Precision Navigation and Timing Enabled by Microtechnology: Are We There Yet?

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1 Precision Navigation and Timing Enabled by Microtechnology: Are We There Yet? Torrance, CA; February 27, 2012 The Southern California Section of the Institute of Navigation Dr. Andrei Shkel Program Manager Microsystems Technology Office Defense Advanced Research Projects Agency Solving an old problem with modern technologies

2 Inertial-only navigation Flight from LA to NYC using inertial-only navigation system Strategic- Nav-Grade 500m 8km Tactical-Grade 1000 km 15m Strategic++ Grade Tactical-Grade ($5k-$25k) Navigation-Grade ($100k-$250k) Strategic-Grade ($250k-$1M) Strategic++ Grade (~$8M)

3 White space in guidance and navigation 70% of missile missions have durations less than 3 minutes* Ballistic Precision Engagement with GPS-assisted guidance Speed of Platform (km/hr) 10,000 1, M-16 (no IMU) 40mm Grenade Launcher (no IMU) 1 Missile 1 SEALs Underwater Mission Soldier Walking in Cave Missile 2 Missile 3 Missile 4 Soldier Walking in Open Field Missile 5 Micro UAV Missile 6 HMMWV Missile 10 Missile 12 Range of Mission (km) Missile 8 Missile 7 Missile 9 Personal navigation GPSassisted 24 hr 1,000 Missile 11

4 Micro-PNT portfolio of programs Clocks: CSAC: Chip-Scale Atomic Clocks Result: (stability) IMPACT: Integrated Micro Primary Atom Clock Technology Result: (time loss) Inertial Sensors: MRIG: Micro Rate Integrating Gyros (gyros for dynamic environment) NGIMG: Navigation Grade Integrated Micro Gyros Result: / hr ARW, /hr drift Microscale Integration: TIMU: Timing and & Measurement Unit (single-chip, 10 mm 3 in volume) PASCAL: Primary and Secondary Calibration on Active Layer (self-calibration) C-SCAN: Chip-Scale Combinatorial Atomic Navigator MINT: Micro Inertial Navigation Technology Result: 3.8m after 4 hours of walking IT-MARS: Information Tethered Micro Automated Rotary Stages Test and Evaluation: PALADIN & T: Platform for Acquisition, Logging, and Analysis of Devices for Inertial Navigation & Timing

5 Realization of inertial sensors on micro-scale Atomic Transitions and Laser Cooling 133 Cs ν = E/ħ = Hz Precise Number of Energy Transitions Larmor Precession ωal= γal(b0+bxe) B0+BXe ωxe= γxeb0 P t at = ( Ω + γb0 ) Pat Vibratory Gyroscopes Vibratory mass on elastic support Inertia of Elastic Waves in Solids 2XDΩQ y( t) = ωn ΩQ φ 2 ω n Electrostatic Levitation Rot or 2 Ro tor 1 Y Z X φ = Ωdt

6 Micro-PNT Objective The program addresses the emerging DOD need to: Decrease reliance on GPS Increase system accuracy Reduce co-lateral damage Increase effective range Reduce SWAP&C HG9900 Nav grade IMU HG1940 MEMS IMU This program Magneto Optical trap Quartz Oscillator Parameters Units SOA SOA MEMS micro-pnt Size mm 3 1.6x x Weight gm 4.5x10 3 2x10 2 ~2 Power W 25 5 ~1 Gyro Range deg/sec (Hz) 1,000 (3) 3,600 (10) 15,000 (40) Gyro Bias deg/hr (0.001) Gyro ARW deg/ hr (0.0001) Gyro Drift ppm, 3σ Accel. Range g ,000 Accel. Bias mg (0.001) Misalignment µ-radians, 3σ 200 1, Short-term Time Loss ns/min Long-term Time Loss ns/month 10 N/A 32 6

7 Navigation-Grade Integrated Micro Gyroscopes (NGIMG) PERFORMERS: Northrop Grumman, Boeing, Archangel Develop chip-scale rotation rate sensor with navigation-grade performance Explore various sensing mechanism on a micro-scale APPROACH: NMR Gyro Pump VCSEL Sense VCSEL Rotation induces net magnetic field, thus polarization of sense VCSEL is detected as mechanical rotation Disk Resonator Gyro 3D Wine-Glass Resonator Gyro Standing wave: before case rotation 36º 90º case rotation Pump VCSEL Sense VCSEL 2D Disk Resonator Gyro Standing wave : after case rotation Spinning Mass Gyro GPS-denied navigation for unmanned vehicles Man-portable dead reckoning device Exploring the physical limits and feasibility of different physical phenomena of sensing Levitated Spinning Mass

