Positive-Tone Photosensitive Polyimide Coatings for Lens Layer in image sensors. Introduction of the characteristic of CS-series
|
|
- Lenard Hunter
- 5 years ago
- Views:
Transcription
1 Positive-Tone Photosensitive Polyimide Coatings for Lens Layer in image sensors Photoneece CS-series Introduction of the characteristic of CS-series Toray Industries, Inc. 1 1
2 CS-7500 basic properties Aqueous developable positive tone PSPI (Photo Sensitive Polyimide) with high R.I., good chemical resistance and high resolution. (1)High Refractive Index (2)Excellent Chemical Stability (3)High resolution (4)Tough product quality (5)Aqueous developable with 2.38% TMAH <Current specs > Thickness :0.3μm~1.2μm Resolution:Aspect ratio=3 Application:[Inner lens] [On-chip lens] 2 2
3 CS-7500 vs. Other Materials Liquid stability Adhesion strength Patternability Transparency Refractive Index Thermal stability Shape Acrylic Inorganic CS-series CS-series have the suitable characteristics for lens layer in Image Sensors 3 3
4 CS-7500 basic properties <R.I. Dependency on wavelength> Reflective Index Refractive Index Wave length(nm) R.I Wavelength 4 Measurement method:prism coupler Cure Conditions:280 :280 5min(Air hotplate) 4
5 CS-7500 basic properties <Dependency of transparency on wavelength 1μm)> Transparency (%) T (%) Measurement apparatus:shimadzu UV-180 Curing conditions: min(hotplate)* wavelength (nm) *Air curing(in case of N2 cure, Transparency=90%/1um@400nm) 5
6 Effect of thermal treatment on its transparency Transparency (%) T (%) as depo wavelength (nm) 250 1min (HP, in air) 300 1min (HP, in air) 6 Transparency maintains after heat treatment. 6
7 CS-7500 basic properties <Curing conditions vs Refractive Index> Curing conditions (Hot plate) 200 5min 220 5min 250 5min R.I. (632nm) Transparency (%/1um) 400nm 500nm 700nm min
8 Pattern profile (after curing) Allay pattern (2.0μm / 0.25μm) L / S pattern (1.0 / 1.0μm) 8 HMDS treatment Spin Pre bake Exposure1 Development Cure 60 20sec 700rpm 10 sec and 1700rpm 120sec 120 plate (thickness 0.87um) 650msec (i-line stepper, Focus=0um) : for patterning 70 sec. Puddle 2.38% TMAH sol. (thickness 0.65um) 280 plate (thickness 0.55um) 8
9 Pattern profile (thiner film, after curing) 2um line / 2um space (thickness 0.32um) HMDS treatment Spin Pre bake Exposure1 Development Exposure2 Cure 60 20sec 700rpm 10 sec and 1500rpm 120sec 120 plate (thickness 0.47um) 160msec (i-line stepper, Focus=0um) : for patterning 30 sec. Puddle 2.38% TMAH sol. (thickness 0.39um) 0.1~0.5 J/cm2(broad i-line) : for bleaching 300 plate (thickness 0.32um) 9 9
10 Patterning Process of CS-7500 <Film thickness after cure:0.7μm recipe example> HMDS Spin Prebake Exposure sec 1500rpm for 120sec 120 3min (Hot plate) (Thickness 1.00μm) 400 msec (i-line stepper, Focus=0μm):For patterning Development 50 sec. Puddle development (Thickness 0.85μm) (2.38%TMAH solution) Exposure2 Cure* ~0.5 J/cm2(broad i-line):for bleaching 280 5min (Hot plate ) (Thickness 0.70μm) *Curing Temp. range from to
11 Patterning Process of CS-7500 < Sensitivity curve > Normalized thickness(%) Exposure time (msec) 11 HMDS treatment Spin Pre bake Exposure Development 60 20sec 1500rpm 120sec 120 plate (thickness 1.00um) i-line stepper, Focus=0um 50 sec. Puddle 2.38% TMAH sol. (thickness 0.85um) 11
12 Patterning Process of CS <Film thickness after cure:0.8μm recipe example> HMDS Spin Prebake Exposure sec 700rpm for 10 sec and 1500rpm for 30sec 120 3min (Hot plate) (Thickness 1.21μm) 300 msec (i-line stepper, Focus=0.5μm):For patterning Development 50 sec. Puddle development (Thickness 1.03μm) (2.38%TMAH solution) Exposure2 Cure* 0.1~0.5 J/cm2(broad i-line):for high transparency 280 5min (Hot plate ) (Thickness 0.84μm) 12 Cure Cure ranges from to
