IGC II Integrated Gas Components Substrates, Manifolds, Mounting Components, and Assembly Hardware
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1 IGC II Integrated Gas Components Substrates, s, Mounting Components, ssembly Hardware IGC II Series. in. (. mm) c-ring modular design Compact footprint minimizes space requirements Lightweight, easy-to-assemble components
2 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Contents Technical Data The IGC II System Substrate Channels Substrate Components Connectors Substrate End Connectors Mass Flow Controller Connectors Jumper Tube Connectors Spacer Connectors Drop-Down Connector Plugs Channels Components Tee Connectors Elbow-to-Elbow Elbow-to-Female H Type VCR Fitting Elbow-to-Male H Type VCR Fitting Elbow-to-Butt Weld Female H Type VCR-to-Female H Type VCR Fitting Female H Type VCR-to-Male H Type VCR Fitting Female H Type VCR-to-Butt Weld Male H Type VCR-to-Male H Type VCR Fitting Male H Type VCR-to-Butt Weld Butt Weld-to-Butt Weld Parallel Channels Parallel Components Jumper Tube Connectors Caps Conversion Plate Support Blocks ssembly Hardware Technical Data Service Ratings Pressure rating: 000 psig (0 bar) at 0 F ( C) for substrate components Temperature rating: 0 C ( F) operating; 0 C (0 F) bakeout. Materials of Construction flow components: L VIM/VR stainless steel Non-wetted components: aluminum (hard-coat anodized, alloy 0-T), stainless steel (, 0, alloy ), plastic (polyethersulfone) Surface Finish components: electropolished µin. (0. µm) R a avg Cleaning Processing components: Swagelok Ultrahigh-Purity Process Specification (SC-0)
3 The IGC II System IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware typical IGC II system consists of three layers a substrate assembly, a assembly, mounting components. The substrate assemblies are combined to form the conduit for the process gas can be customized for any flow configuration. The IGC II system is assembled with simple mounting components stard hardware. The IGC II system accepts any. in. (. mm) c-ring surface mount component. See Swagelok Modular Components Seals catalog for details. The Swagelok IGC II System Configurator is available on CD-ROM software to simplify the layout, selection, ordering of IGC II components. Substrate ssembly The assembly provides the flow path for the process gas through the gas stick. The substrate assembly consists of a substrate channel a variety of drop-in flow components. The substrate channels are available in a variety of lengths to accommodate up to surface-mount components. See pages through for ordering numbers. Substrate channel Flow components ssembly The assembly provides the flow path between two or more parallel gas sticks. The assembly consists of a channel a variety of drop-in flow components. The channels are available in a variety of lengths to accommodate up to 0 parallel gas sticks. Optional parallel assemblies are available to provide an additional flow path parallel to the gas stick. See pages through for ordering numbers. Flow component channel Substrate- ssembly The substrate assembly bolts over the assembly. c-ring gasket assembly (not visible) provides a leak-tight seal between the substrate component the below. The substrate- assembly accepts any. in. (. mm) c-ring surface mount component. Substrate assembly Mounting Components Caps foot block bolts to each end of the gas stick, providing panel-mount capability. support block provides mid-line support for longer gas sticks. conversion plate provides the mounting capacity for a mass flow controller. cap is available to cover an unused position on a substrate or. tube port is available to provide a / inch vertical tube port on a or substrate. See pages for ordering numbers. assembly Foot Cap Support Conversion plate
4 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Substrate Channels Dimensions, in inches (millimeters), are for reference only are subject to change. Ordering Number -IG-SB-0.0 (.0) -IG-SB-0. (0) -IG-SB-0. () -IG-SB-0.9 () -IG-SB-0. () -IG-SB-0 0. (9) -IG-SB-0. (00) -IG-SB-0. () 9 -IG-SB-09. () 0 -IG-SB-0. () -IG-SB-.9 () -IG-SB- 9. (9) -IG-SB-.0 () -IG-SB-. () 0. (.). (.) or Typical -port surface mount. (.9) Port Descriptions for Substrate Components or Bottom View of Components Typical -port surface mount From left to right: Port corresponds to the connection port on the first surface mount component. Port corresponds to the connection port on the second surface mount component. Substrate Components Connectors Description Cutaway Port Port Dimensions, B Port B Port Surface rea 0. (.) LVV-IG-WS-SHSH. (.0) 0.9 (.) 0.9 (.) 0.0 (0.) LVV-IG-WS-SHLG 0. (.) 0.09 (0.) LVV-IG-WS-SHDT. (.9). (.). (.) 0.0 (0.9) LVV-IG-WS-SHDE. (.) 0.0 (0.) LVV-IG-WS-LGLG.0 (.) 0.0 (0.) LVV-IG-WS-LGDT. (.) 0.0 (.0) LVV-IG-WS-LGDE. (.) 0.00 (0.9) LVV-IG-WS-DTDT LVV-IG-WS-DTDE. (.). (.9). (0.). (0.) 0.0 (.) 0.0 (.) LVV-IG-WS-DEDE. (0.) 0.0 (.)
