Digitally Tuned Low Power Gyroscope
|
|
- Tiffany Johnston
- 5 years ago
- Views:
Transcription
1 Digitally Tuned Low Power Gyroscope Bernhard E. Boser & Chinwuba Ezekwe Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley B. Boser 1
2 Outline Objective: 100x power reduction in MEMS gyroscope What are gyroscopes? Power reduction techniques Mechanical gain Low power, low noise amplification Results B. Boser 2
3 Accelerometer flexture anchor N Unit Cells 2 2π 10kHz Fixed Plates xcell x a 2 2.5pm mG Angstrom B. Boser 3
4 Vibratory Gyroscope Vibrate along drive axis with f drive Detect f drive about sense axis with accelerometer x Angstrom B. Boser 4
5 Gyroscope Design Electrostatic Drive Electrostatic Sense Pickup B. Boser 5
6 Power / Accuracy Tradeoff vn gm I D signal SNR noise const Design options: 1) Lower amplifier noise 2) Increase signal Dv gyro without power penalty B. Boser 6
7 Outline Objective: 100x power reduction in MEMS gyroscope What are gyroscopes? Power reduction techniques Mechanical gain Low power, low noise amplification Results B. Boser 7
8 Mode-Matching Drive Amplitude Drive Axis Response f drive Frequency B. Boser 8
9 Mode-Matching Amplitude get Q times the deflection Fabrication tolerance ~ 2% Match by active tuning Drive Axis Response Sense Axis Response B. Boser 9
10 Frequency Error Estimation open loop response: X Y Response bandwidth feedback ( closed loop ): Pilot Tones f r /2 sense frequency X + S - S Y Response T(s) >> 1 frequency B. Boser 10
11 Sense Resonance Estimation H m 1 s f sense Frequency B. Boser 11
12 Key Idea 1 K H f m s two pilot tones locked to the drive frequency amplitudes depend on frequency mismatch! f drive force amplitude difference to zero B. Boser 12
13 Electrostatic Tuning V tune x s Voltage-Tunable Spring Net Stiffness k s k Mechanical m C 2 tune V 2 tune gap Electrostatic Spring B. Boser 13
14 Electrostatic Force Feedback v fb x s V bias v fb F e C gap Voltage-To- Force Gain C v gap SignalDependent Stiffness s0 s0 2 2 Vbias v fb 2 V bias 2 2 fb x s 2-level feedback (Sampled Data SD ) B. Boser 14
15 Sensor Frequency Response Main mode near 15kHz Big parasitic modes near 95kHz and 300kHz Smaller parasitic modes all over Feedback? B. Boser 15
16 Parasitic Resonances Normalized Magnitude (db) Normalized Magnitude (db) Phase ( ) Phase ( ) Frequency (Hz) Non-collocated Control (separate electrodes) Frequency (Hz) Collocated Control (same electrode) B. Boser 16
17 Sampled Data System Normalized Magnitude (db) Aliased Resonance Phase ( ) Excess Lag Frequency (khz) B. Boser 17
18 Negative Feedback Magnitude (db) Phase ( ) Unstable Large Negative Margin Frequency (khz) B. Boser 18
19 Positive Feedback Magnitude (db) DC gain < 0 Phase ( ) Small But Enough Margin Huge Positive Margins stable Frequency (khz) B. Boser 19
20 Mode-Matching Summary >100x increased signal 100x power savings Fabrication tolerances, drift mismatch Background calibration Electrostatic tuning Sensitivity = f(q, environment) Force feedback Stability positive feedback B. Boser 20
21 Sampling Noise Closed Loop Open Loop V m C S+ v 2 n C C i P CL Δf V x Ideal Sampler V o V m C S+ C P v 2 n Δf G m V x C L Ideal Sampler V o C S- C P C i C L T s C S- C P C L T s V m V x Signal V m V x Signal sample sample B. Boser 21
22 Boxcar Sampler versus Charge Integrator SNR SNR BS CI 1 feedback penalty 2 1 F n τ 2 settling penalty n = T s / amp of charge integrator F = feedback factor of charge integrator Typical SNR improvement ~10dB 10x power savings! B. Boser 22
23 System Block Diagram V tune 1 Accumulator Mode Matching, Dither and Offset Compensation (Digital, Off-Chip) PI Estimate ΣΔ Filter Mode-Mismatch Pilot Tones Estimator ΣΔ Dither and Offset Comp Digital background calibration Negligible power penalty Coriolis Acceleration Drive Motion V m 3 FE 3 rd -Order SC Filter Digital Output Sense/FB Switch 1-Bit Quantizer Sense Element Two-Level Feedback Coriolis Readout B. Boser 23
