Berkeley Sensor & Actuator Center: The National Science Foundation Industry/University Cooperative Research Center on MEMS

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1 Berkeley Sensor & Actuator Center: The National Science Foundation Industry/University Cooperative Research Center on MEMS

2 Feeding the Semiconductor Growth Engine* *Semi +0.4% Growth 2012 (SIA); MEMS +14% (Yole/ 8% isuppli) Enabling the Next MEMS Breakthroughs Through Industry/University Collaboration

3 25 Years National Science Foundation Center Partner Organizations 20+ Years 160 Researchers 108 Projects 13 Faculty CoDirectors 13 Affiliate Faculty 7 Engineering Departments Three Campuses of UC System Berkeley Sensor & Actuator Center Center Statistics

4 Marvell Nano Fabrication Laboratory

5 R. Howe Electrical (Stanford) Who s Who in MEMS

6 co DIRECTORS A. Javey B. Boser D. Horsley Electrical UC Davis Mechanical L. Lin M. Maharbiz Mechanical Electrical A. Pisano Mechanical/Electrical K. Pister Electrical L. Lee Electrical BioEngineering M. Wu D. Liepmann BioEngineering Mechanical C. Nguyen Electrical Electrical R. White R. Muller J. Huggins Electrical Electrical Executive Director

7 MEMBERS POOLING RESEARCH FUNDS <1 Year

8 BSAC Membership Levels Regular Membership $50K/yr Technology Scouting Faculty Access Student Access IP Access Collaboration Membership $135K/yr Supported Project

9 Smart Dust & Open WSN platform Harsh Environment Sensing Large Area Nanostructural Active Fabrics/ e-skin Conformal Photovoltaics Nanocomposite Energy Harvesting & Storage Nanocavity LEDs Cell Culture Array Integrated Photonics OptoMechanical Resonator/CSAC MEMS RF Multiband Frontend (108 individual projects by 160 researchers from 7 Engineering Dept s and 3 UC Campuses)

10 The NEXT 25 Years? TRILLIONS OF CONNECTED SENSING DEVICES Mechanical Radio Conformal Electronics & Active Fabrics Integrated Photonics Harsh Environment Sensing & Actuation

11 Disruptive BSAC MEMS Technologies (with Relevance to inemi/ Electronic Manufacturing) Wireless Sensor Networks ( Open WSN) MEMS-Based Timing & Filtering /Multiband Radio Ex Uno Plures Microenergy Generation & Storage Conformal Electronics/Active Fabrics Harsh Environment Sensing Al Pisano

12 Enabling the IOT MOBILE SWARM SUBNET CONNECTED SENSING DEVICES (Extreme Subnetworking) MOBILE Swarm: Geolocation Personal Inertial/navigational Biometrics/ Biomedical Environmental Remote Sensing.etc Sensors SubNet Sensors Mobile Devices Mobile Devices Cloud Source: UC Berkeley Qualcomm Swarm Lab/J.Rabaey Sensor Swarm Enabled By Sensor & InfraX Projects OPEN WSN standards IETF, IEEE 802.x

13 GINA WSN Development Kit Developer Breadboard Battery GINA Charger USB Dongle Upload New Stack Computation Display Communication Internet JTAG dongle Expansion Connector Next Workshop Pending Experiment with Developer Sensors & Open Wireless Sensor Network Standards*: * e, Wireless HART =IEC 62591, IETF pending

14 Extreme Miniaturization Radio & Sensors

15 Commercialization of WSN & IOT

16 Disruptive BSAC MEMS Technologies (with Relevance to inemi/ Electronic Manufacturing) Wireless Sensor Networks ( Open WSN) MEMS-Based Timing & Filtering /Multiband Radio Ex Uno Plures Microenergy Generation & Storage Harsh Environment Sensing Conformal Electronics/Active Fabrics

17 Software Managed Extreme RF Multiband Radio Mechanical RF Front End Cellular Standards (Bandwidths, Shaping ) GSM, CDMA, 3G 4G etc Wireless Data Standards WiFi Bluetooth etc

18 Electrostatic MEMS Resonator Basics Input Electrode Output Electrode Supporting Stem Disk io vi R io vi VP C(t) Frequency: Stiffness fo 1 2 Young s Modulus kr mr E 1 R Density Mass Radius V determines P Resonant Frequency Q 3GHz Note: If VP = 0V device off dc io V P dt

19 Commercial MEMS RF Resonators / Oscillators

20 MEMS Based Mechanical Radio Components (Building Blocks Completed): Oscillators/Frequency References Channel Select Filter Power Amplifier Mechanical Displacement Amplification Synchronous Modulator High Voltage Bias Generator in Low Voltage CMOS Optomechanical Oscillator for Atomic Clock

21 Mechanical Front End for Multi Band Wireless Handsets I Duplexer CDMA = off-chip LNA = micromechanical RF BPF From TX RF BPF Antenna RF BPF LPF 0o 90o PCS 1900 I A/D Q AGC GSM 900 LNA A/D LPF Q I AGC RF BPF LNA DCS 1800 RXRF LO 0o (N+1)/N 90o LNA Duplexer CDMA-2000 WCDMA Q LNA From TX RF BPF Duplexer LNA From TX RXRF Channel Select PLL RF BPF No need for switches! Tank Xstal Osc

22 Disruptive BSAC MEMS Technologies (with Relevance to inemi/ Electronic Manufacturing) Wireless Sensor Networks ( Open WSN) MEMS-Based Timing & Filtering /Multiband Radio Ex Uno Plures Microenergy Generation & Storage Conformal Electronics/Active Fabrics

23 Active Fabrics based on Flexible, Semiconducting Carbon Nanotube TFTs and Printed Electronics 99% semiconducting 23

24 Berkeley Sensor & Actuator Center: The National Science Foundation Industry/University Cooperative Research Center on MEMS Harsh Environment Sensing Prof. Al Pisano