middle and upper seps. Take he maximum difference value among all he 9 poins as he parallelism during able elevaing. Top A B C The maximum carrying mass is he mass ha saisfies he following,, and. I is se for TEB, TU, TSLM, TSLHM, TXM, TCEB, TM, TS/CT, TSLB, AT, AM, TZ, and TZX. The value changes by he posiion of he mass loaded (lengh L, heigh H). I is calculaed by he formula (L, H) = (0, 0). The mass for which he raing life of he linear moion rolling guide, ball screws or suppor bearings is 18,000 hours when coninually driving a he maximum speed for each model and size wih he acceleraion/deceleraion ime of 0.2s. The mass for which he acceleraion 0.3G can be acquired in general. The mass calculaed based upon he basic saic load raing of he linear moion rolling guide you are using. Noe ha he value calculaed varies depending on various condiions, such as he size, ball screw specificaions, slide able lengh, or sroke lengh. The value shown a he specificaions of each model was calculaed based on he mos severe Sample calculaion of parallelism during able elevaing Middle D E F condiions ha are ypical for each size. For deailed values, please conac. Measuring poin Measuremen valuem Lower Middle Upper Maximum difference G H I Maximum load mass A B C D E F G H I Boom Measuring poin The maximum load mass refers o he maximum mass of a seel cube ha ensures necessary acceleraion: acceleraion 0.5G for linear moion and acceleraion 0.5G in ouer circumferenial for roaional moion. I is resriced by hrus (orque) characerisics of he moor used, and he larger he carrying mass is, he longer he marginal acceleraion ime becomes. For linear moor drive models (LT, NT, NTH, NTXZ and NTXZH) and direc drive models (SADE), he dynamic load mass represening he relaion beween acceleraion and load mass in sandard raveling models is se. If measuremen values are as hose indicaed in he able, he maximum difference value among all poins should be 6m a he poin H. As a resul, he parallelism during elevaing of his able is 6m. Measuring mehod Allowable load Allowable load refers o he maximum saic load ha can ensure normal funcions and performance when used horizonally. I is se for RT. Measuremen of squareness during able elevaing The squareness during able elevaing relaive o a square scale shall be he squareness during able elevaing. A he lower sep of he able (Hmin), align he indicaor wih 0 relaive o a square scale. The maximum difference in pick es deflecion a he ime when i is sroked from he lower sep of he able (Hmin) o he upper sep (Hmax) in he condiion shall be he squareness during able elevaing. (Sraighness componen a he ime of able sroke is included.) Place a square scale a he posiion 10mm away from he able edge, make a measuremen for 2 direcions, ball screw axial direcion and direcion perpendicular o he axis - and ake he maximum value beween he 2 values as he sraighness during able elevaing. Measuremen in axial direcion X direcion Measuremen in perpendicular direcion o axis Y direcion 0, 0 L Carrying mass W H Fig. 1 Carrying mass posiion 13 14

8 Maximum Speed and Resoluion Maximum speed The maximum speed of precision posiioning able is defined by he following equaion. The ball screw drive ype is resriced by he allowable number of ball screw revoluions which vary by he sroke lengh. For he iming bel drive, i is calculaed wih he maximum number of moor revoluions of 900min -1. See he specificaions of each model for deails. Each linear moor drive model has fixed maximum speed. See he specificaions of each model. Consideraion of Operaion Paerns Calculaion of posiioning ime The posiioning ime aken when he precision posiioning able acually moves can be obained by he following equaion. For applicaions requiring high precision posiioning, he seling ime from