8 Micro Inertial Navigation Technology (MINT) PERFORMERS: Carnegie Mellon, Analog Devices, Northrop Grumman, U. of Utah Create navigation sensors that use secondary inertial variables to mitigate error growth encountered with inertial sensor alone APPROACH: Error Time Error grows as ~t 3 (gyro),~t 2 (accels) Resetting velocity by using zero velocity information (such as when the foot stop during walking) reduces error growth Zero-velocity sensors being developed: Team Long term (hours to days) GPS denied precision navigation UAV Swarms Small, low power, self-calibrating IMU capable of fitting inside a boot for personal Distribution Statement navigation A (Approved in GPS-denied for Public Release, scenarios Distribution Unlimited) Device RF Transmit/ Receiver Ultrasonic Transmit/ Receiver Micro-g Accels Pressure Sensor Array

9 Integrated Micro Primary Atomic Clock Technology (IMPACT) PERFORMERS: Honeywell, OEWaves, Sandia, Symmetricom Develop a tiny, low power clock that does not age Leverage CSAC technology with its ability to package and release alkali atoms at low thermal budgets APPROACH: z I k k B k k k k Trapped Atoms/Ions y x Laser light Vacuum Package Ions E-field I 1. Laser cool atoms to zero velocity 2. Trap atoms in magnetic field 1. Ions are emitted from source and ionized to hyperfine ground state 2. Trap ions in electric field All Optical Clock Nano-satellites Long-term (days/weeks) GPS-denied navigation for (i.e. underwater) 1. Very high finesse resonator locks to known modes of Rb transitions 2. These modes create reference frequency output Explore fundamental limits of trapping and isolating small number of atoms in chip-scale package Distribution to measure Statement atomic A (Approved transitions for Public with Release, high Distribution accuracy Unlimited) and stability

10 Integrated Micro Primary Atomic Clock Technology (IMPACT) PERFORMERS: Honeywell, OEWaves, Sandia, Symmetricom Develop a tiny, low power clock that does not age Leverage CSAC technology with its ability to package and release alkali atoms at low thermal budgets ACCOMPLISHMENTS (PH III START DATE 2Q 2012): Goals PhII PhIII Power (mw) Size (cc) 250 total clock 20 total clock <50 total clock 5 total clock Q*S/N (10 10 ) 2 5 Time Loss (ns) 1 month 1 month Freq. Retrace (10-11 ) 1x x10-13 Nano-satellites Long-term (days/weeks) GPS-denied navigation for (i.e. underwater) Development of smallest ion trap and MOT physics package

11 Information Tethered Micro Autonomous Rotary Stages (ITMARS) PERFORMERS: Boyce Thompson Institute, UC Berkeley, UC Los Angeles Address wear and friction-induced failure using micro-fluidic bearings or by rotor levitation Provide off-stage electrical power to rotating stage Control stage with high degree of angular position Output Real Ideal Input APPROACH: Team Motor Approach Develop capability to transmit power and signals to and from tiny rotating stages Sensors 1-2mm MEMS rotating stage Ultrasonic Electrostatic Electrostatic Error removal Acoustic detection Real-time calibration of compasses Power Transfer Laser diode for power & data Actuation electrodes Liquid rings Optical Capacitive Liquid Contact Develop micro rotary stages such that sensors and actuators placed on the stages can be Distribution powered Statement and A rotated (Approved 360 for Public degrees Release, simultaneously Distribution Unlimited)

12 Micro Rate Integrating Gyroscope (MRIG) new PERFORMERS: Draper, Honeywell, Univ. of Michigan, Yale, UC Davis, Cornell, Northrop Grumman, Systron Donner, UC Irvine, UC Los Angeles Develop high dynamic range sensor to directly measure angle of rotation Explore new processes and high-q materials for fabricating micro-scale 3D structures APPROACH: TPF/glassblown-based Microspheres Diamond Hemisphere BMG Low CTE Material SixNy Stress-shaped Wine Glass Low CTE Half-toroid Shell Resonator Precision navigation in high dynamic, GPS-denied environment Distributed mass high Q Developing a 3D microfabrication-based vibratory gyroscope extending the dynamic range and eliminating Distribution Statement the need A (Approved for integrating for Public Release, the angular Distribution rate Unlimited) information

13 Micro Rate Integrating Gyroscope (MRIG) new PERFORMERS: Draper, Honeywell, Univ. of Michigan, Yale, UC Davis, Cornell, Northrop Grumman, Systron Donner, UC Irvine, UC Los Angeles Develop high dynamic range sensor to directly measure angle of rotation Explore new processes and high-q materials for fabricating micro-scale 3D structures ACCOMPLISHMENTS (PHI ENDS 3Q 2012): Technical Area 1, Goals Batch Fab Size (mm 3 ) Δƒ (Hz) 10 <1 τ (s) >500 TBD Δ[1/τ] (Hz) <10-4 Precision navigation in high dynamic, GPS-denied environment Blown glass bubble coated with patterned poly-si Silicon nitride goblet structure Initial demonstration of axisymmetric 3D structures Inverted wine glass structure on pyrex substrate

