Development of a Low Cost, Low Power, Miniature Sector Mass Spectrometer with IonCCD Detection

Size: px
Start display at page:

Download "Development of a Low Cost, Low Power, Miniature Sector Mass Spectrometer with IonCCD Detection"

Transcription

1 Leidos Proprietary Development of a Low Cost, Low Power, Miniature Sector Mass Spectrometer with IonCCD Detection Leidos; MIT MTL; Northeastern University; OI Analytical

2 Development Team Noah Christian, Leidos, Inc. Deborah Hunka, Leidos, Inc. James Ha, Leidos, Inc. Tim McPhail, Leidos, Inc. Meredith Melendez, Leidos, Inc. Jean Sebastien Pradel, Leidos, Inc. Augie Ifarraguerri, Leidos, Inc. Dave Nichols, Leidos, Inc. Gottfried Kibelka, CMS Field Products Carol Livermore, Northeastern University Luis Fernando Velásquez García, Massachusetts Institute of Technology Chenye Yang, Massachusetts Institute of Technology 2 Funding by Leidos and Intelligence Advanced Research Projects Activity, Kristy DeWitt Program Manager The research is based upon work supported by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), via Air Force Research Laboratories contract FA C 9103, and work supported by Leidos Exploratory Research and Development Funding. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements, either expressed or implied, of the ODNI, IARPA, or the U.S. Government. The U.S. Government is authorized to reproduce and distribute reprints for Governmental purposes notwithstanding any copyright annotation thereon.

3 Program Goals Derive a new architecture for mass spectrometry that focuses on: Power efficiency Size Weight Ruggedness Simple and low cost Extend established mass spectrometry identification approaches to a small mass spectrometer Using Electron Impact Ionization Maximize library size Maximize identification Create an extensible and modular system for chemical identification 3

4 Mass Spectrometer Block Diagram Sample Inlet Ionization Source Ion Transfer Optics Mass Analyzer Detector Vacuum Pump Readout Electronics Algorithm/ Detection 4

5 System Features Low power non thermionic ionization system Electron tunneling using field emitter arrays Permanent magnet magnetic sector Does not use any power for mass separation Arrayed detector with an IonCCD Simultaneous detection of all ions. Short ion path length (ca. 5 cm) Higher pressure operation Lower power vacuum system System is not scanned or pulsed No loss of signal from duty cycle of ion source or mass filter/trap Simple/Rugged 5

6 Original Spectrometer Concept/Demonstrator Magnetic Sector 1T Permanent Magnet Scaled to detector Continuous injection No scanning Cu Target for Laser Desorption 6

7 Ardara Technologies Ionization Source High current with electron bias high current filament 70 ev typical 4-8 V diff e - flow +4-8 VDC bias over ion region Ion flux Detector Ion Region V typical 7

8 Advanced Electron Sources Fomani et al., TED 2014 Thick SiN / SiO insulator stack Htip 0.7 µm Gate Rap 1.5 µm Pt-coated emitter tip with improved stability 3 µm Si SiO SiN Poly-Si Single-gated Si field emitter arrays with 10 μm pitch (320K elements in 6mm 6mm active area) and 6 nm tip radius 8

9 NEMS CNT Electron Impact Ionizer IV Characteristics (ions) Highlights Max. Ionization Efficiency about 20% 21 mtorr operation ma-level electron current Ionization Eff. vs. Pressure 9

10 Ion Detector System IonCCD 3 μm 21 μm Read out circuitry and partial of 12 pixel Atomic Force Microscope picture of surface Wire bonded IonCCD on ceramic carrier The IonCCD is based on charge coupled device (CCD) technology. An added conductive layer creates capacitive charge detector elements. The IonCCD is optimized for the detection of positive ions. The IonCCD features 2126 active pixel over 5.1 cm Pixel dimension 1500 μm H X 21 μm W 88 % active area detection area Integration time = exposure time Currently integration from 80 μs to 5 s Read out time 2.4 ms serial read out of parallel pixel wells Readout time + exposure time = frame time 10

11 Simultaneous Detection of Spatially Resolved Ions Mass Spectrum of hexane 11

12 Ion Source with Entrance Lens Stack and Magnet Magnet Lens Stack Ion source Detector Array 12

13 Layout of Test Setup Ion source, ESA, Lens stack, and Assembly 3D printed parts: ESA, Lens Stack, outside holder Vacuum compatible Lens stack ESA Ion source (Ardara Technologies) 13

14 Chamber Design for Field Testing 14

15 First Ions Through System Intensity x10-5 Torr No lenses (H2O) Detector Position (mm) Active lens 9000 ESA Intensity Spectrum with 1 lens (a little more structure) Intensity Reference Spectrum from VQM (H2O) Detector Position (mm) mass-to-charge (Da) 15

16 Single Spectrum Data Dichloromethane Toluene Note Shoulder Note Shoulder Dichloromethane Toluene Working on improving resolution with lens optimization 16

17 Single Compound Spectra Show fairly stable response over time Exponentially Decreasing Sample Concentration 17

18 Multiple Compound Injections Isopropanol Dichloromethane Toluene 18

19 Acknowledgements The research is based upon work supported by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), via Air Force Research Laboratories contract FA C 9103, and work supported by Leidos Exploratory Research and Development Funding. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements, either expressed or implied, of the ODNI, IARPA, or the U.S. Government. The U.S. Government is authorized to reproduce and distribute reprints for Governmental purposes notwithstanding any copyright annotation thereon. 19