compleion of command pulse inpu o full sop of he able a he posiioning poin and vibraion damping ime of he machine device mus be considered in addiion o he consan speed raveling ime and acceleraion / deceleraion ime. Long-disance posiioning Ball screw drive Timing bel drive -1 Allowable number of revoluions of ball screwmin Maximum speedmm/sball screw leadmm 60 Long disance in his conex refers o disance for which here is enough consan speed raveling ime even aking ino accoun he acceleraion / deceleraion ime. L1 ab 1 2 d 1 Table movemen Travel command -1 Maximum number of revoluions of he moormin Maximum speedmm/spulley pich diameermm 60 (Pulley pich diameer= 100mm) To obain he acual posiioning ime, he operaion paern mus be considered according o condiions such as acceleraion / deceleraion ime and sroke lengh. See he secion of consideraion of operaion paerns. where : Posiioning ime s a, b : Acceleraion/deceleraion ime s c : Consan speed raveling ime s d : Seling ime s L1 : Traveling disance mm 1 : Traveling speed (se speed) mm/s Speed a Traveling disance L1 c b d Resoluion Resoluion refers o he minimum feed rae allowed for precision posiioning able and can be obained by he following equaion. Each linear moor drive model has fixed resoluion. See he specificaions of each model. Ball screw drive Timing bel drive Resoluionmm/pulse Ball screw leadmm Number of fracion sizes per moor roaion (pulse) Pulley pich diameermm Resoluionmm/pulse Number of fracion sizes per moor roaion (pulse) (Pulley pich diameer= 100mm) Shor-disance posiioning Shor disance in his conex refers o disance for which here is no consan speed raveling ime because deceleraion occurs before reaching o consan speed raveling. L2 ab 2 2 d where : Posiioning ime s a, b : Acceleraion/deceleraion ime s d : Seling ime s L2 : Traveling disance mm 1 : Se speed mm/s 2 : Traveling speed mm/s 1 2 Speed Traveling disance L2 Table movemen Travel command a b d 15 16

9 Consideraion of Operaion Paerns Calculaion of marginal acceleraion ime Torque (hrus force) required for driving of precision posiioning able comes o he highes during acceleraion. Torque (hrus force) required for his acceleraion is limied by moor oupu orque (linear moor hrus force). Therefore, he marginal acceleraion ime wih able used horizonally is calculaed by he following equaion. For ball screw drive and iming bel drive Applied orque TL TLT0Wg NmBall screw drive 2 TLT0WgWedge reducion raio NmApplicable o TZ 2 r TLT0Wg NmTiming bel drive Acceleraion orque Ta 2N TaJTJMJCJL Nm 60a JLW 2 kgm 2 Ball screw drive 2 JLW 2 Wedge reducion raiokgm 2 2 Applicable o TZ 2 JLWr 2 kgm 2 Timing bel drive Torque required for acceleraion TP TPTLTaNm TPkTM Marginal acceleraion ime a 2N ajtjmjcjl k s [In case of AT] Applied orque TL TLT0Wg 2 60 TMTL Carrying mass ineria JL R0 JLW 2 2L Disance o roaor L Model m Lm AT120A AT200A AT300A T0 : Saring orque Nm Fricion coefficien of rolling guide (0.01) W : Carrying mass kg : Ball screw lead m r : Pulley pich radius (0.0159m) Efficiency 0.9 JT : Table ineria kgm 2 JM : Moor ineria kgm 2 JC : Coupling ineria JL : Carrying mass ineria kgm 2 N : Number of revoluions of moor min -1 a : Acceleraion ime s g : Graviy acceleraion (9.8m/s 2 ) TM : Moor oupu orque Nm For he sepper moor, i is he oupu orque a he number of moor revoluions N. For he AC servomoor, i is he maximum (momenary) orque a he number of revoluions N. k : Facor of safey (AC servomoor : 1.3) (sepper moor : 1.52) Wedge reducion raio : 0.5 in case of 1 : 2 : 0.25 in case of 1 : 4 R0 : Disance from he cener of he able o he cener of graviy of he load m L : Disance from he cener of he able o he roaor m In case of linear moor drive Force from acceleraion Fa FaWLWT N a Thrus force required for acceleraion FP FPFaFLN Marginal