nanovea.com PROFILOMETERS 3D Non Contact Metrology

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1 PROFILOMETERS 3D Non Contact Metrology nanovea.com

2 PROFILOMETER INTRO Nanovea 3D Non-Contact Profilometers are designed with leading edge optical pens using superior white light axial chromatism. Nano through macro range is obtained during measurement (Profile/Dimension, Roughness/Finish/Texture, Shape/Form/Topography, Flatness/Warpage, Volume/Area, Step-Height/Depth/Thickness and others) on a wider range of geometries and materials than any other Profilometer. With the use of a large range of optical pens the Profilometer precisely measures an endless range of applications. Nanovea optical pens have zero influence from sample reflectivity, variations require no sample preparation and have advanced ability to measure high surface angles. Easily measure any material: transparent, opaque, specular, diffusive, polished, rough etc. Unlike other optical measurement techniques, large surface areas can be precisely measured without any imaging stitching. For applications exceeding Profilometer capability an AFM integration is available to maximize measurement range. All Profilometers use the same Software and Nanovea PRVision is optional on most Profilometers for auto pattern recognition. Profilometer speeds range from 7mm/s to 1m/s for laboratory or research to the needs of hi-speed inspection on large surface areas. Nanovea Profilometers can be built with custom size, speeds, scanning capabilities, Class 1 Clean Room compliance, with Indexing Conveyor and for Inline or online Integration and now with true portability capability. PROFILOMETERS Jr Optical Profilometer True Portable Capability using the same technology and software as the PS50, along with mm X-Y stages, the high-performance, portable Jr provides measurement capability rarely available for immovable objects or during field study. The Jr has a small footprint (27cm x 14cm) with a total weight less than 5.5 Kg and runs on a laptop, which makes for portable ease. With a fully rotational, single axis, head the Jr has the ability to measure surfaces at difficult angles. Durable carrying case for safe and secure transport. Ideal option for portable measurement needs during field studies or immovable objects in processing environments. PS50 Optical Profilometer Limited Budget Using the same technology and software as the ST400, along with 50mm X-Y stages, the high-performance PS50 is the ideal choice to replace stylus and laser profilers. The PS50 has a small footprint (30cm x cm) and the option of running on a laptop, which makes for an easy installation where space is critical. Ideal option for budget limitations and small research facilities. ST400 Optical Profilometer Nanovea Standard with 150mm X-Y stages and a large coarse height adjustment to easily accommodate larger sample sizes. The ST400 also has an optional offset camera, with either manual or motorized zooms, to easily identify small features prior to measuring them. The Custom ST400, a more open configuration, allows for the addition of larger X-Y stages to measure even larger areas, a 360 rotational stage for measuring spherical or cylindrical parts and many other custom configurations. Works well for larger samples and larger scan areas. Available with various automation options. Ideal option for diverse and expanding measurement needs. HS00 Optical Profilometer Hi-Speed Automated Inspection at speeds 50 times faster than most inspection systems in its class. Inspection speeds can reach up to 1m/s and data acquisition up to 31KHz providing crucial inspection for more time constraint production and quality control environments. The HS00 is made mostly of granite to provide superior stability and comes with an optional enclosure workstation to create a fully contained stand-alone instrument. The HS00 can also be equipped with an 180point line sensor to make inspection up to 180 times faster, which gives 1m/s stage speed and an acquisition rate up to 324,000. Ideal option for hi-speed automation and quality control environments. Optimized versions of the HS00 Profilometer has been built for Photovoltaic, Microelectronics and Asphere production environments. Capable of acquiring up to 31,000 points per second and scan areas up to 1m x 1m. Measurements can range from microelectronic planarity, arity to solar cell flatness to aspheric topography and dimension. Available as stand alone or inline for integration production lines for quality control inspection.

