Optical Microscope. Active anti-vibration table. Mechanical Head. Computer and Software. Acoustic/Electrical Shield Enclosure

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1 Optical Microscope On-axis optical view with max. X magnification Motorized zoom and focus Max Field of view: mm x mm (depends on zoom) Resolution : um Working Distance : mm Magnification : max. X Zoom :. X ~ X Manual view positioning: +/- mm in XY Easy/quick to find probe and sample by adjusting zoom Precise penning view with a manual micrometer stage Computer and Software Computer - OS: Windows XP - GHz Pentium IV processor, HDD:8GB, 9 LCD Monitor, GB RAM, CD-ROM R/W Software - SPM control program - Image processing and analysis program Acoustic/Electrical Shield Enclosure Enclosure can very efficiently isolate n-tracer head from the external perturbation such as room light, acoustic and stray electrical noise. Active anti-vibration table Frequency :.Hz ~ Hz Static Compliance : - vertical : approx.um/n - horizontal : approx.~um/n Load Range : ~ kg Mechanical Head Easy/Quick Laser alignment ( linear translation positioning of laser point on the cantilever and PSPD for all axis). Easy/Quick to exchange probe and sample Easy/Precise to move probe over sample D Closed Loop Scanner High performance Digital Controller Built-in the most fast Digital Signal Processor in the world market Fast and high resolution imaging are realized by a high performance DSP technology, bit AD, -bit DA Converter The first SPM running in the internet (Remote Operation/Wireless communication) Additional channel ADC and channel DAC for users application Integrated -channel -bit counter module for single photon counting

2 PZT thin film (Sol-gel) PZT thin film(mocvd) Au nano-particles DNA with atomic step Multi-walled CNT on glass Single-walled CNT on glass Hard disk data bits EFM/domain reversal Calibration Standard Hard disk surface Raster lithography/force modulation Raster lithography/indentation

3 The n-tracer is complete SPM system designed for industrial users or researchers with optimal throughput and various application mode. Major application areas are high density data storage material science, life science, nanoscale device inspection. System Control Software Image Processing Software Standard Application Modes Software Highlight - Supports full SPM application modes in a single program - Supports image processing and analysis (D, flattening, surface/line analysis, etc. ) - Maximum number of pixel: Mega pixels/image (can set any pixel size from 8x8 to 9x9) - Real-time monitoring profile and FFT spectrum trace - Real-time color management - Quick zoom-in and penning of the scan area - Fully automated tuning of the DFM setup - Serial imaging mode / Bach spectroscopy mode - Adapted scanning technique - Real-time image remapping for high speed scanning - Advanced nanolithography with convenient pattern editor - Contact Mode/Dynamic Force Microscopy - Lateral Force Microscopy - Magnetic Force Microscopy - Phase Contrast/Force Modulation Microscopy - Current Imaging Microscopy - XY Scope, I-V, D-E Hysteresis, Force Spectroscopy Tool Advanced Application Modes - High speed imaging with self-actuating probe - Nanolithography with vector and raster scan tool - Electrostatic Force Microscopy - Scanning Tunneling Microscopy - Dynamic Q-controlled DFM mode

4 High Speed Imaging Hz, x Points High Speed Probe Hz, x Points Hz, x Points Z Hz, x Points Z PZT actuator Hz, x Points Hz, x Points point, Hz Hz, x Points point, Hz 8Hz, x Points Si tip point, 8Hz Piezoresitive sensor Amplitude ( ) Height = nm - Z[nm] Z[nm] Z[nm] X[um] X[um] X[um]. k k k High Speed and High Pixel Imaging st Zoom-in Software Zoom in Displacement( ) Frequency (Hz) upward sweep downward sweep.um.um rd Zoom-in.um nd Zoom-in.um.um [Hz, rescan with X Points].um.um Voltage (V) Plots show a mechanical resonance and DC actuation characteristics of a micro actuator. The mechanical resonance frequency is about khz, and it can be actuated up to um to um with a small driving voltage.

5 Dependence of Indentation Amplitude(Z-Piezo).um Indentation and scratching method/vector scan Vector/Raster Lithography Software.um Polarization reversal on ferroelectric thin film Oxidation on Ti thin film Indentation method/raster scan Mode.8um.um.um

6 Carbon nanotube (CNT) probe ¾ Strong and wear-resistant ¾ Sharp end and high-aspect ratio ¾ Shows gentle probe-sample interaction for imaging biological sample ¾ Increasing resolution and reliability ¾ Shows a good stability and performance while the SPM is operated. Specifications ¾ Length :, nm ¾ Diameter : ~ nm ¾ Angle deviation : (Cohesion aspect) (Side aspect)

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