24 Chip Photo B. Boser 24
25 Chip Micrograph B. Boser 25
26 Output Spectrum PSD Relative to Full Scale (db) Frequency (khz) B. Boser 26
27 Angular Rate ( /sec) Output Spectrum Without calibration Noise Floor: 0.03 /s/ Hz Mismatch: ~400Hz (2.6%) 10 3 Pilot Tones ~400Hz Frequency (Hz) B. Boser 27
28 Angular Rate ( /sec) Output Spectrum Without calibration Noise Floor: 0.03 /s/ Hz Mismatch: ~400Hz (2.6%) With Calibration Noise Floor: /s/ Hz Mismatch: << 50Hz (0.3%) Capacitance resolution 1Hz bandwidth 0.3aF/12.5pF = 24ppb 10 3 Pilot 10 2 Tones Frequency (Hz) B. Boser 28
29 Tuning Voltage Startup Transient 300ms B. Boser 29
30 Results Summary Power dissipation: 1mW (excluding drive) Front-end power reduction: Mode-matching: 100x Boxcar sampling: 10x 1000x combined power savings! B. Boser 30
31 Comparison to previous work Reference Power (mw) Noise ( /sec/ Hz) BW (Hz) Tuning Time (sec) [1] [2] [3] [4] This work [1] Geen, JSSC 2002 [2] Petkov, ISSCC 2004 [3] Saukoski, ESSCIRC 2006 [4] Sharma, ISSCC 2007 B. Boser 31
32 Conclusions Power savings Mechanical gain 100x reduction Open-loop charge amplifier 10x reduction Digital processing occurs minimum power overhead Techniques Background calibrated mode matching insensitive to process variations Positive feedback insensitive to parasitic modes B. Boser 32
33 Acknowledgements Christoph Lang & Vladimir Petkov Robert Bosch Corporation Gyroscope and financial support B. Boser 33
ISSCC 2006 / SESSION 16 / MEMS AND SENSORS / 16.1
16.1 A 4.5mW Closed-Loop Σ Micro-Gravity CMOS-SOI Accelerometer Babak Vakili Amini, Reza Abdolvand, Farrokh Ayazi Georgia Institute of Technology, Atlanta, GA Recently, there has been an increasing demand
More informationSurface Micromachining
Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Sensor
More informationPROBLEM SET #7. EEC247B / ME C218 INTRODUCTION TO MEMS DESIGN SPRING 2015 C. Nguyen. Issued: Monday, April 27, 2015
Issued: Monday, April 27, 2015 PROBLEM SET #7 Due (at 9 a.m.): Friday, May 8, 2015, in the EE C247B HW box near 125 Cory. Gyroscopes are inertial sensors that measure rotation rate, which is an extremely
More informationLast Name Girosco Given Name Pio ID Number
Last Name Girosco Given Name Pio ID Number 0170130 Question n. 1 Which is the typical range of frequencies at which MEMS gyroscopes (as studied during the course) operate, and why? In case of mode-split
More informationIntegrated Dual-Axis Gyro IDG-1004
Integrated Dual-Axis Gyro NOT RECOMMENDED FOR NEW DESIGNS. PLEASE REFER TO THE IDG-25 FOR A FUTIONALLY- UPGRADED PRODUCT APPLICATIONS GPS Navigation Devices Robotics Electronic Toys Platform Stabilization
More informationReference Diagram IDG-300. Coriolis Sense. Low-Pass Sensor. Coriolis Sense. Demodulator Y-RATE OUT YAGC R LPY C LPy ±10% EEPROM TRIM.
FEATURES Integrated X- and Y-axis gyro on a single chip Factory trimmed full scale range of ±500 /sec Integrated low-pass filters High vibration rejection over a wide frequency range High cross-axis isolation
More informationIntegrated Dual-Axis Gyro IDG-500
Integrated Dual-Axis Gyro FEATURES Integrated X- and Y-axis gyros on a single chip Two separate outputs per axis for standard and high sensitivity: X-/Y-Out Pins: 500 /s full scale range 2.0m/ /s sensitivity
More informationLecture 10: Accelerometers (Part I)
Lecture 0: Accelerometers (Part I) ADXL 50 (Formerly the original ADXL 50) ENE 5400, Spring 2004 Outline Performance analysis Capacitive sensing Circuit architectures Circuit techniques for non-ideality
More informationIntegrated Dual-Axis Gyro IDG-1215
Integrated Dual-Axis Gyro FEATURES Integrated X- and Y-axis gyros on a single chip ±67 /s full-scale range 15m/ /s sensitivity Integrated amplifiers and low-pass filter Auto Zero function Integrated reset
More informationEE C245 ME C218 Introduction to MEMS Design
EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 21: Gyros