20 Abbreviations and Acronyms A Ampere(s) ca. circa/approximately CCD charge coupled device cm centimeter(s) Cu copper CNT carbon nanotube Da Dalton(s) diff differential e electron Eff efficiency ESA electrostatic analyzer ev electron Volt(s) GE gate to emitter H height H2O water Htip height of tip I(A) anode current I(I) ion current I(E) electron current IV Current versus Voltage ma milliampere(s) mm millimeter(s) ms millisecond(s) mtorr millitorricelli nm nanometer NEMS nanoelectromechanical system Rap radius of aperture foam micro foam m micrometer(s) s microsecond(s) IonCCD trade name for ion sensitive CCD s second(s) Si Silicon SiO Silicon oxide SiN Silicon nitride T Tesla(s) V Volt(s) VDC Volts direct current V(GE) gate to emitter voltage W width ZPMS zero power mass analyzer/spectrometer 20

Sub-mm Linear Ion Trap Mass Spectrometer Made Using Lithographically Patterned Ceramic Plates

Sub-mm Linear Ion Trap Mass Spectrometer Made Using Lithographically Patterned Ceramic Plates Sub-mm Linear Ion Trap Mass Spectrometer Made Using Lithographically Patterned Ceramic Plates Ailin Li Brigham Young University, Provo, UT Coauthors: Qinghao Wu, Yuan Tian, Derek Andrews, Aaron Hawkins,

More information

Cylindrical Toroidal Ion Trap Mass Spectrometer. Daniel Austin and Nick Taylor Brigham Young University, Provo, Utah

Cylindrical Toroidal Ion Trap Mass Spectrometer. Daniel Austin and Nick Taylor Brigham Young University, Provo, Utah Cylindrical Toroidal Ion Trap Mass Spectrometer Daniel Austin and Nick Taylor Brigham Young University, Provo, Utah Why miniaturize ion traps Geometrically compact Higher tolerance to pressure Amenable

More information

BioInstrumentation Laboratory

BioInstrumentation Laboratory BioInstrumentation Laboratory Ian Hunter Vienna, May 22 2013 BioInstrumentation Lab, Mechanical Engineering, MIT - Robotic endoscopes - Needle-free drug delivery devices - Eye micro-surgery robots - High

More information

Sematech 3D Interconnect Metrology. 3D Magnetic Field Imaging Applied to a 2-Die Through-Silicon-Via Device

Sematech 3D Interconnect Metrology. 3D Magnetic Field Imaging Applied to a 2-Die Through-Silicon-Via Device Sematech 3D Interconnect Metrology 3D Magnetic Field Imaging Applied to a 2-Die Through-Silicon-Via Device Antonio Orozco R&D Manager/Scientist Neocera, LLC Fred Wellstood Professor Center for Nanophysics

More information

AKM AK8973 and AK Axis Electronic Compass

AKM AK8973 and AK Axis Electronic Compass AKM AK8973 and AK8974 Process Review For comments, questions, or more information about this report, or for any additional technical needs concerning semiconductor and electronics technology, please call

More information

High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story

More information

M4 TORNADO PLUS. Innovation with Integrity. Super Light Element Micro-XRF Spectrometer. Micro-XRF

M4 TORNADO PLUS. Innovation with Integrity. Super Light Element Micro-XRF Spectrometer. Micro-XRF M4 TORNADO PLUS Super Light Element Micro-XRF Spectrometer Innovation with Integrity Micro-XRF M4 TORNADO PLUS - A New Era in Micro-XRF M4 TORNADO PLUS is the world's first Micro-XRF spectrometer that

More information

Introduction of New Products

Introduction of New Products Field Emission Electron Microscope JEM-3100F For evaluation of materials in the fields of nanoscience and nanomaterials science, TEM is required to provide resolution and analytical capabilities that can

More information

HIQUAD. New high-end mass spectrometer! Fast, flexible and easy to operate.

HIQUAD. New high-end mass spectrometer! Fast, flexible and easy to operate. New high-end mass spectrometer! Fast, flexible and easy to operate. New high-end mass spectrometer! Fast, flexible and easy to operate. A modular solution for mass spectrometry With the new HiQuad mass

More information

Goodix GF6648 Touch Fingerprint Sensor. Exploratory Analysis

Goodix GF6648 Touch Fingerprint Sensor. Exploratory Analysis Goodix GF6648 Exploratory Analysis 2 Some of the information in this report may be covered by patents, mask and/or copyright protection. This report should not be taken as an inducement to infringe on

More information

HR2000+ Spectrometer. User-Configured for Flexibility. now with. Spectrometers

HR2000+ Spectrometer. User-Configured for Flexibility. now with. Spectrometers Spectrometers HR2000+ Spectrometer User-Configured for Flexibility HR2000+ One of our most popular items, the HR2000+ Spectrometer features a high-resolution optical bench, a powerful 2-MHz analog-to-digital

More information

MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications

MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications Part I: RF Applications Introductions and Motivations What are RF MEMS? Example Devices RFIC RFIC consists of Active components

More information

PRISMAPLUS. The precise solution for mass spectrometry. Modular design. Powerful software. Wide range of applications.