14 Single Chip Timing and Inertial Measurement Unit (TIMU) PERFORMERS: Honeywell (with Draper, Stanford, IS), Univ. of Michigan, JPL (with SiM, Freq. Manag.), Evigia (with Discera), Qualtre (with GIT) Miniaturization of clocks and IMUs are based using microfabrication process compatible with large-scale manufacturing Explore new processes and high-q materials for fabricating micro-scale structures APPROACH: Honeywell JPL new Univ. of Michigan Evigia Qualtre Reduce SWAP+C and redundancy of current IMU and timing navigation systems Develop a single-chip, self-contained system that provides precise timing, location, and Distribution Statement A orientation (Approved for information Public Release, Distribution Unlimited)

15 Single Chip Timing and Inertial Measurement Unit (TIMU) PERFORMERS: Honeywell (with Draper, Stanford, IS), Univ. of Michigan, JPL (with SiM, Freq. Manag.), Evigia (with Discera), Qualtre (with GIT) Miniaturization of clocks and IMUs are based using microfabrication process compatible with large-scale manufacturing Explore new processes and high-q materials for fabricating micro-scale structures ACCOMPLISHMENTS: End MIL STD test requirements Size (mm 3 ) 10 Power (mw) 200 Time loss (ns) after 180s 1 Accel Sensitivity ( /hr/g) <10-7 Vibration Sensitivity of ARW ( / hr per g/ Hz) Vibration Sensitivity of Bias Drift ( /hr per g 2 / Hz) <0.01 <0.01 new TBD Reduce SWAP+C and redundancy of current IMU and timing navigation systems The awards have been finalized. The program is in the first half of Phase I

16 Primary and Secondary Calibration of Active Layer (PASCAL) new PERFORMERS: Source selection has been completed. Contracts are negotiated (kick-off February, 2012) Address challenges associated with the long-term bias and scale-factor drift of chipscale components in-situ calibration of inertial sensors and clocks APPROACH: Gyroscope 1. Co-fabricate 2. Excite Calibration Stage 3. Extract 4. Reset sensor reference GPS-denied navigation for unmanned vehicles Man-portable dead reckoning device Shift paradigm in error reduction of MEMS devices from fabricating the perfect sensor to Distribution Statement A (Approved on-chip for calibration Public Release, Distribution Unlimited)

17 Primary and Secondary Calibration of Active Layer (PASCAL) new PERFORMERS: Source selection has been completed. Contracts are negotiated (kick-off ~ February, 2012) Address challenges associated with the long-term bias and scale-factor drift of chipscale components in-situ calibration of inertial sensors and clocks ACCOMPLISHMENTS (PH I ENDS FEB. 2013): Technical Area 1, Goals Batch Fab Size (mm 3 ) Bias (ppm) S.F. (ppm) Power( mw) 30 <1 <1 50 TBD GPS-denied navigation for unmanned vehicles Man-portable dead reckoning device TBD

18 Platform for Acquisition, Logging, and Analysis of Devices for Inertial Navigation & Timing (PALADIN & T) PERFORMERS: Honeywell, Symmetricom To enable Fast, Flexible, Reliable, and Uniform early-stage testing of micro-pnt prototypes outside performers lab To determine the ground truth of micro- PNT program developments Early engagement of DoD branches in DARPA/MTO programs FULL TESTING CAPABILITIES: Acquisition: Drop-in architecture, standard mechanical and electrical interface, custom signal conditioning Logging: data storage with time stamping Analysis: Allan deviation, long-term drift, sensitivity, phase noise, navigation trajectories, etc. under temp and vibration Open Architecture allowing add-on analysis and sensor fusion (GPS, references, etc.) APPROACH: Universal Test Fixture Reference Clock RF Power Meter Frequency Counter Analog and Digital Data Acquisition Phase Noise Measurement Equipment Rack INERTIAL SENSORS Hardware Architecture CLOCKS Universal Test Fixture Shift Test and Evaluation (T&E) paradigm from boutique, one-by-one to plug and play implementation Distribution resulting Statement in more A (Approved uniform Public measurements Release, Distribution and reduced Unlimited) setup costs new

19 Conclusions Inertial MEMS have consistently a good case for reduction of SWaP, not necessarily for increase in performance. Inertial MEMS are struggling to prove itself to potential DoD users Need new knowledge to achieve phenomenal PNT accuracy material scaling and stability surface effects consequences of fabrication imperfections unusual new fabrication technologies selective wafer-level trimming and polishing combination of passive and active calibration techniques yet-to-be-exploited physics We are not there yet! New direction has been defined: MRIG, TIMU, PASCAL, C-SCAN, PALADIN & T

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