AFM Probes. Innovation with Integrity. AFM Probes

Transcription

1 AFM Probes 2013 Innovation with Integrity AFM Probes 1

2 How to Order Americas Order online (USA only): Phone Orders: +1 (800) Option 6 Purchase Order by Fax: +1 (805) Purchase Order by afmprobeorders@bruker-nano.com Technical Information: +1 (800) x2080 or probesinfo@bruker-nano.com AFM Tech Support: +1 (800) or afmsupport@bruker-nano.com International Europe Phone Orders: +44 (0) Purchase Order by Fax: +33 (0) Purchase Order by orders.france@bruker-nano.com Technical Information: probesinfo.uk@bruker-nano.com Asia Pacific Phone Orders: Purchase Order by Fax: Technical Information: info@bruker.com.sg Japan Phone Orders: Purchase Order by Fax: Purchase Order by spm-orders@bruker-axs.jp Technical Information: info-nano@bruker-axs.jp Bruker AFM Probes A s the worldwide leader in scanning probe microscope (SPM) and atomic force microscope (AFM) instrumentation, Bruker is consistently driving and shaping the future of the industry. Over the past year, we have developed new industry-leading AFM systems for life sciences and materials research, new software and applications capabilities, and revolutionary imaging techniques and modes. Bruker is the only major AFM/SPM equipment manufacturer that also owns and operates a probes nanofabrication facility. Being one of the world s largest probe users, we have an intimate understanding of the value of every single component in a high-performance AFM system. Our dedication to manufacturing probes, coupled with our expertise in AFM, ensures that we are uniquely equipped to deliver the most complete AFM solution for the widest variety of applications. The Bruker AFM Probes Nanofabrication Center features: Class 100 clean rooms Advanced design and fabrication process toolset An in-house probes design team that collaborates with Bruker AFM scientists and engineers An agile production team that produces a wide variety of different probes A comprehensive quality system ensuring industry-leading probe performance Your data depends on repeatable probe performance and quality, from one probe to the next. With our tightly controlled nanofabrication, comprehensive quality testing, and AFM expertise, you can be confident that our probes will deliver the results you require, not only for your current applications, but also for the emerging research of tomorrow. A F M P r o b e s AFM expertise built into every probe, for every AFM Copyright Bruker Corporation. All rights reserved. 2 3

3 Table of Contents How to Order 2 Bruker AFM Probes Introduction 3 Probes Application Selector Guide 6-9 AFM Systems 11 Dimension FastScan AFM 14 Dimension Icon AFM 15 Dimension Edge AFM 16 MultiMode 8 AFM 17 Innova AFM 18 BioScope Catalyst AFM 19 Integrated AFM-Raman Imaging Systems 20 InSight 450/300mm 3D AFMs 21 Dimension AFP 22 Imaging Modes 23 SPM Operation 25 Contact Mode AFM 26 TappingMode AFM 27 PeakForce Tapping 28 ScanAsyst 29 FastScan 30 TappingMode & PhaseImaging 31 PeakForce QNM 32 LiftMode 33 Magnetic Force Microscopy - MFM 34 Electrostatic Force Microscopy - EFM 35 PeakForce KPFM 36 Scanning Tunneling Microscopy - STM 37 Scanning Electrochemical Potential Microscopy - SECPM 38 Table of Contents Electrochemical Atomic Force Microscopy - ECAFM 39 Torsional Resonance 40 PeakForce TUNA & (Photo-)Conductive AFM 41 High Resolution SSRM 42 Scanning Capacitance Microscopy - SCM 43 Scanning Thermal Microscopies 44 Piezoresponse Microscopy 45 Critical Dimension Atomic Force Microscopy - CDAFM 46 Deep Trench Mode 47 Probes 49 Bruker AFM Probes 10-Pack Policy 51 Quality and Performance - Silicon Nitride Probes 52 Silicon Nitride Probe Cantilever Layouts 53 Silicon Probes 54 Silicon Nitride Probes 74 Magnetic Probes 94 Supersharp Probes 100 Electrical Probes 106 Critical Dimension Probes 112 Spike Automated Probes 116 Nanoindentation Probes 122 Active Probe 124 TERS/ STM Probes 126 Thermal Probes 128 Helpful Equations 130 Index 131 Probes by Type 132 Bruker AFM Probes Terms & Conditions for Sale 140 Nanoscale World Community

4 Probes Application Selector Guide Commonly Used Probes Force Constant (N/m) Probe Model Resonant Frequency (khz) Radius of Curvature (nm) Reflective Probe Attributes Tip Side Catalog Page AFM Mode Fast Force Scanning ScanAsyst Tapping Contact Curves Electrical Magnetic è Cells Life Sciences Sample Type Tissues Biomolecules Polymers/ Soft Samples Materials Sample Type Air Liquid Air Liquid Air Liquid Air Liquid Air Hard Samples Liquid DNP Low Force, Symmetric Tip Au None 80 High Resolution, Low Force, DNP-S Symmetric Tip Au None 80 Highest Speed, FastScan-A Precise Force Control Al None 74 Highest Speed, FastScan-B Precise Force Control Au None 74 Highest Speed, FastScan-C Precise Force Control Au None 74 Highest Speed & Force Control FastScan-Dx on Soft Bio Samples Special None 74 è è MLCT Lowest Force, Symmetric Tip Au None 76 MSCT High Resolution, Lowest Force, Symmetric Tip Au None 76 MSNL Ultra-High Resolution, Lowest Force, Symmetric Tip Au None 102 ScanAsyst-Air Ultra-High Resolution, Lowest Force, Symmetric Tip Al None 84 ScanAsyst-Air-HR Highest Speed, Ultra-High Resolution, Lowest Force Al None 84 High Resolution, Lowest Force, ScanAsyst-Fluid Symmetric Tip Au None 84 ScanAsyst-Fluid+ Ultra-High Resolution, Lowest Force, Symmetric Tip Au None 84 SNL Ultra-High Resolution, Low Force, Symmetric Tip Au None 104 è è 6 7

5 Probes Application Selector Guide Commonly Used Probes (continued) Force Constant (N/m) Probe Model Probe Attributes Resonant Frequency (khz) Radius of Curvature (nm) Reflective Tip Side Catalog Page Conductive, DDESP Increased Wear Resistance Al Diamond 108 DDESP-FM Conductive, Low Force, Increased Wear Resistance Al Diamond 108 Highest Resolution, Low Force, FESPA Asymmetric Tip Al None 58 High Resolution, Low Force, FMV Asymmetric Tip None None 58 High Performance, Magnetic MESP Characterization, Asymmetric Tip CoCr CrCo 94 High Performance, Magnetic MESP-RC Characterization, Symmetric Tip CoCr CrCo 96 NCHV-A Al None 62 High Performance, Electrical OSCM-PT Characterization, Visible Apex Tip Al Pt 110 PeakForce Quantitative PFQNE-AL Nano Electrical Measurements Special None 106 Highest Resolution, Electrical PFTUNA Characterization Ptlr Ptlr 106 RTESPA (MPP ) Al None 64 High Performance, Electrical SCM-PIC Characterization, Asymmetric Tip Ptlr Ptlr 110 High Performance, Electrical SCM-PIT Characterization, Asymmetric Tip Ptlr Ptlr 110 TESPA High Resolution, Asymmetric Tip Highest Resolution, Symmetric Tip Highest Resolution, Symmetric Tip Al None 62 AFM Mode Fast Force Scanning ScanAsyst Tapping Contact Curves Electrical Magnetic è è è è è Air Liquid Air Liquid Air Liquid Life Sciences Sample Type Cells Tissues Biomolecules Polymers/ Soft Samples Materials Sample Type Hard Samples Air Liquid Air Liquid 8 9

6 AFM Systems Innovation with Integrity AFM Probes 10 11

7 AFM Systems Table of Contents Dimension FastScan AFM 14 Dimension Icon AFM 15 Dimension Edge AFM 16 MultiMode 8 AFM 17 Innova AFM 18 BioScope Catalyst AFM 19 Integrated AFM-Raman Imaging Systems 20 InSight 450/300mm 3D AFMs 21 Dimension AFP 22 The AFM Performance and Technology Leader B ruker atomic force microscopes (AFMs) are used in the forefront of nanoscale research and discovery in life science, materials science, semiconductor, electrochemistry, and many other applications. Bruker has developed proprietary, application-specific product suites that deliver unparalleled accuracy and resolution at price points for every budget. Based on decades of experience in AFM innovation and design optimization, our systems make the technology easier and more accessible to all AFM users. Utilizing over 20 imaging modes including the revolutionary technology advances of PeakForce Tapping, PeakForce Capture and PeakForce QNM Bruker s AFMs, probes, and accessories enable increased productivity, helping you obtain quantifiable results faster and easier. Bruker is uniquely equipped to offer a complete, high-performance solution tailored to your specific application. Our unrivaled local Applications and Technical specialists will assist you every step along the way, from product, probe and accessory selection through application support and next-generation technique development. The Bruker Innovation Timeline 1992 TappingMode and AFM imaging in liquids 1994 Closed-loop SPM First AFM for life science applications (BioScope ) 1995 PhaseImaging and LiftMode 1999 Electrical application modules X faster imaging 2001 High-temperature polymer imaging 2002 AFM for force spectroscopy (PicoForce ) 2003 Torsional Resonance mode (TR-Mode ) 2006 Single harmonic imaging 2008 HarmoniX real-time material property mapping 2009 PeakForce Tapping PeakForce QNM Imaging Mode ScanAsyst Imaging Mode 2010 PeakForce TUNA quantitative nanoscale electrical characterization 2011 World s fastest, high-resolution AFM (Dimension FastScan ) High-speed, AFM self-optimizing image mode (ScanAsyst-HR) IRIS AFM-Raman integration 2012 First turnkey solution for Li battery EC-AFM research First commercial Bio-AFM to capture high-resolution dynamics with ease (FastScan Bio ) High-contrast TERS probe tips (IRIS TERS Probes)

8 Dimension FastScan AFM The Benchmark for AFM Speed Dimension Icon AFM AFM Performance and Productivity Redefined T Features & Benefits Extreme Imaging Speed on Any Sample High-Resolution Imaging at High-Speed Scan Rates ScanAsyst for Ease of Use Applications See FastScan Application Videos at Dynamics Studies at Nanometer Resolution Materials Polymer Chemistry Life Sciences Measurements Graphene Research he Dimension FastScan Atomic Force Microscope (AFM) delivers, for the first time, extreme imaging speed without sacrificing legendary Dimension Icon resolution and performance. The new life sciences model, FastScan Bio, provides the scanning speed required for high-resolution spatiotemporal studies, allowing researchers to capture biological dynamics with ease. Whether you scan at >125Hz when surveying a sample to find the region of interest, or at time rates of 1-second per image frame in air or fluid, FastScan systems redefine the AFM experience. Dimension FastScan is the first AFM to achieve the perfect balance of scan-speed, resolution, accuracy, drift, and noise, making fast scanning atomic force microscopy a commercial reality. Contact Bruker to learn how you can upgrade your Dimension Icon to a FastScan or explore how you can measure your samples using the Bruker proprietary AFM technology. T Features & Benefits Ultimate Performance Exceptional Productivity ScanAsyst for Ease of Use PeakForce QNM for Nanoscale Mechanical Mapping Applications Materials Polymer Chemistry Electrical Materials Characterization Life Sciences Measurements Electro Chemistry AFM Heating and Cooling Studies he Dimension Icon established new levels of performance in AFM, functionality and AFM accessibility for nanoscale researchers in science and industry. The ultra-stable Icon platform enables previously unachievable measurements with ultra low drift and the lowest tip/sample force control of any commercially available open-platform, tip-scanning AFM. New AFM researchers can now perform exceptionally repeatable, high-resolution experiments that previously were only accessible by highly experienced users. Icon allows new and experienced users to achieve artifact-free images in minutes instead of hours, enabling increased productivity. If you are a using an older model Dimension AFM, please contact Bruker to see for yourself how Icon is achieving the highest resolution images possible in a tip-scanning system, all in minutes instead of hours. bruker.com/fastscan & bruker.com/fastscan-bio bruker.com/dimension-icon 14 15

9 Dimension Edge AFM The Performance and Value AFM Solution MultiMode 8 AFM Highest Resolution and Unmatched Publication Record T Features & Benefits Best Value Closed-Loop AFM Accurate, High- Resolution Results Solutions for All Applications on Any Sample Advanced Nanoscale Capabilities for Beginners and Experts Applications Materials Characterization Polymers Chemistry Electrical Materials Characterization Life Sciences Measurements he Dimension Edge incorporates Bruker s latest technology advances to provide the highest levels of performance, functionality, and accessibility in its class. Based on the ultimate Dimension Icon scanner, the Edge is a large-sample platform designed from top to bottom to deliver the performance necessary to reach decisions on materials formulation and design, or achieve publication-ready data in minutes instead of hours. It does all of this at price points well below expectations for such performance. In addition, integrated visual feedback and preconfigured settings enable expert-level results simply and consistently, making the most advanced large-sample atomic force microscopy capabilities and techniques available to every facility and user. If you already own an older model Dimension AFM, Bruker would like to help you identify an upgrade path to a brand new Dimension Edge, so you can continue to experience the best available AFM performance and service. bruker.com/dimension-edge T Features & Benefits Superior Resolution and Performance Versatility for Widest Range of Applications Proven Productivity and Reliability ScanAsyst for Ease of Use PeakForce QNM for Mapping Mechanical Properties Applications Materials Science Research Life Sciences Measurements Electrochemistry Studies hough best known for its performance leading resolution, today s MultiMode 8 leverages Bruker s exclusive PeakForce Tapping technology to provide new information, faster results and greatly improved ease of use. Bruker s exclusive ScanAsyst mode makes imaging easier, faster, and more consistent by directly controlling the tip-sample interaction force and automatically optimizing imaging parameters. And now ScanAsyst-HR enables up to 6X faster scanning for even greater productivity. New quantitative material property mapping is made possible using PeakForce QNM, which analyzes each tip-sample interaction to extract nanomechanical properties including modulus, adhesion, deformation, and dissipation. This can be combined with the new PeakForce TUNA mode to perform conductivity mapping on even the most delicate samples. With these features and many others, the MultiMode 8 has the versatility to help you excel in virtually any field of research. Contact Bruker to find out how you can upgrade to the MultiMode 8 at a fraction of the cost of a new system. bruker.com/multimode 16 17