3 PROFILOMETER OPTICS Optical Pens Nanovea optical pens have zero influence from sample reflectivity. Variations require no sample preparation and have advanced ability to measure high surface angles. Capable of large Z measurement ranges. Unlike other optical techniques, Nanovea optical pens provide ability to measure any material, whether transparent, opaque, specular, diffusive, polished or rough. Large pen selection for varying dynamic vertical measurements. Excellent vertical and spatial resolution. AFM The AFM is available for maxim measurement range. Providing user ability to quickly move from a chosen area of optical profiler measurement to an AFM three-dimensional measurement at higher lateral and vertical resolution. AFM measurements are non-destructive and require no sample preparation. Standard mode: Static Force (Contact): Constant Force, Constant Height. Extended modes: Dynamic Force (Intermittent Contact etc.): Constant Amplitude, Constant Height. Static Force: Force Modulation, Spreading Resistance. Dynamic Force: Phase Contrast, Magnetic Force, Electrostatic Force. Scan area up to 1μm, Z range up to 22μm, XY resolution down to 0.15nm and Z resolution down to 0.027nm Video Zoom Imaging The Video Zoom offers user ability to select areas to be measured through live camera view. The camera is offset to the optical pen with a calibrated distance through the Nanovea 3D software. Complete with manual or motorized zoom capabilities with a diagonal field of view ranging from 11.42mm to 1.77mm. Video option will be available in the software that allows the user to draw a box around a feature to be measured, take a picture of the surface and stitch multiple images together to create a large picture of the surface. Pattern recognition Software can be included when camera option is added (PRVision). Magnification = 0.7x - 4.5x, Diagonal Field of View = (mm), N.A. = , Depth of Field = (mm), Working Distance = 36mm Microscope Imaging The Microscope, with similar functions to the Video Zoom Camera, allows the full capability of a microscope with options such as polarizer and analyzer slides. The Microscope can be equipped with up to 5 microscope objectives ranging from 5x to 0x, and provides an overall total video magnification of up to 4000x. The Microscope Turret can be used when a high level of detail is needed to resolve small features on any surface. Available Objectives = 5x, x, 20x, 50x, Video Magnification of up to 4000x PROFILOMETER SOFTWARE Nanovea 3D Software The Nanovea 3D software is the acquisition software that is used with all Nanovea Profilers. The software permits the user to define the size of the area, or line to be measured, as well as the lateral resolution of the measurement. The software also allows three different views of the measurement in real-time: cross-sectional, top-down and 3-dimensional views. To make it easier to find and measure small surfaces, a recentering function allows the user to point-and-click on the scanned image in order to recenter the next scan to that specific point; or by use of a point-and click feature from an optional offset video camera. Macro measurement is a standard feature in all versions of Nanovea 3D software. Macro allows users to load several samples, or trays, to stage to create a user trained measurement across several chosen locations and or samples. Mountains 3D Analysis Software software package available to all Nanovea Profilers, which provides a complete set of surface analysis tools. User-friendly report making and editing. An extensive list of roughness, flatness, waviness and other surface parameters. Create's 3D images in false color, contour maps and photo simulation. A variety of filtering, leveling and other surface correction functions. --Continued on next page

4 Ability to create templates to be applied to multiple individual measurements. Dimensional analysis, surface area, volume, bearing ratio and texture direction. Grain counting, sorting, and other grain analysis. Spectral analysis, auto correlation, and fractal analysis. Statistical analysis over a population of results. Ability to export raw data, images, and entire reports. Create and export your videos of the surface. 4D analysis to look at surface changes as a function of time. Motif analysis and additional functions available, please contact Nanovea for more details. Nanovea PRVision Software PRVision Software module can be included in Nanovea 3D Software when an optional camera is included. PRVision has the ability to automatically recognize features from a user-trained image file. The surface is scanned while automatically recognizing all features of interest; then either automatically measures every feature found or a select few that are chosen by the user. PROFILOMETER APPLICATIONS Nanovea Profilometers provide unmatched 3D Non Contact Surface Metrology (Profile Dimension, Roughness Finish Texture, Shape Form Topography, Flatness Warpage Coplanarity, Volume Area, Step-Height Depth, Thickness and others) at Nano through Macro range, for research and quality control environments. Industries include: Semiconductor, Automotive, Coatings, Solar, Metallurgy, Microelectronics, Pharmaceutical, Biomedical, Aerospace and many others.

5 PROFILOMETER SPECS BASE Jr PS50 ST400 HS00 X-Y Axis Travel mm 50 mm 150 mm 400 x 600 mm Z Axis 30 mm 30 mm 60 mm 50 mm X-Y Axis Resolution 0.1μm 0.1 μm 0.1 μm μm Maximum X-Y Speed 7 mm/s mm/s 20 mm/s 1 m/s Rotational Stage Microscope Imaging Zoom Video Imaging AFM MEASUREMENT RANGE WORKING DISTANCE (MM) VERTICAL RESOLUTION (NM) VERTICAL ACCURACY (NM) LATERAL RESOLUTION (μm) MINIMUM TRANSPARENT THICKNESS (μm) Modular Optical Pens 1μm / 1.55 / μm / 1.55 / mm / mm / 8.00 / mm / 8.00 / mm / Classical Optical Pens ( Not Available on Jr or PS50) 20μm μm μm mm mm mm Line Sensors WAVY MICROVIEW Line Length (mm) Number of Points Spot Size (μm) Pitch (μm) Numerical Aperture Working Distance (mm) Z Measurement Range (mm) Resolution (μm) Accuracy (μm) Field Scanning (mm) () x x 1.8 *Specifications may change, please contact Nanovea for clarification.

6 Today's Standard For Tomorrow's Materials Nanovea is the result of over 20 years experience providing professional solutions and experienced service throughout the fields of nano/micro/macro profilometry, mechanical, tribology, imaging and other related fields of materials research & development industries. After years of client feedback and the dedication to providing superior instrumental solutions, Nanovea was launched in 4 as a privately held California corporation. From the Irvine, CA office Nanovea designs and manufactures Profilometers, Mechanical Testers & Tribometers to combine the most advanced testing capabilities in the industry: Scratch Adhesion, Indentation Hardness, Wear Friction & 3D Non-Contact Metrology at Nano, Micro & Macro range. Unlike other manufactures Nanovea also provides Laboratory Services, offering clients availability to the latest technology and optimal results through improvements in material testing standards. nanovea.com

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