5 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Substrate Components Dimensions, in inches (millimeters), are for reference only are subject to change. Port B Port Substrate End Connectors 0. (.) Cutaway Description Port Port Dimensions, B Surface rea LVV-IG-WS-SHVM. (.). (.9). (.) 0.09 (0.9) LVV-IG-WS-LGVM. (9.) 0.0 (.) / in. male VCR fitting LVV-IG-WS-DTVM LVV-IG-WS-DEVM. (.). (.).0 (.). (.) 0.0 (.) 0.00 (.) Stard LVV-IG-WS-VMM. (9.9). (.). (9.9) 0.00 (.) Compact LVV-IG-WS-VMMB.0 (.0). (.). (0.) 0.0 (.) LVV-IG-WS-SHVF. (.). (.9). (.) 0.09 (0.9) LVV-IG-WS-LGVF. (9.) 0.0 (.) / in. female VCR fitting LVV-IG-WS-DTVF LVV-IG-WS-DEVF. (.). (.).0 (.). (.) 0.0 (.) 0.00 (.) Stard LVV-IG-WS-VFM. (9.9). (.). (9.9) 0.00 (.) Compact LVV-IG-WS-VFMB.0 (.0). (.). (0.) 0.0 (.) LVV-IG-WS-SHEC. (.). (.) 0. (.) 0.0 (0.) LVV-IG-WS-LGEC.0 (.) 0.0 (0.) / 0.0 in. butt weld LVV-IG-WS-DTEC LVV-IG-WS-DEEC. (.). (.). (.) 0.0 (0.99).0 (.) 0.09 (0.9) Stard LVV-IG-WS-ECM. (.9). (.).0 (.9) 0.0 (0.9) Compact LVV-IG-WS-ECMB. (.0).9 (0.). (.) 0.0 (0.9)
6 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Substrate Components Dimensions, in inches (millimeters), are for reference only are subject to change. Port B Port Mass Flow Controller Connectors 0. (.) Description Cutaway Port Port Dimensions, B Surface rea LVV-IG-WS-SHM. (.) 0.9 (.9) 0.9 (.9) 0.0 (0.) LVV-IG-WS-LGM.0 (.) 0.00 (0.) Stard LVV-IG-WS-DTM. (0.). (.). (9.) 0.0 (.) LVV-IG-WS-DEM.9 (.9) 0.0 (.0) Stard LVV-IG-WS-MM. (.) 0.9 (.). (.) 0.0 (0.) Compact LVV-IG-WS-MMB. (0.). (0.).0 (.) 0.09 (0.9) LVV-IG-WS-SHMB. (.). (0.0).0 (.) 0.0 (0.) LVV-IG-WS-LGMB. (.9) 0.0 (0.9) Compact LVV-IG-WS-DTMB. (.).9 (.). (0.0) 0.0 (.) LVV-IG-WS-DEMB. (9.) 0.09 (.) Compact LVV-IG-WS-MBMB. (.). (.). (9.) 0.0 (.) Port B Port Jumper Tube Connectors Dimensions, Surface rea Skipped B LVV-IG-WS-SHTB0LG LVV-IG-WS-SHTB0LG LVV-IG-WS-SHTB0LG.0 (.).9 (). (). (0.). (09). (). (.).9 (.). (.) 0.0 (.) 0. (.9) 0. (.) LVV-IG-WS-SHTB0LG. (9). (). (.9) 0.0 (.) LVV-IG-WS-SHTB0LG 9. (). ().9 (.) 0. (.) LVV-IG-WS-SHTB0LG 0. () 0. ().0 (9.0) 0. (.) LVV-IG-WS-SHTB0LG. (0).9 (0).9 (.) 0. (.) LVV-IG-WS-SHTB0LG. (0). (). (0.) 0. (.) 9 LVV-IG-WS-SHTB09LG. (9).0 (). (.) 0.9 (.) 0 LVV-IG-WS-SHTB00LG. (). (9) 9. (.) 0. (.0) 0. (.)