PRISMAPLUS. The precise solution for mass spectrometry. Modular design. Powerful software. Wide range of applications. PRISMAPLUS The precise solution for mass spectrometry. Modular design. Powerful software. Wide range of applications. PRISMAPLUS The precise solution for mass spectrometry. The combination of high sensi

More information

NanoSpective, Inc Progress Drive Suite 137 Orlando, Florida

NanoSpective, Inc Progress Drive Suite 137 Orlando, Florida TEM Techniques Summary The TEM is an analytical instrument in which a thin membrane (typically < 100nm) is placed in the path of an energetic and highly coherent beam of electrons. Typical operating voltages

More information

Project by: Dr. Jorge A. Diaz. Physics School, University of Costa Rica, National Center for High Technology (CENAT)

Project by: Dr. Jorge A. Diaz. Physics School, University of Costa Rica, National Center for High Technology (CENAT) Test of a Miniature Double-Focusing Mass Spectrometer for the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) at the Advanced Space Propulsion Laboratory Project by: Dr. Jorge A. Diaz Physics School,

More information

SCANNING ELECTRON MICROSCOPY AND X-RAY MICROANALYSIS

SCANNING ELECTRON MICROSCOPY AND X-RAY MICROANALYSIS SCANNING ELECTRON MICROSCOPY AND X-RAY MICROANALYSIS Robert Edward Lee Electron Microscopy Center Department of Anatomy and Neurobiology Colorado State University P T R Prentice Hall, Englewood Cliffs,

More information

835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information

835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information 835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information The Revolutionary New Vacuum Quality Monitor World s Fastest, Accurate at low mass Single Gas Calibration Small

More information

Basic Functional Analysis. Sample Report Richmond Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel:

Basic Functional Analysis. Sample Report Richmond Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: Basic Functional Analysis Sample Report 3685 Richmond Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: 613-829-0414 www.chipworks.com Basic Functional Analysis Sample Report Some of the information in this

More information

Module 2: CMOS FEOL Analysis

Module 2: CMOS FEOL Analysis Module 2: CMOS FEOL Analysis Manufacturer Device # 2 About Chipworks Chipworks is the recognized leader in reverse engineering and patent infringement analysis of semiconductors and electronic systems.

More information

Manufacturer Part Number. Module 4: CMOS SRAM Analysis

Manufacturer Part Number. Module 4: CMOS SRAM Analysis Manufacturer Part Number description Module 4: CMOS SRAM Analysis Manufacturer Device # 2 Some of the information is this report may be covered by patents, mask and/or copyright protection. This report

More information

Then the mass spectrometer should go to the field, in your hand, small as possible, light as possible, and operated with light battery.

Then the mass spectrometer should go to the field, in your hand, small as possible, light as possible, and operated with light battery. My name is Mo Yang from Korea Basic Science Institute. Everybody here knows that a mass spectrometer is the most powerful analytical tool in chemistry. However, the target samples you want to analyze are

More information

STMicroelectronics VL53L0B ToF Proximity Sensor

STMicroelectronics VL53L0B ToF Proximity Sensor STMicroelectronics VL53L0B Basic Functional Analysis 1891 Robertson Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: 613-829-0414 chipworks.com Basic Functional Analysis 2 Some of the information in this

More information

X-ray generation by femtosecond laser pulses and its application to soft X-ray imaging microscope

X-ray generation by femtosecond laser pulses and its application to soft X-ray imaging microscope X-ray generation by femtosecond laser pulses and its application to soft X-ray imaging microscope Kenichi Ikeda 1, Hideyuki Kotaki 1 ' 2 and Kazuhisa Nakajima 1 ' 2 ' 3 1 Graduate University for Advanced

More information

photolithographic techniques (1). Molybdenum electrodes (50 nm thick) are deposited by

photolithographic techniques (1). Molybdenum electrodes (50 nm thick) are deposited by Supporting online material Materials and Methods Single-walled carbon nanotube (SWNT) devices are fabricated using standard photolithographic techniques (1). Molybdenum electrodes (50 nm thick) are deposited

More information

The SIRAD irradiation facility at the INFN - Legnaro National Laboratory

The SIRAD irradiation facility at the INFN - Legnaro National Laboratory The SIRAD irradiation facility at the INFN - Legnaro National Laboratory I. Introduction 2 The INFN - Legnaro National Laboratory (LNL) SIRAD beamline http://www.lnl.infn.it 3 What is SIRAD? SIRAD is the

More information

An Introduction to Laser Diodes

An Introduction to Laser Diodes TRADEMARK OF INNOVATION An Introduction to Laser Diodes What's a Laser Diode? A laser diode is a semiconductor laser device that is very similar, in both form and operation, to a light-emitting diode (LED).