10 Innova AFM Superior Research Performance and Versatility BioScope Catalyst AFM Complete Integration of AFM and Light Microscopy T Features & Benefits High-Resolution Closed-Loop System Fast, Easy Tip and Sample Exchange Versatility and Value Powerful Research Flexibility Applications Materials Characterization Nanolithography Life Sciences Measurements Polymer Chemistry Device Characterization he Innova introduces an unmatched combination of productivity, ease of use, and application flexibility for the most demanding scientific research, all at a moderate cost. It offers a unique, state-of-the-art closed-loop scan linearization system that ensures accurate measurements and noise levels approaching those of open-loop operation. Innova delivers atomic resolution with great ease and scans up to 90 microns without the need to change scanner hardware. The integrated, high-resolution color optics and programmable, motorized Z-stage make finding features and changing tips or samples fast and easy. T Features & Benefits Uncompromised Performance from Both Techniques Increased Productivity and Ease of Use Simple, Effective Solutions for Biological Samples Applications Live Cell Imaging Force and Bio- Mechanical Studies High-Resolution, Molecular-Scale Imaging he BioScope Catalyst has been designed from top to bottom to make it easier than ever to realize the full benefits of combining AFM and light microscopy. Its unique design delivers high-performance AFM results for both imaging and force measurement applications while integrating seamlessly with standard inverted light microscopes. Bruker s exclusive MIRO software enables true functional integration of the two techniques, allowing AFM imaging and force curves to be guided by optical images to automatically generate spatially registered and overlaid optical and AFM images. The full functionality of the BioScope Catalyst is made more productive with a variety of ease-of-use features. The NanoScope software presents a simple workflow to help guide users through their measurements, and the Catalyst hardware is designed to make such routine tasks as probe exchange and laser alignment simple and fast. Bruker s proprietary ScanAsyst Mode with automatic image optimization technology provides easier, faster, and more consistent imaging results. Its performance, productivity, and integrated design make the BioScope Catalyst the best, easiest to use life science AFM available today. bruker.com/innova bruker.com/bioscope-catalyst 18 19

11 Integrated AFM-Raman Imaging Systems Seamless Integration of AFM and Raman Spectroscopy InSight 450/300mm 3D AFMs 3D Characterization to Production Depth and CMP Metrology C Features & Benefits Easy-to-Use AFMs for Spectroscopy in Materials and Life Sciences Highest Performance, Most Complete AFM Capabilities TERS-Ready AFM- Raman System Integration True Nanoscale Spectroscopy Targeted to Your Application Applications Nanoscale Materials Characterization Life Sciences Measurements Tip-Enhanced Raman Spectroscopy (TERS) Biomaterials atalyst-iris (Integrated AFM-Raman Imaging System) and Innova-IRIS systems enable researchers to easily and affordably combine chemical or crystallographic information from Raman spectroscopy, at high spatial and spectral resolution, with the most advanced nanoscale mechanical, electrical, and thermal AFM characterization. The IRIS models leverage the unique capabilities of the Catalyst and Innova platforms to provide TERSready performance that can be tailored to specific application requirements without sacrificing ease of use. The Catalyst-IRIS is compatible with Zeiss, Leica, Olympus, and Nikon inverted optical microscopes, and both systems fully support leading Raman instruments from Renishaw, HORIBA Scientific, and Princeton Instruments. T Features & Benefits Unique, Non-Destructive, 3D Metrology, (LER, LWR, SWA) High-Throughput Depth Metrology for Production and Process Development Fab-Based, Production- Level Reliability and Automation Applications Reference Metrology for CD-SEM and Optical CD 3D Characterization of Advanced Lithography Production-Based Depth and CD Metrology for Etch Processes Non-Destructive Measurement of Contacts, Line End and Isolated Structures he InSight 3D AFM systems provide the unparalleled accuracy and precision required for non-destructive, high-resolution 3D measurements of critical semiconductor features. InSight enables an entirely new approach to in-line 3D metrology, delivering both unique 3D Metrology (LWR, LER) and the lowest measurement uncertainty for CD, Depth and Sidewall Angle on critical layers, such as Shallow Trench Isolation, Gate and FinFet structures. These features allow the system to overcome the limitations of CD-SEM and Optical CD technologies, which suffer from bias variation issues that negatively impact CD measurements. The new InSight-450 model provides a one-tool metrology solution for depth, CD, side-wall angle, profile and roughness for full 450mm wafers. bruker.com/innova-iris & bruker.com/catalyst-iris bruker.com/insight-300 & bruker.com/insight

12 Dimension AFP Chemical Mechanical Planarization and Etch Metrology at 65nm Features & Benefits Fastest CMP Profiling Throughput Exceptional Productivity Fab-Based, Production-Level Reliability and Automation T Applications CMP Process Characterization (CU, W, STI Dielectric, Poly) Industry-Leading Repeatability for CMP and Etch Depth Metrology Profiling and High- Aspect-Ratio Depth Measurements in a Single Platform Applications in Semiconductor, Data Storage and LED Industries he Dimension AFP is the world s only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler to monitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability. Replacing costly wafer crosssectioning, the Dimension AFP offers the highest performance available for device characterization. Imaging Modes bruker.com/dimension-afp Innovation with Integrity AFM Probes 22 23

13 Applications Table of Contents SPM Operation 25 Contact Mode AFM 26 TappingMode AFM 27 PeakForce Tapping 28 ScanAsyst 29 FastScan 30 TappingMode & PhaseImaging 31 PeakForce QNM 32 LiftMode 33 Magnetic Force Microscopy - MFM 34 Electrostatic Force Microscopy - EFM 35 PeakForce KPFM 36 Scanning Tunneling Microscopy - STM 37 Scanning Electrochemical Potential Microscopy - SECPM 38 Electrochemical Atomic Force Microscopy - ECAFM 39 Torsional Resonance 40 PeakForce TUNA & (Photo-)Conductive AFM 41 High Resolution SSRM 42 Scanning Capacitance Microscopy - SCM 43 Scanning Thermal Microscopies 44 Piezoresponse Microscopy 45 Critical Dimension Atomic Force Microscopy - CDAFM 46 Deep Trench Mode 47 SPM Operation Sample Detector Signal Z X Y Feedback Loop Output Signal Adjusts Z Position Raster Scan Scanning Probe Microscopy (SPM) is a technique to provide spatially localized three-dimensional information by raster scanning a sharp probe and a surface in close proximity relative to each other and monitoring probe-sample interactions. Depending on the interaction, a variety of surface properties can be measured in addition to topographic information, such as electrical, magnetic, and nanomechanical data. The main SPM scan modes are contact mode, TappingMode, and PeakForce Tapping mode, and these build the foundation of all advanced scanning techniques. Probe Protein molecules in liquid before and after force pulling with AFM. Probes: TESP pg 62 MPP (RTESP) pg 64 ESP pg 54 SNL-10 pg 104 DNP-10 pg 80 MLCT pg 76 MSNL-10 pg

14 Contact Mode AFM TappingMode AFM Feedback Loop Maintains Constant Cantilever Deflection Detector Signal Feedback Loop Maintains Constant Cantilever Amplitude Drive Signal Z X Y Feedback Loop Output Signal Adjusts Z Position Raster Scan Z X Y Feedback Loop Output Signal Adjusts Z Position Raster Scan Contact mode is a primary AFM mode. The probe is a microfabricated cantilever with a sharp tip. Tip and sample are in perpetual contact during the raster-scan. Detector signal is a measure of cantilever deflection in Z. In feedback mode, output signal usually adjusts the Z position of the scanner to maintain a deflection setpoint. This mode enables numerous secondary modes, including LFM, Force Modulation, SCM, SSRM, TUNA, and CAFM. TappingMode is a primary AFM mode. The probe is a microfabricated cantilever with a sharp tip. A drive signal, applied to the tapping piezo, mechanically oscillates the probe at or near its resonance frequency (usually the fundamental resonance). Detector signal is cantilever oscillation amplitude, or phase (relative to drive signal). In feedback mode, output signal usually adjusts the Z position of the scanner to maintain an (rms) amplitude setpoint. TappingMode enables numerous secondary modes, including PhaseImaging, EFM, MFM, and Surface Potential imaging. Native Collagen fibrils exhibiting the typical 67nm Probes: banding pattern. ESP pg 54 MPP pg 56 SNL-10 pg 104 DNP-10 pg 80 MLCT pg 76 MSNL-10 pg 102 Topography of antimony dendrites on graphite. Probes AIR: MPP (RTESP) pg 64 TESP pg 62 OTESPA pg 66 FESP pg 58 Probes FLUID: SNL-10 pg 104 DNP-10 pg 80 MLCT pg 76 MSNL-10 pg

15 PeakForce Tapping ScanAsyst C A approach B Time D withdraw E A PeakForce Tapping C + B E Auto Optimization of: Set Point Gain Scan Rate = approach D withdraw Z - Limit Time A B C D E PeakForce Tapping is Bruker s exclusive core technology that enables many of our most recent AFM innovations, including ScanAsyst, PeakForce QNM, PeakForce TUNA and ScanAsyst-HR. Like TappingMode, PeakForce Tapping is an AC imaging technique, i.e., the cantilever is oscillated, and therefore very gentle on even delicate samples. What makes PeakForce Tapping technology unique is that the probe is oscillated well below its resonance frequency. By doing so, every interaction between the tip and sample can be measured, generating a continuous series of force-distance curves. Rather than the feedback loop controlling the cantilever amplitude (i.e., like TappingMode), it is the peak force of each tip-sample interaction that is held constant. This allows PeakForce Tapping to operate at much lower forces and makes its operation inherently more stable in both air and liquid. It also makes it possible to measure nanomechanical and nanoelectrical properties during each interaction. Probes: ScanAsyst-Air pg 84 ScanAsyst-Fluid pg 84 ScanAsyst-Fluid+ pg 84 ScanAsyst is an exclusive imaging mode based on PeakForce Tapping technology that automatically optimizes imaging parameters including setpoint, feedback gains, and scan rate. This makes it faster and easier to obtain consistent high-quality results. Because the tip-sample interaction force is directly controlled, ScanAsyst is very gentle on samples in both air and liquid. Faster imaging is now possible using ScanAsyst with the Dimension FastScan AFM or using ScanAsyst-HR on the MultiMode 8 AFM. Polymer brush sample imaged on a MultiMode 8 using ScanAsyst. Sample courtesy of S. Sheiko, University of North Carolina, Chapel Hill. Probes: ScanAsyst-Air pg 84 ScanAsyst-Fluid pg 84 ScanAsyst-Fluid+ pg 84 ScanAsyst-Air-HR pg

16 ON Z-Scanner Vacuum OFF Z-Scanner Release High Voltage ON Laser ON FastScan TappingMode & PhaseImaging Amplitude Setpoint Amplitude Error Height Data Detector Signal Detector Signal Proportional & Integral (P/I) gains Controller HV Amplifier Controller Amplitude Response Scanner Electro-Mechanical Response Drive Signal Drive Signal At Equal Tip-Sample Force Probe Response Magnitude 90 Phase 0-90 f FastScan Other High Performance AFM Topography Tip Surface Distance 2 1 FastScan is a revolutionary AFM from Bruker that enables scanning speeds >20x compared to a typical high-performance AFM. Using specially engineered high-bandwidth probes, the fast scanning AFM tracks the sample surface using a feedback loop, with each component in the loop contributing its own dynamics or delays. The sum of all these component responses determine the full speed system transfer function (FSTF), establishing the FastScan s speed performance. A comparison of the FSTF for a FastScan versus a typical high-performance AFM shows a >20x higher frequency, resulting in direct proportion to scan rate. With FastScan, users can also survey samples at speeds >100x without ringing or sacrificing image quality and desired resolution. TappingMode AFM is an AC technique in which the cantilever is operated at or near its resonance frequency. Forces between tip and sample cause a change of the initial resonance behavior. Typically a reduction in the free air amplitude is maintained to track the sample topography. By simultaneously monitoring the phase shift between drive signal to the cantilever and its response, a so-called phase image can be generated that provides very high spatial information based on various material properties. Probes: FASTSCAN-A pg 74 FASTSCAN-B pg 74 FASTSCAN-C pg 74 FASTSCAN-DX pg 74 FastScan image showing oxygen atoms protruding from calcite crystals on the top and bottom crystal planes. Discrete atomic structure is revealed in the dissolving crystal front with PeakForce Capture. TappingMode phase image clearly shows microphase separation in SBS tri-block copolymer. Probes: MPP (RTESP) pg 64 TESP pg 62 OTESPA pg 66 FESP pg

17 PeakForce QNM LiftMode DMT fit for modulus Adhesion Peak Force Deformation LiftMode Scan Dissipation Tip-sample Separation Lift Height TappingMode Height Data Baseline Attractive Forces Peak Force & Deformation Adhesion Baseline Modulus Dissipation PeakForce QNM is another exclusive imaging mode based on PeakForce Tapping technology. Here each tip-sample interaction is analyzed to extract quantitative nanomechanical properties including elastic modulus, adhesion, deformation, and dissipation. This allows each of these properties to be mapped quantitatively and at high resolution while still collecting standard topography images at normal imaging rates. Unlike some competing technologies based on old contact mode technology, PeakForce QNM works well on a wide range of sample types from soft delicate materials with modulus <1MPa all the way up to materials with modulus >50GPa. LiftMode is not an imaging mode, as it by itself does not measure a new quantity to reveal new information, but rather a technique that enables other modes such as MFM, EFM, and SCM. In LiftMode the sample is scanned first in a regular topographic mode: Contact, TappingMode or PeakForce Tapping. The following line, the lift line, traces the previously acquired topography back and adds a Z-offset. As the feedback laser is not necessarily needed during the lift line, experiments that would be influenced by laser light can be enabled (DarkLift). Probes: MPP (RTESPA) pg 64 MPP pg 64 MPP pg 64 PDNISP-HS pg 122 ScanAsyst-Air pg 84 Modulus image of a multi-component polymer blend. Three components are clearly identified by their modulus. MFM and EFM samples. Probes: MESP pg 94 SCM-PIT pg 110 SCM-PIC pg