13 Patterning Process of CS-7500 <Pattern process recipe by Mark-7> 1. PI Coating (Mark 7) C/S Coater recipe(manual) STEP Time Speed Acceleration Dispense Arm Arm HMDS (HP) 60 X 20 s (sec) (rpm) (rpm/sec) Home Home COL 23 X 60 s Home Home Home Home COAT Home Home Home Home Pre-Bake (HP) 1 20 X 180 s Dispense CS-7000 at step 1 COL 23 X 60 s C/S 4.Exposure2 PLA Broadband alighner Exposure0.1~5J/cm2(at iline) 5.Cure Cure machine:mark-7(tel) Cure steps: r.t min r.t. Atmosphere:N2 2.Exposure1 I-line stepper(gca 8000 DSW WAFER STEPPER) ET 300 msec (150mJ/cm2) focus 0.5μm Development recipe STEP Time Speed Acceleration Dispense 3.Development (Mark 7)/Bake (sec) (rpm) (rpm/sec) C/S DEV C/S Development(TMAH 2.38%)Rate:0.6 L/min Rinse(DI water)rate:1.2 L/min Back rinse(di water)rate:150 ml/min Cup exhaust:60 Pa Nozzle:Stream nozzle Dispense7:Developer dispense 13 13
14 Spin curve of CS-7500 (example) Thickness after Prebaking(μm) Rotation speed(x rpm 120sec) 14 14
Part 5-1: Lithography
Part 5-1: Lithography Yao-Joe Yang 1 Pattern Transfer (Patterning) Types of lithography systems: Optical X-ray electron beam writer (non-traditional, no masks) Two-dimensional pattern transfer: limited
More information+ Preferred material for tool O Acceptable material for tool X Unacceptable material for tool
Contact Aligners (HTG, ABM, EV620) GCA 5X g-line Stepper GCA i-line Steppers (GCA 10X, AS200) Shipley 1800 Series (1805, 1813, 1818, 1827) + + X AZ nlof 2000 O X + AZ4903 + + X OiR 620-7i X X + OiR 897-12i
More informationProcess Optimization
Process Optimization Process Flow for non-critical layer optimization START Find the swing curve for the desired resist thickness. Determine the resist thickness (spin speed) from the swing curve and find
More informationPhotolithography Technology and Application
Photolithography Technology and Application Jeff Tsai Director, Graduate Institute of Electro-Optical Engineering Tatung University Art or Science? Lind width = 100 to 5 micron meter!! Resolution = ~ 3
More informationi- Line Photoresist Development: Replacement Evaluation of OiR
i- Line Photoresist Development: Replacement Evaluation of OiR 906-12 Nishtha Bhatia High School Intern 31 July 2014 The Marvell Nanofabrication Laboratory s current i-line photoresist, OiR 897-10i, has
More informationMeRck. nlof 2000 Series. technical datasheet. Negative Tone Photoresists for Single Layer Lift-Off APPLICATION TYPICAL PROCESS
MeRck technical datasheet AZ Negative Tone Photoresists for Single Layer Lift-Off APPLICATION AZ i-line photoresists are engineered to simplify the historically complex image reversal and multilayer lift-off
More informationMeRck. AZ nlof technical datasheet. Negative Tone Photoresist for Single Layer Lift-Off APPLICATION TYPICAL PROCESS. SPIN CURVE (150MM Silicon)
MeRck technical datasheet AZ nlof 5510 Negative Tone Photoresist for Single Layer Lift-Off APPLICATION AZ nlof 5510 i-line photoresist is engineered to simplify the historically complex image reversal
More informationContrast Enhancement Materials CEM 365HR
INTRODUCTION In 1989 Shin-Etsu Chemical acquired MicroSi, Inc. including their Contrast Enhancement Material (CEM) technology business*. A concentrated effort in the technology advancement of a CEM led
More informationTHE USE OF A CONTRAST ENHANCEMENT LAYER TO EXTEND THE PRACTICAL RESOLUTION LIMITS OF OPTICAL LITHOGRAPHIC SYSTEMS
THE USE OF A CONTRAST ENHANCEMENT LAYER TO EXTEND THE PRACTICAL RESOLUTION LIMITS OF OPTICAL LITHOGRAPHIC SYSTEMS Daniel R. Sutton 5th Year Microelectronic Engineering Student Rochester Institute of Technology
More informationSU-8 Post Development Bake (Hard Bake) Study
University of Pennsylvania ScholarlyCommons Protocols and Reports Browse by Type 10-16-2017 Ram Surya Gona University of Pennsylvania, ramgona@seas.upenn.edu Eric D. Johnston Singh Center for Nanotechnology,
More informationPHGN/CHEN/MLGN 435/535: Interdisciplinary Silicon Processing Laboratory. Simple Si solar Cell!