acceleraion ime a WLWTk a s FMFL : Fricion coefficien of rolling guide0.01 WT : Mass of moving able kg WL : Carrying mass kg FR : Running resisance N LT130H: 20N LT170H: 40N Fc : Cord pull-resisance 1 N LT Series: Abou 1.0N NT Series: None FM : Linear moor hrus force N maximum hrus a raveling speed a : Acceleraion ime s : Traveling speed m/s g : Graviy acceleraion 9.8 m/s 2 k : Facor of safey1.3 Noe 1 Cord pull-resisance varies depending on cord mass and how o pull i. Use he an expeced resisance value for calculaion. [In case of LTCE, LTLD] Fricion resisance of rolling guide Ff FfWLWTgN However, minimum value of Ff shall be as follows. For LT100CE: 2.5N For LT150CE: 5.0N For LT130LD: 6.0N For LT170LD: 6.0N Force from running resisance FL FLFfFcN [In case of LTH] Running resisance FR LT130H: 20N, LT170H: 40N Speed coefficien f Traveling speed m/s LT130H LT170H 0.5 or less 1 Above 0.5 and below Above 1.0 and below Force from running resisance FL FLf FRFcN [In case of NT38] Force from running resisance FL F L 0.25N [In case of NT55/NT80] Force from running resisance FL FL 1.5N [In case of NT80XZ] Force from running resisance FL Horizonal axis: FL 1.5N erical axis: FL 0.5N 2 [In case of NT90XZH] Force from running resisance FL Horizonal axis: FL 2.0N erical axis: FL 2.0N 2 [In case of NT88H] Force from running resisance FL FL 0.5N Noe 2 I is he resisance value for he sroke of 5mm from he equilibrium poin in he cener area of he sroke range, assuming he spring sysem balance mechanism of he verical axis. The value changes depending on he spring mouning posiion or he sroke widh in he acual calculaion. Please verify using he acual machine

10 Consideraion of Operaion Paerns In case of direc drive (SADE) [In case of SADE/XY] Fricion resisance of rolling guide Ff Ff value shall be as follows. In case of SA65DE/X 0.5N In case of SA120DE/X 3.0N Force from running resisance FL FLFfFcN Force from acceleraion Fa FaWLWT a N Thrus force required for acceleraion FP FPFaFLN Marginal acceleraion ime a WLWTk a s FMFL WT: Mass of moving able kg WL: Carrying mass kg Fc : Cord pull-resisance 1 N FM: Linear moor hrus force N maximum hrus a raveling speed a : Acceleraion ime s : Traveling speed m/s k : Facor of safey1.3 Noe 1 Cord pull-resisance varies depending on cord mass and how o pull i. Use he an expeced resisance value for calculaion. Calculaion of effecive orque and effecive hrus force As a large orque (hrus force) is required for acceleraion / deceleraion when he precision posiioning able is driven, he effecive orque (effecive hrus force) may become larger han he moor's raed orque (raed hrus) depending on he operaion rae of each paern in case he AC servomoor or linear moor drive is used. Coninuing he operaion in his condiion may cause overheaing and seizure of he moor. So ensure ha he effecive orque (effecive hrus force) is smaller han moor's raed orque (raed hrus). The effecive orque (effecive hrus force) by he operaion paern of able is calculaed by he following equaion. If he raed orque (raed hrus) of he moor is larger han he effecive orque (effecive hrus force), coninuous operaion according o he operaion paern is possible. If AC servomoor is used Effecive orque Trms Trms TP 2 a TP 2 TL 2 atl 2 c Nm Speed [In case of SADE/S] Fricion resisance of rolling guide Mf Mf value shall be as follows. In case of SA65DE/S 0.03Nm In case of SA120DE/S 0.1Nm In case of SA200DE/S 0.2Nm Torque from roaion resisance ML MLMfMcN Torque from acceleraion Ma R MaJLJT Nm a Torque required for acceleraion MP MPMaMLNm Marginal acceleraion ime a JLJTRk a s MMML JL : Ineria momen of load kgm 2 JT : Ineria momen of moving able kgm 2 Mc : Cord pull-resisance 1 Nm MM : Alignmen sage orque Nm a : Acceleraion ime s R : Traveling speed rad/s k : Facor of safey1.3 