3D Optical Motion Analysis of Micro Systems. Heinrich Steger, Polytec GmbH, Waldbronn

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1 3D Optical Motion Analysis of Micro Systems Heinrich Steger, Polytec GmbH, Waldbronn SEMICON Europe 2012

2 Outline Needs and Challenges of measuring Micro Structure and MEMS Tools and Applications for optical MEMS Measurements Topography Measurement Out-of-Plane Vibration Measurement In-Plane Vibration Measurement Video Stroboscopy 3D-Vibrometry => Status and new Developments Polytec GmbH 10/17/2012 # 2

3 Challenge of measuring MEMS Optimization of vibrational behavior Simulations (FEM) are providing good first estimations and impressions Results have to be validated by measurement data Various applications require specific measurement techniques Optimization of the geometry Information like topography, geometry and values for roughness, waviness or flatness are of interest Resonance frequencies are depending on geometry parameters Wafer level testing Polytec GmbH 10/17/2012 # 3

4 Challenge of measuring MEMS Why do I need optical measurement techniques? MEMS usually involve active moving elements for sensing and actuation Micro mirrors, beams, accelerometers, gyroscopes, membranes, pressure sensors, RF-switches Electrical test can prove if a device is working or not, but electrical testing can t determine exact behavior of device. can t provide animated mode shapes or display motion. Polytec GmbH 10/17/2012 # 4

5 Challenge of measuring MEMS Why do I need optical measurement techniques? MEMS usually involve active moving elements for sensing and actuation Micro mirrors, beams, accelerometers, gyroscopes, membranes, pressure sensors, RF-switches Electrical test can prove if a device is working or not, but electrical testing can t determine exact behavior of device. can t provide animated mode shapes or display motion. Polytec GmbH 10/17/2012 # 5

6 MSA Micro System Analyzer Optical Setup Interferometer Measurement Techniques Vibration Laser-Doppler Vibrometry Video Microscopy Geometry Confocal Auto Focus White-Light Interferometry Polytec GmbH 10/17/2012 # 6

7 MSA Micro System Analyzer MSA-500 System Fiber-Optic Interferometer Measurement Head Junction Box Data Management System Vibrometer Controller Polytec GmbH 10/17/2012 # 7

8 MSA Micro System Analyzer: Topography Analysis Properties and Benefits of WLI Integrated WLI enables static topography measurement Measurement of curvature, step heights and flatness Pixel resolution: µm View field: mm Z-Scan range: 0.25 mm Z-resolution: down to 0.25 nm Polytec GmbH 10/17/2012 # 8

9 MSA Micro System Analyzer: Topography Examples: 3D Topography Micro engine Membrane pressure sensor Micro gear Biochip Polytec GmbH 10/17/2012 # 9

10 MSA Micro System Analyzer: In-Plane Motion Properties of Stroboscopic Videomicroscopy Motion analysis of the full field-of-view. Large displacements of small objects can be studied. Length of strobe pulses defines the maximum velocity which can be measured. Method works well up to a few MHz. Acoustic environmental noise is aliased to the measurement frequency band. Long data acquisition time due to low frame rate of camera. Vibration amplitude resolution is in the range of nm. Polytec GmbH 10/17/2012 # 10

11 MSA Micro System Analyzer: In-Plane Motion In-Plane Motion of Yaw Rate Sensors Measurement results: Resonance frequency: 1498 Hz Polytec GmbH 10/17/2012 # 11

12 MSA Micro System Analyzer: In-Plane Motion Visualization Gyro In-Plane Motion Polytec GmbH 10/17/2012 # 12

13 MSA Micro System Analyzer: Ouf-of-plane Motion Properties of Laser-Doppler Vibrometry (MSA) Broad-bandwidth measurement up to 24 MHz Picometer vibration-amplitude resolution Frequency response functions in real-time Velocity amplitudes up to 20 m/s Laser beam can be focused with 100x microscope objective to less then 1 µm diameter. Polytec GmbH 10/17/2012 # 13

14 MSA Micro System Analyzer: Ouf-of-plane Motion Heterodyne Interferometer specimen measurement beam He-Ne Laser <1 mw (633 nm) stray light Bragg cell v f D 2 v λ Doppler shift f c reference beam s res 8 h Pm Pr 1 Hz P P 2 m r 3 fm Hz detector Polytec GmbH 10/17/2012 # 14

