Scanning Electron Microscope FEI INSPECT F50. Step by step operation manual

Transcription

1 Scanning Electron Microscope FEI INSPECT F50 Step by step operation manual

2 Scanning Electron Microscope, FEI Inspect F50

3 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

4 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

5 How to Observe Your Specimen Software should be always running. Just switch on the monitor switch 1.Locate your specimen in the SEM chamber 1 Confirm SEM condition 1. Check vacuum level of SEM. Vacuum indicator (B) should be green Pressure (D) < 1.56e-4 mbar 2. Make sure the specimen holder will not touch the SEM column by CCD. C A 2 Vent Chamber 1. Click Vent(A). Wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray. 2. Open the door gently when the vacuum indicator (B) presented in gray High vacuum Middle of Evac / Vac Air condition 3 Mount and tighten the stub in the sample Holder using a screw B D Do not Screw Too Much 4 Check the height of stage with specimen using scale Adjust height of the sample holder including the stub. The maximum height must be below 10 of the scale. It is adjustable by turning the top of screw 2 after loosen a base of sample holder 1, or by using Z knob of the stage controller on the SEM chamber door. 5 Close the Door 1. Close the door with placing your hands and click Pump (C). 2. Waite until pressure (D) reach less than 1.56e-4mbar and the vacuum indicator (B) is presented in green. Sample holder Stub Platform Stage Base Stage base

6 FE-ESEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

7 6 Stage Preparation E Activate CCD monitor and make sure the sample holder will never hit the SEM column. Then click Centre position (E) in Stage tab. The sample holder moves to directly below the column, which is the centre position of SEM. * Confirm X and Y of the control panel (F) are also X=0 and Y=0. F 2. Electron Beam And Spot Size Settings H G Select appropriate acceleration voltage and spot size using pull down key or adjuster(g) and (H). *acceleration voltage and Spot Size is able to change during observation anytime during observation. High Voltage : 200 V ~ 30 kv Magnification : 30 x ~ 1,000,000 x 3. Rink Z to WD (Working Distance) I 1. Click Beam On (I).The Indicator now should be presented in green. If the indicator is presented in red, the filament may be broken. J 2. Increase magnification (J) little by little, while adjusting focus until 1000x. Magnification can be changed by pressing + and - on the keyboard; it can be double by + key, and make it half by - key. Also, magnification can be changed in the input directly. A blank column will be appeared after double-click the number above the slider. Enter the magnification of your choice. Pointer on the screen will become Arrow ( ) with right click of the mouse. Focus of the image can be adjusted by moving the arrow( ) from side to side. Same as focusing process, Stigma is adjustable by moving the mouse with right click while pressing Shift key.

8 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

9 4. After adjust focus, actual height (Z) MUST be linked to WD. Click (K). 5. Confirm the indication (K) is now displayed as (L) and WD and Z are also similar distance. WD(Working Distance) is distance between a just focus position on the specimen and SEM Column. K L L Before Link Height (z) and WD are different After Link Height (z) and WD are similar 4. Actual Observation, Capture and Saving Images A. Search An Area of Interest Track mode (effective at low magnification) : A yellow ball appears on the monitor by pressing a middle button of the mouse. Move it to any direction by a cursor. Get mode : An area ( or subject) of interest can be located to the centre of the monitor by left double click of the mouse. Arrow in the keyboard : An observation area moves to the direction of arrow for approx. 80 % of a field of view. Beam Shift Mode / effective at high magnification : a hand mark, which is represented as shift of electron beam, appears on the monitor by pressing a left button of the mouse while pressing [Ctrl]. A field of view can be moved by beam shift, without actual stage moving. B. Adjusting Focus and Stigma Use the Selected area frame (M) to adjust focus and stigma. The selected area frame allows changing magnification within the frame area only. Therefore, focus and stigma can make a fine adjustment while minimizing beam irradiation damage on the surface. 1. Adjust focus precisely. M 2. Adjust stigma if required. Cross-type arrow appears after right -click of the mouse while pressing Shift key. Move mouse in left and right for X-axis stigma while pressing Shift key, and then, move it in top and bottom for y-axis stigma. 3. Adjust focus again. Repeat process 1 and 2, until obtaining the finely adjusted image.