18 Magnetic Force Microscopy - MFM Electrostatic Force Microscopy - EFM LiftMode Scan Magnetic Probe LiftMode Scan Conductive Probe Magnetic Forces Cause Phase Shift over Different Domains during the LiftMode Scan = Phase Shift Lift Height Electric Forces Cause Phase Shift over Different Domains during the LiftMode Scan = Phase Shift Lift Height Height Data Height Data Single Pass (Dual Frequency) is also available Magnetic Force Microscopy (MFM) uses a combination of TappingMode, LiftMode and a properly prepared tip to gather information about the magnetic field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a userselectable height offset in LiftMode, during which the magnetic data are collected. Typical lift heights in MFM range from nm. Electrostatic Force Microscopy (EFM) uses a combination of TappingMode, LiftMode and a conductive tip to gather information about the electric field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a userselectable height offset in LiftMode, during which the electrical data is collected. Typical lift heights in EFM range from 20-80nm. Magnetic domains in a steel sample. Carbon black aggregates in a rubber matrix visualized by utilizing their electric properties. Probes: MESP pg 94 MESP-HM pg 94 MESP-LM pg 94 MESP-RC pg 96 Probes: SCM-PIT pg 110 MESP pg 94 MESP-RC pg 96 OSCM-PT pg

19 PeakForce KPFM Scanning Tunneling Microscopy - STM 2V Potential Data 0V -1V LiftMode Scan Conductive Probe Feedback Loop Maintains Constant Tunneling Current Tunneling Current Amplifier Lift Height DC Bias Feedback Loop Output Signal Adjusts Z Position Z Height Data X Y XY Raster Scan Single Pass (Dual Frequency) Capacity is also available Surface Potential Microscopy (SPoM) is based on the macroscopic Kelvin method. SPoM is able to measure surface topography and surface potential (VDC) information simultaneously. Both amplitude modulation (AM) and frequency-modulation (FM) are available and they can be combined with TappingMode and PeakForce Tapping for topography mapping. Bruker s signature PeakForce KPFM mode combines the high spatial resolution offered by FM potential detection with complete auto-parameter setup for high measurement consistency and with the nanomechanical information available by employing PeakForce Tapping for topography feedback. STM is a primary AFM mode. The probe is a metal needle. Detector signal is the tunneling current between the tip and sample when an electrical bias, V, is applied. In feedback mode, output signal usually adjusts the Z position of the scanner to maintain a tunneling current setpoint. STM is the highest resolution AFM mode. Probes: SCM-PIT pg 110 MESP pg 94 MESP-RC pg 96 OSCM-PT pg 110 Composite image of Height and Surface potential of a laser diode (8μm scan). In-situ atom resolution electrochemical STM image of Cu underpotential deposition on Au(111). Probes: TT10 pg 127 PT10 pg 127 STM pg 127 CLST-PTBO pg 127 DPT10 pg 127 DTT10 pg 127 PT-ECM10 pg 127 TT-ECM10 pg

20 Scanning Electrochemical Potential Microscopy - SECPM Electrochemical Atomic Force Microscopy - ECAFM ECAFM-1b.pdf 1 3/8/13 2:26 PM Detector Signal Potentiometer Potentiostat Counter Electrode Probe Potentiostat Reference Electrode Counter Electrode Reference Electrode Topography Modulus Working Electrode = Sample Working Electrode = Sample The probe in SECPM is a sharp metal needle. Detector signal is electric potential difference between tip and sample (or between tip and a reference electrode) in an ionic or polar liquid, where an electric double-layer exists at the liquid/sample interface. SECPM maps the electric potential profile across the depth of the double-layer (versus Z, the tip-sample distance) at tip XY location. In feedback mode, the output signal usually adjusts the Z position of the scanner. ECAFM is a technique combining atomic force microscopy with electrochemical control where the sample is the working electrode. An electrochemical cell provides counter and reference electrode. Control of all electrodes is provided by a (bi-) potentiostat. The AFM tip constitutes an in situ spectator, observing topographic changes directly in liquid, while under electrochemical control. All liquid AFM modes apply, including ScanAsyst for easies liquid imaging and including PeakForce QNM, providing quantitative nanomechanical information. Probes: PT-ECM10 pg 127 Sn60Ph40 alloy in glycerol Topography (left) and Modulus (right) of Li anode using PeakForce QNM in ECAFM. Probes: ScanAsyst-Fluid pg 84 ScanAsyst-Fluid+ pg 84 SNL-10 pg 104 MLCT pg 76

21 Torsional Resonance PeakForce TUNA & (Photo-)Conductive AFM Detector Signal Feedback Loop Maintains Constant Lateral Deflection Contact Mode Drive Signal Conductive AFM Probe Current Amplifier (Sub pa µa) Lateral Tip Dither n p Feedback Loop Output Signal Adjusts Z Position Si Z Raster Scan V DC Topography TUNA Data X Y During Torsional Resonance mode (TR-Mode ), the tip is actuated parallel rather then vertical with respect to the surface. Forces between tip and sample cause a change in resonance behavior that can be used to track the surface at a constant distance. TR-Mode has the advantage that the tip remains at a constant distance to the surface at all times. This can be advantageous in modes like TR-TUNA or nearfield-optical experiments. Tunneling AFM (TUNA) and Conductive AFM traditionally normally operate in contact mode. The imaging signal is the electric current between the conductive tip and sample for an applied DC bias. In the feedback mode, the DC bias is dynamically adjusted to maintain a constant tip-sample current. The operational current ranges from fa (TUNA) to μa (CAFM). More recently, CAFM and TUNA have been utilized with PeakForce Tapping into a new mode, PeakForce TUNA, which enables these measurements to be taken more reliably and on a much wider range of samples, as well as allowing for the direct correlation of electrical data with nanomechanical information from PeakForce QNM measurements. PeakForce TUNA can be leveraged to minimize damage and thus achieve best spatial resolution on the often mechanically delicate OPV samples. Probes: MPP pg 60 FESP pg 58 Steps on HOPG as seen by the tip operating in TR-Mode. Conductive Polymer (right), Poly-analine on Indium Tin Oxide (left). Probes: SCM-PIC pg 110 SCM-PIT pg 110 DDESP-FM pg 108 PFTUNA pg

22 High Resolution Scanning Spreading Resistance Microscopy - SSRM-HR Scanning Capacitance Microscopy - SCM Contact Mode Contact Mode Conductive AFM Probe Logarithmic Amplifier log (I) Conductive AFM Probe Capacitance Sensor SCM Sensor (10 pa µa) n Si p n Si p n n p p n V DC Resistance (SSRM Data) Spreading Resistance ρ R = 4 x radius V AC Topography SCM Data SSRM uses contact mode AFM where the sensor signal is the electric current between the conductive tip and sample for an applied DC bias, VDC. SSRM measures the current by referencing it to an internal resistor, using a logarithmic amplifier, to yield local resistance value. SSRM maps the variation in majority carrier concentration in doped semiconductors with spatial resolution dependent on the contact area from which the spreading resistance emanates. Best spatial resolution is thus achieved on a dry sample surface with sharp probes. The high resolution, glove-box based SSRM-HR package therefore combines sample preparation in high vacuum with SSRM measurement at <1ppm H 2 O partial pressure. Transistor cross section. SCM uses contact mode AFM and a conductive probe and applies to semiconductor samples with an AC bias (amplitude DV, ~90kHz) with a DC offset. The capacitance of the metal-oxide-semiconductor (MOS) capacitor at tip-sample contact is a function of majority carrier concentration in the sample. SCM uses an ultra-high-frequency (1GHz) detector to measure tip-sample capacitance variation, DC, at the bias frequency. Sensor signal is DC/DV. In feedback mode, output signal is DV, adjusted to maintain a DC/DV Setpoint. SCM maps relative changes of majority carrier concentration in semiconductors. Topography (left), SCM (right) laser diode cross section. Probes: DDESP pg 108 SSRM-DIA pg 108 Probes: SCM-PIC pg 110 SCM-PIT pg 110 MESP-RC pg 96 OSCM-PT pg

23 Scanning Thermal Microscopies Piezoresponse Microscopy Vertical Deflection Monitored as Tip Heated Topographical Measurement Heater Control Temperature Measurement T Thermal Property Map Topographical Map In Scanning Thermal Microscopy (SThM) a heated tip is scanned across a sample. Changes in the tip s resistivity reveal either thermal conductivity or thermal gradients on the sample. In Nanoscale Thermal Analysis (NanoTA), a tip is heated in such a way that it induces a phase transition in the sample. That transition is monitored using the cantilever deflection and is material specific. Piezoresponse (Piezoforce) Microscopy (PFM) is a technique based on contact mode that maps out the inverse piezoelectric effect on a sample. The sample is electrically stimulated and the topographic response of the sample is monitored using lock-in techniques. Amplitude and phase information reveal information about the strength and direction of the polarization on the sample. Probes: VITA-NanoTA Probes pg 129 VITA-SThM Probes pg 128 Topography and thermal map of a data storage sample. Small defect on the poling boundary of a Lithium niobate film visible in the amplitude signal of a PFM experiment. Probes: MESP-RC pg 96 SCM-PIT pg 110 MESP pg 94 DDESP-FM pg

24 Critical Dimension Atomic Force Microscopy - CDAFM Deep Trench Mode Sidewall Angles Line Width Roughness LWR & LER Depth Top CD Middle CD Bottom CD Sidewall Profile High Scan Rate Slower Scan Higher Resolution on Horizontal Surfaces Flare of Tip Enables Measurements of Undercut Features Critical Dimension Atomic Force Microscopy (CDAFM) is a nondestructive, high-resolution technique that enables accurate measurement of three-dimensional (3D) features. CD-AFM is accurate as it provides highly linear measurement over a range of line-widths and is unaffected by feature type, density or material type. Additionally, the technique is able to measure undercut features and can be calibrated using NIST traceable calibration standards to ensure accuracy of measurements. CDAFM capabilities have enabled its use as a reference metrology tool. Deep Trench (DT) Mode is an AFM mode developed specifically for the repeatable measurement of deep semiconductor trench structures for 90nm and below. It is an adaptive scan method in which data is only collected when user-specified system state conditions are met. This means that the tip is allowed to move only in certain servo states. DT Mode steps the tip along the sample surface collecting data points only when good scan criteria are met. This permits feature-dependent scan optimization in which the concentration of data points is highest on the features of interest and low elsewhere, resulting in improved measurement precision. Multiple semiconductor trenches. Isolated semiconductor via. Probes: 3D Metrology Probes pg 112 Probes: FIB Probes pg 118 Depth Metrology Probes pg 112 CNT Probes pg 120 TESP-HAR pg

25 Probes Innovation with Integrity AFM Probes 48 49

26 Probes Table of Contents Bruker AFM Probes 10-Pack Policy 51 Quality and Performance - Silicon Nitride Probes 52 Silicon Nitride Probe Cantilever Layouts 53 Silicon Probes 54 Contact 54 Contact MPP-Rotated 56 Force Modulation 58 Multi MPP-Rotated 60 Tapping 62 Tapping MPP-Rotated 64 Visible Apex 66 Hardened 68 Force Calibration 70 HarmoniX 72 Silicon Nitride Probes 74 FastScan 74 MicroLever Series 76 MicroLever - Special 78 NP Series 80 NP - Special 82 ScanAsyst 84 ORC8 Series 86 OTR4 Series 88 OTR8 Series 90 Biolever 92 Magnetic Probes 94 MFM 94 MFM - Premium 96 MFM - MicroLever 98 Supersharp Probes 100 Supersharp Silicon 100 Supersharp MicroLever 102 Supersharp NP 104 Electrical Probes 106 PeakForce Electrical 106 Doped Diamond 108 Platinum 110 Critical Dimension Probes D Metrology 112 Depth Metrology 114 Spike Automated Probes 116 HAR 116 FIB 118 CNT 120 Nanoindentation Probes 122 Diamond 122 Active Probe 124 Self Sensing/ Actuating 124 TERS/ STM Probes 126 TERS 126 Platinum-Iridium & Tungsten 127 Thermal Probes 128 VITA - SThM 128 VITA - NanoTA 129 Helpful Equations 130 Bruker AFM Probes 10-Pack Policy Continuing the Commitment to Quality E njoy the savings of volume probe purchases without sacrificing quality! Bruker AFM Probes understands that most customers purchase their probes in large quantities to take advantage of volume discounts. Traditionally, the price per probe becomes decreasingly expensive as the pack size increases, with the best savings resulting from the purchase of an entire wafer. Unfortunately, large pack sizes have been identified as a frequent cause of inconvenience to the customer and corruption of probe quality over time: Large pack sizes have a hidden cost that customers share with friends and colleagues. The process of repackaging and distributing probes from larger pack sizes is time consuming and subjects the probes to potential handling damage. Large packs must be opened and closed repeatedly throughout their lifetime, continuously exposing the entire package to static and environmental contamination, thus degrading probe quality over time. In an effort to allow customers to continue to enjoy volume discounts while enabling them to preserve the initial quality of the probes, Bruker AFM Probes offers most probes in only two pack sizes 10-packs and wafers and extends the volume discount structure when multiple 10-packs are purchased. These discounts can be found on each product page in the website where applicable. Example: Price per 10-Pack, When Purchased in Quantities Indicated Model Wafer DNP-10 $ $ $ $ $ $ $4, DNP-S10 $ $ $ $ $ $ $5, NP-10 $ $ $ $ $ $ $4, NP-S10 $ $ $ $ $ $ $5, Since the cost of purchasing a wafer s worth of probes in individually packaged and sealed 10-packs is equivalent to purchasing the wafer in most cases, it is highly recommended that wafers are only purchased by customers who need to expose a full wafer to a secondary process, such as coatings, treatments, etc. For everyone else, buying large quantities of probes in 10-packs at the volume discount rate will make the probes easier to store, more effective to distribute, and guaranteed fresh every time a 10-pack is opened! 50 51