Noe 1 As here is no cord for -axis moving able, se he cord pull-resisance o 0 if he load does no pull cord. Calculae he ineria momen of load by referencing calculaion formulas below. In case of linear moor drive Effecive hrus force Frms Frms FP 2 a FP 2 FL 2 afl 2 c N In case of direc drive (SADE) Effecive hrus force (applicable o SADE/XY) Frms FP Frms 2 a FP 2 FL 2 afl 2 c N Torquehrus force Speedroaion speed TP FP TL FL a Ta Fa c 1 circle ime a Calculaion of ineria momen p: densiy, m: mass Cylinder Quadrangular prism Offse roaion r a b r3 Effecive orque (applicable o SADE/S) Mrms Mrms MP 2 a MP 2 ML 2 aml 2 c Nm Thrus forceorque FP MP FL ML Fa Ma c a c 1 circle ime a 1 JL pr mr JL pabca 2 b ma 2 b 2 12 JL J L mr 3 2 JL: Ineria momen from roaion cener JL : Ineria momen when roaing around he cener of graviy 19 20

11 Consideraion of Operaion Paerns Consideraion example of operaion paern If AC servomoor is used Usage condiions Mouning direcion Horizonal usage Carrying mass W 30kg Sroke lengh L 300mm Traveling speed (se speed) 300mm/s Acceleraion/deceleraion ime a 0.2s Consan speed raveling ime c 0.8s 1 cycle ime 2.0s Speed mm/s 300 Sroke lengh 300mm s Calculaion of orque required for acceleraion Applied orque TL TLTsWg Nm Acceleraion orque Ta 2 JLW kgm N min N TaJTJMJCJL 60a Nm In case of linear moor drive The effecive hrus force may exceed he raed hrus depending on he operaion rae of Linear Moor Table, leading o moor overheaing and seizure ha may cause breakage and human injury. Before operaions, ensure ha he effecive hrus force is below he raed hrus. Described below is an example of consideraion of operaion paern wih LT170HS. Temporarily se he operaion paern as indicaed below considering he carrying mass and acceleraion from he dynamic load mass char in page 288. Speed L STEP1 Calculaion of hrus force required for acceleraion Force from running resisance FL FLf FRFc N Force from acceleraion Fa FaWLWT a N 0.3 Thrus force required for acceleraion FP FPFaFL N A his poin, check ha he FPk (facor of safey) is below he hrus characerisics curve in page 288. If his value is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. You can see in he example paern ha i is below he hrus characerisics curve. Maximum hrus FM a 1.5m/sAbou 550N FPk NFM Torque N. m TP TL Temporary selecion of posiioning able Temporarily selec TU60S49/AT103G10S03. Basic specificaion Ball screw lead 10mm Sroke lengh 300mm Maximum speed 500mm/s Saring orque Ts 0.08Nm Table ineria JT kgm 2 Coupling ineria JC kgm 2 Moor specificaion Ta s AC servomoor used SGMA-01A Raed orque 0.318Nm Moor ineria JM kgm Torque required for acceleraion TP TPTLTa Nm A his poin, check ha he TPk (facor of safey) is smaller han moor's oupu orque TM. If his value is exceeded, review he maximum speed and acceleraion / deceleraion ime. For he operaion paern under consideraion, i is smaller han he oupu orque TM as indicaed below. TM Nm TPk NmTM Consideraion of effecive orque Effecive orque Trms TP Trms 2 atp2tl 2 atl 2 c Nm As moor's raed orque is larger han he effecive orque Trms, i can be judged ha coninuous operaion in he operaion paern under consideraion is possible. Thrus force FP FL Seing iems Model Mass of moving WT able Table Maximum hrus FM specificaion a raveling speed Running resisance FR Speed coefficien f Carrying mass WL 30kg Traveling disance L 1.2m Traveling speed (se speed) 1.5m/s a 0.3s c 0.5s 2.5s Cord pull-resisance Facor of safey Ambien emperaure Fa a c a LT170HS (naural air cooling) 4.0kg See page 303 Abou 550N See page 288 See [In case of LTH] in he secion of calculaion of marginal acceleraion ime. Fc 1.0N Expeced value k STEP2 Consideraion of effecive hrus force Effecive hrus force Frms can be obained as follows. FP Frms 2 a FP 2 FL 2 afl 2 c N A his poin, check ha Frms is below he raed hrus. If he raed hrus is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. (For LTH, hrus characerisics vary depending on ambien emperaure. See he raed hrus characerisics diagram.) For he example paern, he raed hrus is abou 117N a he ambien emperaure of 30, so he value is 103N 117N (raed hrus) and i can be judged ha coninuous operaion is possible