More information

FTIR microscopy and imaging for failure analysis in electronics manufacturing

FTIR microscopy and imaging for failure analysis in electronics manufacturing FTIR microscopy and imaging for failure analysis in electronics manufacturing Application Note Author Steven M. Barnett, Ellen V. Miseo, and Wayne Jalenak Agilent Technologies, Inc. Introduction The electronics

More information

Multianode Photo Multiplier Tubes as Photo Detectors for Ring Imaging Cherenkov Detectors

Multianode Photo Multiplier Tubes as Photo Detectors for Ring Imaging Cherenkov Detectors Multianode Photo Multiplier Tubes as Photo Detectors for Ring Imaging Cherenkov Detectors F. Muheim a edin]department of Physics and Astronomy, University of Edinburgh Mayfield Road, Edinburgh EH9 3JZ,

More information

X-Ray Transport, Diagnostic, & Commissioning Plans. LCLS Diagnostics and Commissioning Workshop

X-Ray Transport, Diagnostic, & Commissioning Plans. LCLS Diagnostics and Commissioning Workshop X-Ray Transport, Diagnostic, & Commissioning Plans LCLS Diagnostics and Commissioning Workshop *This work was performed under the auspices of the U.S. Department of Energy by the University of California,

More information

MODULE I SCANNING ELECTRON MICROSCOPE (SEM)

MODULE I SCANNING ELECTRON MICROSCOPE (SEM) MODULE I SCANNING ELECTRON MICROSCOPE (SEM) Scanning Electron Microscope (SEM) Initially, the plan of SEM was offered by H. Stintzing in 1927 (a German patent application). His suggested procedure was

More information

WHITE PAPER MINIATURIZED HYPERSPECTRAL CAMERA FOR THE INFRARED MOLECULAR FINGERPRINT REGION

WHITE PAPER MINIATURIZED HYPERSPECTRAL CAMERA FOR THE INFRARED MOLECULAR FINGERPRINT REGION WHITE PAPER MINIATURIZED HYPERSPECTRAL CAMERA FOR THE INFRARED MOLECULAR FINGERPRINT REGION Denis Dufour, David Béland, Hélène Spisser, Loïc Le Noc, Francis Picard, Patrice Topart January 2018 Low-cost

More information

Progress in Standoff Surface Contaminant Detector Platform

Progress in Standoff Surface Contaminant Detector Platform Physical Sciences Inc. Progress in Standoff Surface Contaminant Detector Platform Julia R. Dupuis, Jay Giblin, John Dixon, Joel Hensley, David Mansur, and William J. Marinelli 20 New England Business Center,

More information

Newer process technology (since 1999) includes :

Newer process technology (since 1999) includes : Newer process technology (since 1999) includes : copper metalization hi-k dielectrics for gate insulators si on insulator strained silicon lo-k dielectrics for interconnects Immersion lithography for masks

More information

Feature-level Compensation & Control

Feature-level Compensation & Control Feature-level Compensation & Control 2 Sensors and Control Nathan Cheung, Kameshwar Poolla, Costas Spanos Workshop 11/19/2003 3 Metrology, Control, and Integration Nathan Cheung, UCB SOI Wafers Multi wavelength

More information

Bosch Sensortec BMI160 Low Power IMU

Bosch Sensortec BMI160 Low Power IMU Bosch Sensortec BMI160 Basic Functional Analysis 1891 Robertson Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: 613-829-0414 chipworks.com Basic Functional Analysis 2 Some of the information in this report

More information

Scanning Electron Microscopy Basics and Applications

Scanning Electron Microscopy Basics and Applications Scanning Electron Microscopy Basics and Applications Dr. Julia Deuschle Stuttgart Center for Electron Microscopy MPI for Solid State Research Room: 1E15, phone: 0711/ 689-1193 email: j.deuschle@fkf.mpg.de

More information

Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors

Micro-sensors - what happens when you make classical devices small: MEMS devices and integrated bolometric IR detectors Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors Dean P. Neikirk 1 MURI bio-ir sensors kick-off 6/16/98 Where are the targets

More information

Lecture 20: Optical Tools for MEMS Imaging

Lecture 20: Optical Tools for MEMS Imaging MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 20: Optical Tools for MEMS Imaging 1 Overview Optical Microscopes Video Microscopes Scanning Electron

More information

830 Vacuum Quality Monitor

830 Vacuum Quality Monitor Granville-Phillips Vacuum Instrumentation 830 Vacuum Quality Monitor Featuring ART MS Technology February 2011 1 What is ART MS? ART MS Anharmonic Resonant Trap Mass Spectrometry or Auto Resonant Ion Trap

More information

The Development of Miniature Electron Multipliers for Use In Portable Mass Spectrometers

The Development of Miniature Electron Multipliers for Use In Portable Mass Spectrometers The Development of Miniature Electron Multipliers for Use In Portable Mass Spectrometers *Bruce N. Laprade, Lenny Erickson William G. Dunn and Reginald Farr BURLE Electro-Optics Sturbridge MA Paper 10400-2100

More information

Optical Characterization and Defect Inspection for 3D Stacked IC Technology

Optical Characterization and Defect Inspection for 3D Stacked IC Technology Minapad 2014, May 21 22th, Grenoble; France Optical Characterization and Defect Inspection for 3D Stacked IC Technology J.Ph.Piel, G.Fresquet, S.Perrot, Y.Randle, D.Lebellego, S.Petitgrand, G.Ribette FOGALE

More information

PrismaPlus. The New Mass Spectrometer with the Added Plus! Modular Design. Powerful Software. Wide Range of Applications.