More informationA Two-Chip Interface for a MEMS Accelerometer
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 51, NO. 4, AUGUST 2002 853 A Two-Chip Interface for a MEMS Accelerometer Tetsuya Kajita, Student Member, IEEE, Un-Ku Moon, Senior Member, IEEE,
More informationEE247 Lecture 24. EE247 Lecture 24
EE247 Lecture 24 Administrative EE247 Final exam: Date: Wed. Dec. 15 th Time: -12:30pm-3:30pm- Location: 289 Cory Closed book/course notes No calculators/cell phones/pdas/computers Bring one 8x11 paper
More informationSummary Last Lecture
Interleaved ADCs EE47 Lecture 4 Oversampled ADCs Why oversampling? Pulse-count modulation Sigma-delta modulation 1-Bit quantization Quantization error (noise) spectrum SQNR analysis Limit cycle oscillations
More informationMEMS-FABRICATED ACCELEROMETERS WITH FEEDBACK COMPENSATION
MEMS-FABRICATED ACCELEROMETERS WITH FEEDBACK COMPENSATION Yonghwa Park*, Sangjun Park*, Byung-doo choi*, Hyoungho Ko*, Taeyong Song*, Geunwon Lim*, Kwangho Yoo*, **, Sangmin Lee*, Sang Chul Lee*, **, Ahra
More informationCapacitive Sensing Project. Design of A Fully Differential Capacitive Sensing Circuit for MEMS Accelerometers. Matan Nurick Radai Rosenblat
Capacitive Sensing Project Design of A Fully Differential Capacitive Sensing Circuit for MEMS Accelerometers Matan Nurick Radai Rosenblat Supervisor: Dr. Claudio Jacobson VLSI Laboratory, Technion, Israel,
More informationMEMS. Platform. Solutions for Microsystems. Characterization
MEMS Characterization Platform Solutions for Microsystems Characterization A new paradigm for MEMS characterization The MEMS Characterization Platform (MCP) is a new concept of laboratory instrumentation
More informationA 3-Stage Shunt-Feedback Op-Amp having 19.2dB Gain, 54.1dBm OIP3 (2GHz), and 252 OIP3/P DC Ratio
International Microwave Symposium 2011 Chart 1 A 3-Stage Shunt-Feedback Op-Amp having 19.2dB Gain, 54.1dBm OIP3 (2GHz), and 252 OIP3/P DC Ratio Zach Griffith, M. Urteaga, R. Pierson, P. Rowell, M. Rodwell,
More informationThe Case for Oversampling
EE47 Lecture 4 Oversampled ADCs Why oversampling? Pulse-count modulation Sigma-delta modulation 1-Bit quantization Quantization error (noise) spectrum SQNR analysis Limit cycle oscillations nd order ΣΔ
More informationSmall, Low Power, 3-Axis ±3 g i MEMS Accelerometer ADXL330
Small, Low Power, 3-Axis ±3 g i MEMS Accelerometer ADXL33 FEATURES 3-axis sensing Small, low-profile package 4 mm 4 mm 1.4 mm LFCSP Low power 18 μa at VS = 1.8 V (typical) Single-supply operation 1.8 V
More informationA 12-bit Interpolated Pipeline ADC using Body Voltage Controlled Amplifier
A 12-bit Interpolated Pipeline ADC using Body Voltage Controlled Amplifier Hyunui Lee, Masaya Miyahara, and Akira Matsuzawa Tokyo Institute of Technology, Japan Outline Background Body voltage controlled
More informationFUNCTIONAL BLOCK DIAGRAM AGND 2G 1F. CORIOLIS SIGNAL CHANNEL R SEN1 R SEN2 π DEMOD RATE SENSOR RESONATOR LOOP 12V CHARGE PUMP/REG.
±300 /s Single Chip Yaw Rate Gyro with Signal Conditioning ADXRS300 FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2000 g powered
More informationdemonstrated with a single-mass monolithic surface In a mechanical spring-mass system deflection of the
36 04 7-076 +c A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass &djz 970654 Mark A. Lemkin, Bernhard E. Boser, David Auslander*, Jim Smith** BSAC, 497 Cory Hall,U.C. Berkeley, Berkeley C
More informationMEMS Real-Time Clocks: small footprint timekeeping. Paolo Frigerio November 15 th, 2018
: small footprint timekeeping Paolo Frigerio paolo.frigerio@polimi.it November 15 th, 2018 Who? 2 Paolo Frigerio paolo.frigerio@polimi.it BSc & MSc in Electronics Engineering PhD with Prof. Langfelder
More informationReceiver Architecture
Receiver Architecture Receiver basics Channel selection why not at RF? BPF first or LNA first? Direct digitization of RF signal Receiver architectures Sub-sampling receiver noise problem Heterodyne receiver
