Micro Electro Mechanical Systems Programs at MTO. Clark T.-C. Nguyen Program Manager, DARPA/MTO

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3 Micro Electro Mechanical Systems Programs at MTO Clark T.-C. Nguyen Program Manager, DARPA/MTO

4 Microsystems Technology Office Technology for Chip-Level Integration of E. P. M.

5 MEMS Application Domains Shear-Stress Stress Sensor for Jet Fighter (Caltech) MEMS Exploder for Torpedoes Pico Satellites (Aerospace Corp) DARPA M E M S MEMS Sensors for Munitions

6 Land Applications of MEMS MEMS Sensors for Munitions

7 Sea Applications of MEMS MEMS Exploder for Torpedoes

8 Sea Applications of MEMS MEMS Exploder for Torpedoes

9 Air Applications of MEMS Shear-Stress Stress Sensor for Jet Fighter (Caltech)

10 Space Applications of MEMS Pico Satellites (Aerospace Corp)

11 Wireless Integrated Sensors 4Allow remote maintenance, health monitoring, and environmental monitoring Army NTC / Aberdeen PG Integrated Sensors USS Rushmore

12 Micro Power Generation 4Harness fuels with higher energy density Li Battery Methane Methanol Ethanol Diesel Gasoline Propane Energy Density (kw-hr/kg)

13 Micro Rotary Engine Micro Rotor [University of California at Berkeley]

14 Micro Combustion Chamber Inlet & Exhaust Tubes Thermocouples Reactor 5 mm Ignition Wire Alumina reactor with 200-µm µm-wide Pt-coated square channels [Princeton]

15 Thermoelectric Combustion 4Maximize thermoelectric surfaces between hot and cool regions ~ 5 mm Combustion Volume Products Reactants 3-D Toroidal Swiss-Roll Microcombustor/Generator [Univ. of Southern Cal.]

16 Micro Fuel Cell Current Collectors Anode Catalyst Cathode Catalyst Proton Exchange Membrane Fuel Manifold Laser-Milled Carbon Gas Channels Fuel Distributor Micro Fuel Cell [Case Western Reserve Univ.]

17 Nano Mechanical Array Signal Processors >100X reduction in size and power consumption over conventional frequency processors Free-Free Beam Vibrating Micromechanical Resonator [University of Michigan]

18 So Many Off-Chip Passives Passives pose a bottleneck against miniaturization of wireless handsets Quartz Quartz RF Crystal RF Filter Filter Crystal Inductors Inductors (ceramic) Transistor Transistor Capacitors IF Capacitors IF Filter (ceramic) Filter Chips Chips Resistors (SAW) Resistors (SAW) IF IF Filter Filter (SAW) (SAW)

19 Miniaturization of Transceivers 4Replace off-chip passives with MEMS

20 MEMS-Based Receiver Blocks Antenna Switch Bandpass Filter (Ceramic) Off-chip passive elements Ant 1 Ant 2 Ant 1 Ant 2 T/R Switch VCO Xstal Tank Conventional Super-Heterodyne Receiver Image Reject Filter (Ceramic) RF LNA Mixer Receiver with Numerous Off-chip Passives Channel Select PLL LNA IF Filter (Ceramic) AGC IF PLL IF LNA Introduce MEMS Mechanical Mixer-Filter IF Mixer IF Mixer 90 = ADC ADC ADC I Q I Antenna Switch Mechanical RF Channel Selector Fully IntegratedVc MEMS-Based Receiver Mechanical Switchable Resonator IF PLL 90 Mechanical Resonators ADC >100X power reduction (<3 mw) >100X size reduction (<0.8 cm 2 ) >10X improvement in spectral eff. & BW Q

21 Large Arrays of Micro Resonators v in Decoder v in v out Spectrum Analyzer / Fourier Signal Transformer A few µm A few µm Tracking Filter / Discriminator / Programmable Equalizer v in v out v in Frequency Converter v out Parametric Amplifier / Digital Demodulator / Envelope Detector

22 Chip-Scale Atomic Clocks Modulated Laser 133 Cs vapor at 10 7 torr Photo Detector Mod f Atomic Clock Concept GHz Resonator in Vacuum VCSEL Cs or Rb Glass Detector Substrate MEMS and Photonic Technologies Chip-Scale Atomic Clock

23 Miniaturization of Atomic Clocks NIST- F1 Vol: : ~3.7 m 3 Power: ~500 W Acc: HP 5071A NG MC250 Datum R2000 Kernco Temex RMO NIST CPT cell CSAC State-of- Practice State-of- Research Vol: : 1 cm 3 Power: 30 mw Acc:

24 CSAC-Enabled Enhancements 4High channel selectivity and enhanced channel density for VHF/UHF comm. 25kHz f Conventional Channel High-Selectivity f High-Density f Spacing Channels Channels SINCGARS Radio 4Better resilience against jamming 4Extended silence in radios

25 P/Y-Code Acquisition Time (s) CSAC s Applied to Navigation 4 Direct P/Y-code acquisition fast acquisition at low power 4 Missile and munitions guidance g-hard precision clocks Desired Maximum GPS Receiver Clock Uncertainty Examples of Use: GPS Position Location Reporting System (GPS PLRS) - Fielded units: ~100,000 & growing Future Joint Tactical Radio System (JTRS) - Potential fielding: ~300,000 (FY10) 9,000 commercial handheld GPS deployed in Desert Storm

26 Z-axis Gyroscope MEMS: An Enabling Technology Picosatellite Constellation Polychromator Micromechanical Filter Using MEMS-Based Thrusters [Nguyen, U. Michigan] Auto-Folding Fabrication [B.TRW] Hocker, Honeywell] [D. Lewis, Techniques MEMS-Enabled Activities and there is much more to be done Memory Card [B. Boser, UC Berkeley] Space Process/ Materials Data Storage [G. Whitesides, Harvard] Inertial Signal/ Micro Meas. [T. Davis, Kionix] CommBubble Actuators Power Units Actuator [C.-M. Ho, UCLA] Flux Control[R. Savinell, CWRU] Support Sensor

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