Where were we? Simple Si solar Cell! Two Levels of Masks - photoresist, alignment Etch and oxidation to isolate thermal oxide, deposited oxide, wet etching, dry etching, isolation schemes Doping - diffusion/ion
More informationDevice Fabrication: Photolithography
Device Fabrication: Photolithography 1 Objectives List the four components of the photoresist Describe the difference between +PR and PR Describe a photolithography process sequence List four alignment
More informationKMPR 1010 Process for Glass Wafers
KMPR 1010 Process for Glass Wafers KMPR 1010 Steps Protocol Step System Condition Note Plasma Cleaning PVA Tepla Ion 10 5 mins Run OmniCoat Receipt Dehydration Any Heat Plate 150 C, 5 mins HMDS Coating
More informationContrast Enhancement Materials CEM 365iS
INTRODUCTION In 1989 Shin-Etsu Chemical acquired MicroSi, Inc. and the Contrast Enhancement Material (CEM) technology business from General Electric including a series of patents and technologies*. A concentrated
More informationOutline. 1 Introduction. 2 Basic IC fabrication processes. 3 Fabrication techniques for MEMS. 4 Applications. 5 Mechanics issues on MEMS MDL NTHU
Outline 1 Introduction 2 Basic IC fabrication processes 3 Fabrication techniques for MEMS 4 Applications 5 Mechanics issues on MEMS 2.2 Lithography Reading: Runyan Chap. 5, or 莊達人 Chap. 7, or Wolf and
More informationLecture 13 Basic Photolithography
Lecture 13 Basic Photolithography Chapter 12 Wolf and Tauber 1/64 Announcements Homework: Homework 3 is due today, please hand them in at the front. Will be returned one week from Thursday (16 th Nov).
More informationOrganic Antireflective Coatings for Photomask Fabrication using Optical Pattern Generators
Organic Antireflective Coatings for Photomask Fabrication using Optical Pattern Generators Benjamen M. Rathsack 1, Cyrus E. Tabery 1, Cece Philbin 2, and C. Grant Willson 1 September 15, 1999 1 Department
More informationModule 11: Photolithography. Lecture 14: Photolithography 4 (Continued)
Module 11: Photolithography Lecture 14: Photolithography 4 (Continued) 1 In the previous lecture, we have discussed the utility of the three printing modes, and their relative advantages and disadvantages.
More informationCharacterization Study of an Aqueous Developable Photosensitive Polyimide on 300 mm Wafers
Characterization Study of an Aqueous Developable Photosensitive Polyimide on 300 mm Wafers Warren W. Flack, Scott Kulas Ultratech Stepper, Inc. San Jose, CA 95134 Craig Franklin HD Microsystems Austin,
More informationMajor Fabrication Steps in MOS Process Flow
Major Fabrication Steps in MOS Process Flow UV light Mask oxygen Silicon dioxide photoresist exposed photoresist oxide Silicon substrate Oxidation (Field oxide) Photoresist Coating Mask-Wafer Alignment
More informationUFNF YES Image Reversal & HMDS Oven Revision 6.0 1/22/2014 Page 1 of 5. YES Image Reversal and HMDS Oven SOP
1/22/2014 Page 1 of 5 YES Image Reversal and HMDS Oven SOP Table of Contents 1.0 Safety 2.0 Quality Control and Calibrations 3.0 Processes Description 4.0 Process Information for Lift Off 5.0 Operation
More informationDevelopment of a LFLE Double Pattern Process for TE Mode Photonic Devices. Mycahya Eggleston Advisor: Dr. Stephen Preble
Development of a LFLE Double Pattern Process for TE Mode Photonic Devices Mycahya Eggleston Advisor: Dr. Stephen Preble 2 Introduction and Motivation Silicon Photonics Geometry, TE vs TM, Double Pattern
More informationChapter 6. Photolithography
Chapter 6 Photolithography 2006/4/10 1 Objectives List the four components of the photoresist Describe the difference between +PR and PR Describe a photolithography process sequence List four alignment
More informationAtlas 46 novel negative tone photoresist which combines the good properties of the established SU-8 and CAR 44
EIPBN, 30 th Mai 2018 Atlas 46 novel negative tone photoresist which combines the good properties of the established SU-8 and CAR 44 Dr. Christian Kaiser, Matthias Schirmer Allresist GmbH, Germany Outline
More informationOptical Requirements
Optical Requirements Transmission vs. Film Thickness A pellicle needs a good light transmission and long term transmission stability. Transmission depends on the film thickness, film material and any anti-reflective
More informationChapter 3 Fabrication
Chapter 3 Fabrication The total structure of MO pick-up contains four parts: 1. A sub-micro aperture underneath the SIL The sub-micro aperture is used to limit the final spot size from 300nm to 600nm for
More informationAZ 1512 RESIST PHOTOLITHOGRAPHY
AZ 1512 RESIST PHOTOLITHOGRAPHY STANDARD OPERATIONAL PROCEDURE Faculty Supervisor: Prof. R. Bruce Darling Students: Katherine Lugo Danling Wang Department of Electrical Engineering Spring, 2009 TABLE OF
