Nanotechnology, the infrastructure, and IBM s research projects

Transcription

1 Nanotechnology, the infrastructure, and IBM s research projects Dr. Paul Seidler Coordinator Nanotechnology Center, IBM Research - Zurich Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100 nanometers, where unique phenomena enable novel applications. 2 1

2 3 Invented by two IBM scientists in Zurich in 1981, the STM opened the world of nanoscience years ago IBM scientist Don Eigler demonstrated the ability to build structures at the atomic level by spelling out "I-B-M" with individual xenon atoms 4 2

3 Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100 nanometers, where unique phenomena enable novel applications. Fe atom corral Melting point of gold Melting point: 1064 C Source: K.J. Klabunde, 2001 Integrated circuits Displays Hard-disk drives 5 The scale of things nanometers and more Things natural Ant ~5 mm Dust mite ~200 m Human hair ~ m Micro world Red blood cells ~7-8 m Virus nm Ø DNA nm Ø Nano world Silicon atoms spacing nm 10-2 m 10-3 m 10-4 m 10-5 m 10-6 m 10-7 m 10-8 m 10-9 m m 1 cm 10 mm Microwave 0.1 mm 100 m 0.01 mm 10 m Infrared Visible 0.1 m 1,000 nanometers 100 nm = 1 micrometer ( m) Ultraviolet 0.01 m 10 nm Soft x-ray 0.1 nm 1 nanometer (nm) Quantum corral ~14 nm Ø Head of a pin ~1-2 mm Ø Pollen grain Red blood cells Things manmade Micro-Electro-Mechanical (MEMS) devices ~ m CMOS transistor gate ~35 nm Source: 6 Nanotube electrode Carbon buckyball ~1 nm Ø Carbon nanotube ~1.3 nm Ø 3

4 Nano everywhere Sensors Anti-stick coatings Scratch-resistant paints Optical communication Regenerative medicine Photovoltaics Self-cleaning paints and textiles Nano- Pore DN A DNA sequencing Filtration and purification 7 The infrastructure Leading-edge science requires a leading-edge infrastructure at the Binnig and Rohrer Nanotechnology Center industry and academia are creating it together. Nanotechnology Center Cleanroom ~ 950 m 2 Noise-free laboratories Off-line labs and offices Total floor space ~ m 2 8 4

5 Cleanroom processes/equipment Tools/process sectors - Lithography - Pattern definition - Wet processing - Substrate cleaning, wet chemical etching - Thin film deposition - Metals, isolators,... - Dry etching - Material removal using (reactive) gases - Thermal processing - Oxidation, annealing, vapor phase deposition - Metrology/inspection - Optical and electron microscopes, surface topology - Thickness measurements,... - Backend - Plating, lapping/polishing, dicing, bonding - IBM sector - Polymer waveguide processing for optical interconnects A user facility Cleanroom class 100/1000 No fixed wafer size Flexibility is important 9 Ground floor: cleanroom with separate partner entrance Entrance ETH / 3 rd parties Entrance IBM Connection to existing IBM buildings 10 5

6 Ultra-stable noise-free laboratories Sonntagszeitung Goals: Mechanical vibrations: 0.5 um/s (x,y), 5 nm/s (z) below 16 Hz Acoustic noise: <50 dbc (<55 dbc / f>100hz) Electromagnetic fields: B < 5 nt Temperature: 0.1 C/h Measures: Passive mechanical damping, f>2hz Active mechanical damping, f= Hz Passive EM shielding (Faraday cage), 20 nt Helmholtz coils with active compensation for B<20 nt 11 What kind of research are we doing? 12 6

7 Information processing and storage Nanoelectronics Beyond charged-based logic Materials for future CMOS transistors Spintronics Semiconductor nanowires Molecular electronics Storage-class memory Carbon-based devices Quantum devices 13 Semiconducting nanowires for field-effect transistors Ideal electrostatic geometry Low power consumption due to sharp switching Material combinations not possible in planar devices InAs Nanowires on Si 14 InAs/Si Nanowire Tunnel FET 7

8 Photonics for data communication Optical interconnects Integrated Si photonics New materials/devices Optics to the carrier CARRIER BOARD THERMAL LID CHIP FLEX OE-SUB- ASSEMBLY MT-CONN. FI Modulators V a c V b Photonic bandgap structures Polymer waveguides Switches All optical switches Passively-aligned optical connectors (De-)Multiplexing Non-linear materials 15 Photonics vision: >1 TFLOP on a 3-D chip Optical I/O On-chip optical traffic Photonic plane Memory plane Logic plane Optical switch network Photonic layer not only connects various cores, but also routes the traffic Modulation Switching Detection V b (De-)Multiplexing Generation V ac PIN Modulator Coupled Ring Resonators Ge Photodiode Cascaded Mach-Zehnder splitter Second-order 2D photonic crystal 16 8