830 Vacuum Quality Monitor

Transcription

1 Granville-Phillips Vacuum Instrumentation 830 Vacuum Quality Monitor Featuring ART MS Technology February

2 What is ART MS? ART MS Anharmonic Resonant Trap Mass Spectrometry or Auto Resonant Ion Trap Mass Spectrometry 2

3 What is a Mass Spectrometer? Mass Spectrometer Ionizer Mass Separator Magnetic Sector, Quadrupole or Ion Trap Detector Partial Pressure Measurement A small fraction of the gas molecules are ionized (+ ions), and the resulting ions are separated, detected and measured according to their mass-to-charge ratios (m/z). The ion signals sensed and measured by the Detector provide an indirect measurement of partial pressures in a high vacuum gas environment. 2 Ionizer Field Replaceable Filament Assembly Ion Trap Mass Separator Electron Multiplier Detector 3

4 Mass Separator Modern Trends Mass Separation methodology defines the type of mass spectrometer Magnetic Sector and Quadrupoles are prevalent technologies The Electrostatic Ion Trap is the new generation of low mass separation technology Quadrupole MS Ion Trap MS Ion Source Stable Trajectory To Detector Ion Source Ion Beam Trapped Ions To Detector Entry Plate Unstable Trajectory Exit Plate Ionization is outside the mass separator Mass filter - one m/z at a time Mass-dependent throughput Slow scanning Ionization is inside the trap Ion Trap - all ions stored together Mass dependent ejection Fast spectral output 4

5 Ion Trap Mass Separator 0 Vdc 0 Vdc -1000Vdc Electrostatic fields trap the ions and the ions oscillate within the trap Similar to gravity causing a pendulum on a clock to oscillate back and forth Electrostatic Ion Trap: Ions confined by purely electrostatic fields oscillate at a resonant frequency inversely proportional to m / z Where, m is mass, z is the total charge of the ion Electrostatic confinement = Ultra-low power requirements 5

6 The Magic of Autoresonance M/z (Ion) Linear Amplitude and Oscillation Frequency Sweep RF When the RF hits the resonant frequency of each M/z, the M/z autoresonates with the RF, increasing the amplitude of the M/z until the amplitude exceeds the length of the trap. One M/z at a time are ejected in this manner. detector AMU 1 Ion Resonant Frequency AMU 1 Autoresonance detector AMU 135 Ion Resonant Frequency Continuous Sweep RF Frequency 2 MHz to 2KHz AMU 135 Autoresonance detector 6

7 ART MS vs. Quadrupole RGA Quad RGA = 1.5 sec, Ion Trap MS= 70 msec amu scan How much information you get in a 70 msec scan Quadrupole N (14) H 2 O (18) O 2 (32) N 2 /CO (28) Ar (40) CO 2 (44) Ion Trap MS How much resolution and gas detection you get in 1.5 seconds Quadrupole missed Freon (fluorocarbon) CF 3 C 2 F 3 H 2 Quadrupole missed Water Mass (amu) Ion Trap MS 7

8 Low Mass Scan Capabilities High Resolution Low Mass Spectra Excellent He detection capabilities Leak detection Excellent Hydrogen detection capabilities No quadrupole Zero Blast! 8

9 What is Zero Blast? Quadrupole mass filters exhibit poor performance at low masses: Zero Blast + Poor Resolution. The RF amplitudes at low masses are too low to stop all ions from reaching the detector leading to a zero blast starting at 0 amu and extending as far as 4 amu. The baseline for the low mass spectrum is raised. Hydrogen which is an amu of 1 cannot be detected clearly in standard RGAs. No zero blast problem with ART MS. 9

10 830 Vacuum Quality Monitor System 830 VQM Controller 830 VQM Viewer Software 830 VQM Sensor Total Pressure Kit 10

11 VQM Controller Highlights 15 W power requirement (without Total pressure Kit. 75 Watts with TPMK) USB 2.0 Interface 830 Command set Total Pressure Kit Connectivity 85 msec- 135 amu scan range Multiple trigger modes External Analog In (total pressure.) 11

12 830 VQM Viewer Software Highlights Intuitive GUI Single point Calibration Top 10 Gas Display Library of 10 Gases Mass Spectrum Output Leak detection Pressure vs. Time Control Gauge Settings Logging 12

13 830 VQM Viewer: Summary Screen 13

14 830 VQM Viewer: Leak Screen 14

15 830 VQM Viewer: Tune Screen Graph - Raw signal - Denoised signal - Histogram - Gaussian Fit Calibrate - Peak selection - Gaussian fit - Calibration controls Advanced Settings - Sensor control - Current values Communications Header - Revision info, status, etc 15

16 830 VQM Features Summary Highly Differentiated! Fast (Scan time <100ms) Large Pressure Range UHV to 10-5 Torr Full amu measurement range Unprecedented low power requirements (15W) Single point mass axis calibration Comprehensive, easy to use viewer Electronics remote from sensor Electronics not paired to the sensor 16

17 Supplemental Slides 830 VQM Controller 830 VQM Viewer Software 830 VQM Sensor Total Pressure Kit 17

18 830 Product Specifications Parameter Pressure Range Mass Range Resolution Dynamic Range Scan Time Operating Temp Specification UHV to 10-5 Torr amu 150 typical, 100 minimum 2 decades single scan, >3 decades with averaging 85 msec 0-50 o C for gauge, 0-40 o C for controller Power 15W max, 8W typ, 75W max with Communications USB 2.0 Operating System Windows XP 32 bit, Windows7 32 or 64 bit 18

19 ART MS Timeline Novel electrostatic ion trap mass spectrometry technology first disclosed by A. V. Ermakov and B. J. Hinch, Rutgers University, end of Highly differentiated technology recognized by Brooks Automation, Inc. as potential candidate for development of Gas Analysis Instrumentation line, October ART MS technology acquired from Rutgers University, November Research, Development and productization by Dr. Gerardo Brucker VQM 830 announcement April 2010, SVC TechCon. 19

20 Scientific Literature Ermakov AV, Hinch BJ., An electrostatic autoresonant ion trap mass spectrometer, Rev. Sci. Instrum. 81 (2010) G. Brucker and K. Van Antwerp, Comparison of Ion Trap Mass Spectrometer and Quadrupole Mass Spectrometer, Soc. Of Vacuum Coaters, TechCon 2009, Santa Clara, CA, Technical Presentation E-2, May 11, G. Brucker and J. G. Rathbone, Autoresonant Trap Mass Spectrometry (ART MS) for Remote Sensing Applications, Int. J. Mass Spectrom., accepted for publication. Multiple International and US Patents in the pipeline. 20

21 Ion Ejection Low Amplitude RF Ionizer e - Detector Ions oscillate axially at a resonant frequency Inversely proportional to (m/z)1/2 Ion en erg y Ground (Electrostatic Mirror) -HV 0 V (Transition Plate) Ampl. Ground (Electrostatic Mirror) -HV -L 0 L Ion positio n A low amplitude RF frequency scan mass selectively pumps ions and ejects them from the trap. Low amplitude RF signal = Ultra-low power requirement 21

22 frequency The magic of Autoresonance Ionized molecules oscillate at a unique resonant frequency that is determined by their mass/charge ratio (m/z) ƒ R0 dƒ R0 Auto-Resonant behavior A ƒ R Sweep RF ƒ R1 dƒ R1 detector Ions escape the trap and are detected time 22

23 VQM 830 Ion Trap Gauge Off-axis Ionization Source Field Replaceable Filament Assembly 2 Compensation Electrode Detector- Electron Multiplier 23

24 Resolution Typical Resolving power 150X 24