More informationEECS240 Spring Advanced Analog Integrated Circuits Lecture 1: Introduction. Elad Alon Dept. of EECS
EECS240 Spring 2009 Advanced Analog Integrated Circuits Lecture 1: Introduction Elad Alon Dept. of EECS Course Focus Focus is on analog design Typically: Specs circuit topology layout Will learn spec-driven
More informationEE247 Lecture 26. This lecture is taped on Wed. Nov. 28 th due to conflict of regular class hours with a meeting
EE47 Lecture 6 This lecture is taped on Wed. Nov. 8 th due to conflict of regular class hours with a meeting Any questions regarding this lecture could be discussed during regular office hours or in class
More informationEE247 Lecture 26. EE247 Lecture 26
EE247 Lecture 26 Administrative EE247 Final exam: Date: Mon. Dec. 18 th Time: 12:30pm-3:30pm Location: 241 Cory Hall Extra office hours: Thurs. Dec. 14 th, 10:30am-12pm Closed book/course notes No calculators/cell
More informationSmall, Low Power, 3-Axis ±3 g Accelerometer ADXL335
Small, Low Power, 3-Axis ±3 g Accelerometer ADXL335 FEATURES 3-axis sensing Small, low profile package 4 mm 4 mm 1.45 mm LFCSP Low power : 35 µa (typical) Single-supply operation: 1.8 V to 3.6 V 1, g shock
More information2.996/6.971 Biomedical Devices Design Laboratory Lecture 7: OpAmps
2.996/6.971 Biomedical Devices Design Laboratory Lecture 7: OpAmps Instructor: Dr. Hong Ma Oct. 3, 2007 Fundamental Circuit: Source and Load Sources Power supply Signal Generator Sensor Amplifier output
More informationDynamic Angle Estimation
Dynamic Angle Estimation with Inertial MEMS Analog Devices Bob Scannell Mark Looney Agenda Sensor to angle basics Accelerometer basics Accelerometer behaviors Gyroscope basics Gyroscope behaviors Key factors
More informationOversampling Converters
Oversampling Converters Behzad Razavi Electrical Engineering Department University of California, Los Angeles Outline Basic Concepts First- and Second-Order Loops Effect of Circuit Nonidealities Cascaded
More information±150 /Sec Yaw Rate Gyroscope ADXRS623
± /Sec Yaw Rate Gyroscope FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency g powered shock survivability Ratiometric to referenced
More informationOBSOLETE FUNCTIONAL BLOCK DIAGRAM. 100nF. 100nF AGND 2G 1F CORIOLIS SIGNAL CHANNEL. R SEN1 R SEN2 π DEMOD RATE SENSOR RESONATOR LOOP 12V
FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 0.05 /s/ Hz noise 2000 g powered shock survivability Self-test on digital command
More information±300 /sec Yaw Rate Gyro ADXRS620
±3 /sec Yaw Rate Gyro ADXRS62 FEATURES Qualified for automotive applications Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2 g powered
More informationSWS1120 Configurable 24-bit Analog-to-Digital Interface IC for High Performance Capacitive MEMS Gyroscope
SWS1120 Configurable 24-bit Analog-to-Digital Interface IC for High Performance Capacitive MS Gyroscope General Description The SWS1120 is a full capacitive detection MS gyroscope control IC. The SWS1120
More informationDesign of an Amplifier for Sensor Interfaces
Design of an Amplifier for Sensor Interfaces Anurag Mangla Electrical and Electronics Engineering anurag.mangla@epfl.ch Supervised by Dr. Marc Pastre Prof. Maher Kayal Outline Introduction Need for high
More informationFUNCTIONAL BLOCK DIAGRAM ST2 ST1 TEMP V RATIO SELF-TEST AT 25 C MECHANICAL SENSOR AC AMP CHARGE PUMP AND VOLTAGE REGULATOR
± /s Yaw Rate Gyro ADXRS624 FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2 g powered shock survivability Ratiometric to referenced
More informationAdvanced Servo Tuning
Advanced Servo Tuning Dr. Rohan Munasinghe Department of Electronic and Telecommunication Engineering University of Moratuwa Servo System Elements position encoder Motion controller (software) Desired
More informationSmall and Thin ±18 g Accelerometer ADXL321
Small and Thin ±18 g Accelerometer ADXL321 FEATURES Small and thin 4 mm 4 mm 1.4 mm LFCSP package 3 mg resolution at Hz Wide supply voltage range: 2.4 V to 6 V Low power: 3 µa at VS = 2.4 V (typ) Good