PrismaPlus. The New Mass Spectrometer with the Added Plus! Modular Design. Powerful Software. Wide Range of Applications. PrismaPlus The New Mass Spectrometer with the Added Plus! Modular Design. Powerful Software. Wide Range of Applications. PrismaPlus The PrismaPlus innovation The optimum combination of high sensitivity,

More information

Scanning electron microscope

Scanning electron microscope Scanning electron microscope 5 th CEMM workshop Maja Koblar, Sc. Eng. Physics Outline The basic principle? What is an electron? Parts of the SEM Electron gun Electromagnetic lenses Apertures Detectors

More information

Simulation of High Resistivity (CMOS) Pixels

Simulation of High Resistivity (CMOS) Pixels Simulation of High Resistivity (CMOS) Pixels Stefan Lauxtermann, Kadri Vural Sensor Creations Inc. AIDA-2020 CMOS Simulation Workshop May 13 th 2016 OUTLINE 1. Definition of High Resistivity Pixel Also

More information

True simultaneous ICP-OES for unmatched speed and performance

True simultaneous ICP-OES for unmatched speed and performance True simultaneous ICP-OES for unmatched speed and performance Technical overview Introduction The Agilent 700 Series ICP-OES spectrometers combine state-of-the-art echelle optical design with innovative

More information

A Portable Scanning Electron Microscope Column Design Based on the Use of Permanent Magnets

A Portable Scanning Electron Microscope Column Design Based on the Use of Permanent Magnets SCANNING VOL. 20, 87 91 (1998) Received October 8, 1997 FAMS, Inc. Accepted with revision November 9, 1997 A Portable Scanning Electron Microscope Column Design Based on the Use of Permanent Magnets A.

More information

Micro Analytical Instruments - A System Approach. Jörg Müller Institut für Mikrosystemtechnik

Micro Analytical Instruments - A System Approach. Jörg Müller Institut für Mikrosystemtechnik Micro Analytical Instruments - A System Approach Jörg Müller Institut für Mikrosystemtechnik Technische h Universität i Hamburg-Harburg H b Outline Motivation Political Political Issues Design Principles

More information

Today s Outline - January 25, C. Segre (IIT) PHYS Spring 2018 January 25, / 26

Today s Outline - January 25, C. Segre (IIT) PHYS Spring 2018 January 25, / 26 Today s Outline - January 25, 2018 C. Segre (IIT) PHYS 570 - Spring 2018 January 25, 2018 1 / 26 Today s Outline - January 25, 2018 HW #2 C. Segre (IIT) PHYS 570 - Spring 2018 January 25, 2018 1 / 26 Today

More information

Vixar High Power Array Technology

Vixar High Power Array Technology Vixar High Power Array Technology I. Introduction VCSELs arrays emitting power ranging from 50mW to 10W have emerged as an important technology for applications within the consumer, industrial, automotive

More information

Material analysis by infrared mapping: A case study using a multilayer

Material analysis by infrared mapping: A case study using a multilayer Material analysis by infrared mapping: A case study using a multilayer paint sample Application Note Author Dr. Jonah Kirkwood, Dr. John Wilson and Dr. Mustafa Kansiz Agilent Technologies, Inc. Introduction

More information

Layout Analysis Floorplan

Layout Analysis Floorplan Sample Report Analysis from a Touch Screen Controller For any additional technical needs concerning semiconductor and electronics technology, please call Sales at Chipworks. 3685 Richmond Road, Suite 500,

More information

Performance characteristics of a new wide range, fast settling electrometer design for a residual gas analysis mass spectrometer

Performance characteristics of a new wide range, fast settling electrometer design for a residual gas analysis mass spectrometer Performance characteristics of a new wide range, fast settling electrometer design for a residual gas analysis mass spectrometer MKS Spectra Products, January 2010 Design considerations for RGA components

More information

Kit for building your own THz Time-Domain Spectrometer

Kit for building your own THz Time-Domain Spectrometer Kit for building your own THz Time-Domain Spectrometer 16/06/2016 1 Table of contents 0. Parts for the THz Kit... 3 1. Delay line... 4 2. Pulse generator and lock-in detector... 5 3. THz antennas... 6

More information

ESCALAB 250: High Performance Imaging XPS

ESCALAB 250: High Performance Imaging XPS Application Note: 31063 ESCALAB 250: High Performance Imaging XPS Key Words Surface Analysis High Resolution High Sensitivity Multitechnique Parallel Imaging Introduction The Thermo Scientific ESCALAB

More information

Ion Assisted Deposition Processes for Precision and Laser Optics

Ion Assisted Deposition Processes for Precision and Laser Optics Ion Assisted Deposition Processes for Precision and Laser Optics H. Ehlers, T. Groß, M. Lappschies, and D. Ristau Laser Zentrum Hannover e.v. Germany Introduction Ion assisted deposition (IAD) processes

More information

LC/MS/MS. Page Header. triple quadrupole mass spectrometer.

LC/MS/MS. Page Header. triple quadrupole mass spectrometer. LC/MS/MS VARIAN, INC. 320-MS Page Header triple quadrupole mass spectrometer www.varianinc.com VARIAN, INC. 320-MS Unsurpassed commitment to innovation Varian, Inc. is an innovator and leader in mass spectrometry

More information

Integrated Sensors. David Cumming Department of Electronics and Electrical Engineering University of Glasgow

Integrated Sensors. David Cumming Department of Electronics and Electrical Engineering University of Glasgow Integrated Sensors David Cumming Department of Electronics and Electrical Engineering University of Glasgow Outline Microelectronics Medical Devices Sensing-system-on-chip Extracellular ion imaging Cheap

More information

EE119 Introduction to Optical Engineering Fall 2009 Final Exam. Name:

EE119 Introduction to Optical Engineering Fall 2009 Final Exam. Name: EE119 Introduction to Optical Engineering Fall 2009 Final Exam Name: SID: CLOSED BOOK. THREE 8 1/2 X 11 SHEETS OF NOTES, AND SCIENTIFIC POCKET CALCULATOR PERMITTED. TIME ALLOTTED: 180 MINUTES Fundamental

More information

PRISMAPRO. The latest generation of compact mass spectrometers. Modular design. Powerful software. Low detection limit.