10 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

11 C. Adjusting Contrast and Brightness Click Auto contrast (N) Or, use sliding bar(o) of the user interface. Arrows (o-2) can change current condition finely, but knob at the centre (o-1) can change it coarsely. O-1 N O-2 D. Changing Scan Speed P Slow scan :Turtle (P) / Fast scan :Rabbit (Q) Scan speed can be changed by clicking Turtle or Rabbit. Setting of scanning speed can be changed following, Scan (R) Preference (S) Scanning (T) Q R T S E. Filter for imaging Select Live, Average, Integrate Live : Real-time imaging Average : Default setting / Fast scan will be useful during observation. However, in order to capture a fine image, Number of Flame should be set up four to 16. Integrate : The integrate mode is effective if materials are easily affected by the electrostatic charge. Scanning will be paused once automatically after integrated the set number of times.

12 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

13 V F. Capture images U 1. Adjust focus and stigma with appropriate scan speed and magnification. 2. Click Camera (U), or Press F2 button. Camera mode allows capturing images with the fixed scan speed, which is set up in Scan Preference. After each capturing, image on the monitor will be frozen. Pixel size of captured image is 1024 x 884; appropriate exposure time is 30 to 90 seconds. 3. After capturing process, Save as menu (V) appeared automatically. For image saving, you must create your own holder in the ESEM datastation (W). And then, save images. Do not create a holder in the SEM PC except the ESEM datastation. *Make sure those checkbox were selected W 4. Take out your data with your USB. and remove your date from the ESEM datastation immediately. Please make sure you saved all of your data in your USB. Data in the ESEM datastation will be deleted without prior notice.

14 FE-SEM-F Observation Flow Saving Data And Analysis Specimen preparation Error check Closing Procedure Start Observation ESEM FE-SEM-F FE-SEM-H FE-SEM-J Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor Mount Specimen on The Stub Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder Measure The Height of The Specimen Holder Set The Stage of SEM to The Specimen Switch On Electron Beam Insert The Specimen Holder into The SEM Chamber Select WD=12mm at 250x of The High Mag Mode Select Home Stage or Appropriate WD Adjust The Focus at The Present Condition Link (Z) to WD Gently Adjust The Actual Height of (z) Manually, for Focusing The Image With The WD You Choose Start Observation With The Low Magnification Save Images Low Vacuum / EDX BSD,STEM / EDX Switch Off Electron Beam Confirm The SEM Chamber by CCD Set The SEM Stage to The Specimen Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

15 5. Closing Procedure 1 1. Click Beam On 1 button to switch off the electron beam. 2. Confirm the stage height of SEM that will never hit the SEM column by CCD Click Vent 2 and, wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray. 3. Gently open the door and take out the specimen 4. Close the door and then click Pump 4. Wait until the chamber becomes the high vacuum condition, such as <1.56e mbar. 3 It is compulsory that confirming following conditions before you leave the room. PC monitor is showing inside of the chamber by CCD Vacuum indicator should be presented in green Keep running the SEM software Switch off the PC monitor only No error message or alarm are appeared

16 Closing Procedure Saving Data And Analysis FE-SEM-F Observation Flow - BSD, STEM and EDX Error check Specimen preparation Start Observation Save Images BSD STEM EDX Need to Change Detector * Contact us Analyze your Specimen Saving images and data Switch Off Electron Beam Confirm The SEM Chamber by CCD Take Out Specimen And Data Leave The Room After Verifying That The Error Message Does Not Appear

17 FE-SEM-F Observation Flow - BSD, STEM and EDX Cautionary note BSD STEM To attach detector is necessary. Please contact our staff. Both detectors fix to the bottom of the SEM column. So, you have to be seriously careful because you may give serious damages to both detectors if your specimen are not flat. Therefore, you have to confirm the actual position of stage through the CCD camera often, especially, when you want to change the stage position. Recommended observation condition BSD STEM Aperture Size 6 6 Acceleration Voltage Spot Size Higher than normal observation. You must find out the appropriate condition depending on your material, which the BSD and the STEM detectors are able to detect sufficient signals. Same as normal observation WD EDX Cooling the detector is necessary before starting analysis. It is very important to extend the detector s service life, cooling must be switched off. life Detector EDX SDD(Silicon Drift Detector) Aperture Size 6 Acceleration voltage Spot Size Theoretically, an appropriate acceleration voltage, which is 2-3 times higher than the energies of K-shell or L-shell of elements of interests, should be selected. Same as normal observation WD 10 Please contact our staff when you are not able to obtain sufficient signals during your experiments.