27 Quality and Performance Improvement of Bruker Silicon Nitride Probes B ased on customer experience and internal applications feedback, Bruker AFM Probes launched a project in 2009 to implement user requests and improve the quality and performance of the Silicon Nitride (SiN) probes. The outcome was twofold: 1) An updated version of the old SiN probe series with exactly the same lever characteristics, but with additional requested imaging benefits, and 2) an innovative high-performance SiN product line, capable of groundbreaking imaging results. Bruker s Silicon Nitride Probe Cantilever Layouts T he cantilever orientation of Bruker s Silicon Nitride probe 10-packs is indicated below, with top indicating upward in the box, and bottom indicating downward in the box. Differences Between the Old and New Style SiN Probes: The older style SiN products DNP, DNP-S, NP, NP-S, MLCT, MSCT were improved in February From this change, most customers are getting more consistent results with higher resolution imaging. The differences between the probes are detailed below: Old Style Lower Tip Aspect Ratio with 35 angles Slightly Blunter Tips with radius of curvature ~20nm to 50nm nominal Thicker Probe Body of 500μm with bonded glass wafer The New SNL Product Line: New Style Higher Tip Aspect Ratio with 15 to 25 angles Slightly Sharper Tips with radius of curvature ~15nm to 30nm nominal Thinner Probe Body of 300μm with no glass wafer Exactly the same as most standard silicon probes! The new SiN product line is called the sharp nitride lever series (SNL), and it unlocks never before possible, high-resolution imaging in contact mode, TappingMode, and now ScanAsyst mode operation. It combines a sharp silicon tip of 2nm (nominal) radius of curvature with the soft SiN cantilevers found on the legacy SiN products. The resulting new products SNL, MSNL, ScanAsyst-Air, ScanAsyst-Fluid, and ScanAsyst-Fluid+ are probes capable of high-resolution imaging with a tip that stays sharp during long term scanning, for all of the applications where a legacy SiN probe would have been used in the past. Call us for a free sample today. One Cantilever A on top Products: ScanAsyst-Air, ScanAsyst-Fluid, ScanAsyst-Fluid+ Four Cantilevers A & B on top C & D on bottom Products: SNL, DNP, DNP-S, NP, NP-S, NP-O, NPG, NP-UC Six Cantilevers A on top B, C, D, E, F on bottom Products: MSNL, MLCT, MSCT, MLCT-O, MLCT-UC, MSCT-UC A B A A C D F E D C B Hi-Res DNA in air & fluid Typical 2nm tip radius on Sharp Nitride Levers Hi-Res Alkane, 4.1nm spacings 52 53

28 Silicon Probes Contact brukerafmprobes.com/contact Contact etched silicon probes consist of an integrated single-crystal silicon cantilever and tip. The tip shape is identical to that of the most commonly used TappingMode probes (model TESP), however, the cantilever is longer, which provides the low spring constant needed for contact mode imaging. The tip has a smaller radius of curvature than most silicon nitride tips and steeper sidewalls, making it a good choice for applications requiring a higher aspect ratio tip. These probes can also be used with interferometer-based detection AFMs because of their long cantilever length. CONTV-A Unmounted 0.2N/m, 13kHz, Al Reflective 10 CONTV-AW Unmounted 0.2N/m, 13kHz, Al Reflective 375 ESP Unmounted 0.2N/m, 13kHz, Al Reflective 10 ESP-MT Caliber 0.2N/m, 13kHz, Al Reflective 10 ESPW Unmounted 0.2N/m, 13kHz, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) CONTV-A ESP Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side None Notes - These Contact probes come with back side reflective Aluminum coating standard. - For similar contact probes with a rotated (symmetrical) tip, see the Contact MPP - Rotated section on page Back Side Reflective Aluminum

29 Silicon Probes Contact MPP Rotated brukerafmprobes.com/contactmpp-r The Contact MPP-Rotated cantilevers are designed for high-resolution contact mode imaging. These probes, identical in tip sharpness and cantilever geometry to the standard Contact MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. MPP Unmounted 0.9N/m, 20kHz, Rotated Tip, No 10 MPP W Unmounted 0.9N/m, 20kHz, Rotated Tip, No 375 MPP Unmounted 0.9N/m, 20kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 0.9N/m, 20kHz, Rotated Tip, Al Reflective 375 MPP Innova 0.9N/m, 20kHz, Rotated Tip, Al Reflective 10 MPP Unmounted 0.1N/m, 10kHz, Rotated Tip, No 10 MPP W Unmounted 0.1N/m, 10kHz, Rotated Tip, No 375 MPP Unmounted 0.1N/m, 10kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 0.1N/m, 10kHz, Rotated Tip, Al Reflective 375 MPP Unmounted 5N/m, 40kHz, Rotated Tip, No 10 MPP W Unmounted 5N/m, 40kHz, Rotated Tip, No 375 MPP Unmounted 5N/m, 40kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 5N/m, 40kHz, Rotated Tip, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-31 (Rectangular) MPP-32 (Rectangular) MPP-33 (Rectangular) Front Side None Notes - Aluminum back side reflective coating is optional on all MPP products Back Side Reflective Aluminum (where applicable)

30 Silicon Probes Force Modulation brukerafmprobes.com/forcemod Contrast in force modulation is dependent on the spring constant of the cantilever, which must complement the pliancy of the two materials being contrasted. The spring constant should be close to or in between the pliancy of one or the other material. In this way, the tip will indent into one material more than the other, providing good force modulation image contrast. These force modulation cantilevers have a mid-range spring constant that provides a good starting point for force modulation imaging. FESP Unmounted 2.8N/m, 75kHz, No 10 FESP-MT Caliber 2.8N/m, 75kHz, No 10 FESPW Unmounted 2.8N/m, 75kHz, No 375 FESPA Unmounted 2.8N/m, 75kHz, Al Reflective 10 FESPAW Unmounted 2.8N/m, 75kHz, Al Reflective 375 FMV Unmounted 2.8N/m, 75kHz, No 10 FMV-W Unmounted 2.8N/m, 75kHz, No 375 FMV-A Unmounted 2.8N/m, 75kHz, Al Reflective 10 FMV-AW Unmounted 2.8N/m, 75kHz, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) FESP/ FESPA FMV/ FMV-A Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side Notes - Aluminum back side reflective coating on the FESPA and FESPAW only. - For similar force modulation probes with a rotated (symmetrical) tip, see the Multi MPP - Rotated section on page None Back Side Reflective Aluminum (where applicable)

31 Silicon Probes Multi MPP Rotated brukerafmprobes.com/multimpp-r The Multi MPP cantilevers are designed for high-resolution force modulation imaging and specialty applications. These probes, identical in tip sharpness and cantilever geometry to the standard Multi MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. MPP Unmounted 3N/m, 75kHz, Rotated Tip, No 10 MPP W Unmounted 3N/m, 75kHz, Rotated Tip, No 375 MPP Unmounted 3N/m, 75kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 3N/m, 75kHz, Rotated Tip, Al Reflective 375 MPP Innova 3N/m, 75kHz, Rotated Tip, Al Reflective 10 MPP Unmounted 0.9N/m, 40kHz, Rotated Tip, No 10 MPP W Unmounted 0.9N/m, 40kHz, Rotated Tip, No 375 MPP Unmounted 0.9N/m, 40kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 0.9N/m, 40kHz, Rotated Tip, Al Reflective 375 MPP Unmounted 35N/m, 190kHz, Rotated Tip, No 10 MPP W Unmounted 35N/m, 190kHz, Rotated Tip, No 375 MPP Unmounted 35N/m, 190kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 35N/m, 190kHz, Rotated Tip, Al Reflective 375 RFESP Unmounted Order MPP , 3N/m, 75kHz, Rotated Tip, No 10 RFESPW Unmounted Order MPP W, 3N/m, 75kHz, Rotated Tip, No 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-21 (Rectangular) MPP-22 (Rectangular) MPP-23 (Rectangular) RFESP (Rectangular) Front Side Notes - Aluminum back side reflective coating is optional on all MPP products. - RFESP and RFESPW are identical to MPP and MPP W, respectively None Back Side Reflective Aluminum (where applicable)

32 Silicon Probes Tapping brukerafmprobes.com/tapping Bruker s line of etched silicon probes are the industry standard for imaging in non-contact and TappingMode. Tight specification control, unrivaled sensitivity, and dependably sharp tips all contribute to producing consistently accurate, high-resolution imaging. The LTESP and NCLV products offer a longer cantilever with a lower resonant frequency. LTESP Unmounted 48N/m, 190kHz, No 10 LTESP-MT Caliber 48N/m, 190kHz, No 10 LTESPW Unmounted 48N/m, 190kHz, No 375 NCHV Unmounted 42N/m, 320kHz, No 10 NCHV-W Unmounted 42N/m, 320kHz, No 375 NCHV-A Unmounted 42N/m, 320kHz, Al Reflective 10 NCHV-AW Unmounted 42N/m, 320kHz, Al Reflective 375 NCLV Unmounted 48N/m, 190kHz, No 10 NCLV-W Unmounted 48N/m, 190kHz, No 375 TESP Unmounted 42N/m, 320kHz, No 10 TESP-MT Caliber 42N/m, 320kHz, No 10 TESPW Unmounted 42N/m, 320kHz, No 375 TESPA Unmounted 42N/m, 320kHz, Al Reflective 10 TESPAW Unmounted 42N/m, 320kHz, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) LTESP NCHV NCL TESP/ TESPA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) LTESP/ NCL (Rectangular) TESP/ NCHV (Rectangular) Front Side Notes - Aluminum back side reflective coating on the NCHV-A, NCHV-AW, TESPA and TESPAW. - For similar TappingMode probes with a rotated (symmetrical) tip, see the Tapping MPP - Rotated section on page None Back Side Reflective Aluminum (where applicable)

33 Silicon Probes Tapping MPP Rotated brukerafmprobes.com/tappingmpp-r The Tapping MPP - Rotated cantilevers are designed for high-resolution imaging in non-contact or TappingMode. These probes, identical in tip sharpness and cantilever geometry to the standard Multi MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. MPP Unmounted 40N/m, 300kHz, Rotated Tip, No 10 MPP W Unmounted 40N/m, 300kHz, Rotated Tip, No 375 MPP Unmounted 40N/m, 300kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 40N/m, 300kHz, Rotated Tip, Al Reflective 375 MPP Innova 40N/m, 300kHz, Rotated Tip, Al Reflective 10 MPP Unmounted 5N/m, 150kHz, Rotated Tip, No 10 MPP W Unmounted 5N/m, 150kHz, Rotated Tip, No 375 MPP Unmounted 5N/m, 150kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 5N/m, 150kHz, Rotated Tip, Al Reflective 375 MPP Unmounted 200N/m, 525kHz, Rotated Tip, No 10 MPP W Unmounted 200N/m, 525kHz, Rotated Tip, No 375 MPP Unmounted 200N/m, 525kHz, Rotated Tip, Al Reflective 10 MPP W Unmounted 200N/m, 525kHz, Rotated Tip, Al Reflective 375 RTESP Unmounted Order MPP , 40N/m, 300kHz, Rotated Tip, No 10 RTESPW Unmounted Order MPP W, 40N/m, 300kHz, Rotated Tip, No 375 RTESPA Unmounted Order MPP , 40N/m, 300kHz, Rotated Tip, Al Reflective 10 RTESPAW Unmounted Order MPP W, 40N/m, 300kHz, Rotated Tip, Al Reflective 375 Quantity Discounts Are Available Tip Specifications need TIPSEM Pic Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-11 (Rectangular) MPP-12 (Rectangular) MPP-13 (Rectangular) RTESP (Rectangular) Front Side Notes - Aluminum back side reflective coating is optional on all MPP products. - RTESP and RTESPW are identical to MPP and MPP W, respectively. - RTESPA and RTESPAW are identical to MPP and MPP W, respectively None Back Side Reflective Aluminum (where applicable)

34 Silicon Probes Visible Apex brukerafmprobes.com/visibleapex The tetrahedral tip of the visibile apex probes allows for exact positioning of the probe tip on the sample surface. The tip is located on the very end of the cantilever, which enables the tip to be set over a point of interest on the sample, easily and precisely. This probe is especially effective when using an AFM combined with an optical microscope, such as the BioScope Catalyst. OLTESPA Unmounted 2N/m, 70kHz, Al Reflective 10 OLTESPAW Unmounted 2N/m, 70kHz, Al Reflective 375 OTESPA Unmounted 42N/m, 300kHz, Al Reflective 10 OTESPAW Unmounted 42N/m, 300kHz, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) OLTESPA (Rectangular) OTESPA (Rectangular) Front Side Notes - The OLTESPA and OTESPA product lines both come with back side reflective Aluminum coating, standard None Back Side Reflective Aluminum

35 Silicon Probes Hardened brukerafmprobes.com/hardened The hardened TappingMode etched silicon probes consist of the same silicon probes used for most TappingMode applications (model TESP). However, the tip side of the cantilever is hardened with a diamond-like carbon (DLC) coating for extended tip life. These probes are designed for greater durability when scanning materials that tend to rapidly degrade the end of the tip, such as silicon nitride, polysilicon, or titanuim nitride. TESPD Unmounted DLC Coated Tips, 42N/m, 320kHz, Al Reflective 10 TESPDW Unmounted DLC Coated Tips, 42N/m, 320kHz, Al Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangluar) Front Side Hardened Diamond-like Carbon Notes - For an electrically conductive diamond coating on the tip, please refer to the Doped Diamond probes on page Back Side Reflective Aluminum

36 Silicon Probes Force Calibration brukerafmprobes.com/forcecal Bruker s force calibration cantilevers are used as a reference for measuring the force constant of other AFM probes. Most probes used for imaging have tolerances in the specified values of the force constant of cantilevers. Calibrating a probe against a reference allows for an accurate measurement of the force constant. These probes come with three different cantilevers of different lengths and pre-measured force constants. An application note explaining the calibration procedure is also included with the cantilevers. CLFC-NOBO Unmounted Calibration Probes, Three Cantilevers with Different k 5 CLFC-NOMB Innova Calibration Probes, Three Cantilevers with Different k 5 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) B (Rectangular) C (Rectangular) Front Side Notes - The force constant of each CLFC cantilever is measured using the thermal tune method None Back Side None

37 Silicon Probes HarmoniX brukerafmprobes.com/hmx HarmoniX probes are used for nanoscale material property mapping of standard samples on HarmoniX-enabled AFMs. HMX probes are good for stiff samples within the 10MPa to 10GPa hardness range. HMXS probes are significantly softer and ideal for samples within the 0.5MPa to 1GPa hardness range. These probes have the characteristic off-axis design specific to the Bruker HarmoniX mode. The torsional/ flexural spring constant is 17N/m. HMX-10 Unmounted 4N/m, 60kHz, Al Reflective, for HarmoniX Mode 10 HMX-W Unmounted 4N/m, 60kHz, Al Reflective, for HarmoniX Mode 375 HMXS-10 Unmounted 1N/m, 40kHz, Al Reflective, for HarmoniX Mode 10 HMXS-W Unmounted 1N/m, 40kHz, Al Reflective, for HarmoniX Mode 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) HMX (Rectangular) HMXS (Rectangular) Front Side Notes - For use only on Harmonix-enabled, NanoScope V-based AFMs None Back Side Reflective Aluminum