15 MSA Micro System Analyzer: Ouf-of-plane Motion Broadband Demodulation Displacement decoder Moving object j ref Dj x(t) U Sensor f ref f mod j ref j mod f ref f j v(t) x(t) v(t)=dx/dt j ref U Velocity decoder Phase (displacement) or frequency (velocity) can be demodulated Broad bandwidth demodulation of the carrier signal makes the heterodyne interferometer a Laser-Doppler-Vibrometer. Polytec GmbH 10/17/2012 # 15

16 UHF-120 Ultra High Frequency Vibrometer High-Frequency (> 24 MHz) Applications RF MEMS NEMS DRIVE ELECTRODE RESONATOR SENSE ELECTRODE BAW or SAW Filters Ultrasound Imaging Ultrasonic Motors Laser Ultrasonics Polytec GmbH 10/17/2012 # 16

17 UHF-120 Ultra High Frequency Vibrometer The System for Frequencies up to 1.2 GHz UHF-I-120 x-y-stage Polytec GmbH 10/17/2012 # 17

18 UHF-120 Ultra High Frequency Vibrometer Example: SAW filter, 262 MHz Polytec GmbH 10/17/2012 # 18

19 MSA-050-3D Micro System Analyzer Real-time µ-3d Dynamics You need and want real-time 3D dynamics of microstructrues? Combine 3 simultaneous measurement beams! v y v z v x Polytec GmbH # 19

20 MSA-050-3D Micro System Analyzer Real-time µ-3d Dynamics Non-contact and non-destructive measurements of 3-D movement of surfaces on fine-mechanical components and micro systems. Three heterodyne interferometers simultaneously acquire three linear velocity components of a sample point. Polytec GmbH # 20

21 MSA-050-3D Micro System Analyzer Real-time µ-3d Dynamics v y Coordinate transformation v z v x The MSA-050-3D is suitable for making measurements on rough and non-mirroring surfaces which reflect at least small amount of the laser light into the respective sensor head by scattering. Polytec GmbH # 21

22 MSA-050-3D Micro System Analyzer Hard Disk Slider Analysis Polytec GmbH # 22

23 3D-Vibration Measurement Obtaining In-Plane Vibration Macro world: Rough surfaces scatter light large objects Micro world: Flat surfaces reflect light tiny objects Spot size 25 µm 3 mm Spot size 0.7 µm - 10 µm In-Plane Motion: Frequency of backscattered light is Doppler-shifted In-Plane Motion: Frequency of reflected light is not Doppler-shifted => Vibrometry for 3D-motions of MEMS is tricky but we have figured out solutions Polytec GmbH 10/17/2012 # 23

24 3D-Vibration Measurement 3D-Vibrometer MSA-050 3D Requires Roughness 3D deflection shape of a hard disk read/write head mount In-plane mode at 7 khz (Amplitude: 2 nm) Polytec GmbH 10/17/2012 # 24

25 3D-Vibration Measurement x, y, z-vibration Components Polytec GmbH 10/17/2012 # 25

26 3D-Vibration Measurement Current Concept Scattered radiation Laser1 Vibrometer1 k in1 k in 2 Polytec GmbH 10/17/2012 # 26

27 3D-Vibration Measurement New Concept Scattered radiation Laser Vibrometer1 k in k ch1 k ch2 Allows very small spot size of in the µm range ( ~ 3 µm) Allows high frequency bandwidth in the MHz range A sufficiently-scattering surface texture is required Polytec GmbH 10/17/2012 # 27

28 3D-Vibration Measurement Confirmation of Theory k in Scattering particle v j in j det Local surface normal k det f D 1 2 v k in k det Polytec GmbH 10/17/2012 # 28

29 3D-Vibration Measurement Demonstration Setup The demonstration setup has already shown a sensitivity that is close to the theoretical limit. Polytec GmbH 10/17/2012 # 29

30 3D-Vibration Measurement Improvements with Novel Concept Spot size MSA-050-3D Novel concept Measurement bandwidth Limited due to optical crosstalk Few tens of MHz bandwidth possible Required surface texture Rough surface Rough surface Corners or edges Polytec GmbH 10/17/2012 # 30

31 Conclusions Conclusions Optical measurement tools are indispensable tools for the development of MEMS devices and also for testing in production Polytec MSA is widely used in the MEMS community for topography, in-plane and out-of-plane motion analysis UHF-LDV for frequencies up to 1.2 GHz is well suited for many applications like HF mems oscillators, RF switches and SAW filters New 3D-Micro-Laser-Doppler Vibrometers allow rapid acquisition of 3D vibration spectra in real-time Polytec GmbH 10/17/2012 # 31

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