PRISMAPRO. The latest generation of compact mass spectrometers. Modular design. Powerful software. Low detection limit. The latest generation of compact mass spectrometers. Modular design. Powerful software. Low detection limit. The latest generation of compact mass spectrometers. The combination of high sensi tivity, maximum

More information

Carbon Nanotube Bumps for Thermal and Electric Conduction in Transistor

Carbon Nanotube Bumps for Thermal and Electric Conduction in Transistor Carbon Nanotube Bumps for Thermal and Electric Conduction in Transistor V Taisuke Iwai V Yuji Awano (Manuscript received April 9, 07) The continuous miniaturization of semiconductor chips has rapidly improved

More information

ANALYTICAL MICRO X-RAY FLUORESCENCE SPECTROMETER

ANALYTICAL MICRO X-RAY FLUORESCENCE SPECTROMETER Copyright(c)JCPDS-International Centre for Diffraction Data 2001,Advances in X-ray Analysis,Vol.44 325 ANALYTICAL MICRO X-RAY FLUORESCENCE SPECTROMETER ABSTRACT William Chang, Jonathan Kerner, and Edward

More information

Residual Gas Analyzers XT Series

Residual Gas Analyzers XT Series Residual Gas Analyzers XT Series Products from ExTorr Inc. - Pirani, Ion Gauge, Quadrupole - All Included The Extorr XT residual gas analyzer is a quadrupole mass spectrometer complete with a built-in

More information

Packaging Fault Isolation Using Lock-in Thermography

Packaging Fault Isolation Using Lock-in Thermography Packaging Fault Isolation Using Lock-in Thermography Edmund Wright 1, Tony DiBiase 2, Ted Lundquist 2, and Lawrence Wagner 3 1 Intersil Corporation; 2 DCG Systems, Inc.; 3 LWSN Consulting, Inc. Addressing

More information

Strip Detectors. Principal: Silicon strip detector. Ingrid--MariaGregor,SemiconductorsasParticleDetectors. metallization (Al) p +--strips

Strip Detectors. Principal: Silicon strip detector. Ingrid--MariaGregor,SemiconductorsasParticleDetectors. metallization (Al) p +--strips Strip Detectors First detector devices using the lithographic capabilities of microelectronics First Silicon detectors -- > strip detectors Can be found in all high energy physics experiments of the last

More information

ABSTRACT. Supported by U.S. DoE grant No. DE-FG02-96ER54375

ABSTRACT. Supported by U.S. DoE grant No. DE-FG02-96ER54375 ABSTRACT A CCD imaging system is currently being developed for T e (,t) and bolometric measurements on the Pegasus Toroidal Experiment. Soft X-rays (E

More information

Narrow line diode laser stacks for DPAL pumping

Narrow line diode laser stacks for DPAL pumping Narrow line diode laser stacks for DPAL pumping Tobias Koenning David Irwin, Dean Stapleton, Rajiv Pandey, Tina Guiney, Steve Patterson DILAS Diode Laser Inc. Joerg Neukum Outline Company overview Standard

More information

attocfm I for Surface Quality Inspection NANOSCOPY APPLICATION NOTE M01 RELATED PRODUCTS G

attocfm I for Surface Quality Inspection NANOSCOPY APPLICATION NOTE M01 RELATED PRODUCTS G APPLICATION NOTE M01 attocfm I for Surface Quality Inspection Confocal microscopes work by scanning a tiny light spot on a sample and by measuring the scattered light in the illuminated volume. First,

More information

Novel piezoresistive e-nose sensor array cell

Novel piezoresistive e-nose sensor array cell 4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria Novel piezoresistive e-nose sensor array cell V.Stavrov a, P.Vitanov b, E.Tomerov a, E.Goranova b, G.Stavreva a

More information

Technical Explanation for Displacement Sensors and Measurement Sensors

Technical Explanation for Displacement Sensors and Measurement Sensors Technical Explanation for Sensors and Measurement Sensors CSM_e_LineWidth_TG_E_2_1 Introduction What Is a Sensor? A Sensor is a device that measures the distance between the sensor and an object by detecting

More information

Components for Surface Analysis PHOIBOS 150 NAP. Near Ambient Pressure Hemispherical Energy Analyzer

Components for Surface Analysis PHOIBOS 150 NAP. Near Ambient Pressure Hemispherical Energy Analyzer Customized Systems and Solutions Nanostructures and Thin Film Deposition Surface Analysis and Preparation Components Surface Science Applications Components for Surface Analysis PHOIBOS 150 NAP Near Ambient

More information

JEM-F200. Multi-purpose Electron Microscope. Scientific / Metrology Instruments Multi-purpose Electron Microscope

JEM-F200. Multi-purpose Electron Microscope. Scientific / Metrology Instruments Multi-purpose Electron Microscope Scientific / Metrology Instruments Multi-purpose Electron Microscope JEM-F200 Multi-purpose Electron Microscope JEM-F200/F2 is a multi-purpose electron microscope of the new generation to meet today's