12 Consideraion of Operaion Paerns In case of Alignmen Sage SA The effecive hrus force may exceed he raed hrus (or he effecive orque exceeds he raed orque) depending on he operaion rae of Alignmen Sage SA, leading o moor overheaing and seizure ha may cause breakage and human injury. Before operaions, ensure ha he effecive hrus force is below he raed hrus (or he effecive orque is below he raed orque). Described below is an example of consideraion of operaion paern wih Alignmen Sage SA120DE/XYS. Temporarily se an operaion paern as indicaed below considering he marginal acceleraion ime. Seing iems Table model SA120DE/XYS Load mass WL 5.0kg Ineria momen of load JL kgm 2 Mass of moving able WT 5.9kg Se sroke L 0.01m Maximum speed 0.1m/s Acceleraion/deceleraion ime a 0.05s Consan speed raveling ime c 0.05s Cycle ime 0.4s Cord pull-resisance Fc 1.0N Mass of moving able WT 3.4kg Se sroke L 0.01m Maximum speed 0.1m/s Acceleraion / deceleraion ime a 0.05s Consan speed raveling ime c 0.05s Cycle ime 0.4s X-axis operaion paern Y-axis operaion paern STEP1 Calculaion of hrus force required for X-axis acceleraion Force from running resisance FL FLFfFc N Force from acceleraion Fa FaWLW T a N 0.05 Thrus force required for acceleraion FP FPFaFL N A his poin, check ha he FPk (facor of safey) is below he maximum hrus in page 264. If his value is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. You can see in he example paern ha i is below he maximum hrus. The maximum hrus FM of SA120DE/X70N FPk NFM Speed a c a STEP3 Consideraion of hrus force and effecive hrus force required for Y-axis acceleraion Perform he same calculaion as X-axis. If he operaion paern is he same, he condiion is ligher for Y-axis as is mass of moving able is smaller. So ha is omied in his example. STEP4 Consideraion of orque required for -axis acceleraion Torque from roaion resisance ML ML MfMc Nm Torque from acceleraion Ma R Ma JLJT a Nm 0.05 Torque required for acceleraion MP MP MaML Nm A his poin, check ha he MPk (facor of safey) is below he maximum orque in page 264. If his value is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. You can see in he example paern ha i is below he maximum orque. Maximum orque MM of SA120DE/S2.0Nm MPk NmMM STEP5 Consideraion of effecive orque Effecive orque Mrms can be obained as follows. Mrms MP 2 a MP 2 ML 2 aml 2 c Nm A his poin, check ha Mrms is below he raed orque. If he raed orque is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. In he example paern, i can be judged ha coninuous operaion is possible. Cauion If he load is offse from he roaion cener, X- and Y-axis acceleraion / deceleraion generaes orque load on he -axis. So exra care mus be exercised. paern operaion -axis Ineria momen of moving able JT kgm 2 Cord pull-resisance Fc Se operaing angle 1.0NL 0.1rad 18º Maximum speed R rad/s 180º/s Acceleraion/deceleraion ime a 0.05s Consan speed raveling ime c 0.05s Cycle ime 0.4s Cord pull-resisance Mc 0.0Nm Facor of safey k 1.3 STEP2 Consideraion of effecive hrus force Effecive hrus force Frms can be obained as follows. FP Frms 2 a FP 2 FL 2 afl 2 c N A his poin, check ha Frms is below he raed hrus. If he raed hrus is exceeded, review he maximum speed for operaing paern and acceleraion / deceleraion ime. In he example paern, i can be judged ha coninuous operaion is possible