38 Silicon Nitride Probes FastScan brukerafmprobes.com/fastscan FastScan probes are designed specifically for the Dimension FastScan Atomic Force Microscope (AFM), which delivers extreme imaging speed without loss of resolution, loss of force control, added complexity, or additional operating costs. Based upon the highly successful Dimension Icon AFM architecture, the FastScan AFM is a tip-scanning system that provides measurements on both large and small size samples in air or fluids. Now, with the Dimension FastScan AFM system you can achieve in a single system, immediate atomic force microscopy images with the expected high resolution of a high-performance AFM. Whether you scan at >125Hz when surveying a sample to find the region of interest, or at time rates of 1-second per image frame in air or fluids, the Dimension FastScan redefines the AFM experience. The latest addition to the cost effective FastScan probe series is the FASTSCAN-Dx, designed for optimal performance in fluid, at high scan rates for AFM dynamics observations. The unique design of these probes renders a balance of high resonant frequency and low spring constant, enabling imaging of the fragile biological samples without deforming the samples fundamental atomic structures. This series of probes were designed to continue pushing the limits of the Bruker unique FastScan technology that enables biological observations in fluid in a small volume flow-cell in conjunction with heating control. FASTSCAN-A Unmounted FastScan Probes, 18N/m, 1,400kHz, Al Reflective 10 FASTSCAN-B Unmounted FastScan Probes, 4N/m, 400kHz, Au Reflective 10 FASTSCAN-C Unmounted FastScan Probes, 0.8N/m, 300kHz, Au Reflective 10 FASTSCAN-DX Unmounted FastScan Bio Probes, 0.25N/m, 110kHz (Fluid), 250kHz (Air), 10 Proprietary Reflective Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) FASTSCAN-A/-B/-C FASTSCAN-DX Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) FASTSCAN-A (Triangular) 1, FASTSCAN-B (Triangular) FASTSCAN-C (Triangular) FASTSCAN-DX (Special) 110(Fluid) 250(Air) Front Side None Notes - Using this probe on an AFM other than the Dimension FastScan is not recommended and will result in sub-optimal performance Back Side Reflective Aluminum (FastScan-A) Reflective Gold (FastScan-B/ FastScan-C) Proprietary Reflective (FastScan-Dx)

39 Silicon Nitride Probes MicroLever Series brukerafmprobes.com/microlever Microlevers from Bruker have soft silicon nitride cantilevers with silicon nitride tips, and are ideal for contact imaging modes, force modulation microscopy, and liquid operation. The range in force constants enables users to image soft samples in contact as well as high load vs. distance spectroscopy. Each unmounted probe comes with six different cantilevers of various dimensions, resulting in six unique nominal values for force constant and resonant frequency. All cantilevers on the microlever products have <2 cantilever bend. MLCT Unmounted 6 Cantilevers, N/m; Au Reflective 10 MLCT-EXMT-A1 Caliber 1 Cantilever, 0.07N/m, Au Reflective 10 MLCT-EXMT-BF1 Caliber 5 Cantilevers, N/m, Au Reflective 10 MLCT-MT-A Innova 1 Cantilever, 0.07N/m, Au Reflective 10 MLCT-MT-BF Innova 5 Cantilevers, N/m, Au Reflective 10 MSCT Unmounted Sharpened, 6 Cantilevers, N/m, Au Reflective 10 MSCT-EXMT-A1 Caliber Sharpened, 1 Cantilever, 0.07N/m, Au Reflective 10 MSCT-EXMT-BF1 Caliber Sharpened, 5 Cantilevers, N/m, Au Reflective 10 MSCT-MT-A Innova Sharpened, 1 Cantilever, 0.07N/m, Au Reflective 10 MSCT-MT-BF Innova Sharpened, 5 Cantilevers, N/m, Au Reflective 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MLCT MSCT Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Front Side Notes - If mounted, probes must be mounted for A side (one usable cantilever) or BF side (five usable cantilevers). - See page 53 for the microlever cantilever layout. - See page 78 for uncoated and tipless versions of microlevers. - Supersharp microlevers, part MSNL, can be found on page None Back Side Reflective Gold

40 Silicon Nitride Probes MicroLever Special brukerafmprobes.com/microlever-sp Microlevers are also available in tipless and uncoated versions. These optional features enable unique coatings, tips, or functionalizations to be applied to the probe. The cantilever geometries are identical to that of the standard microlevers, and each unmounted probe comes with six different cantilevers of various dimensions, resulting in six unique nominal values for force constant and resonant frequency. All cantilevers on the microlever products have <2 cantilever bend. MLCT-O10 Unmounted Tipless, 6 Cantilevers, N/m, Au Reflective 10 MLCT-OW Unmounted Tipless, 6 Cantilevers, N/m, Au Reflective 375 MLCT-UC Unmounted 6 Cantilevers, N/m, No 10 MLCT-UCMT-A Innova 1 Cantilever, 0.07N/m, No, Pre-Mounted For Innova AFM 10 MLCT-UCMT-BF Innova 5 Cantilevers, N/m, No, Pre-Mounted For Innova AFM 10 MSCT-UC Unmounted Sharpened, 6 Cantilevers, N/m, No 10 MSCT-UCMT-A Innova Sharpened, 1 Cantilever, 0.07N/m, No 10 MSCT-UCMT-BF Innova Sharpened, 5 Cantilevers, N/m, No 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MLCT-UC MSCT-UC MLCT-O NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Front Side Notes - If mounted, probes must be mounted for A side (one usable cantilever) or BF side (five usable cantilevers). - See page 53 for the microlever cantilever layout. - See page 76 for standard versions of microlevers. - Supersharp microlevers, part MSNL, can be found on page None Back Side Reflective Gold (where applicable)

41 Silicon Nitride Probes NP Series brukerafmprobes.com/np Bruker s premium nitride probes are ideal for contact mode in air and fluid, TappingMode in fluid, and force measurements. Each unmounted probe comes with four different cantilevers of various dimensions, resulting in four unique nominal values for force constant and resonant frequency. DNP Unmounted 4 Cantilevers, N/m, Au Reflective 375 DNP-10 Unmounted 4 Cantilevers, N/m, Au Reflective 10 DNP-S Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective 375 DNP-S10 Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective 10 NP Unmounted 4 Cantilevers, N/m, Au Reflective 375 NP-10 Unmounted 4 Cantilevers, N/m, Au Reflective 10 NP-S Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective 375 NP-S10 Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) DNP/ NP DNP-S/ NP-S Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Front Side Notes - See page 53 for nitride probe cantilever layout. - See page 82 for uncoated and tipless versions of nitride probes. - Supersharp nitride probes, part SNL, can be found on page None Back Side Reflective Gold

42 Silicon Nitride Probes NP Special brukerafmprobes.com/np-sp Bruker s premium nitride probes are also available in tipless and uncoated versions. These optional features enable unique coatings, tips, and functionalizations to be applied to the probe. The cantilever geometries are identical to that of the standard nitride probes, and each unmounted probe comes with four different cantilevers of various dimensions, resulting in four unique nominal values for force constant and resonant frequency. NP-10UC Unmounted 4 Cantilevers, N/m, No 10 NP-W-UC Unmounted 4 Cantilevers, N/m; No 375 NPG Unmounted Au Coated Tips, 4 Cantilevers, N/m, Au Reflective 375 NPG-10 Unmounted Au Coated Tips, 4 Cantilevers, N/m, Au Reflective 10 NP-O10 Unmounted Tipless, 4 Cantilevers, N/m, Au Reflective 10 NP-OW Unmounted Tipless, 4 Cantilevers, N/m, Au Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) NP NP-O NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Front Side Reflective Gold (on NPG) Notes - Gold coating on front side optional on NPG products. - See page 53 for the nitride probe cantilever layout. - See page 80 for standard versions of NP probes. - Supersharp nitride probes, part SNL, can be found on page Back Side Reflective Gold (where applicable)

43 Silicon Nitride Probes ScanAsyst brukerafmprobes.com/scanasyst ScanAsyst utilizes a proprietary method for curve collection and sophisticated algorithms to continuously monitor image quality, and to automatically make appropriate parameter adjustments. This enables: - Automatic image optimization for faster, more consistent results, regardless of user skill level, - Direct force control at ultra-low forces to protect delicate samples and tips from damage, - Elimination of cantilever tuning, setpoint adjustment, and gain optimization to make even fluid imaging simple. ScanAsyst-Air-HR probes are specifically designed for use with the ScanAsyst-HR fast scanning accessory on the MultiMode 8 AFM. Enjoy up to 20x faster survey scan rates and up to 6x faster scans with no loss of resolution. SCANASYST-AIR Unmounted Sharpened, 1 Cantilever, 0.4N/m, Al Reflective 10 SCANASYST-AIR-HR Unmounted Fast Scanning, Sharpened, 1 Cantilever, 0.4N/m, Al Ref. 10 SCANASYST-FLUID Unmounted 1 Cantilever, 0.7N/m, Au Reflective 10 SCANASYST-FLUID+ Unmounted Sharpened, 1 Cantilever, 0.7N/m, Au Reflective 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) Air/ Fluid Fluid Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) ScanAsyst-Air (Triangular) ScanAsyst-Air-HR (Special) ScanAsyst-Fluid (Triangular) ScanAsyst-Fluid+ (Triangular) Front Side Notes - For use only on ScanAsyst-enabled Dimension Icon, MultiMode 8, or BioScope Catalyst AFMs. - ScanAsyst-Air-HR for use only on ScanAsyst-HR fast scanning accessory for MultiMode 8 AFM. If you have an older MultiMode model, please contact Bruker to find out how to upgrade it to a MultiMode 8 AFM with high-speed ScanAsyst-HR None Back Side Reflective Gold (Fluid/Fluid+) Reflective Aluminum (Air)

44 Silicon Nitride Probes ORC8 Series brukerafmprobes.com/orc8 These SiN probes on pyrex glass substrate have a pyramidal tip and four different rectangular cantilevers with unique resonant frequencies and force constants. These probes are recommended for contact mode lateral force microscopy measurements because the twist motion of the rectangular cantilever is simpler than that of a triangular cantilever. Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications ORC8-10 Unmounted Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective 10 ORC8-W Unmounted Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective 490 Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) B (Rectangular) Quantity Discounts Are Available C (Rectangular) D (Rectangular) Front Side None Back Side Reflective Gold

45 Silicon Nitride Probes OTR4 Series brukerafmprobes.com/otr4 These SiN probes on pyrex glass substrate have a pyramidal tip, and two different triangular cantilevers with unique resonant frequencies and force constants. The 100µm long cantilever of this product is recommended for non-contact mode imaging in fluid and on soft samples. OTR4-10 Unmounted Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective 10 OTR4-W Unmounted Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective 245 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Front Side None Back Side Reflective Gold

46 Silicon Nitride Probes OTR8 Series brukerafmprobes.com/otr8 These SiN probes on pyrex glass substrate have a pyramidal tip, and two different triangular cantilevers with unique resonant frequencies and force constants. This probe is recommended as a general choice for contact mode operation. OTR8-10 Unmounted Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective 10 OTR8-W Unmounted Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective 490 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Front Side None Back Side Reflective Gold

47 Silicon Nitride Probes Biolever brukerafmprobes.com/biolever The B cantilever on the Biolever is one of the softest cantilevers commercially available today. These probes have a visible, V-shaped tip that is stable and unique to only this product. Geometrically, the tip is a hollow pyramid sliced in half vertically with a sharpened apex. Very small and very soft cantilevers like these are excellent for force curve measurements. This silicon nitride probe has two different rectangular cantilevers with unique resonant frequencies and force constants. Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications OBL-10 Unmounted Au Coated tips; 2 Cantilevers, N/m, Au Reflective 10 Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) Quantity Discounts Are Available B (Rectangular) Front Side Gold Back Side Reflective Gold Notes - OBL cantilevers have bend up to +/- 3 degrees, which makes them unsuitable for Bruker s Dimension AFM line. Therefore, these probes are not intended for use on Dimension AFMs.

48 Magnetic Probes MFM brukerafmprobes.com/mfm Bruker s magnetic probes offer various MFM imaging solutions with standard, highmoment, low-moment, and low-coercivity options. The conductive coatings on these probes also make them an excellent choice for electrical and capacitance microscopy. See brukerafmprobes.com for the additional magnetic moment and coercivity specification information of these probes. MESP Unmounted Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 10 MESP-MT Caliber Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 10 MESP-CPMT Innova Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 10 MESPW Unmounted Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 375 MESP-HM Unmounted High-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 10 MESP-HMW Unmounted High-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 375 MESP-LC Unmounted Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective 10 MESP-LCW Unmounted Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective 375 MESP-LM Unmounted Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 10 MESP-LMW Unmounted Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective 375 MESPSP Unmounted MFM Sample Pack Containing 3x MESP-LC, 3x MESP-HM, and 4x MESP-LM 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MESP/ -LC MESP-HM MESP-LM Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side MESP/ HM/ -LM: Magnetic Cobalt-Chromium MESP-LC: Magnetic Iron Notes - The specific compositions and thicknesses of the MFM coatings are not provided because they are Bruker proprietary. - For a sample pack of -HM, -LM, and -LC, see part MESPSP Back Side MESP/ HM/ -LM: Reflective Cobalt-Chromium MESP-LC: Reflective Iron

49 Magnetic Probes MFM Premium brukerafmprobes.com/mfmpremium High-performance cobalt alloy magnetic coated probes: - The MESP-HR has a conical tip with a coercivity of ~950Oe and a moment of ~5.6e The MESP-RC has a coercivity of ~400Oe and a moment of 1e-13EMU, and is also recommended for piezo response applications. MESP-HR10 Unmounted High-Resolution, High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Al Reflective 10 MESP-RC Unmounted High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, CoCr Reflective 10 MESP-RCW Unmounted High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, CoCr Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MESP-HR MESP-RC Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MESP-HR (Rectangular) MESP-RC (Rectangular) Front Side MESP-HR: Magnetic Cobalt-Chromium MESP-RC: Magnetic Cobalt-Chromium Notes - The specific compositions and thicknesses of the MFM coatings are not provided because they are Bruker proprietary Back Side MESP-HR: Reflective Aluminum MESP-RC: Reflective Cobalt-Chromium

50 Magnetic Probes MFM MicroLever brukerafmprobes.com/microlever-mfm Bruker offers sharpened SiN cantilevers coated with cobalt for Magnetic Force Microscopy (MFM). MFM sharpened microlevers produce superior micro-magnetic domain resolution when operated with Bruker s proprietary non-contact imaging technique. Each unmounted probe comes with two different cantilevers of various dimensions, resulting in two unique nominal values for force constant and resonant frequency. MSNC-MF Unmounted Sharpened, 2 Cantilevers, 0.1 & 0.5N/m, MFM 10 MSNC-MT-A Innova Sharpened, 1 MFM Cantilevers, 0.1N/m, MFM 10 MSNC-MT-B Innova Sharpened, 1 MFM Cantilevers, 0.5N/m, MFM 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Front Side Magnetic Cobalt-Chromium Notes - If mounted, probes must be mounted for A side (one usable cantilever) or B side (one usable cantilever). - For standard microlevers without MFM coating, see page Back Side Reflective Cobalt-Chromium

