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1 Copyright 2017 Transfer Office School of Electrical and Computer Engineering, College of Engineering, University of Tehran. Design by M.M. Mahdizade All rights reserved. This book or any portion thereof may not be reproduced or used in any manner whatsoever without the express written permission of the publisher except for the use of brief quotations in a book review. 1 st edition, Summer 2017 Transfer Office (TTO), School of Electrical and Computer Engineering, College of Engineering, University of Tehran, North Kargar st., Tehran, Iran. P.O.Box: Tel: +98 (21) Fax: +98 (21) tto.ece@ece.ut.ac.ir Web: Page 1 School of ECE, University of Tehran

2 Digital Systems Learning Systems, Robotics, & Control Software BioMedical School of ECE School of ECE Information Electronics Power

3 Electronic Devices Lithium Ion Batteries Supplying energy for electronic devices, transportation, industrial, and home appliance Fabrication of Li-ion batteries using nano/micro structures in anode, cathode or separator. These structures can result in significant improvement in the battery performance. Page 3 School of ECE, University of Tehran

4 Electronic Devices Microfluidic Device for Size-based Separation Size-based cell separation in microfluidic channels This lab on chip separates cells based on cell size and interaction between cells and microfluidic chip walls. Each specific size cells is then introduced to a specific microchannel. School of ECE, University of Tehran Page 4

5 Electronic Devices Miniaturized Sensors Nanoelectronics Pressure sensors Bio-sensors A high sensitivity sensor based on arrays of carbon nanotubes, which can be used for acceleration and pressure sensing. The use of branched carbon nanotubes would lead to a high sensitivity over a suspended bridge. Page 5 School of ECE, University of Tehran

6 Electronic Devices Ion-Sensitive Transistors Bio-sensors ph sensors This is a high sensitivity ion selective transistor based on grass nanostructures. The presence of tiny nanostructures results in higher extension of diffuse layer and subsequently higher sensitivity. School of ECE, University of Tehran Page 6

7 Electronic Devices Three Dimensional MEMS Structures Nanoelectronics Pressure sensors MEMS These are three dimensional features on silicon and silicon based materials, which have unique properties for MEMS applications. They can also be used as a holder for electrochromic materials in future display applications. Page 7 School of ECE, University of Tehran

8 Electronic Devices Diffusion Furnace Dry oxidation with O2, N2 Phosphor diffusion with POCl3, N2, O2 Boron diffusion with BBr3, N2, O2 o Temperatures up to 1100 C o Set up for more than 100 Wafers (4") o o High uniformity The recipes can be modified to generate new recipes for different structures School of ECE, University of Tehran Page 8

9 Electronic Devices Sheet Resistance Scan P/N determination Emitter sheet resistance mapping using 4-point probe method Uniformity determination o o Sample material: multi crystalline and mono crystalline silicon Sample shape: square, semi-square, rectangle, circle Page 9 School of ECE, University of Tehran

10 Electronic Devices Lifetime Measurement Data output is in the form of color maps Detect crystal defects Detect impurities due to heavy metal and transition metal contaminations o o Measuring lifetime via microwave photoconductive decay (microwave PCD or µ- PCD) technique Sample shape: square, semi-square, rectangle, circle o Uniformity determination School of ECE, University of Tehran Page 10

11 Electronic Devices Electrochemical Capacitance-Voltage Profiling Monitor the doping concentration (depth resolution: 1nm) Monitor the concentration of electrically activated dopants Monitor the doping type (n or p) o o o Sample shape: square, semi-square, rectangle, circle Sample material: multi crystalline and mono crystalline silicon Concentration resolution: < 1012 cm-3 to > 1021 cm-3 o Depth resolution: 1 nm to 100 µm Page 11 School of ECE, University of Tehran

12 Electronic Devices CORESCAN Surface mapping of contact resistance between the emitter and the metallization grid of solar cells Other mappings: shunt resistance, short circuit current (LBIC), and open circuit voltage (V OC ) Sample shape: Square, rectangle, and circle solar cells with maximum 5 Bus-bars School of ECE, University of Tehran Page 12