More informationIntroduction to Microeletromechanical Systems (MEMS) Lecture 12 Topics. MEMS Overview
Introduction to Microeletromechanical Systems (MEMS) Lecture 2 Topics MEMS for Wireless Communication Components for Wireless Communication Mechanical/Electrical Systems Mechanical Resonators o Quality
More informationADXL311. Ultracompact ±2g Dual-Axis Accelerometer FEATURES FUNCTIONAL BLOCK DIAGRAM APPLICATIONS GENERAL DESCRIPTION
Ultracompact ±2g Dual-Axis Accelerometer ADXL311 FEATURES High resolution Dual-axis accelerometer on a single IC chip 5 mm 5 mm 2 mm LCC package Low power
More informationAdvanced Analog Integrated Circuits. Precision Techniques
Advanced Analog Integrated Circuits Precision Techniques Bernhard E. Boser University of California, Berkeley boser@eecs.berkeley.edu Copyright 2016 by Bernhard Boser 1 Topics Offset Drift 1/f Noise Mismatch
More informationA 24 V Chopper Offset-Stabilized Operational Amplifier with Symmetrical RC Notch Filters having sub-10 µv offset and over-120db CMRR
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY Volume 20, Number 4, 2017, 301 312 A 24 V Chopper Offset-Stabilized Operational Amplifier with Symmetrical RC Notch Filters having sub-10 µv offset
More informationP96.67 X Y Z ADXL330. Masse 10V. ENS-Lyon Département Physique-Enseignement. Alimentation 10V 1N nF. Masse
P96.67 X Y Z V Masse ENS-Lyon Département Physique-Enseignement 1N47 nf 78 Alimentation E M V Masse Benoit CAPITAINE Technicien ENS LYON mai 1 ACCEL BOARD Additional Board All Mikroelektronika s development
More informationWhile the Riso circuit is both simple to implement and design it has a big disadvantage in precision circuits. The voltage drop from Riso is
Hello, and welcome to part six of the TI Precision Labs on op amp stability. This lecture will describe the Riso with dual feedback stability compensation method. From 5: The previous videos discussed
More informationeasypll UHV Preamplifier Reference Manual
easypll UHV Preamplifier Reference Manual 1 Table of Contents easypll UHV-Pre-Amplifier for Tuning Fork 2 Theory... 2 Wiring of the pre-amplifier... 4 Technical specifications... 5 Version 1.1 BT 00536
More informationTeaching Staff. EECS240 Spring Course Focus. Administrative. Course Goal. Lecture Notes. Elad s office hours
EECS240 Spring 2012 Advanced Analog Integrated Circuits Lecture 1: Introduction Teaching Staff Elad s office hours 519 Cory Hall Tues. and Thurs. 11am-12pm (right after class) GSI: Pierluigi Nuzzo Weekly
More informationCHAPTER 9 FEEDBACK. NTUEE Electronics L.H. Lu 9-1
CHAPTER 9 FEEDBACK Chapter Outline 9.1 The General Feedback Structure 9.2 Some Properties of Negative Feedback 9.3 The Four Basic Feedback Topologies 9.4 The Feedback Voltage Amplifier (Series-Shunt) 9.5
More informationA Micropower Front-end Interface for Differential-Capacitive Sensor Systems
A Micropower Front-end Interface for Differential-Capacitive Sensor Systems T.G. Constandinou, J. Georgiou and C. Toumazou Abstract: This letter presents a front-end circuit for interfacing to differential
More informationISSCC 2001 / SESSION 23 / ANALOG TECHNIQUES / 23.2
ISSCC 2001 / SESSION 23 / ANALOG TECHNIQUES / 23.2 23.2 Dynamically Biased 1MHz Low-pass Filter with 61dB Peak SNR and 112dB Input Range Nagendra Krishnapura, Yannis Tsividis Columbia University, New York,
More informationA Low Area, Switched-Resistor Loop Filter Technique for Fractional-N Synthesizers Applied to a MEMS-based Programmable Oscillator
A Low Area, Switched-Resistor Loop Filter Technique for Fractional-N Synthesizers Applied to a MEMS-based Programmable Oscillator ISSCC 00, Session 3. M.H. Perrott, S. Pamarti, E. Hoffman, F.S. Lee, S.
More informationServo Tuning. Dr. Rohan Munasinghe Department. of Electronic and Telecommunication Engineering University of Moratuwa. Thanks to Dr.