51 Supersharp Probes Supersharp Silicon brukerafmprobes.com/sharpsi Supersharp silicon probes should be used when the highest image resolution possible is desired. These probes are developed using advanced tip manufacturing processes to yield an extremely sharp tip radius that cannot be found on other silicon probe products. DLCS-10 Unmounted DLC Spike Tips, 5N/m, 160kHz, Al Reflective 10 IMPSC-5 Unmounted High Aspect Ratio Conical Tips, 35N/m, 350kHz, Al Reflective 5 TESP-SS Unmounted Supersharp Tips, 42N/m, 320kHz, No 10 TESP-SSW Unmounted Supersharp Tips, 42N/m, 320kHz, No 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) DLCS IMPSC TESP-SS Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) DLCS (Rectangular) IMPSC (Rectangular) TESP-SS (Rectangular) Front Side None Back Side Reflective Aluminum (where applicable)

52 Supersharp Probes Supersharp MicroLever brukerafmprobes.com/msnl MSNL probes marry the sharpness of a silicon tip with the low spring constants and high sensitivity of a silicon nitride cantilever, for an unprecedented level of high resolution and force control on just about any sample, in any medium. The MSNL cantilever layout is identical to that of the other microlever products, with an A cantilever on one side of the probe, and B, C, D, E, and F cantilevers on the other side of the probe. All cantilevers on the MSNL products have <2 cantilever bend. MSNL-10 Unmounted Supersharp, 6 Cantilevers, N/m, Au Reflective 10 MSNL-W Unmounted Supersharp, 6 Cantilevers, N/m, Au Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Front Side Notes - See also SNL probes for a different set of lever options. - See page 53 for the microlever cantilever layout. - Standard microlevers can be found on page None Back Side Reflective Gold

53 Supersharp Probes Supersharp NP brukerafmprobes.com/snl SNL probes marry the sharpness of a silicon tip with the low spring constants and high sensitivity of a silicon nitride cantilever, for an unprecedented level of high resolution and force control on just about any sample, in any medium. The SNL cantilever layout is identical to that of the other NP products, with A and B cantilevers on one side of the probe, and C and D cantilevers on the other side of the probe. All cantilevers on the SNL products have <2 cantilever bend. SNL-10 Unmounted Supersharp, 4 Cantilevers, N/m, Au Reflective 10 SNL-W Unmounted Supersharp, 4 Cantilevers, N/m, Au Reflective 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Front Side Notes - See also MSNL probes for a different set of lever options. - See page 53 for the nitride probe cantilever layout. - Standard nitride probes can be found on page None Back Side Reflective Gold

54 Electrical Probes PeakForce Electrical brukerafmprobes.com/peakforce-electrical Realize the power of Bruker s newest electrical imaging modes based on PeakForce Tapping technology -- PeakForce TUNA and PeakForce Kelvin Probe Microscopy -- with the only probes designed specificially with these new modes in mind. - PFTUNA probes combine the low spring constant and high sensitivity of a nitride cantilever with a sharp, electrically conductive tip. When used with Bruker s exclusive PeakForce TUNA mode, they enable an unprecedented level of high-resolution electrical characterization on fragile samples. - The PFQNE-AL are sharp nitride lever probes ideally suited for PeakForce Quantitative Nano-Electric measurements. They are tailored for high-resolution PFKPFM measurements by matching the softness of a nitride cantilever with the sharpness of an uncoated silicon probe. PFTUNA Unmounted PeakForce Tuna, PtIr Coated Tips, 0.4N/m, 70kHz, PtIr Reflective 10 PFQNE-AL Unmounted PeakForce KPFM, 0.8N/m, 300kHz, Proprietary Reflective 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) PFTUNA PFQNE-AL Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) PFTUNA (Triangular) PFQNE-AL (Triangular) Front Side PFTUNA: Conductive Platinum-Iridium Notes - PFQNE-AL is only for use on Bruker AFMs equipped with a PeakForce KPFM module Back Side PFTUNA: Reflective Platinum-Iridium PFQNE-AL: Proprietary Reflective

55 Electrical Probes Doped Diamond brukerafmprobes.com/doped-diamond These probes have an electrically conductive doped diamond coating on the tip side. This coating is also extremely wear resitant due to the hardness of the diamond. Typical applications for this probe include Scanning Spreading Resistance Microscopy (SSRM), Scanning Capacitance Microscopy (SCM) and Tunneling/Conducting AFM. The SSRM-DIA probes are mode from solid Boron-doped polycrystalline diamond in a pyramid shape. These extremely hard tips enable high-resolution electrical AFM measurements requiring high forces, such as SSRM and other electrical and mechanical characterization methods. The measured resistance of the diamond tips on a Platinum surface is between 10 and 1000kOhm, depending on the tip radius. The electrical resolution can be below 1nm, as measured on a dedicated buried oxide sample in an optimized environment. DDESP-10 Unmounted Doped Diamond Coated Tips, 42N/m, 320kHz, Al Reflective 10 DDESP-FM-10 Unmounted Doped Diamond Coated Tips, 2.8N/m, 75kHz, Al Reflective 10 SSRM-DIA Unmounted Pyramidal Solid Diamond Tips, 3-27N/m, 18-77kHz, No 5 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) DDESP/-FM SSRM-DIA 1* Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) DDESP (Rectangular) DDESP-FM (Rectangular) SSRM-DIA A (Rectangular) SSRM-DIA B (Rectangular) SSRM-DIA C (Rectangular) Front Side DDESP/-FM: Conductive Doped Diamond Notes - The TESPD product line (on page 68) is a non-conductive, less expensive alternative for a diamond-coated hardened probe. - Each SSRM-DIA probe has three different cantilevers: A (long), B (medium), C (short). Each five pack of SSRM-DIA probes includes fifteen cantilevers total, ie., three per probe. - *1nm typical electrical resolution Back Side DDESP/-FM: Reflective Aluminum SSRM-DIA: None

56 Electrical Probes Platinum brukerafmprobes.com/platinum Bruker s platinum-coated probes have an electrically conductive tip and are ideal for Scanning Capacitance Mode (SCM) and electrical characterization applications. The platinum coating on the front side of the cantilever provides a metallic electrical path from the cantilever die to the apex of the tip. The platinum coating on the back side of the SCM-PIT/PIC cantilevers compensates for the stress created by the front side coating and also enhances laser reflectivity by a factor of up to 2.5 times. Rocky Mountain Nanotechnology (RMN) probes are uniquely constructed from pure platinum and placed on a standard AFM probe sized ceramic substrate. Solid metal probes offer excellent conductivity and suffer no thin-film adhesion problems that occur with metal-coated silicon probes. These probes also have a tip radius (<20nm) that is difficult to routinely obtain by standard AFM probe processing methods. These probes are ideal for C-AFM, SCM, and KPFM/EFM applications. They are available in a range of spring constants. Each probe tip is individually imaged by FE-SEM to verify that the metallic probe tip radius is below 20nm. OSCM-PT Unmounted Pt Coated Tips, 2N/m, 70kHz, PtIr Reflective 10 OSCM-PTW Unmounted Pt Coated Tips, 2N/m, 70kHz, PtIr Reflective 375 SCM-PIC Unmounted PtIr Coated Tips, 0.2N/m, 13kHz, PtIr Reflective 10 SCM-PICW Unmounted PtIr Coated Tips, 0.2N/m, 13kHz, PtIr Reflective 375 SCM-PIT Unmounted PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective 10 SCM-PITW Unmounted PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective 375 SCM-PTMT-EX Caliber PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective 10 RMN-12PT300B Unmounted Solid Platinum Wire Tips, 0.8N/m, 9kHz, No 10 RMN-12PT400B Unmounted Solid Platinum Wire Tips, 0.3N/m, 5kHz, No 10 RMN-25PT300B Unmounted Solid Platinum Wire Tips, 18N/m, 20kHz, No 10 RMN-25PT400B Unmounted Solid Platinum Wire Tips, 10N/m, 8kHz, No 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) OSCM SCM RMN 20 N/A N/A N/A Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) OSCM (Rectangular) SCM-PIC (Rectangular) SCM-PIT (Rectangular) RMN-12PT300B (Special) RMN-12PT400B (Special) RMN-25PT300B (Special) RMN-25PT400B (Special) Front Side OSCM: Conductive Platinum SCM: Conductive Platinum-Iridium Notes - The OSCM-PT has a visible apex tip, as described in the visible apex section on page Back Side OSCM: Reflective Aluminum SCM: Reflective Platinum-Iridium

57 Critical Dimension Probes 3-D Metrology brukerafmprobes.com/3d 3-D Metrology probes are designed to be used in Critical Dimension (CD) mode on X3D or InSight 3DAFM systems. These probes are designed with a flare at the apex of the probe to measure critical dimension features such as linewidth, undercut, Line Edge Roughness (LER), Line Width Variation (LWV), and Sidewall Roughness (SR). These probes are silicon based and may be coated or nitride capped for wear resistance. EBD-CDR probes have the key strengths of electron beam deposition (EBD) probe manufacturing: precise tip orientation, precise control of tip dimensions (length, width, overhang), and large volume production. These tips do not have a wear resistant coating, but are made from bulk wear resistant diamond like carbon. CDF100 Unmounted Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm 5 CDF100C Unmounted Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm, Carbon Coated 5 CDR32 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 32nm, Length 220nm 5 CDR-50C Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 300nm, Carbon Coated 5 CDR-50S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 225nm 5 CDR-70 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 500nm 5 CDR-70S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 400nm 5 CDR-120 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm 5 CDR120C Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm, Carbon Coated 5 CDR130S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 130nm, Length 300nm 5 CDR-300 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 300nm, Length 1250nm 5 CDR850 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 850nm, Length 6000nm 5 EBD-CDR15 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 15nm, Length 150nm 5 EBD-CDR20 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 20nm, Length 150nm 5 EBD-CDR30 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 30nm, Length 150nm 5 EBD-CDR50 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 200nm 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Overhang Effective Tip Tilt Shape Set Back (µm) Height (µm) Width (nm) (nm) Length (nm) Compensation ( ) CDF100 Triangular CDF100C Triangular CDR32 Round CDR-50C Round CDR-50S Round CDR-70 Round CDR-70S Round CDR-120 Round CDR-120C Round CDR130S Round CDR-300 Round CDR850 Round EBD-CDR15 Round EBD-CDR20 Round EBD-CDR30 Round EBD-CDR50 Round Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side Wear resistant carbon on CDR-50C, CDF100C and CDR120C Back Side Reflective Aluminum (on all)

58 Critical Dimension Probes Depth Metrology brukerafmprobes.com/depth These depth metrology probes have post-shaped tips (i.e., cylindrical with a flat apex) and are designed for depth applications where a constant probe cross section is required. Post probes are named according to the diameter of the post. For example, a CDP55A probe has a top that is nominally 55nm in diameter. CDP15/150-3D Unmounted Round Post Tips, Depth Metrology, Width 15nm, Length 150nm 5 CDP15/150C-3D Unmounted Round Post Tips, Depth Metrology, Width 15nm, Length 150nm, Carbon Coated 5 CDP200A Unmounted Round Post Tips, Depth Metrology, Width 200nm, Length 600nm 5 CDP55A Unmounted Round Post Tips, Depth Metrology, Width 55nm, Length 600nm 5 CDP55L Unmounted Round Post Tips, Depth Metrology, Width 55nm, Length 900nm 5 SNP10 Unmounted Silicon Nitride Post Tips, Depth Metrology, Width 10nm, Length 150nm 5 SNP20 Unmounted Silicon Nitride Post Tips, Depth Metrology, Width 20nm, Length 200nm 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Overhang Effective Tip Tilt Shape Set Back (µm) Height (µm) Width (nm) (nm) Length (nm) Compensation ( ) CDP15/150-3D Round CDP15/150C-3D Round CDP200A Round CDP55A Round CDP55L Round SNP10 Round SNP20 Round Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side Wear-resistant carbon on CDP15/ 150C-3D Back Side Reflective Aluminum

59 Spike Automated Probes HAR brukerafmprobes.com/har High Aspect Ratio (HAR) probes are based on Bruker technology and made from Bruker TESP probes using focused ion beam milling techniques. The HAR process modifies the last 1.5um of the tip to an apsect ratio of at least 5:1. These probes are ideal for TappingMode imaging on samples with tall/ deep geometries, such as semiconductor trench imaging. HAR Unmounted 1µm, 42N/m, 320kHz, No 10 TESP-HAR Unmounted 1µm, 42N/m, 320kHz, No 10 TESPA-HAR Unmounted 1µm, 42N/m, 320kHz, Al Reflective 10 Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Quantity Discounts Are Available Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) HAR TESP Cantilever Specifications Front Side None Back Side Reflective Aluminum (where applicable)

60 Spike Automated Probes FIB brukerafmprobes.com/fib Focused Ion beam (FIB) probes consist of an integrated single crystal silicon cantilever and tip that have been machined (or shaped) to obtain the desired aspect ratio. They have near vertical sidewalls and aspect ratios of more than 10:1. Common applications include semiconductor devices, 3-D micro-optics, and development of precision metrology methods. FIB tips are designed only for TappingMode and for profiling narrow gaps. FIB tips should not be used in contact mode. FIB1-100 Unmounted 1µm, 42N/m, 320kHz, No 5 FIB1-100A Unmounted 1µm, 42N/m, 320kHz, Al Reflective 5 FIB2-100S Unmounted 2µm, 42N/m, 320kHz, No 5 FIB2-100A Unmounted 2µm, 42N/m, 320kHz, Al Reflective 5 FIB3D2-100 Unmounted 2µm, 42N/m, 320kHz, 3 Tilt Compensation, No 5 FIB3D2-100A Unmounted 2µm, 42N/m, 320kHz, 3 Tilt Compensation, Al Ref. 5 FIB3-200A Unmounted 3µm, 42N/m, 320kHz, Al Reflective 5 FIB4-200 Unmounted 4µm, 42N/m, 320kHz, No 5 FIB4-200A Unmounted 4µm, 42N/m, 320kHz, Al Reflective 5 FIB6-400 Unmounted 6µm, 42N/m, 320kHz, No 5 FIB6-400A Unmounted 6µm, 42N/m, 320kHz, Al Reflective 5 FIB8-600 Unmounted 8µm, 42N/m, 320kHz, No 5 FIB8-600A Unmounted 8µm, 42N/m, 320kHz, Al Reflective 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) FIB FIB FIB3D FIB FIB FIB FIB Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side None Back Side Reflective Aluminum (where applicable)