13 Electronic Devices Plasma-Enhanced Chemical Vapor Deposition Deposit poly silicon Deposit silicon dioxide Deposit silicon nitride o o PECVD is a process to deposit thin films in different ranges of pressure, temperature, gas flow and power The thickness can vary from 10nm to 2µm Page 13 School of ECE, University of Tehran

14 Electronic Devices Fourier Transform Infrared Spectroscopy Determination of compounds in silicon nitride films Non-destructive analysis A simple way to evaluate semiconductor materials o Sample material: thin film layers o High-speed data collection o High precision and accuracy School of ECE, University of Tehran Page 14

15 Electronic Devices Silk Print To create front and back contact of solar cells Two high precision free stand screen/stencil printing machine on large areas Screen printing is a printing technique whereby a mesh is used to transfer ink onto a substrate with high precision print head Page 15 School of ECE, University of Tehran

16 Electronic Devices Spectral Response A spectral response/qe/ipce system Extracting solar cell parameters including V OC, I SC, J SC, V max, I max, P max, and efficiency Characterizes different types of solar cells, including: Mono-crystalline Silicon solar cells (Si), Multi-crystalline Silicon solar cells (mcsi), Amorphous Silicon solar cells (asi), Gallium Arsenide solar cells (GaAs), Cadmium Telluride solar cells (CdTe), Dye sensitized solar cells (DSSC), Organic solar cells, Multijunction solar cells. School of ECE, University of Tehran Page 16

17 Electronic Devices I-V Measurement Current Voltage (I-V) measurement Extracting solar cell parameters including V OC, I SC, J SC, V max, I max, P max, and efficiency o o I-V measurement for mono-crystalline silicon solar cells (Si) I-V measurement for multi-crystalline silicon solar cells (mcsi) Page 17 School of ECE, University of Tehran

18 Electronic Devices Laser Cutter Laser cutting all kinds of silicon wafers, aluminum, glass, o o o o A technology that uses a laser to cut material High speed and precision cutting Wavelength: 1064 nm Maximum sample size: mm o Minimum cut width: 0.15 mm School of ECE, University of Tehran Page 18

19 Electronic Devices Ellipsometry Non destructive analysis Measure the refractive index and the thickness of semi-transparent thin films o o An optical technique for investigating dielectric properties (complex refractive index or dielectric function) of thin films Uniformity determination o Measure films, such as silicon oxides, nitrides, and photoresists Page 19 School of ECE, University of Tehran

20 Electronic Devices I-V and C-V Measurements I-V characteristics C-V characteristics o o Measuring device characteristics at currents from 10fA to 3A and voltages from 10µV to 1100V Programmable voltage and current output sweeps for fixed and linear stair pulses School of ECE, University of Tehran Page 20

21 Electronic Devices RF Sputtering Deposit thin films, including Au, Ti, Pt, ZnO, AZO (2%), Al, Al 2 O 3, Ni, Cu, Ag, ITO, Si, Si 3 N 4, SiO, Mo, TiO 2, NiO o o A technique that is used to create thin films Layer thicknesses are controlled by changing the sputtering time and power Page 21 School of ECE, University of Tehran

22 Electronic Devices Low Pressure Chemical Vapour Deposition Electronic fabrication Nano-technology Hard coating This is an important unit in fabrication of micro and nano electronic devices. It is a deposition reactor with great ability to control gas flows and pressure and temperature of reactor. Various layers as polysilicon, Silicon Nitride, Silicon oxides and nano-wires can be grown in this reactor. School of ECE, University of Tehran Page 22

23 Electronic Devices Plasma Enhanced Chemical Vapor Deposition Nanoelectronics Pressure sensors Bio-sensors This is a unit suitable for the growth of carbon nanotubes and nanofibers as well as graphene and various 2-D materials. The high control over the growth parameters makes this unit a favorable addition to any research institute. Page 23 School of ECE, University of Tehran

