2006 IEEE WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES
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1 2006 IEEE WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES Boise Centre on the Grove April 14, 2006 WORKSHOP SPONSORS IEEE Electron Devices Society Boise Chapter Boise State University, College of Engineering Electrochemical Society (ECS) IEEE EDS Region 6 / SRC IEEE Boise Section Micron Foundation PARTICIPATING INSTITUTIONS American Semiconductor AMI Semiconductor Boise State University Micron Technology Montana State University/ Auburn University Oregon State University Sandia Laboratories SEMATECH TU Berlin University of Idaho University of Utah University of Tehran Washington State University
2 2006 IEEE Workshop on Microelectronics and Electron Devices Copyright 2006 by the Institute of Electrical and Electronics Engineers, Inc. All rights reserved. Copyright and Reprint Permission Abstracting is permitted with credit to the source. Libraries are permitted to photocopy beyond the limit of U.S. copyright law, for private use of patrons, those articles in this volume that carry a code at the bottom of the first page, provided that the per-copy fee indicated in the code is paid through the Copyright Clearance Center, 222 Rosewood Drive, Danvers, MA Other copying, reprint, or reproduction requests should be addressed to: IEEE Copyrights Manager, IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ IEEE Catalog Number: 06EX1374 (Softbound) 06EX1374C (CD-ROM) ISBN Softbound: Additional copies of this publication are available from IEEE Operations Center P.O. Box Hoes Lane Piscataway, NJ USA IEEE (FAX) customer.services@ieee.org
3 Preface... vii Program...ix Session Circuit Design S1p1 Indirect Feedback Compensation of CMOS Op-Amps... 3 Vishal Saxena, R. Jacob Baker S1p2 A CMOS Low Voltage Down-Converter Mixer for Sub 1V Applications... 5 M. B. Vahidfar, O. Shoaei S1p3 Shared Multiplier Design of a Digital Filter on a High-Temperature FPGA Module... 7 Bijan Houle, Vishu Gupta, Kevin Buck, Herbert L. Hess, Gregory Gregory, Randy Normann S1p4 40 Gbps SiGe Pattern Generator IC with Variable Clock Skew and Output Levels... 9 Matthew J. Zahller, George S. La Rue S1p5 High Speed Digital Input Buffer Circuits...11 Krishna Duvvada, Vishal Saxena, R. Jacob Baker MEMS Devices and Sensors S2p1 Polymer-based Thin Film Coils as a Power Module of Wireless Neural Interfaces...15 S. Kim, K. Buschick, K. Zoschke, M. Klein, M. Toepper, D. Black, R. Harrison, P. Tathireddy, F. Solzbacher S2p2 Design and Fabrication of a MEMS Capacitive Chemical Sensor System...17 Vishal Saxena, Todd J. Plum, Jeff R. Jessing, R. Jacob Baker S2p3 A High Sensitive Piezoresistive Sensor for Stress Measurements in Packaged Semiconductor Die...19 Ahsan Mian, Jeffrey C. Suhling, Richard C. Jaeger S2p4 Resistance Switching in SnxMnyTez-based Devices...21 Patrick K. Herring, Kristy A. Campbell S2p5 Metal/Semiconductor Contacts for Organic Molecules...23 Divesh Kapoor, Justin B. Jackson, Mark S. Miller iii
4 Processing and Reliability S3p1 S3p2 S3p3 S3p4 S3p5 Space Efficient ESD Methodology for Reliable High Volt Applications...27 John J. Naughton, Matthew Tyler, Muhammad Anser Time-Dependent Dielectric Breakdown of a Recessed Channel DRAM Access Device...29 T. Owens, D. Hwang, P. Vaidyanathan, K. Parekh Preliminary Study of NOR Digital Response to Single pmosfet Dielectric Degradation...31 T. L. Gorseth, D. Estrada, J. Kiepert, M. L. Ogas, B. J. Cheek, P.M. Price, R. J. Baker, G. Bersuker, W. B. Knowlton Ultra-Low-Power Dynamic-Threshold Digital Circuits in the FlexFET Independently-Double-Gated SOI CMOS Technology...33 S. Parke, K. DeGregorio, D. Hackler, D. Wilson Secondary Ion Mass Spectrometry Analysis of Wafer Contamination Resulting from Gloved Hands...35 Wendy Morinville, Chantelle Krasinski Poster Papers and Abstracts S4p01 Thermal Noise Limits in Nanoscale Electronics...39 M. Mudrow, W. Wanalertlak, L. Forbes S4p02 A Novel Triple Mode LNA Designed in CMOS 0.18 µm Technology for Multi-standard Receivers...41 M. B. Vahidfar, O. Shoaei S4p03 Power Dissipation and Temperature Variations in Nanoscale Devices...43 W. Wanalertlak, M. Y. Louie, L. Forbes S4p04 Micro-Sensor for Monitoring Oils...45 Brian M. Marx, Matthew Luke, Darryl P. Butt S4p05 Integrated Silicon Nanowire Diodes...47 Justin B. Jackson, Sun-Gon Jun, Divesh Kapoor, Mark S. Miller S4p06 Design of a MEMS Capacitive Chemical Sensor Based on Polymer Swelling...49 T. J. Plum, V. Saxena, J. R. Jessing S4p07 Introduction to Modeling an Imaging System with Human Detection of Artifacts...51 Vinesh Sukumar, Doug Warner, Patrick Doherty, Herbert Hess, Ken Noren, Steve Krone S4p08 Comparative Study of TaN-TiN and TiN Gate Stacks for Thermally Stable PFETs...53 Nirmal Ramaswamy, Allen Mcteer, Venkat Ananthan, Nanda Palaniappan, Tim Owens, Sanh Tang, Ravi Iyer, Shixin Wang, Chandra Mouli S4p09 Dependence of Si3N4 Film Properties on Precursor Chemistry...55 Fernando Gonzalez, Shyam Surthi, Parag Banerjee S4p10 Photo Sensitivities in a 0.35 µm 18 V PDMOS Technology...57 Brett Williams, Mike Thomason, Chuck Belisle iv
5 S4p11 Silicon Solar Cells Using Backside Contacts with Through-Wafer Interconnects...59 Aaron Erbe, A. J. Moll S4p12 CMOS Imager Pixel Design for Space Applications...61 Mark Elgin, Dede Russell, Matt Katula, Ryan Paulsen, Stephen Parke S4p13 Characterization of Negative Differential Resistance in Chalcogenide Devices Containing Silver...62 Armand Bregaj, Kristy A. Campbell Author Index...63 v
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