More informationChapter 6 Photolithography
Chapter 6 Photolithography Hong Xiao, Ph. D. hxiao89@hotmail.com www2.austin.cc.tx.us/hongxiao/book.htm Hong Xiao, Ph. D. www2.austin.cc.tx.us/hongxiao/book.htm 1 Objectives List the four components of
More informationLecture 7. Lithography and Pattern Transfer. Reading: Chapter 7
Lecture 7 Lithography and Pattern Transfer Reading: Chapter 7 Used for Pattern transfer into oxides, metals, semiconductors. 3 types of Photoresists (PR): Lithography and Photoresists 1.) Positive: PR
More informationMicrolens formation using heavily dyed photoresist in a single step
Microlens formation using heavily dyed photoresist in a single step Chris Cox, Curtis Planje, Nick Brakensiek, Zhimin Zhu, Jonathan Mayo Brewer Science, Inc., 2401 Brewer Drive, Rolla, MO 65401, USA ABSTRACT
More informationLithography. 3 rd. lecture: introduction. Prof. Yosi Shacham-Diamand. Fall 2004
Lithography 3 rd lecture: introduction Prof. Yosi Shacham-Diamand Fall 2004 1 List of content Fundamental principles Characteristics parameters Exposure systems 2 Fundamental principles Aerial Image Exposure
More informationSection 2: Lithography. Jaeger Chapter 2 Litho Reader. The lithographic process
Section 2: Lithography Jaeger Chapter 2 Litho Reader The lithographic process Photolithographic Process (a) (b) (c) (d) (e) (f) (g) Substrate covered with silicon dioxide barrier layer Positive photoresist
More informationObducat NIL 6. Nanoimprinting with NRF s NIL 6
Obducat NIL 6 Substrates: pieces to 6 inch, hard or soft Thermal cure with PMMA, MR I 7010 etc Alignment to about 3 microns Temperature to 300 HC Pressure 15 to 80 bars Resolution < 50 nm possible Up to
More informationSemiconductor Manufacturing Technology. Semiconductor Manufacturing Technology. Photolithography: Resist Development and Advanced Lithography
Semiconductor Manufacturing Technology Michael Quirk & Julian Serda October 2001 by Prentice Hall Chapter 15 Photolithography: Resist Development and Advanced Lithography Eight Basic Steps of Photolithography
More information(Ar [ Si O Si O] m )n
The widespread adoption of advanced packaging techniques is primarily driven by electrical device performance and chip form factor considerations. Flip chip packaging is currently growing at a 27% compound
More informationA Novel Resist Freeze Process for Double Imaging
A Novel Resist Freeze Process for Double Imaging David J. Abdallah, Eric Alemy, Srinivasan Chakrapani, Munirathna Padmanaban and Ralph R. Dammel AZ Electronic Materials Somerville, NJ USA 1 st exp 2 nd
More informationWilliam Reiniach 5th Year Microelectronic Engineering Student Rochester Institute of Technology
DEVELOPMENT OF A PHOTOSENSITIVE POLYIMIDE PROCESS William Reiniach 5th Year Microelectronic Engineering Student Rochester Institute of Technology 1~BS TRACT A six step lithographic process has been developed
More informationSection 2: Lithography. Jaeger Chapter 2 Litho Reader. EE143 Ali Javey Slide 5-1
Section 2: Lithography Jaeger Chapter 2 Litho Reader EE143 Ali Javey Slide 5-1 The lithographic process EE143 Ali Javey Slide 5-2 Photolithographic Process (a) (b) (c) (d) (e) (f) (g) Substrate covered
More informationPhotoresist Absorbance and Bleaching Laboratory
MCEE 505 Lithography Materials and Processes Page 1 of 5 Photoresist Absorbance and Bleaching Laboratory Microelectronic Engineering Rochester Institute of Technology 1. OBJECTIVE The objective of this
More information(ksaligner & quintel resolution)
Process [4.10] (ksaligner & quintel resolution) 1.0 Process Summary 1.1 Since Karl Suss ksaligner is heavily used and Quintel aligner is not, nanolab decided to compare the 2 micron line resolution from
More informationSection 2: Lithography. Jaeger Chapter 2. EE143 Ali Javey Slide 5-1
Section 2: Lithography Jaeger Chapter 2 EE143 Ali Javey Slide 5-1 The lithographic process EE143 Ali Javey Slide 5-2 Photolithographic Process (a) (b) (c) (d) (e) (f) (g) Substrate covered with silicon
More informationCharacterization of a Thick Copper Pillar Bump Process
Characterization of a Thick Copper Pillar Bump Process Warren W. Flack, Ha-Ai Nguyen Ultratech, Inc. San Jose, CA 95126 Elliott Capsuto, Craig McEwen Shin-Etsu MicroSi, Inc. Phoenix, AZ 85044 Abstract
More informationDr. Dirk Meyners Prof. Wagner. Wagner / Meyners Micro / Nanosystems Technology
Micro/Nanosystems Technology Dr. Dirk Meyners Prof. Wagner 1 Outline - Lithography Overview - UV-Lithography - Resolution Enhancement Techniques - Electron Beam Lithography - Patterning with Focused Ion
More informationEE143 Fall 2016 Microfabrication Technologies. Lecture 3: Lithography Reading: Jaeger, Chap. 2