61 Spike Automated Probes CNT brukerafmprobes.com/cnt The electron beam deposited (EBD) CNT probes are manufactured to the dimensions of a CNT using proven EBD technology, allowing the probe to act like a CNT while maintaining EBD s key strengths: precise tip orientation, precise control of tip dimensions (length and diameter), and large volume production. MCNT-100 Unmounted EBD Carbon Nanotube Probe, 100nm Length, 42N/m, 320kHz, Al Ref. 5 MCNT-500 Unmounted EBD Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) MCNT MCNT Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side None Back Side Reflective Aluminum

62 Nanoindentation Probes Diamond brukerafmprobes.com/nanoindent These probes provide the ability to perform nanoindenting, scratching, and hardness tests to investigate mechanical properties of materials, such as diamond-like carbon (DLC) thin films. They consist of diamond tips mounted on stainless steel cantilevers. The cantilevers have spring constants higher than the typical cantilevers used for imaging, which allows the application of forces large enough to indent or scratch a sample surface. Imaging is performed non-destructively by the patented TappingMode technique. CDNISP-HS Catalyst Diamond Tip, N/m, 35-65kHz 1 DNISP Unmounted Diamond Tip, N/m, 35-65kHz 1 DNISP-HS Unmounted Diamond Tip, N/m, 35-65kHz 1 DNISP-MM MultiMode Diamond Tip, N/m, 35-65kHz 1 MDNISP-HS MultiMode Diamond Tip, N/m, 35-65kHz 1 NICT-MTAP Innova Diamond Tip, N/m, 35-65kHz 1 PDNISP Dimension Diamond Tip, N/m, 35-65kHz 1 PDNISP-HS Dimension Diamond Tip, N/m, 35-65kHz 1 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Front Side None Notes - Each cantilever s spring constant is individually qualified and is supplied with a certification sheet Back Side None

63 Active Probe Self Sensing/ Actuating brukerafmprobes.com/active The Active Probe increases the speed of AFM imaging by over an order of magnitude. By integrating a high-speed micro-actuator onto the probe, the bandwidth limitation of a conventional AFM s Z-piezo is overcome. The probe is a MEMS device, micro-machined from bulk silicon with a piezoelectric film patterned along a portion of the cantilever. At the free end of the cantilever is a pyramidal tip with nanometer-scale sharpness, optimally shaped for high-resolution imaging. The cantilever is capable of bending by way of biomorph actuation, resulting in a controlled vertical displacement of the tip. DMASP Dimension Micro-Actuated for Fast Scanning & Ideal Resonances 10 MPA Unmounted Micro-Actuated for Fast Scanning & Ideal Resonances 10 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Special) Front Side None Notes - DMASP probes are designed for plug-and-play high-speed imaging and active control on NanoScope IV or newer controllers Back Side None

64 Tip Enhanced Raman Spectroscopy TERS brukerafmprobes.com/ters The Tip Enhanced Raman Spectroscopy (TERS) community has long recognized probe reliability and uniformity as the biggest barrier to the technique s wider adoption. Bruker has spent considerable resources overcoming this barrier, and has developed the world s first high-performance TERS probes only for Innova-IRIS systems. The combination of the Innova-IRIS AFM with the new IRIS TERS probes provides the most complete TERS solution available today. TERS-STM Innova-IRIS TERS probes for 633nm or 785nm excitation using STM feedback 10 Notes - For use with Innova-IRIS only, using cartridge model Pin-premounted for easier and safer handling. - At least 5 out of 10 probes reach >10 enhancement (tip-in vs tip-out) on TERS-SMPL. STM Probes Platinum-Iridium & Tungsten brukerafmprobes.com/stm Bruker s STM imaging probes are made of either Pt(80)Ir wire with a mechanically formed tip, or Tungsten wire with an electrochemically etched tip (except for part STM, which is mechanically formed). While the electrochemically etched Tungsten probes are very uniform and good for large-scan STM imaging on areas larger than atomic scale, the PtIr tips have potentially sharper tips and are recommended for atomic resolution imaging. The Tungsten probes come vacuum packaged to prevent oxidation -- once opened, these tips should be used in approximately one week since oxidation may degrade performance. CLST-PTBO Unmounted Precision Cut Wire, 0.5mm Diameter, 20mm Length 10 DPT10 Unmounted Precision Cut Wire, 0.25mm Diameter, 6mm Length 10 PT10 Unmounted Precision Cut Wire, 0.25mm Diameter, 8mm Length 10 PT-ECM10 Unmounted Precision Cut Wire, 0.25mm Diameter, 14mm Length 10 STM Unmounted Precision Cut Wire, 0.25mm Diameter, 6mm Length 10 DTT10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 6mm Length 10 TT10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 8mm Length 10 TT-ECM10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 14mm Length 10 Notes - Tip Radius <50nm on all STM probes. - DPT10 and DTT10 recommended for Dimension and BioScope AFMs. - PT-ECM10 and TT-ECM10 recommended for Electrochemical STM. - CLST-PTBO recommended for Innova AFMs

65 Thermal Probes VITA SThM brukerafmprobes.com/sthm The VITA Scanning Thermal Microscopy (SThM) probes are specially designed contact mode probes that incorporate a thin metal film near the apex of the probe. The probes are mounted on a precision support: - Measurement Mode: Temperature contrast - Lateral Resolution: <100nm (dependent on probe) - Temperature Resolution: <0.1 C (dependent on probe) - Maximum Temperature: 160 C (dependent on probe) VITA-DM-GLA-1 Dimension Scanning Thermal Microscopy probes, 150µm Length 5 VITA-MM-GLA-1 MultiMode Scanning Thermal Microscopy probes, 150µm Length 5 VITA-HE-GLA-1 MultiMode/ Innova / Caliber Scanning Thermal Microscopy probes, 150µm Length 5 Notes - Specifically designed for use with VITA module. Uses other than with VITA module void probe warranty. - Requires specialized probe holder (part of the VITA module). VITA-HE-GLA-1 probes for use only with VITA-CH-MM-HE (MultiMode) and VITA-CH-IN (Innova/ Caliber) probe holders. Thermal Probes VITA NanoTA VITA NanoTA probes are micro-machined silicon probes, similar in geometry to standard Silicon AFM probes, but incorporate a resistive heater at the end of the cantilever. These probes have the capability to image the sample surface significantly better than most thermal probes. Probes can be heated repeatedly and reliably to higher temperatures (350 C) than other thermal probes made of thin metal films. VITA-DM-NANOTA-200 Dimension Nano Thermal Analysis probes, 200µm Length 5 VITA-DM-NANOTA-300 Dimension Nano Thermal Analysis probes, 300µm Length 5 VITA-MM-NANOTA-200 MultiMode Nano Thermal Analysis probes, 200µm Length 5 VITA-MM-NANOTA-300 MultiMode Nano Thermal Analysis probes, 300µm Length 5 VITA-HE-NANOTA-200 MultiMode/ Innova / Caliber Nano Thermal Analysis probes, 200µm Length 5 VITA-HE-NANOTA-300 MultiMode/ Innova/ Caliber Nano Thermal Analysis probes, 300µm Length 5 Notes - Specifically designed for use with VITA module. Uses other than with VITA module void probe warranty. - Requires specialized probe holder (part of the VITA module). VITA-HE-NANOTA probes for use only with VITA-CH-MM-HE (MultiMode) and VITA-CH-IN (Innova/ Caliber) probe holders brukerafmprobes.com/nanota

66 Helpful Equations L w width of cantilever H tip height p cantilever mass per unit-length ρ air = 1.18kg / m 3 η air = 1.86x10-5 kg / m s t thickness of cantilever f 0 resonance frequency of cantilever (in Hz) ρ density of cantilever (silicon) = 2.33gm/cm 3 = 2330kg/m 3 H w t L length of cantilever P mass of tip E elastic modulus of cantilever = 1.39x10 11 N/m 2 (in the <110> direction) Spring Constant : Resonance Frequency (without tip mass): k = E w t 3 4 L 3 f 0 = E t 1 E t ρ L 2 2π ρ L 2 Resonance Frequency (taking tip mass into account): 3 E w t 3 E w t 3 f corr = = π 12(P L p L 4 ) ρ(π H 3 L w t L4 ) where the tip is assumed as a cone with height H and base diameter equal to H. Spring Constant Calibration Using the Sader Method: Sader s result for the spring constant of a rectangular cantilever is: k rect = ρ f w 2 LQf 0 2 Γ i (Re) where ρ f is the density of the surrounding fluid (air), Q is the quality factor of the resonance, and Γ i is the imaginary component of the hydrodynamic function, a function of the Reynolds number Re which is given by Re = 2πρ f f 0 w 2 / 4η f where η f is the viscosity of the surrounding fluid (air). Innovation with Integrity Index AFM Probes

67 Index Probes by Type Index Probes by Type ACTIVE PROBES Model Description Qty Page DMASP Micro-Actuated for Fast Scanning & Ideal Resonances MPA Micro-Actuated for Fast Scanning & Ideal Resonances CRITICAL DIMENSION PROBES Model Description Qty Page CDF100 Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm CDF100C Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm, Carbon Coated CDP15/150-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm CDP15/150C-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm, Carbon Coated CDP200A Round Post Tips, Depth Metrology, Width 200nm, Length 600nm CDP55A Round Post Tips, Depth Metrology, Width 55nm, Length 600nm CDP55L Round Post Tips, Depth Metrology, Width 55nm, Length 900nm CDR-120 Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm CDR120C Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm, Carbon Coated CDR130S Round Re-Entrant Tips, 3-D Imaging, Width 130nm, Length 300nm CDR-300 Round Re-Entrant Tips, 3-D Imaging, Width 300nm, Length 1250nm CDR32 Round Re-Entrant Tips, 3-D Imaging, Width 32nm, Length 220nm CDR-50C Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 300nm, Carbon Coated CDR-50S Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 225nm CDR-70 Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 500nm CDR-70S Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 400nm CDR850 Round Re-Entrant Tips, 3-D Imaging, Width 850nm, Length 6000nm EBD-CDR15 Round Re-Entrant Tips for 3-D Imaging, Width 15nm, Length 150nm EBD-CDR20 Round Re-Entrant Tips for 3-D Imaging, Width 20nm, Length 150nm EBD-CDR30 Round Re-Entrant Tips for 3-D Imaging, Width 30nm, Length 150nm EBD-CDR50 Round Re-Entrant Tips for 3-D Imaging, Width 50nm, Length 200nm SNP10 Silicon Nitride Post Tips, Depth Metrology, Width 10nm, Length 150nm SNP20 Silicon Nitride Post Tips, Depth Metrology, Width 20nm, Length 200nm ELECTRICAL PROBES Model Description Qty Page DDESP-10 Doped Diamond Coated Tips, 42N/m, 320kHz, Al Reflective DDESP-FM-10 Doped Diamond Coated Tips, 2.8N/m, 75kHz, Al Reflective OSCM-PT Pt Coated Tips, 2N/m, 70kHz, PtIr Reflective OSCM-PTW Pt Coated Tips, 2N/m, 70kHz, PtIr Reflective PFQNE-AL PeakForce KPFM, 0.8N/m, 300kHz, Proprietary Reflective PFTUNA PtIr Coated Tips, 0.4N/m, 70kHz, PtIr Reflective Model Description Qty Page SCM-PIC PtIr Coated Tips, 0.2N/m, 13kHz, PtIr Reflective SCM-PICW PtIr Coated Tips, 0.2N/m, 13kHz, PtIr Reflective SCM-PIT PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective SCM-PITW PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective SCM-PTMT-EX PtIr Coated Tips, 2.8N/m, 75kHz, PtIr Reflective SSRM-DIA Pyramidal Solid Diamond Tips, 3-27N/m, 18-77kHz, No MAGNETIC PROBES Model Description Qty Page MESP Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-CPMT Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-HM High-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-HMW High-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-HR10 High-Resolution, High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Al Reflective MESP-LC Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective MESP-LCW Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective MESP-LM Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-LMW Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-MT Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MESP-RC High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, CoCr Reflective MESP-RCW High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, CoCr Reflective MESPSP MFM Sample Pack Containing 3x MESP-LC, 3x MESP-HM, and 4x MESP-LM MESPW Standard MFM Coated Tips, 2.8N/m, 75kHz, CoCr Reflective MSNC-MF Sharpened, 2 Cantilevers, 0.1 & 0.5N/m, MFM MSNC-MT-A Sharpened, 1 MFM Cantilevers, 0.1 N/m, MFM MSNC-MT-B Sharpened, 1 MFM Cantilevers, 0.5 N/m, MFM NANOINDENTATION PROBES Model Description Qty Page CDNISP-HS Diamond Tip, N/m, 35-65kHz DNISP Diamond Tip, N/m, 35-65kHz DNISP-HS Diamond Tip, N/m, 35-65kHz DNISP-MM Diamond Tip, N/m, 35-65kHz MDNISP-HS Diamond Tip, N/m, 35-65kHz NICT-MTAP Diamond Tip, N/m, 35-65kHz PDNISP Diamond Tip, N/m, 35-65kHz PDNISP-HS Diamond Tip, N/m, 35-65kHz