Servo Tuning Dr. Rohan Munasinghe Department. of Electronic and Telecommunication Engineering University of Moratuwa Thanks to Dr. Jacob Tal Overview Closed Loop Motion Control System Brain Brain Muscle
More informationSmall, Low Power, 3-Axis ±3 g Accelerometer ADXL337
Small, Low Power, 3-Axis ±3 g Accelerometer ADXL337 FEATURES 3-axis sensing Small, low profile package 3 mm 3 mm 1.4 mm LFCSP Low power: 3 μa (typical) Single-supply operation: 1.8 V to 3.6 V 1, g shock
More informationGlossary of VCO terms
Glossary of VCO terms VOLTAGE CONTROLLED OSCILLATOR (VCO): This is an oscillator designed so the output frequency can be changed by applying a voltage to its control port or tuning port. FREQUENCY TUNING
More informationSystem Level Simulation of a Digital Accelerometer
System Level Simulation of a Digital Accelerometer M. Kraft*, C. P. Lewis** *University of California, Berkeley Sensors and Actuator Center 497 Cory Hall, Berkeley, CA 94720, mkraft@kowloon.eecs.berkeley.edu
More informationFUNCTIONAL BLOCK DIAGRAM ST2 ST1 TEMP V RATIO 25 C MECHANICAL SENSOR AC AMP CHARGE PUMP AND VOLTAGE REGULATOR
± /s Yaw Rate Gyro ADXRS614 FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2 g powered shock survivability Ratiometric to referenced
More informationHomework Assignment 13
Question 1 Short Takes 2 points each. Homework Assignment 13 1. Classify the type of feedback uses in the circuit below (i.e., shunt-shunt, series-shunt, ) 2. True or false: an engineer uses series-shunt
More informationSmall, Low Power, 3-Axis ±5 g Accelerometer ADXL325
Small, Low Power, 3-Axis ±5 g Accelerometer ADXL325 FEATURES 3-axis sensing Small, low profile package 4 mm 4 mm 1.45 mm LFCSP Low power: 35 μa typical Single-supply operation: 1.8 V to 3.6 V 1, g shock
More informationEE C245 - ME C218 Introduction to MEMS Design Fall Today s Lecture
EE 45 ME 8 Introduction to MEMS Design Fall 003 Roger Howe and Thara Srinivasan Lecture 6 Micromechanical Resonators I Today s Lecture ircuit models for micromechanical resonators Microresonator oscillators:
More informationISSCC 2004 / SESSION 25 / HIGH-RESOLUTION NYQUIST ADCs / 25.4
ISSCC 2004 / SESSION 25 / HIGH-RESOLUTION NYQUIST ADCs / 25.4 25.4 A 1.8V 14b 10MS/s Pipelined ADC in 0.18µm CMOS with 99dB SFDR Yun Chiu, Paul R. Gray, Borivoje Nikolic University of California, Berkeley,
More informationHomework Assignment 13
Question 1 Short Takes 2 points each. Homework Assignment 13 1. Classify the type of feedback uses in the circuit below (i.e., shunt-shunt, series-shunt, ) Answer: Series-shunt. 2. True or false: an engineer
More informationQUAD 5V RAIL-TO-RAIL PRECISION OPERATIONAL AMPLIFIER
ADVANCED LINEAR DEVICES, INC. ALD472A/ALD472B ALD472 QUAD 5V RAILTORAIL PRECISION OPERATIONAL AMPLIFIER GENERAL DESCRIPTION The ALD472 is a quad monolithic precision CMOS railtorail operational amplifier
More informationExperiment 9. PID Controller
Experiment 9 PID Controller Objective: - To be familiar with PID controller. - Noting how changing PID controller parameter effect on system response. Theory: The basic function of a controller is to execute
More informationHow to turn an ADC into a DAC: A 110dB THD, 18mW DAC using sampling of the output and feedback to reduce distortion
How to turn an ADC into a DAC: A 110dB THD, 18mW DAC using sampling of the output and feedback to reduce distortion Axel Thomsen, Design Manager Silicon Laboratories Inc. Austin, TX 1 Why this talk? A
More informationTactical grade MEMS accelerometer
Tactical grade MEMS accelerometer S.Gonseth 1, R.Brisson 1, D Balmain 1, M. Di-Gisi 1 1 SAFRAN COLIBRYS SA Av. des Sciences 13 1400 Yverdons-les-Bains Switzerland Inertial Sensors and Systems 2017 Karlsruhe,
More informationELC224 Final Review (12/10/2009) Name:
ELC224 Final Review (12/10/2009) Name: Select the correct answer to the problems 1 through 20. 1. A common-emitter amplifier that uses direct coupling is an example of a dc amplifier. 2. The frequency
More informationLab 4. Crystal Oscillator
Lab 4. Crystal Oscillator Modeling the Piezo Electric Quartz Crystal Most oscillators employed for RF and microwave applications use a resonator to set the frequency of oscillation. It is desirable to
More informationPURPOSE: NOTE: Be sure to record ALL results in your laboratory notebook.