EE143 Fall 2016 Microfabrication Technologies Lecture 3: Lithography Reading: Jaeger, Chap. 2 Prof. Ming C. Wu wu@eecs.berkeley.edu 511 Sutardja Dai Hall (SDH) 1-1 The lithographic process 1-2 1 Photolithographic
More informationIntegrated Focusing Photoresist Microlenses on AlGaAs Top-Emitting VCSELs
Integrated Focusing Photoresist Microlenses on AlGaAs Top-Emitting VCSELs Andrea Kroner We present 85 nm wavelength top-emitting vertical-cavity surface-emitting lasers (VCSELs) with integrated photoresist
More informationProcesses for Flexible Electronic Systems
Processes for Flexible Electronic Systems Michael Feil Fraunhofer Institut feil@izm-m.fraunhofer.de Outline Introduction Single sheet versus reel-to-reel (R2R) Substrate materials R2R printing processes
More informationPhotolithography II ( Part 2 )
1 Photolithography II ( Part 2 ) Chapter 14 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda Saroj Kumar Patra, Department of Electronics and Telecommunication, Norwegian University of Science
More informationSoft Electronics Enabled Ergonomic Human-Computer Interaction for Swallowing Training
Supplementary Information Soft Electronics Enabled Ergonomic Human-Computer Interaction for Swallowing Training Yongkuk Lee 1,+, Benjamin Nicholls 2,+, Dong Sup Lee 1, Yanfei Chen 3, Youngjae Chun 3,4,
More informationFabrication Methodology of microlenses for stereoscopic imagers using standard CMOS process. R. P. Rocha, J. P. Carmo, and J. H.
Fabrication Methodology of microlenses for stereoscopic imagers using standard CMOS process R. P. Rocha, J. P. Carmo, and J. H. Correia Department of Industrial Electronics, University of Minho, Campus
More informationTechnology for the MEMS processing and testing environment. SUSS MicroTec AG Dr. Hans-Georg Kapitza
Technology for the MEMS processing and testing environment SUSS MicroTec AG Dr. Hans-Georg Kapitza 1 SUSS MicroTec Industrial Group Founded 1949 as Karl Süss KG GmbH&Co. in Garching/ Munich San Jose Waterbury
More informationLithography Is the Designer s Brush. Lithography is indispensible for defining locations and configurations of circuit elements/functions.
Lithography 1 Lithography Is the Designer s Brush Lithography is indispensible for defining locations and configurations of circuit elements/functions. 2 ITRS 2007 The major challenge in litho: CD, CD
More informationSurface Topography and Alignment Effects in UV-Modified Polyimide Films with Micron Size Patterns
CHINESE JOURNAL OF PHYSICS VOL. 41, NO. 2 APRIL 2003 Surface Topography and Alignment Effects in UV-Modified Polyimide Films with Micron Size Patterns Ru-Pin Pan 1, Hua-Yu Chiu 1,Yea-FengLin 1,andJ.Y.Huang
More informationWireless Metrology in Semiconductor Manufacturing
1 Wireless Metrology in Semiconductor Manufacturing Costas J. Spanos Seminar 2 Outline Historical perspective Hardware and software applications Breakthroughs that have yet to be realized Distributed control
More informationEE 143 Microfabrication Technology Fall 2014
EE 143 Microfabrication Technology Fall 2014 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 EE 143: Microfabrication
More informationA Method for Adding Ophthalmic Prescription to Augmented Reality Heads-Up Displays
Technical Disclosure Commons Defensive Publications Series November 17, 2017 A Method for Adding Ophthalmic Prescription to Augmented Reality Heads-Up Displays Yeh-Jiun Tung James Dunphy Ozan Cakmakci
More informationT in sec, I in W/cm 2, E in J/cm 2
Exposures from Mask Aligner into Resist Mask aligner images created by shadowing from mask into resist Soft contact and Proximity good for 3 micron structures Vacuum Hard Contact: no shadow effects at
More informationBI-LAYER DEEP UV RESIST SYSTEM. Mark A. Boehm 5th Year Microelectronic Engineering Student Rochester Institute of Technology ABSTRACT
INTRODUCTION BI-LAYER DEEP UV RESIST SYSTEM Mark A. Boehm 5th Year Microelectronic Engineering Student Rochester Institute of Technology ABSTRACT A portable conformable mask (PCM) system employing KTIS2O
More informationOptical Lithography. Keeho Kim Nano Team / R&D DongbuAnam Semi
Optical Lithography Keeho Kim Nano Team / R&D DongbuAnam Semi Contents Lithography = Photolithography = Optical Lithography CD : Critical Dimension Resist Pattern after Development Exposure Contents Optical
More informationA study on the fabrication method of middle size LGP using continuous micro-lenses made by LIGA reflow
Korea-Australia Rheology Journal Vol. 19, No. 3, November 2007 pp. 171-176 A study on the fabrication method of middle size LGP using continuous micro-lenses made by LIGA reflow Jong Sun Kim, Young Bae
More informationKey Photolithographic Outputs