7 Substrate Components Spacer Connectors IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Dimensions, in inches (millimeters), are for reference only are subject to change. Cutaway Description Port Port Port. (.) Dimensions, B Surface rea B Port 0. (.) LVV-IG-WS-SHTSH. (9.9). (.).0 (0.) 0.0 (.) LVV-IG-WS-SHTLG.0 (.). (.9). (.) 0.00 (.) Drop-down Connector Plugs Cutaway Description Surface rea Drop-down connector for substrate-to- connection LVV-IG-WC-DD 0. (.) 0.9 (.) 0.0 (0.) Plug for port with a substrate component above LVV-IG-WC-PG 0.0 (.) 0.00 (0.9) Plug for port with no substrate component above LVV-IG-WC-DP 0. (.) 0.00 (0.9) Channels Ordering Number.0 (0.) -IG-MB-0. (.) -IG-MB-0. (.) -IG-MB-0. () -IG-MB-0. () -IG-MB-0.0 (0) -IG-MB-0 9. () -IG-MB-0. () -IG-MB-0.9 () 9 -IG-MB-09. () 0 -IG-MB-0. (09) 0.0 (0.). (.) Components Tee Connectors.0 (0.) 0. (.9) Elbow-to-Elbow Surface rea Skipped LVV-IG-MS-MEME.0 (.).9 (0.) 0.0 (.) LVV-IG-MS-MEMT0ME. (9.). (0.) 0. (.) LVV-IG-MS-MEMT0ME. (). (0.) 0. (.) LVV-IG-MS-MEMT0ME. (). (0.) 0. (.) LVV-IG-MS-MEMT0ME. (). (0.) 0. (9.) LVV-IG-MS-MEMT0ME 0.0 () 9.0 (0.0) 0.0 (.) LVV-IG-MS-MEMT0ME. (9) 0.9 (0.0) 0. (.) 9 LVV-IG-MS-MEMT0ME. (). (0.0) 0.9 (.) 0 LVV-IG-MS-MEMT0ME. ().9 (9.9).0 (.) 0. (.)
8 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Components Tee Connectors Dimensions, in inches (millimeters), are for reference only are subject to change. 0. (.).0 (0.).0 (.) Elbow-to-Female H Type VCR Fitting Surface rea LVV-IG-MS-MEMF. (.9). (.0) 0. (.0) LVV-IG-MS-MEMT0MF.9 (99.). (.0) 0. (.0) LVV-IG-MS-MEMT0MF. (0).9 (.9) 0. (.9) LVV-IG-MS-MEMT0MF. ().9 (.) 0. (.9) LVV-IG-MS-MEMT0MF. ().0 (.) 0.0 (9.) LVV-IG-MS-MEMT0MF 0. () 9. (.) 0. (.) LVV-IG-MS-MEMT0MF.9 (0). (.) 0. (.) LVV-IG-MS-MEMT0MF. (). (.) 0.9 (.) 9 LVV-IG-MS-MEMT0MF. (). (9.9).0 (.) 0 LVV-IG-MS-MEMT09MF. (). (0).9 (9.) 0. (.9) 0. (.) 0. (.).0 (0.).0 (.) Elbow-to-Male H Type VCR Fitting Surface rea 0. (.9) 0. (.) LVV-IG-MS-MEMM. (.9). (.0) 0. (.0) LVV-IG-MS-MEMT0MM.9 (99.). (.0) 0. (.0) LVV-IG-MS-MEMT0MM. (0).9 (.9) 0. (.9) LVV-IG-MS-MEMT0MM. ().9 (.) 0. (.9) LVV-IG-MS-MEMT0MM. ().0 (.) 0.0 (9.) LVV-IG-MS-MEMT0MM 0. () 9. (.) 0. (.) LVV-IG-MS-MEMT0MM.9 (0). (.) 0. (.) LVV-IG-MS-MEMT0MM. (). (.) 0.9 (.) 9 LVV-IG-MS-MEMT0MM. (). (9.).0 (.) 0 LVV-IG-MS-MEMT09MM. (). (0).9 (9.) 0. (.).0 (0.) 0. (0.) 0. (.9) Elbow-to-Butt Weld Surface rea 0. (9.) LVV-IG-MS-MEMC.0 (.9) 0.0 (.) 0.0 (0.) LVV-IG-MS-MEMT0MC. (.). (.) 0. (.) LVV-IG-MS-MEMT0MC. (0). (.) 0.9 (.) LVV-IG-MS-MEMT0MC. (). (.0) 0. (.) LVV-IG-MS-MEMT0MC. ().9 (.0) 0. (.) LVV-IG-MS-MEMT0MC 9.0 (9). (.9) 0. (0.) LVV-IG-MS-MEMT0MC 0. (9) 0. (.9) 0. (.) LVV-IG-MS-MEMT0MC. (0). (.) 0. (.) 9 LVV-IG-MS-MEMT0MC. (0). (.).00 (.) 0 LVV-IG-MS-MEMT09MC. (9). (9.). (.)