24 Electronic Devices Deep Reactive Ion Etching Nanoelectronics Pressure sensors Bio-sensors This is a unique facility to realize complex micro and nano electronic devices. By proper adjusting the gases and radio-frequency plasma, one is able to arrive at various exciting features for ion transport, MEMS devices and transistor fabrication. School of ECE, University of Tehran Page 24

25 Electronic Devices Low-Cost, Active, Paper-Based Lab-on-Chip Point-of-care test devices Medical tests in developing world Biosecurity Developing very low-cost technologies to fabricate lab-on-chip systems on paper substrate; including digital and channel based microfluidics, embedded sensors and actuators. Page 25 School of ECE, University of Tehran

26 Digital Systems Learning Systems, Robotics, & Control Software BioMedical School of ECE School of ECE Information Electronics Power

27 Electronics Terahertz Photoconductive Antenna Ultra fast imaging Security Material spectroscopy Terahertz PCAs (THz emitters/detectors) have been fabricated on LT-GaAs substrates. This product can generate 1 Thz frequency with power spectrum level of ~- 20db. Page 27 School of ECE, University of Tehran

28 Electronics Full Duplex Optical Transceiver Communications Infrastructures Dispatching house data communications High speed optical servers This is a full duplex optical communication system, which converts two optical-fiber communication systems to a single one. The system is reliable, durable and duplex the communication capacity. School of ECE, University of Tehran Page 28

29 Electronics Phase Array Transceiver Module Radars A 4-channel miniaturized X-band transceiver with independent and simultaneous operation, using die wire bonding. Page 29 School of ECE, University of Tehran

30 Electronics Low Noise High Frequency Amplifiers Transceivers Many industrial and commercial applications LNAs with wide frequency band of GHz and a variety of customized specifications. School of ECE, University of Tehran Page 30

31 Electronics Microwave, L and S Band Power Amplifiers Wireless communications Satellite communications Commercial RADAR (Weather RADAR, automobile, air traffic control, ) High power, reliable, and wide-band power amplifiers with adjustable parameters. Page 31 School of ECE, University of Tehran

32 Electronics Signal Generator R&D centres and educational university labs Part of many electronic systems Design and production of a signal generator with given specifications: Frequency in the range of 54MHz-13.6GHz With low phase noise, low power consumption, and high resolution School of ECE, University of Tehran Page 32

33 Electronics SAW-Based Radio Sensor Systems for Short-Range To measure physical parameters: Pressure Humidity Temperature Buildings vibrations to detect problems or monitor life time Structural safety in satellites/spacecrafts Wireless measurement of different physical parameters using a passive sensor (batteryless) for non/hard accessible places, like inside the tire or industrial tanks, etc. The system consists of a readout sub-system employing EM waves and a SAW-based sensor. Page 33 School of ECE, University of Tehran

34 Electronics Analysis, Design & Fabrication of Secure and Immunized Electronic Systems Secure and immune electronic systems for EMI/EMC The circuit/field analysis, measurement, and evaluation of electromagnetic susceptibility of electronic systems and proposing immune design solutions for EM protection. School of ECE, University of Tehran Page 34

35 Electronics Anechoic Test Chamber Antenna production industry Testing antennas output power for L, S, and X bands. Page 35 School of ECE, University of Tehran

36 Electronics Portable Spectrum Analyser R&D centres and educational university labs Part of many systems Spectrum analyser with operational frequencies up to 12GHz. Designed in three types: PCB, external module, and desktop equipment. School of ECE, University of Tehran Page 36

37 Electronics Instantaneous Frequency Measurement Electronic intelligence systems This is an instant frequency measurement (IFM) system, which is used for rapid detection, recognition, and characterization of signals. It benefits from very accurate and optimized filters, and precise digital system design. Page 37 School of ECE, University of Tehran

38 Electronics PSR-24x - Surveillance Radar Parameters Maximum Range Frequency Band Beamwidth-Azimuth Beamwidth-Elevation Wave Form Field of view Scan Rotation Rate Resolution Bandwidth Target Velocity Interface Supply Voltage Power Consumption Weight Environmental Operating Temperature PSR-24x Vehicle: Up to 2000m/Man: Up to 800m K Band 1 3 FMCW rpm 1m 8Mb/s 0-50m/s 10/100 Mb/s Ethernet V AC 24V DC 25Watts 15Kg IP67-20 C to + 60 C Radar threat detection Situation awareness for wide areas Perimeter security The PSR-24x is a compact, 360 scanning radar sensor that is designed for surveillance solution in combination with CCTV and intelligent software to provide unrivalled threat detection. School of ECE, University of Tehran Page 38