Exposure latitude Depth of Focus Exposure latitude Vs DOF plot Linearity and MEEF Isolated-Dense Bias NILS Contrast Swing Curve Reflectivity Curve 1 Exposure latitude:the range of exposure energies (usually
More informationT in sec, I in W/cm 2, E in J/cm 2
Exposures from Mask Aligner into Resist Mask aligner images created by shadowing from mask into resist Soft contact and Proximity good for 3 micron structures Vacuum Hard Contact: no shadow effects at
More informationMICRO AND NANOPROCESSING TECHNOLOGIES
MICRO AND NANOPROCESSING TECHNOLOGIES LECTURE 4 Optical lithography Concepts and processes Lithography systems Fundamental limitations and other issues Photoresists Photolithography process Process parameter
More informationFabrication Techniques of Optical ICs
Fabrication Techniques of Optical ICs Processing Techniques Lift off Process Etching Process Patterning Techniques Photo Lithography Electron Beam Lithography Photo Resist ( Microposit MP1300) Electron
More informationT in sec, I in W/cm 2, E in J/cm 2
Exposures from Mask Aligner into Resist Mask aligner images created by shadowing from mask into resist Soft contact and Proximity good for 3 micron structures Vacuum Hard Contact: no shadow effects at
More informationAcceleration of EUV Resist Development with EB Tool
C/N:1220710068 Acceleration of Resist Development with Tool Takeyoshi Mimura, Takako Suzuki, Makiko Irie, Takeshi Iwai TOKYO OHKA KOGYO CO., LTD. Advanced Material Development Division 1 2007 L Symposium
More informationCLAIMS 1. A suspension board with circuit, characterized in that, it comprises a metal support layer, an insulating layer formed on the metal support
[19] State Intellectual Property Office of the P.R.C [51] Int. Cl 7 G11B 5/48 H05K 1/11 [12] Patent Application Publication G11B 21/16 [21] Application No.: 00133926.5 [43] Publication Date: 5.30.2001
More informationShooting for the 22nm Lithography Goal with the. Coat/Develop Track. SOKUDO Lithography Breakfast Forum 2010 July 14 (L1)
Shooting for the 22nm Lithography Goal with the Coat/Develop Track SOKUDO Lithography Breakfast Forum 2010 July 14 (L1) Three (3) different exposure options for 22nm: Public External (L1) MAPPER Lithography
More informationFabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique
Sensors and Materials, Vol. 18, No. 3 (2006) 125 130 MYU Tokyo 125 S & M 0636 Fabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique Jung-Hun Kim,
More informationForming a vertical interconnect structure using dry film processing for Fan Out Wafer Level Packaging
2017 IEEE 67th Electronic Components and Technology Conference Forming a vertical interconnect structure using dry film processing for Fan Out Wafer Level Packaging Yew Wing Leong, Hsiang Yao Hsiao, Soon
More informationFabrication of suspended micro-structures using diffsuser lithography on negative photoresist
Journal of Mechanical Science and Technology 22 (2008) 1765~1771 Journal of Mechanical Science and Technology www.springerlink.com/content/1738-494x DOI 10.1007/s12206-008-0601-8 Fabrication of suspended
More informationSensing platform based on micro-ring resonator and on-chip reference sensors in SOI
Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI S.M.C. Abdulla*, B.M. de Boer, J.M. Pozo, J.H. van den Berg, A. Abutan, R.A.J. Hagen, D.M.R. Lo Cascio, P. J. Harmsma
More informationOptimization of PMMA 950KA4 resist patterns using Electron Beam Lithography
CeNSE restricted NNFC-TN 2017/001 Technical Note CENSE-NNFC-2017/001 Issued: 03/2017 Optimization of PMMA 950KA4 resist patterns using Electron Beam Lithography Sreedhar Babu, Anita CeNSE, NNFC, Indian
More informationFabrication of micro injection mold with modified LIGA micro-lens pattern and its application to LCD-BLU
Vol. 19, No. 3, November 2007 pp. 165-169 Fabrication of micro injection mold with modified LIGA micro-lens pattern and its application to LCD-BLU Jong Sun Kim, Young Bae Ko, Chul Jin Hwang, Jong Deok
More informationDroplet Junction Chips
Unit 1, Anglian Business Park, Orchard Road, Royston, Hertfordshire, SG8 5TW, UK T: +44 (0)1763 242491 F: +44 (0)1763 246125 E: sales@dolomite-microfluidics.com W: www.dolomite-microfluidics.com Dolomite
More informationCHAPTER 2 Principle and Design
CHAPTER 2 Principle and Design The binary and gray-scale microlens will be designed and fabricated. Silicon nitride and photoresist will be taken as the material of the microlens in this thesis. The design
More informationUpdate on 193nm immersion exposure tool
Update on 193nm immersion exposure tool S. Owa, H. Nagasaka, Y. Ishii Nikon Corporation O. Hirakawa and T. Yamamoto Tokyo Electron Kyushu Ltd. January 28, 2004 Litho Forum 1 What is immersion lithography?