13 Sensor Specificaion Precision posiioning able is equipped wih CW and CCW limi sensors for overrun prevenion and pre-origin and origin sensors for machine origin deecion. For some able models, hese sensors are provided as sandard equipmen, and for he oher models, mouning is specified by idenificaion numbers. Types of sensors used for Precision posiioning able are lised in Table 1 and specificaions of each sensor in Table 2 o 4. For connecor specificaions for NT, RT and TM, see Table 5.1 o 5.3. For oher ables, wires are unbound, so ha he sensor oupu connecor and maing-side mus be prepared separaely by cusomer. For sensor iming char, please see secion of sensor specificaions of each model. In addiion, unless oherwise saed, sensor posiions can be fine-adjused. Please make adjusmen on your own. Table 1 Sensor ypes Table model CW limi Pre-origin CW CCW Origin CCW limi A mark ube wih engraved signal name (ORG, PORG, CW or CCW) is insered ino he unbound-wire specificaion sheah. Sensor CW limi CCW limi Pre-originPORG OriginORG TEB 1 Proximiy sensor Proximiy sensor Proximiy sensor Proximiy sensor TU 1 Proximiy sensor Proximiy sensor Proximiy sensor Proximiy sensor TSLM Proximiy sensor Proximiy sensor Proximiy sensor Phoo sensor 2 TSLHMCTLHM Phoo sensor Phoo sensor Phoo sensor Phoo sensor 2 TXMCTXM Phoo sensor Phoo sensor Phoo sensor Phoo sensor 2 TCEB 1 Proximiy sensor Proximiy sensor Proximiy sensor Proximiy sensor 5 TM 1 4 Magneic sensor 5 Magneic sensor 5 Magneic sensor 5 Magneic sensor 5 TS55/55CT55/55 Micro swich 6 Micro swich 6 Proximiy sensor Phoo sensor TS75/75 Phoo sensor Phoo sensor Phoo sensor Phoo sensor TS/CT 1 CT75/75 Phoo sensor Phoo sensor Phoo sensor 5 Phoo sensor 5 Oher han lised above Phoo sensor Phoo sensor Phoo sensor Phoo sensor 2 TSLB Proximiy sensor Proximiy sensor Proximiy sensor Proximiy sensor LTCE 1 Proximiy sensor 3 Proximiy sensor 3 Proximiy sensor 3 Encoder 3 5 LTLD Inernal sensor 3 5 Inernal sensor 3 5 Inernal sensor 3 5 Encoder 3 5 LTH Proximiy sensor 3 5 Proximiy sensor 3 5 Proximiy sensor 3 5 Encoder 3 5 NT 1 Proximiy sensor Proximiy sensor Proximiy sensor Encoder 3 5 RT 1 Phoo sensor Phoo sensor Phoo sensor Encoder 3 5 AT Proximiy sensor 5 Proximiy sensor 5 AM Proximiy sensor Proximiy sensor Proximiy sensor 2 SADE Inernal sensor 3 5 Inernal sensor 3 5 Inernal sensor 3 5 Encoder 3 5 TZ Proximiy sensor 5 Proximiy sensor 5 Proximiy sensor 5 Proximiy sensor 2 5 Noes 1 Mouning a sensor is specified using he corresponding idenificaion number. For he oher models, sensors are equipped as sandard equipmen. 2 No origin sensor is provided if an aachmen for AC servomoor or linear encoder is seleced. Use C phase or Z phase signal of AC servomoor or linear encoder o be insalled on your own. For AM, only AC servomoor is seleced. 3 Each signal is oupu from applicable dedicaed programmable conrol uni or dedicaed driver. 4 Sensors are buil in he able and each signal is oupu from a dedicaed sensor amplifier. When he AC servomoor is used, use encoder's C phase for origin signals. 5 Sensor posiions canno be fine-adjused. 6 This is buil in he subsrae. Table 2 Phoo sensor specificaions Iem Manufacurer Shape (mm) Sensor Oupu connecor models 1 Power supply volage Curren consumpion Oupu Oupu operaion Operaion indicaion Circui diagram 13.4 PM-L PM-K54 Limi, pre-origin and origin PM-T54 Panasonic Indusrial Devices SUNX Co., Ld. CN-14H-C1 (lead lengh: 1 m) or CN-14H-C3 (lead lengh: 3 m) DC524 10% 15mA or less NPN ransisor open collecor Maximum inpu curren : 50mA Applied volage : 30DC or less Residual volage : 0.7 or less a inpu curren of 50mA 0.4 or less a 16mA ON/OFF upon ligh enrance; selecive 2 Main circui Red LED ON upon ligh enrance PM-L54 Noes 1 Seleced according o he applicable models. 2 For CT75/75, use OUT1 blackfor CW limi and CCW limi and OUT2 whiefor pre-origin and origin. For he oher models, use OUT1 blackfor all. Remarks 1. Wire he sensor cords on your own. 2. Lead runs off by a leas 200mm from he able end. Acual lengh varies depending on sroke lengh CC OUT1 OUT2 GND 22.2 brown black whie blue