More information

Indiana University JEM-3200FS

Indiana University JEM-3200FS Indiana University JEM-3200FS Installation Specification Model: JEM 3200FS Serial Number: EM 15000013 Objective Lens Configuration: High Resolution Pole Piece (HRP) JEOL Engineer: Michael P. Van Etten

More information

Fast Laser Raman Microscope RAMAN

Fast Laser Raman Microscope RAMAN Fast Laser Raman Microscope RAMAN - 11 www.nanophoton.jp Fast Raman Imaging A New Generation of Raman Microscope RAMAN-11 developed by Nanophoton was created by combining confocal laser microscope technology

More information

Partial Replication of Storms/Scanlan Glow Discharge Radiation

Partial Replication of Storms/Scanlan Glow Discharge Radiation Partial Replication of Storms/Scanlan Glow Discharge Radiation Rick Cantwell and Matt McConnell Coolescence, LLC March 2008 Introduction The Storms/Scanlan paper 1 presented at the 8 th international workshop

More information

Production of HPDs for the LHCb RICH Detectors

Production of HPDs for the LHCb RICH Detectors Production of HPDs for the LHCb RICH Detectors LHCb RICH Detectors Hybrid Photon Detector Production Photo Detector Test Facilities Test Results Conclusions IEEE Nuclear Science Symposium Wyndham, 24 th

More information

CHAPTER 6 CARBON NANOTUBE AND ITS RF APPLICATION

CHAPTER 6 CARBON NANOTUBE AND ITS RF APPLICATION CHAPTER 6 CARBON NANOTUBE AND ITS RF APPLICATION 6.1 Introduction In this chapter we have made a theoretical study about carbon nanotubes electrical properties and their utility in antenna applications.

More information

Evaluation of Confocal Microscopy. for Measurement of the Roughness of Deuterium Ice. Ryan Menezes. Webster Schroeder High School.

Evaluation of Confocal Microscopy. for Measurement of the Roughness of Deuterium Ice. Ryan Menezes. Webster Schroeder High School. Evaluation of Confocal Microscopy for Measurement of the Roughness of Deuterium Ice Webster Schroeder High School Webster, NY Advisor: Dr. David Harding Senior Scientist Laboratory for Laser Energetics

More information

Low Voltage Electron Microscope

Low Voltage Electron Microscope LVEM5 Low Voltage Electron Microscope Nanoscale from your benchtop LVEM5 Delong America DELONG INSTRUMENTS COMPACT BUT POWERFUL The LVEM5 is designed to excel across a broad range of applications in material

More information

CRL MASS SPECTROMETRY FACILITY INSTRUMENT USER MANUAL MALDI MICRO. Operating Instructions. Basement Spec Lab:

CRL MASS SPECTROMETRY FACILITY INSTRUMENT USER MANUAL MALDI MICRO. Operating Instructions. Basement Spec Lab: CRL MASS SPECTROMETRY FACILITY INSTRUMENT USER MANUAL MALDI MICRO Operating Instructions Basement Spec Lab: 00.097 crs Page of 2 This is a guide to using the MALDI Micro for those who have received training.

More information

Figure 7 Dynamic range expansion of Shack- Hartmann sensor using a spatial-light modulator

Figure 7 Dynamic range expansion of Shack- Hartmann sensor using a spatial-light modulator Figure 4 Advantage of having smaller focal spot on CCD with super-fine pixels: Larger focal point compromises the sensitivity, spatial resolution, and accuracy. Figure 1 Typical microlens array for Shack-Hartmann

More information

Scanning Electron Microscopy. EMSE-515 F. Ernst

Scanning Electron Microscopy. EMSE-515 F. Ernst Scanning Electron Microscopy EMSE-515 F. Ernst 1 2 Scanning Electron Microscopy Max Knoll Manfred von Ardenne Manfred von Ardenne Principle of Scanning Electron Microscopy 3 Principle of Scanning Electron

More information

Investigating the Electronic Behavior of Nano-materials From Charge Transport Properties to System Response

Investigating the Electronic Behavior of Nano-materials From Charge Transport Properties to System Response Investigating the Electronic Behavior of Nano-materials From Charge Transport Properties to System Response Amit Verma Assistant Professor Department of Electrical Engineering & Computer Science Texas

More information

Miniature Spectrometer Technical specifications

Miniature Spectrometer Technical specifications Miniature Spectrometer Technical specifications Ref: MSP-ISI-TEC 001-02 Date: 2017-05-05 Contact Details Correspondence Address: Email: Phone: IS-Instruments Ltd. Pipers Business Centre 220 Vale Road Tonbridge

More information

Applications Information

Applications Information Applications Information Window Materials % TRANSMISSION 100 90 80 70 60 50 40 30 20 10 UV Sapphire UV Quartz Pyrex & Glass 100 200 300 400 500 600 700 800 900 Wavelength (nm) Pyrex only In applications

More information

Supporting Information. Epitaxially Aligned Cuprous Oxide Nanowires for All-Oxide, Single-Wire Solar Cells

Supporting Information. Epitaxially Aligned Cuprous Oxide Nanowires for All-Oxide, Single-Wire Solar Cells Supporting Information Epitaxially Aligned Cuprous Oxide Nanowires for All-Oxide, Single-Wire Solar Cells Sarah Brittman, 1,2 Youngdong Yoo, 1 Neil P. Dasgupta, 1,3 Si-in Kim, 4 Bongsoo Kim, 4 and Peidong

More information

August 14, SOFTHARD Technology Ltd. Lesna 52, Marianka Slovak Republic

August 14, SOFTHARD Technology Ltd. Lesna 52, Marianka Slovak Republic August 14, 2009 SOFTHARD Technology Ltd Lesna 52, 900 33 Marianka Slovak Republic http://www.softhard.sk 1 Table of Contents 1 Table of Contents... 2 2 Revision History... 3 3 Disclaimers... 4 4 Privacy

More information

An Introduction to CCDs. The basic principles of CCD Imaging is explained.