More informationLecture 22 Optical MEMS (4)
EEL6935 Advanced MEMS (Spring 2005) Instructor: Dr. Huikai Xie Lecture 22 Optical MEMS (4) Agenda: Refractive Optical Elements Microlenses GRIN Lenses Microprisms Reference: S. Sinzinger and J. Jahns,
More informationHeidelberg µpg 101 Laser Writer
Heidelberg µpg 101 Laser Writer Standard Operating Procedure Revision: 3.0 Last Updated: Aug.1/2012, Revised by Nathanael Sieb Overview This document will provide a detailed operation procedure of the
More informationApplication-Based Opportunities for Reused Fab Lines
Application-Based Opportunities for Reused Fab Lines Semicon China, March 17 th 2010 Keith Best Simax Lithography S I M A X A L L I A N C E P A R T N E R S Outline Market: Exciting More than Moore applications
More informationMobile Electrostatic Carrier (MEC) evaluation for a GaAs wafer backside manufacturing process
Mobile Electrostatic Carrier (MEC) evaluation for a GaAs wafer backside manufacturing process H.Stieglauer 1, J.Nösser 1, A.Miller 1, M.Lanz 1, D.Öttlin 1, G.Jonsson 1, D.Behammer 1, C.Landesberger 2,
More informationOPTOFLUIDIC ULTRAHIGH-THROUGHPUT DETECTION OF FLUORESCENT DROPS. Electronic Supplementary Information
Electronic Supplementary Material (ESI) for Lab on a Chip. This journal is The Royal Society of Chemistry 2015 OPTOFLUIDIC ULTRAHIGH-THROUGHPUT DETECTION OF FLUORESCENT DROPS Minkyu Kim 1, Ming Pan 2,
More informationMICROBUMP CREATION SYSTEM FOR ADVANCED PACKAGING APPLICATIONS
MICROBUMP CREATION SYSTEM FOR ADVANCED PACKAGING APPLICATIONS Andrew Ahr, EKC Technology, & Chester E. Balut, DuPont Electronic Technologies Alan Huffman, RTI International Abstract Today, the electronics
More information(PT-3528) Chip Ambient Light Sensor, RoHS Compliant. Token Electronics Industry Co., Ltd. Version: July 26, Web:
Version: July 26, 2017 (PT-3528) Chip Ambient Light Sensor, RoHS Compliant Token Electronics Industry Co., Ltd. Web: www.token.com.tw Email: rfq@token.com.tw Taiwan: No.137, Sec. 1, Zhongxing Rd., Wugu
More informationMicro/Nanolithography
Dale E. Ewbank dale.ewbank@rit.edu unl081413_microe.ppt 2013 Dale E. Ewbank page 1 OUTLINE Masks Optical Lithography Photoresist Sensitivity Processing Exposure Tools Advanced Processes page 2 MICROLITHOGRAPHY
More informationPhotolithography I ( Part 1 )
1 Photolithography I ( Part 1 ) Chapter 13 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda Bjørn-Ove Fimland, Department of Electronics and Telecommunication, Norwegian University of Science
More informationLZ4-00UA10. LedEngin, Inc. High Efficacy UV LED Emitter. Key Features. Typical Applications. Description
High Efficacy UV LED Emitter LZ4-UA1 Key Features High Efficacy 1W UV LED Ultra-small foot print 7.mm x 7.mm x 4.3mm Surface mount ceramic package with integrated glass lens Very low Thermal Resistance
More informationHigh Efficacy 365nm UV LED Emitter LZ1-00U600
High Efficacy 365nm UV LED Emitter LZ1-U6 Key Features High Efficacy 365nm 5W UV LED Ultra-small foot print 4.4mm x 4.4mm x 3.2mm Surface mount ceramic package with integrated glass lens Very low Thermal
More informationModule 11: Photolithography. Lecture11: Photolithography - I
Module 11: Photolithography Lecture11: Photolithography - I 1 11.0 Photolithography Fundamentals We will all agree that incredible progress is happening in the filed of electronics and computers. For example,
More informationLZ4-00D110. LedEngin, Inc. High Efficacy Dental Blue + UV LED Emitter. Key Features. Typical Applications. Description