39 Electronics Jammer Generation of jamming signals for: Conference and meeting rooms Protected areas The product generates different jammer signals with adjustable parameters, including the centre frequency and bandwidth. The system can block signals in a wide bandwidth. Page 39 School of ECE, University of Tehran

40 Electronics High Frequency Scanning Imaging System Security and stand-off detection of threats This product is a millimetre-wave imager for stand-off detection of concealed object in the body. School of ECE, University of Tehran Page 40

41 Electronics Distributed Optical Fiber Sensor Pipeline monitoring Transportation industries Security Border protection This is a system for measurement of temperature, strain, and vibration along an optical fiber by detection and processing of the Raman, Brillouin, and Rayleigh scattering inside the fiber. Page 41 School of ECE, University of Tehran

42 Electronics Nano-Distance Measurement Nanopositioner Non-contact metrology Real-time high-precision measurements This is an optical distance measurement system, with nano-metric precision. School of ECE, University of Tehran Page 42

43 Electronics Altimeter Tester Mass production of altimeter system A user friendly tester to perform full functional test and troubleshooting of the whole system of an altimeter and all its parts, including PCB modules and active devices. The test procedure can be done automaticly or manually. Page 43 School of ECE, University of Tehran

44 Electronics Magnetic Sensor Detection System Security systems This is a system for automatic detection of the position, motion, and size of any metal object in the range of its network. School of ECE, University of Tehran Page 44

45 Electronics Far Field Gonio-Photometer Type C-ɤ Determination of the light distribution curve for luminaires This setup includes a rotating robot, a mobile robot with a lux-meter on top of it, which measures luminous intensity for luminaires. Page 45 School of ECE, University of Tehran

46 Electronics Gonio-Photometer Type B Luminous intensity metering of different sources, such as traffic lights The Luminous intensity metering system includes a metallic structure which has two degrees of freedom, a lux-meter sensor for measuring luminous intensity in different angles, and a signal processing software. School of ECE, University of Tehran Page 46

47 Electronics Ultraviolet-Visible Spectroscopy Material spectroscopy The UV-Vis spectroscope (Wavelength range: 200 to 800 nm) is capable of measuring absorption spectroscopy or reflectance spectroscopy in the ultravioletvisible spectral region. Page 47 School of ECE, University of Tehran

48 Electronics Hand Held Body Scanner Security Quick scanning The Hand Held Body Scanner provides an easy and fast way to scan the object using RF frequencies. It is easy to use and selfreliable. It may be used for security in airports, infrastructures, and similar places. School of ECE, University of Tehran Page 48

49 Electronics Lab-on-a-phone Colorometry Detection of Hg ions Water Inspection The Colorometry lab-on-a-phone system provides an easy and cheap way to measure the concentration of mercury and other heavy metal ions in water. It is a fast and easy way to test the health of the water. Page 49 School of ECE, University of Tehran

50 Electronics Fourier Transform Infrared High resolution material spectroscopy Electrical characterization Fourier transform infrared (FTIR) spectroscopy provides an effective way to obtain an infrared spectrum (1-25 m) of absorption or emission of a solid, liquid or gas. School of ECE, University of Tehran Page 50

51 Electronics Routers and Switches Data communication Cooperation offices High capacity routers and switches, from 20 to 640 Gbps (Giga bit per second), with all standard services, and supporting voice and data. Page 51 School of ECE, University of Tehran

52 Electronics ANN-Based CAD Tool Modelling and simulation of nonlinear circuits, with the help of computer clusters This is a CAD tool for simulation of circuits and systems based on neural network (ANN). Also, it can generate HSpice netlist from the developed CAD tool (Matlab). School of ECE, University of Tehran Page 52

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