68 Index Probes by Type Index Probes by Type SILICON PROBES Model Description Qty Page CLFC-NOBO Calibration Probes, Three Cantilevers With Different k 5 70 CLFC-NOMB Calibration Probes, Three Cantilevers With Different k 5 70 CONTV-A 0.2N/m, 13kHz, Al Reflective CONTV-AW 0.2N/m, 13kHz, Al Reflective ESP 0.2N/m, 13kHz, Al Reflective ESP-MT 0.2N/m, 13kHz, Al Reflective ESPW 0.2N/m, 13kHz, Al Reflective FESP 2.8N/m, 75kHz, No FESPA 2.8N/m, 75kHz, Al Reflective FESPAW 2.8N/m, 75kHz, Al Reflective FESP-MT 2.8N/m, 75kHz, No FESPW 2.8N/m, 75kHz, No FMV 2.8N/m, 75kHz, No FMV-W 2.8N/m, 75kHz, No FMV-A 2.8N/m, 75kHz, Al Reflective FMV-AW 2.8N/m, 75kHz, Al Reflective HMX-10 4N/m, 60kHz, Al Reflective, For HarmoniX Mode HMXS-10 1N/m, 40kHz, Al Reflective, For HarmoniX Mode HMXS-W 1N/m, 40kHz, Al Reflective, For HarmoniX Mode HMX-W 4N/m, 60kHz, Al Reflective, For HarmoniX Mode LTESP 48N/m, 190kHz, No LTESP-MT 48N/m, 190kHz, No LTESPW 48N/m, 190kHz, No MPP N/m, 300kHz, Rotated Tip, No MPP W 40N/m, 300kHz, Rotated Tip, No MPP N/m, 300kHz, Rotated Tip, Al Reflective MPP W 40N/m, 300kHz, Rotated Tip, Al Reflective MPP N/m, 300kHz, Rotated Tip, Al Reflective MPP N/m, 150kHz, Rotated Tip, No MPP W 5N/m, 150kHz, Rotated Tip, No MPP N/m, 150kHz, Rotated Tip, Al Reflective MPP W 5N/m, 150kHz, Rotated Tip, Al Reflective Model Description Qty Page MPP N/m, 525kHz, Rotated Tip, No MPP W 200N/m, 525kHz, Rotated Tip, No MPP N/m, 525kHz, Rotated Tip, Al Reflective MPP W 200N/m, 525kHz, Rotated Tip, Al Reflective MPP N/m, 75kHz, Rotated Tip, No MPP W 3N/m, 75kHz, Rotated Tip, No MPP N/m, 75kHz, Rotated Tip, Al Reflective MPP W 3N/m, 75kHz, Rotated Tip, Al Reflective MPP N/m, 75kHz, Rotated Tip, Al Reflective MPP N/m, 40kHz, Rotated Tip, No MPP W 0.9N/m, 40kHz, Rotated Tip, No MPP N/m, 40kHz, Rotated Tip, Al Reflective MPP W 0.9N/m, 40kHz, Rotated Tip, Al Reflective MPP N/m, 190kHz, Rotated Tip, No MPP W 35N/m, 190kHz, Rotated Tip, No MPP N/m, 190kHz, Rotated Tip, Al Reflective MPP W 35N/m, 190kHz, Rotated Tip, Al Reflective MPP N/m, 20kHz, Rotated Tip, No MPP W 0.9N/m, 20kHz, Rotated Tip, No MPP N/m, 20kHz, Rotated Tip, Al Reflective MPP W 0.9N/m, 20kHz, Rotated Tip, Al Reflective MPP N/m, 20kHz, Rotated Tip, Al Reflective MPP N/m, 10kHz, Rotated Tip, No MPP W 0.1N/m, 10kHz, Rotated Tip, No MPP N/m, 10kHz, Rotated Tip, Al Reflective MPP W 0.1N/m, 10kHz, Rotated Tip, Al Reflective MPP N/m, 40kHz, Rotated Tip, No MPP W 5N/m, 40kHz, Rotated Tip, No MPP N/m, 40kHz, Rotated Tip, Al Reflective MPP W 5N/m, 40kHz, Rotated Tip, Al Reflective NCHV 42N/m, 320kHz, No NCHV-A 42N/m, 320kHz, Al Reflective NCHV-AW 42N/m, 320kHz, Al Reflective NCHV-W 42N/m, 320kHz, No

69 Index Probes by Type Index Probes by Type Model Description Qty Page NCLV 48N/m, 190kHz, No NCLV-W 48N/m, 190kHz, No OLTESPA 2N/m, 70kHz, Al Reflective OLTESPAW 2N/m, 70kHz, Al Reflective OTESPA 42N/m, 300kHz, Al Reflective OTESPAW 42N/m, 300kHz, Al Reflective RFESP Order MPP , 3N/m, 75kHz, Rotated Tip, No RFESPW Order MPP W, 3N/m, 75kHz, Rotated Tip, No RTESP Order MPP , 40N/m, 300kHz, Rotated Tip, No RTESPA Order MPP , 40N/m, 300kHz, Rotated Tip, Al Reflective RTESPAW Order MPP W, 40N/m, 300kHz, Rotated Tip, Al Reflective RTESPW Order MPP W, 40N/m, 300kHz, Rotated Tip, No TESP 42N/m, 320kHz, No TESPA 42N/m, 320kHz, Al Reflective TESPAW 42N/m, 320kHz, Al Reflective TESPD DLC Coated Tips, 42N/m, 320kHz, Al Reflective TESPDW DLC Coated Tips, 42N/m, 320kHz, Al Reflective TESP-MT 42N/m, 320kHz, No TESPW 42N/m, 320kHz, No SILICON NITRIDE PROBES Model Description Qty Page DNP 4 Cantilevers, N/m, Au Reflective DNP-10 4 Cantilevers, N/m, Au Reflective DNP-S Sharpened, 4 Cantilevers, N/m, Au Reflective DNP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective FASTSCAN-A FastScan Probes, 18N/m, 1,400kHz, Al Reflective FASTSCAN-B FastScan probes, 4N/m, 400kHz, Au Reflective FASTSCAN-C FastScan Probes, 0.9N/m, 300kHz, Au Reflective FASTSCAN-DX FastScan Bio Probes, 0.25N/m, 110(Fluid)/ 250(Air) Reflective MLCT 6 Cantilevers, N/m; Au Reflective MLCT-EXMT-A1 1 Cantilever, 0.07N/m, Au Reflective MLCT-EXMT-BF1 5 Cantilevers, N/m, Au Reflective MLCT-MT-A 1 Cantilever, 0.07N/m, Au Reflective MLCT-MT-BF 5 Cantilevers, N/m, Au Reflective Model Description Qty Page MLCT-O10 Tipless, 6 Cantilevers, N/m, Au Reflective MLCT-OW Tipless, 6 Cantilevers, N/m, Au Reflective MLCT-UC 6 Cantilevers, N/m, No MLCT-UCMT-A 1 Cantilever, 0.07N/m, No, Pre-Mounted For Innova AFM MLCT-UCMT-BF 5 Cantilevers, N/m, No, Pre-Mounted For Innova AFM MSCT Sharpened, 6 Cantilevers, N/m, Au Reflective MSCT-EXMT-A1 Sharpened, 1 Cantilever, 0.07N/m, Au Reflective MSCT-EXMT-BF1 Sharpened, 5 Cantilevers, N/m, Au Reflective MSCT-MT-A Sharpened, 1 Cantilever, 0.07N/m, Au Reflective MSCT-MT-BF Sharpened, 5 Cantilevers, N/m, Au Reflective MSCT-UC Sharpened, 6 Cantilevers, N/m, No MSCT-UCMT-A Sharpened, 1 Cantilever, 0.07N/m, No MSCT-UCMT-BF Sharpened, 5 Cantilevers, N/m, No NP 4 Cantilevers, N/m, Au Reflective NP-10 4 Cantilevers, N/m, Au Reflective NP-10UC 4 Cantilevers, N/m, No NPG Au Coated Tips, 4 Cantilevers, N/m, Au Reflective NPG-10 Au Coated Tips, 4 Cantilevers, N/m, Au Reflective NP-O10 Tipless, 4 Cantilevers, N/m, Au Reflective NP-OW Tipless, 4 Cantilevers, N/m, Au Reflective NP-S Sharpened, 4 Cantilevers, N/m, Au Reflective NP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective NP-W-UC 4 Cantilevers, N/m, No OBL-10 Au Coated tips; 2 Cantilevers, N/m, Au Reflective ORC8-10 Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective ORC8-W Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective OTR4-10 Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective OTR4-10-W Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective OTR8-10 Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective OTR8-W Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective SCANASYST-AIR Sharpened, 1 Cantilever, 0.4N/m, Au Reflective SCANASYST-AIR-HR Fast Scanning, Sharpened, 1 Cantilever, 0.4N/m, Al Ref SCANASYST-FLUID 1 Cantilever, 0.4N/m, Au Reflective SCANASYST-FLUID+ Sharpened, 1 Cantilever, 0.4N/m, Au Reflective

70 Index Probes by Type Index Probes by Type SPIKE (HIGH ASPECT RATIO) PROBES Model Description Qty Page FIB µm, 42N/m, 320kHz, No FIB1-100A 1µm, 42N/m, 320kHz, Al Reflective FIB2-100A 2µm, 42N/m, 320kHz, Al Reflective FIB2-100S 2µm, 42N/m, 320kHz, No FIB3-200A 3µm, 42N/m, 320kHz, Al Reflective FIB3D µm, 42N/m, 320kHz, 3 Tilt Compensation, No FIB3D2-100A 2µm, 42N/m, 320kHz, 3 Tilt Compensation, Al Reflective FIB µm, 42N/m, 320kHz, No FIB4-200A 4µm, 42N/m, 320kHz, Al Reflective FIB µm, 42N/m, 320kHz, No FIB6-400A 6µm, 42N/m, 320kHz, Al Reflective FIB µm, 42N/m, 320kHz, No FIB8-600A 8µm, 42N/m, 320kHz, Al Reflective HAR µm, 42N/m, 320kHz, No MCNT-100 EBD Carbon Nanotube Probe, 100nm Length, 42N/m, 320kHz, Al Ref MCNT-500 EBD Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref TESPA-HAR 1µm, 42N/m, 320kHz, Al Reflective TESP-HAR 1µm, 42N/m, 320kHz, No TERS/ STM PROBES Model Description Qty Page CLST-PTBO Precision Cut Wire, 0.5mm Diameter, 20mm Length DPT10 Precision Cut Wire, 0.25mm Diameter, 6mm Length DTT10 Electrochemically Etched Wire, 0.25mm Diameter, 6mm Length PT10 Precision Cut Wire, 0.25mm Diameter, 8mm Length PT-ECM10 Precision Cut Wire, 0.25mm Diameter, 14mm Length STM Precision Cut Wire, 0.25mm Diameter, 6mm Length TERS-STM TERS probes for 633nm or 785nm excitation using STM feedback TT10 Electrochemically Etched Wire, 0.25mm Diameter, 8mm Length TT-ECM10 Electrochemically Etched Wire, 0.25mm Diameter, 14mm Length SUPERSHARP PROBES Model Description Qty Page DLCS-10 DLC Spike Tips, 5N/m, 160kHz, Al Reflective IMPSC-5 High Aspect Ratio Conical Tips, 35N/m, 350kHz, Al Reflective MSNL-10 Supersharp, 6 Cantilevers, N/m, Au Reflective MSNL-W Supersharp, 6 Cantilevers, N/m, Au Reflective SNL-10 Supersharp, 4 Cantilevers, N/m, Au Reflective SNL-W Supersharp, 4 Cantilevers, N/m, Au Reflective TESP-SS Supersharp Tips, 42N/m, 320kHz, No TESP-SSW Supersharp Tips, 42N/m, 320kHz, No THERMAL PROBES Model Description Qty Page VITA-DM-GLA-1 SThM probes for Dimension SPMs, 150µm Length VITA-DM-NANOTA-200 NanoTA probes for Dimension SPMs, 200µm Length VITA-DM-NANOTA-300 NanoTA probes for Dimension SPMs, 300µm Length VITA-MM-GLA-1 SThM probes for MultiMode SPMs, 150µm Length VITA-MM-NANOTA-200 NanoTA probes for MultiMode SPMs, 200µm Length VITA-MM-NANOTA-300 NanoTA probes for MultiMode SPMs, 300µm Length VITA-HE-GLA-1 SThM probes for MultiMode/ Innova/ Caliber SPMs, 150µm Length VITA-HE-NANOTA-200 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 200µm Length VITA-HE-NANOTA-300 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 300µm Length

71 Bruker AFM Probes Terms and Conditions for Sale FCA: Payment: Origin Net 30 days from date of invoice, upon approved credit, or prepaid. Freight Charges: Prepaid and added or collect. All freight charges are to be paid by the buyer. Warranty: Delivery: Acceptance: One year on parts and labor, subject to the terms and conditions of Bruker s standard warranty Varies by product; contact us for details. All consumables are shipped on a best effort basis. Acceptance of these products is assumed if not returned to Bruker AFM Probes within 30 days of receipt of goods. All prices and specifications are subject to change. Specifications listed are the nominal specifications for each product. For specification ranges please visit our website. If certain specifications are critical to your application, please contact our technical staff to verify specifications prior to purchase. For a complete copy of our Terms & Conditions, please contact us at afmprobeorders@bruker-nano.com. Bruker Trademarks: Atomic Force Profiler (AFP), AutoTune, BioScope, Catalyst, DAFP, Dimension, EasyAlign, ECAFM, ECSTM, Edge, FastScan, FastScan Bio, FESP, HarmoniX, Icon, Innova, InSight, Interleave, LiftMode, MIRO, MultiMode, NanoDrive, NanoIndentation, Nanolithography, NanoMan, Nanomanipulation, NanoProbes, NanoScope, PeakForce, PeakForce Capture, PeakForce KPFM, PeakForce Tapping, PeakForce QNM, PeakForce TUNA, PhaseImaging, PicoForce, SAM, ScanAsyst, SECPM, TappingMode, TESP, TipX, Top View Accessory TVA, TR-Mode, TR-Tuna, TurboScan, VITA. The NANOSCALE WORLD COMMUNITY JOIN TODAY SHARE LEAD PARTICIPATE MEMBERSHIP BENEFITS Fully customizable and secure profile Exclusive downloadable content before anyone else Instant access to Bruker s leaders in the nanoscale world Access to exclusive content area for Bruker instrument owners Free resource site including valuable PDFs, images and video content Interactive atmosphere NANOSCALE WORLD JOIN YOUR AFM ONLINE COMMUNITY Bruker invites you to share, lead and participate in your AFM and SPM community with other leaders of the nanoscale world. Feel free to attend live webinars, listen to recorded sessions and browse publications. The best thing is it s YOUR community. Lead the metrology pack join your community today! nanoscaleworld.bruker-axs.com/nanoscaleworld/

72 Americas Order online (USA only): Phone Orders: +1 (800) Option 6 Purchase Order by Fax: +1 (805) Purchase Order by afmprobeorders@bruker-nano.com Technical Information: +1 (800) x2080 or probesinfo@bruker-nano.com AFM Tech Support: +1 (800) or afmsupport@bruker-nano.com International Europe Phone Orders: +44 (0) Purchase Order by Fax: +33 (0) Purchase Order by orders.france@bruker-nano.com Technical Information: probesinfo.uk@bruker-nano.com Asia Pacific Phone Orders: Purchase Order by Fax: Technical Information: info@bruker.com.sg Japan Phone Orders: Purchase Order by Fax: Purchase Order by spm-orders@bruker-axs.jp Technical Information: info-nano@bruker-axs.jp 142 International