High Efficacy Dental Blue + UV LED Emitter LZ4-D11 Key Features High Efficacy 1W Dental Blue + UV LED Three Dental Blue Dice + One UV Die Ultra-small foot print 7.mm x 7.mm x 4.3mm Surface mount ceramic
More informationDOE Project: Resist Characterization
DOE Project: Resist Characterization GOAL To achieve high resolution and adequate throughput, a photoresist must possess relatively high contrast and sensitivity to exposing radiation. The objective of
More informationUV Nanoimprint Stepper Technology: Status and Roadmap. S.V. Sreenivasan Sematech Litho Forum May 14 th, 2008
UV Nanoimprint Stepper Technology: Status and Roadmap S.V. Sreenivasan Sematech Litho Forum May 14 th, 2008 Overview Introduction Stepper technology status: Patterning and CD Control Through Etch Alignment
More informationLedEngin, Inc. High Efficacy 365nm UV LED Emitter LZ1-00U605. Key Features. Typical Applications. Description
High Efficacy 365nm UV LED Emitter LZ1-00U605 Key Features High Efficacy 365nm 5W UV LED Ultra-small foot print 4.4mm x 4.4mm x 3.2mm Surface mount ceramic package with integrated glass lens Very low Thermal
More informationKrF EXCIMER LASER LITHOGRAPHY TECHNOLOGY FOR 64MDRAM
Journa' of Photopolymer Science and Technology Volume 4, Number 3 (1991) 361-369 KrF EXCIMER LASER LITHOGRAPHY TECHNOLOGY FOR 64MDRAM MASAYUKI ENDO, YOSHIYUKI TAM, TOSHIKI YABU, SHOZO OKADA MASARU SASAGO
More informationHigh Efficacy UV LED Emitter LZ4-00UA00
High Efficacy UV LED Emitter LZ4-UA Key Features High Efficacy 1W UV LED Ultra-small foot print 7.mm x 7.mm x 4.3mm Surface mount ceramic package with integrated glass lens Very low Thermal Resistance
More informationInkjet resist inks. Krishna Balantrapu
Inkjet resist inks Krishna Balantrapu OUTLINE Conventional Vs. Inkjet-Cost Savings Inkjet Material Design Inkjet Equipment-Lunaris Future work 2 DOW-R&D DRIVERS FOR NEW PRODUCT DEVELOPMENT Technology Need
More information0603 Package Infrared LED
Technical Data Sheet 0603 Package Infrared LED MIR60363T and MIR60383T Features 0603 package Peak wavelength λp=940nm Package in 8mm tape on 7 diameter reel Compatible with infrared and vapor phase reflow
More informationUV-dose indicator formulations as paint-onphotodetectors: way to optimize the UV curing process
UV-dose indicator formulations as paint-onphotodetectors: A convenient and quantitative way to optimize the UV curing process Katia Studer, Caroline Lordelot, Tunja Jung, Kurt Dietliker, Urs Lehmann, Peter
More informationEG2605 Undergraduate Research Opportunities Program. Large Scale Nano Fabrication via Proton Lithography Using Metallic Stencils
EG2605 Undergraduate Research Opportunities Program Large Scale Nano Fabrication via Proton Lithography Using Metallic Stencils Tan Chuan Fu 1, Jeroen Anton van Kan 2, Pattabiraman Santhana Raman 2, Yao
More information3.Photolithography and resist systems
3.Photolithography and resist systems Exposure Mercury arc lamp Shadow printing projection printing Photomask Substrates Resist systems DNQ-Novolak-based Epoxy-based Polyimide based 1 Exposure Mercury
More informationInfrared wire grid polarizers: metrology, modeling, and laser damage threshold
Infrared wire grid polarizers: metrology, modeling, and laser damage threshold Matthew George, Bin Wang, Jonathon Bergquist, Rumyana Petrova, Eric Gardner Moxtek Inc. Calcon 2013 Wire Grid Polarizer (WGP)
More information