EE4902 Lab 9 CMOS OP-AMP PURPOSE: The purpose of this lab is to measure the closed-loop performance of an op-amp designed from individual MOSFETs. This op-amp, shown in Fig. 9-1, combines all of the major
More informationSingle-Axis, High-g, imems Accelerometers ADXL193
Single-Axis, High-g, imems Accelerometers ADXL193 FEATURES Complete acceleration measurement system on a single monolithic IC Available in ±120 g or ±250 g output full-scale ranges Full differential sensor
More informationFUNCTIONAL BLOCK DIAGRAM 3 to 5V (ADC REF) ST2 ST1 TEMP V RATIO ADXRS k SELF-TEST. 25 C AC AMP MECHANICAL SENSOR
08820-001 FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response 20 /hour bias stability 0.02 / second angle random walk High vibration rejection over wide frequency 10,000 g powered
More informationLecture 2: Non-Ideal Amps and Op-Amps
Lecture 2: Non-Ideal Amps and Op-Amps Prof. Ali M. Niknejad Department of EECS University of California, Berkeley Practical Op-Amps Linear Imperfections: Finite open-loop gain (A 0 < ) Finite input resistance
More informationDigitizing the Analog World: Challenges and Opportunities
Digitizing the Analog World: Challenges and Opportunities April 5, 2010 Boris Murmann murmann@stanford.edu Murmann Mixed-Signal Group Murmann Mixed-Signal Group 2 Research Overview Biomolecule detection
More informationA 25MS/s 14b 200mW Σ Modulator in 0.18µm CMOS
UT Mixed-Signal/RF Integrated Circuits Seminar Series A 25MS/s 14b 200mW Σ Modulator in 0.18µm CMOS Pio Balmelli April 19 th, Austin TX 2 Outline VDSL specifications Σ A/D converter features Broadband
More informationPOINTING ERROR CORRECTION FOR MEMS LASER COMMUNICATION SYSTEMS
POINTING ERROR CORRECTION FOR MEMS LASER COMMUNICATION SYSTEMS Baris Cagdaser, Brian S. Leibowitz, Matt Last, Krishna Ramanathan, Bernhard E. Boser, Kristofer S.J. Pister Berkeley Sensor and Actuator Center
More informationActuation Techniques For Frequency Modulated MEMS Gyroscopes
Actuation Techniques For Frequency Modulated MEMS Gyroscopes by Michael Xie A thesis presented to the University of Waterloo in fulfillment of the thesis requirement for the degree of Master of Applied
More informationAnalog-to-Digital Converters
EE47 Lecture 3 Oversampled ADCs Why oversampling? Pulse-count modulation Sigma-delta modulation 1-Bit quantization Quantization error (noise) spectrum SQNR analysis Limit cycle oscillations nd order ΣΔ
More informationHomework Assignment 10
Homework Assignment 10 Question The amplifier below has infinite input resistance, zero output resistance and an openloop gain. If, find the value of the feedback factor as well as so that the closed-loop
More informationDUAL ULTRA MICROPOWER RAIL-TO-RAIL CMOS OPERATIONAL AMPLIFIER
ADVANCED LINEAR DEVICES, INC. ALD276A/ALD276B ALD276 DUAL ULTRA MICROPOWER RAILTORAIL CMOS OPERATIONAL AMPLIFIER GENERAL DESCRIPTION The ALD276 is a dual monolithic CMOS micropower high slewrate operational
More informationA Novel Control System Design for Vibrational MEMS Gyroscopes
Sensors & Transducers Journal, Vol.78, Issue 4, April 7, pp.73-8 Sensors & Transducers ISSN 76-5479 7 by IFSA http://www.sensorsportal.com A Novel Control System Design for Vibrational MEMS Gyroscopes
More informationSwitch-less Dual-frequency Reconfigurable CMOS Oscillator using One Single Piezoelectric AlN MEMS Resonator with Co-existing S0 and S1 Lamb-wave Modes
From the SelectedWorks of Chengjie Zuo January, 11 Switch-less Dual-frequency Reconfigurable CMOS Oscillator using One Single Piezoelectric AlN MEMS Resonator with Co-existing S and S1 Lamb-wave Modes
More informationWide Bandwidth Yaw Rate Gyroscope with SPI ADIS16060
Data Sheet Wide Bandwidth Yaw Rate Gyroscope with SPI FEATURES Complete angular rate digital gyroscope 4-bit resolution Scalable measurement range Initial range: ±8 /sec (typical) Increase range with external
More informationWorkshop ESSCIRC. Low-Power Data Acquisition System For Very Small Signals At Low Frequencies With12-Bit- SAR-ADC. 17. September 2010.
Workshop ESSCIRC Low-Power Data Acquisition System For Very Small Signals At Low Frequencies With12-Bit- SAR-ADC 17. September 2010 Christof Dohmen Outline System Overview Analog-Front-End Chopper-Amplifier
More informationA Wide-Bandwidth 2.4GHz ISM Band Fractional-N PLL with Adaptive Phase Noise Cancellation. Outline
A Wide-Bandwidth 2.4GHz ISM Band Fractional-N PLL with Adaptive Phase Noise Cancellation Ashok Swaminathan,2, Kevin J. Wang, Ian Galton University of California, San Diego, CA 2 NextWave Broadband, San
More informationFinal Exam. 1. An engineer measures the (step response) rise time of an amplifier as t r = 0.1 μs. Estimate the 3 db bandwidth of the amplifier.