14 Sensor Specificaion Table 3 Specificaions of proximiy sensor Iem Targe model number Oher han TZ TZ120, TZ200H and TZ200X TZ120X Manufacurer Azbil Corporaion OMRON Corporaion APM-D3B1-017 Pre-origin APM-D3B1F-019 APM-D3B1F-019 E2S-W14 1M Model APM-D3B1F-020 CW limi APM-D3B1-017 APM-D3B1-017 E2S-W14 1M CCW limi APM-D3B1-018 APM-D3B1F-019 E2S-W14 1M Origin APM-D3A1-013 APM-D3A1-013 E2S-W13B 1M Shape mm Deecion surface cener Hole for M Deecion surface Table 5.1 Connecor specificaions (NT55/SC and NT80/SC) Pin No. Signal name 1 2 Pre-origin 3 direcion limi 4 direcion limi Power inpufor pre-origin 8 GNDfor pre-origin Power inpu 9 for direcion limi 10 GNDfor direcion limi Power inpu 11 for direcion limi 12 GNDfor direcion limi Connecor used Produc of Molex Japan Co., Ld. Body side Housing R1 Terminal 1855TL Remark: Maing side mus be prepared by cusomer. Maing side Housing P1 Terminal 1854TL Table 5.2 Connecor specificaions (RT158A2) Pin No. Signal name Connecor used Tyco Elecronics Japan G.K. Body side 1 2 Pre-origin Housing CW limi 4 CCW limi Conacor 5 Power inpu GND Remark: Maing side mus be prepared by cusomer. Maing side Housing Conacor Power supply volage DC % Curren consumpion 10mA or less 13mA or less NPN open collecor Maximum inpu curren : 30mA or less (resisance NPN open collecor Maximum inpu curren : 50mA Oupu load) Applied volage : DC30 or less Applied volage : DC26.4 or less Residual volage : 1 or less a inpu Residual volage : 1 or less a inpu curren of 30mA curren of 50mA Pre-origin OFF in proximiy Oupu Limi OFF in proximiy operaion Origin ON in proximiy Pre-origin Orange LEDOFF upon deecion Operaion Limi Orange LEDOFF upon deecion indicaion Origin Orange LEDON upon deecion CC brown Table 5.3 Connecor specificaions (for TM) Pin No. Signal name 1 Origin 2 Pre-origin 3 CW limi 4 CCW limi 5 Power inpu 6 GND Connecor used Produc of Molex Japan Co., Ld. Body side Housing Terminal Maing side Housing Terminal Remarks: 1. Maing side mus be prepared by cusomer. 2. When he AC servomoor is used, use encoder's C phase or Z phase for origin signals. Circui diagram Main circui OUT black GND blue Remarks: 1. Wire he sensor cords on your own excep for NT/SC. 2. Lead runs off by a leas 200mm from he able end. Acual lengh varies depending on sroke lengh. Table 4 Specificaions of magneic sensor Sensor Iem Limi and pre-origin Origin Power supply volage DC % Curren consumpion 1 65mA or less NPN ransisor open collecor Maximum inpu curren : 12mA or less Oupu 2 Applied volage : DC36 or less Residual volage : 1.7 or less a inpu curren of 12mA 1.1 or less a inpu curren of 4mA Oupu operaion OFF in proximiy ON in proximiy CW limi Yellow LEDON upon deecion Operaion CCW limi Red LEDON upon deecion indicaion Pre-origin Red LEDON upon deecion Red LEDON upon deecion CC Circui diagram Main circui OUT Noes 1 Curren consumpion of he whole sysem including sensor amplifier. 2 Oupu per circui. 27 GND 28

15 Mouning Processing accuracy of mouning surface Accuracy and performance of Precision posiioning able are affeced by accuracy of maing mouning surface. Therefore, processing accuracy of he mouning surface mus be considered according o usage condiions such as required moion performance and posiioning accuracy. Reference flaness of he maing mouning surface under general usage condiions is indicaed in Table 6. In addiion, he base on which a able is mouned receives a large reacive force, so ake enough care abou he rigidiy of he base. Table 6 Accuracy of mouning surface Model uni: m Flaness of he