An Introduction to CCDs. The basic principles of CCD Imaging is explained. An Introduction to CCDs. The basic principles of CCD Imaging is explained. Morning Brain Teaser What is a CCD? Charge Coupled Devices (CCDs), invented in the 1970s as memory devices. They improved the

More information

Performance of Microchannel Plates Fabricated Using Atomic Layer Deposition

Performance of Microchannel Plates Fabricated Using Atomic Layer Deposition Performance of Microchannel Plates Fabricated Using Atomic Layer Deposition Andrey Elagin on behalf of the LAPPD collaboration Introduction Performance (timing) Conclusions Large Area Picosecond Photo

More information

Iron Powder Core Selection For RF Power Applications. Jim Cox Micrometals, Inc. Anaheim, CA

Iron Powder Core Selection For RF Power Applications. Jim Cox Micrometals, Inc. Anaheim, CA HOME APPLICATION NOTES Iron Powder Core Selection For RF Power Applications Jim Cox Micrometals, Inc. Anaheim, CA Purpose: The purpose of this article is to present new information that will allow the

More information

Lecture 2. Part 2 (Semiconductor detectors =sensors + electronics) Segmented detectors with pn-junction. Strip/pixel detectors

Lecture 2. Part 2 (Semiconductor detectors =sensors + electronics) Segmented detectors with pn-junction. Strip/pixel detectors Lecture 2 Part 1 (Electronics) Signal formation Readout electronics Noise Part 2 (Semiconductor detectors =sensors + electronics) Segmented detectors with pn-junction Strip/pixel detectors Drift detectors

More information

Capacitive sensors capancdt

Capacitive sensors capancdt Capacitive sensors capancdt Measuring principle capacitive sensors - Principle of ideal plate capacitor - Two plate electrodes are represented by sensor and measurement object - Measurement on insulators

More information

Superior ICP-OES optical design for unmatched speed and performance

Superior ICP-OES optical design for unmatched speed and performance Superior ICP-OES optical design for unmatched speed and performance Technical Overview 5110 ICP-OES Introduction The Agilent 5110 ICP-OES combines a vertical torch, unique dual view and synchronous dual

More information

Photoresist erosion studied in an inductively coupled plasma reactor employing CHF 3

Photoresist erosion studied in an inductively coupled plasma reactor employing CHF 3 Photoresist erosion studied in an inductively coupled plasma reactor employing CHF 3 M. F. Doemling, N. R. Rueger, and G. S. Oehrlein a) Department of Physics, University at Albany, State University of

More information

Adaptive Focal Plane Array - A Compact Spectral Imaging Sensor

Adaptive Focal Plane Array - A Compact Spectral Imaging Sensor Adaptive Focal Plane Array - A Compact Spectral Imaging Sensor William Gunning March 5 2007 Report Documentation Page Form Approved OMB No. 0704-0188 Public reporting burden for the collection of information

More information

The Extrel MAX Systems are UHV-compatible flange mounted Quadrupole Mass

The Extrel MAX Systems are UHV-compatible flange mounted Quadrupole Mass The Extrel MAX Systems are UHV-compatible flange mounted Quadrupole Mass Spectrometers. The Ionizer, Quadrupole Mass Filter, and Detector on a Mounting Flange are designed for inclusion in your experimental

More information

Autoresonant Trap Mass Spectrometry

Autoresonant Trap Mass Spectrometry 8 th Harsh Environment Mass Spectrometry Wokshop Autoresonant Trap Mass Spectrometry (ART MS) Sept 21, 2011 Gerardo A. Brucker and G. Jeffery Rathbone Granville-Phillips Vacuum Instrumentation Brooks Automation,

More information

Microscopic Structures

Microscopic Structures Microscopic Structures Image Analysis Metal, 3D Image (Red-Green) The microscopic methods range from dark field / bright field microscopy through polarisation- and inverse microscopy to techniques like

More information

The Simulation, Design, and Fabrication of Optical Filters

The Simulation, Design, and Fabrication of Optical Filters Rose-Hulman Institute of Technology Rose-Hulman Scholar Graduate Theses - Physics and Optical Engineering Graduate Theses 11-2017 The Simulation, Design, and Fabrication of Optical Filters John-Michael

More information

Product Range Electronic Units

Product Range Electronic Units Pyramid Technical Consultants, Inc. 1050 Waltham Street Suite 200 Lexington, MA 02421 TEL: +1 781 402-1700 TEL (UK): +44 1273 492001 FAX: (781) 402-1750 EMAIL: SUPPORT@PTCUSA.COM Product Range Electronic

More information