835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information

Transcription

1 835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information

2 The Revolutionary New Vacuum Quality Monitor World s Fastest, Accurate at low mass Single Gas Calibration Small size and low outgasing Lowest Power (80% less) Now with new options 2

3 What is a Mass Spectrometer? Ionizer Mass Spectrometer Mass Separator Magnetic Sector, Quadrupole or Ion Trap Detector Partial Pressure Measurement A small fraction of the gas molecules are ionized (+ ions), and the resulting ions are separated, detected and measured according to their mass tocharge ratios (m/z). The ion signals sensed and measured by the Detector provide an indirect measurement of partial pressures in a high vacuum gas environment. 2 Ionizer Field Replaceable Filament Assembly Ion Trap Mass Separator Electron Multiplier Detector 3

4 Autoresonant Ion Trap Mass Separator Ionizer e 130 Vdc 685Vdc.5V P P 2MHz to 200KHz in 80msec 125 Vdc Electrostatic t ti Ion Trap: Ions confined by purely electrostatic fields oscillate at a resonant frequency inversely proportional to m / z Where, m is mass, z is the total charge of the ion Autoresonance: RF scan pushes ions when scan frequency matches ion s resonant frequency Electrostatic confinement = Ultra low power requirements 4

5 Mass Separator Modern Trends Mass Separation methodology defines the type of mass spectrometer Magnetic Sector and Quadrupoles are prevalent technologies The Electrostatic t ti Ion Trap is the new generation of low mass separation technology Quadrupole MS Ion Trap MS Ion Source Stable Trajectory To Detector Ion Source Ion Beam Trapped Ions To Detector Entry Plate Unstable Trajectory Exit Plate Ionization is outside the mass separator Mass filter one m/z at a time Mass dependent throughput Slow scanning Ionization is inside the trap Ion Trap all ions stored together Mass dependent ejection Fast spectral output 5

6 Why is it 20 Times Faster? Autoresonant Ion Trap MS vs. Quadrupole RGA Quad RGA = 1.5 sec, Ion Trap MS= 70 msec amu scan How much information you get in a 70 msec scan Quadrupole N (14) H 2 O (18) O 2 (32) N 2 /CO (28) Ar (40) CO 2 (44) Ion Trap MS How much resolution Quadrupole missed and gas detection you Freon (fluorocarbon) get in 1.5 seconds CF 3 C 2 F 3 H 2 Quadrupole missed Water Mass (amu) Ion Trap MS 6

7 Can it see Hydrogen? Low Mass Scan Capabilities High Resolution Low Mass Spectra Excellent He detection capabilities Leak detection p Excellent Hydrogen detection capabilities No quadrupole Zero Blast! 7

8 What is Zero Blast? Quadrupole mass filters exhibit poor performance at low masses: Zero Blast + Poor Resolution. o The RF amplitudes at low masses are too low to stop all ions from reaching the detector leading to a zero blast starting at 0 amu and extending as far as 4 amu. The baseline for the low mass spectrum is raised. Hydrogen which is an amu of 1 cannot be detected clearly in standard RGAs. No zero blast problem with ART MS. 8

9 Low Mass Comparison 9

10 VQM Resolution Typical Resolving power 150X 10

11 835 VQM Improvements Over 830 VQM Field replaceable electron multiplier Better dynamic range (approximately 2x better) Software interface allows other software programs to control and receive partial pressure information from the VQM amu available as an option Scan range can be controlled so you don t need to scan the entire range Audio for leak detect VQI (Vacuum Quality Index) which allows you to create an equation and drive alarms or the digital output on the controller o For example: Drive output if Water is less than 20% AND Argon is >37% AND O2 is <24% Histogram display of partial pressures (instead of only normalized) Log files in both the software and Excel Auto Tune adjusts gauge parameters for optimum performance 11

12 The New 835 VQM With 300 amu option 300 amu system is optional 12

13 VQI (Vacuum Quality Index) Can drive alarms and digital output based on total pressure and partial pressure measurements o Example: Drive output if Total Pressure < 5E-7 AND Argon < 51% AND Nitrogen >.5% 13

14 VQM System Hookup 14

15 835 Product Specifications Parameter Specification Pressure Range UHV to 110 1x10 55 Torr Mass Range Resolution Dynamic Range Scan Time Operating Temp amu or amu 150 typical, 100 minimum 2 decades single scan, >3 decades with averaging 125 Msec for 300 amu, 85 msec for 145 amu 0 50 o Cfor gauge, 0 40 o Cfor controller Power 15W max, 8W typ, 75W max with Communications USB 2.0 Operating System Windows XP 32 bit, Windows7 32 or 64 bit 15

16 VQM Controller Highlights 15 W power requirement (without Total pressure Kit. 75 Watts with TPMK) USB 2.0 Interface SCPI Command set Total Pressure Kit Connectivity 125 msec- 300 amu scan range Multiple l trigger modes External Analog In (total pressure.) Trigger Out can be driven by VQI equation 16

17 835 VQM Viewer: Tune Screen Graph Calibrate Advanced d Settings - Raw signal - Peak selection - Sensor control - Denoised signal - Gaussian fit - Current values 17 - Histogram - Gaussian Fit - Calibration controls Communications Header - Revision info, status, etc

18 VQM System With Ethernet API Process Control Computer Ethernet Router VQM Computer VQM Controller USB 18 Runs: Process control API Runs: Data analysis Service Viewer App (with optional keyboard/monitor)

19 Ion Trap Gauge Configurations YG-1N No Envelope Accessible Multiplier No Port Screen YG-1D Demountable Envelope Accessible Multiplier Removable Port Screen 19

20 Replaceable Filament Assembly The 835 sensor has a single Yttria coated Iridium Filament in a field replaceable assembly. Filament life should be similar to an ion gauge filament in same application i 20

21 Field Replaceable Electron Multiplier The 835 sensor has an electron multiplier li li in a field replaceable assembly. Electron multipliers wear out over time Lifetime is based on usage 21

22 835 VQM Features Summary Highly Differentiated! Fast (Scan time 85ms for amu scan) Large Pressure Range UHV to 10-5 Torr Full or amu measurement range Unprecedented low power requirements (15W) Single point mass axis calibration Comprehensive, easy to use viewer Electronics remote from sensor Electronics not paired to the sensor 22