mouning surface NTH 5 TX 8 TM TS/CT NT NTXZ 10 NTXZH SADE TSLHM 15 TEB TU TSLM 30 TCEB LT AM TSLB 50 Tighening orque for fixing screw Typical ighening orque o fix he Precision posiioning able is indicaed in Table 7. If sudden acceleraion / deceleraion occurs frequenly or momen is applied, i is recommended o ighen hem o 1.3 imes higher orque han ha indicaed in he able. In addiion, when high accuracy is required wih no vibraion and shock, i is recommended o ighen he screws o orque smaller han ha indicaed in he able and use adhesive agen o preven looseness of screws. Table 7 Screw ighening orque Bol size Seel Female hread componen Aluminum alloy Wih heliser uni: Nm M M M M Abou 60% of seel value Abou 80% of seel value M M M Noe 1 As ighening orque for NT, 1.1Nm is recommended. Precauion for Use Safey precauions Be sure o earh he ground erminal (The grounding resisance is 100 or less.). I may lead o elecric shock and fire. Use only he power volage indicaed on he device. Oherwise, i may lead o fire and malfuncion. Do no ouch any elecrical componen wih we hand. I may lead o elecric shock. Do no bend forcibly, wis, pull, hea or apply heavy load on he cord. I may lead o elecric shock and fire. Do no pu your finger ino any opening during able operaions. I may lead o injury. Do no ouch any moving par during able operaions. I may lead o injury. When removing he elecrical componen cover, be sure o urn he power off and disconnec he power plug. I may lead o elecric shock. Do no ouch he erminal for 5 minues afer shuing down he power. Oherwise, elecric shock due o residual volage may occur. When insalling / removing he connecion erminal, be sure o urn he power off and disconnec he power plug in advance.oherwise, i may lead o elecric shock and fire. Precauion for Use As precision posiioning able is a precision machine, excessive load or shock may impair accuracy and damage he pars. Take exra care when handling i. Check ha he able mouning surface is free from dus and harmful projecion. Use i in a clean environmen where i is no exposed o waer, oil and dus paricles. As grease is applied o he linear moion rolling guide inegraed wih precision posiioning able and ball screws, ake dus proecion measures o preven dus and oher foreign maers from enering ino he uni. If foreign maers ge mixed, horoughly eliminae he conaminaed grease and apply clean grease again. Though lubricaion frequency for precision posiioning able varies depending on usage condiions, wipe off old grease and apply clean grease again biannually for normal cases or every hree monhs for applicaions wih consan reciprocaing moions in long disance. In addiion, he Precision Posiioning Table in which C-Lube is buil delivers long-erm mainenance free performance. This reduces he need for he lubricaion mechanism and workload which used o be necessary for linear moion rolling guides and ball screws, allowing large-scale reducion of mainenance cos. As precision posiioning able is assembled hrough precise processing and adjusmens, do no disassemble or aler i. Linear moor drive producs have srong magnes inside. Noe ha any magneic objec around such produc may be araced. For use around any device vulnerable o magneism, please conac. Linear moor drive producs require parameer seings of programmable conrol uni or driver for driving. Securely configure parameer seings suiable for he drive moor. For Linear Moor Table LT series, moor cord, ec. is conneced o moving able, so a space for wiring of cord mus be ensured in addiion o he insallaion space for he main body. In addiion, arrange cord wiring wih sufficien curvaure so ha he running resisance does no increase or no excessive force is applied. The exernal appearance / specificaions of his produc can be modified for improvemens wihou noices