Final Exam Name: Score /100 Question 1 Short Takes 1 point each unless noted otherwise. 1. An engineer measures the (step response) rise time of an amplifier as t r = 0.1 μs. Estimate the 3 db bandwidth
More informationLM148/LM248/LM348 Quad 741 Op Amps
Quad 741 Op Amps General Description The LM148 series is a true quad 741. It consists of four independent, high gain, internally compensated, low power operational amplifiers which have been designed to
More informationMicro-nanosystems for electrical metrology and precision instrumentation
Micro-nanosystems for electrical metrology and precision instrumentation A. Bounouh 1, F. Blard 1,2, H. Camon 2, D. Bélières 1, F. Ziadé 1 1 LNE 29 avenue Roger Hennequin, 78197 Trappes, France, alexandre.bounouh@lne.fr
More informationStudy of MEMS Devices for Space Applications ~Study Status and Subject of RF-MEMS~
Study of MEMS Devices for Space Applications ~Study Status and Subject of RF-MEMS~ The 26 th Microelectronics Workshop October, 2013 Maya Kato Electronic Devices and Materials Group Japan Aerospace Exploration
More informationEE C245 - ME C218 Introduction to MEMS Design Fall Today s Lecture
EE 45 ME 8 ntroduction to MEMS Design Fall 003 Roger Howe and Thara Srinivasan Lecture 6 Micromechanical Resonators EE 45 ME 8 Fall 003 Lecture 6 Today s Lecture ircuit models for micromechanical resonators
More informationFast Tip/Tilt Platform
Fast Tip/Tilt Platform Short Settling Time and High Dynamic Linearity S-331 Tip/tilt angle up to 5 mrad, optical deflection angle up to 10 mrad (0.57 ) Parallel-kinematic design for identically high performance
More informationA 2.6GHz/5.2GHz CMOS Voltage-Controlled Oscillator*
WP 23.6 A 2.6GHz/5.2GHz CMOS Voltage-Controlled Oscillator* Christopher Lam, Behzad Razavi University of California, Los Angeles, CA New wireless local area network (WLAN) standards have recently emerged
More informationPYKC 7 Feb 2019 EA2.3 Electronics 2 Lecture 13-1
In this lecture, we will look back on all the materials we have covered to date. Instead of going through previous lecture materials, I will focus on what you have learned in the laboratory sessions, going
More informationMechanical Spectrum Analyzer in Silicon using Micromachined Accelerometers with Time-Varying Electrostatic Feedback
IMTC 2003 Instrumentation and Measurement Technology Conference Vail, CO, USA, 20-22 May 2003 Mechanical Spectrum Analyzer in Silicon using Micromachined Accelerometers with Time-Varying Electrostatic
More information2011/12 Cellular IC design RF, Analog, Mixed-Mode
2011/12 Cellular IC design RF, Analog, Mixed-Mode Mohammed Abdulaziz, Mattias Andersson, Jonas Lindstrand, Xiaodong Liu, Anders Nejdel Ping Lu, Luca Fanori Martin Anderson, Lars Sundström, Pietro Andreani
More informationLinear vs. PWM/ Digital Drives
APPLICATION NOTE 125 Linear vs. PWM/ Digital Drives INTRODUCTION Selecting the correct drive technology can be a confusing process. Understanding the difference between linear (Class AB) type drives and
More informationEE247 Lecture 27. EE247 Lecture 27
EE247 Lecture 27 Administrative EE247 Final exam: Date: Wed. Dec. 19 th Time: 12:30pm-3:30pm Location: 70 Evans Hall Extra office hours: Thurs. Dec. 13 th, 10:am2pm Closed course notes/books No calculators/cell
More informationCDS 101/110a: Lecture 8-1 Frequency Domain Design
CDS 11/11a: Lecture 8-1 Frequency Domain Design Richard M. Murray 17 November 28 Goals: Describe canonical control design problem and standard performance measures Show how to use loop shaping to achieve
More informationOvercoming Offset. Prof. Kofi Makinwa. Electronic Instrumentation Laboratory / DIMES Delft University of Technology Delft, The Netherlands
Overcoming Offset Prof. Kofi Makinwa Electronic Instrumentation Laboratory / DIMES Delft University of Technology Delft, The Netherlands email: k.a.a.makinwa@tudelft.nl Motivation The offset of amplifiers
More informationASC IMU 7.X.Y. Inertial Measurement Unit (IMU) Description.
Inertial Measurement Unit (IMU) 6-axis MEMS mini-imu Acceleration & Angular Rotation analog output 12-pin connector with detachable cable Aluminium housing Made in Germany Features Acceleration rate: ±2g
More informationSystem Architecture for Mode-Matching. a MEMS Gyroscope. Henry Wu S.B. EECS, M.I.T., 2008
System Architecture for Mode-Matching a MEMS Gyroscope by Henry Wu S.B. EECS, M.I.T., 2008 Submitted to the Department of Electrical Engineering and Computer Science in Partial Fulfillment of the Requirements
More informationOBSOLETE. High Accuracy 1 g to 5 g Single Axis imems Accelerometer with Analog Input ADXL105*
a FEATURES Monolithic IC Chip mg Resolution khz Bandwidth Flat Amplitude Response ( %) to khz Low Bias and Sensitivity Drift Low Power ma Output Ratiometric to Supply User Scalable g Range On-Board Temperature
More information