9 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware 9 Components Tee Connectors Dimensions, in inches (millimeters), are for reference only are subject to change. Female H Type VCR-to-Female H Type VCR Fitting Surface rea 0. (.) LVV-IG-MS-MFMT0MF. (0). (.) 0. (.) LVV-IG-MS-MFMT0MF. (). (.) 0. (.) LVV-IG-MS-MFMT0MF. ().0 (.) 0.0 (.) LVV-IG-MS-MFMT0MF 9.0 (9). (.9) 0. (0.) LVV-IG-MS-MFMT0MF 0. (9) 9.9 (.9) 0. (.) LVV-IG-MS-MFMT0MF. (0). (.0) 0. (.) LVV-IG-MS-MFMT0MF. (0).0 (.) 0.9 (.) LVV-IG-MS-MFMT0MF. (9). (9.).0 (.0) LVV-IG-MS-MFMT09MF.0 (). (0). (0.0) 0 LVV-IG-MS-MFMT0MF. (). (). (.0).0 (0.).0 (.) 0. (.9) 0. (.) 0. (.).0 (0.).0 (.) Female H Type VCR-to-Male H Type VCR Fitting 0. (.9) 0. (.) LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM LVV-IG-MS-MFMT0MM. (0). (). () 9.0 (9) 0. (9). (0). (0) Surface rea. (.). (.).0 (.). (.9) 9.9 (.9). (.0).0 (.) 0. (.) 0. (.) 0.0 (.) 0. (0.) 0. (.) 0. (.) 0.9 (.). (9). (9.).0 (.0) 9 LVV-IG-MS-MFMT09MM.0 (). (0). (0.0) 0 LVV-IG-MS-MFMT0MM. (). (). (.0) 0. (.).0 (.).0 (0.) 0. (0.) 0. (.) Female H Type VCR Fitting-to-Butt Weld LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC LVV-IG-MS-MFMT0MC.9 (.9). (). (). (9) 9. () 0.9 (). () Surface rea.0 (.0). (.). (.).9 (.). (.). (.) 0. (.) 0.0 (.) 0.9 (.) 0. (.0) 0. (.00) 0. (.9) 0. (0.9) 0. (.). (). (.) 0.90 (.) 0. (9.) 0. (.9) 9 LVV-IG-MS-MFMT09MC. (99). (.).0 (.) 0 LVV-IG-MS-MFMT0MC. (9).9 (9.). (.)
10 0 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Components Tee Connectors Dimensions, in inches (millimeters), are for reference only are subject to change. Male H Type VCR-to-Male H Type VCR Fitting LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM LVV-IG-MS-MMMT0MM. (0). (). () 9.0 (9) 0. (9). (0). (0) Surface rea. (.). (.).0 (.). (.9) 9.9 (.9). (.0).0 (.) 0. (.) 0. (.) 0. (.) 0.0 (.) 0. (0.) 0. (.) 0. (.) 0.9 (.). (9). (9.).0 (.0).0 (0.).0 (.) 0. (.9) 0. (.) 9 LVV-IG-MS-MMMT09MM.0 (). (0). (0.0) 0 LVV-IG-MS-MMMT0MM. (). (). (.0) 0. (.).0 (.).0 (0.) 0. (.) 0. (0.) 0. (9.) Male H Type VCR Fitting-to-Butt Weld Surface rea LVV-IG-MS-MMMT0MC.9 (.9).0 (.0) 0.0 (.) LVV-IG-MS-MMMT0MC. (). (.) 0.9 (.) LVV-IG-MS-MMMT0MC. (). (.) 0. (.0) LVV-IG-MS-MMMT0MC. (9).9 (.) 0. (.00) LVV-IG-MS-MMMT0MC 9. (). (.) 0. (.9) LVV-IG-MS-MMMT0MC 0.9 (). (.) 0. (0.9) LVV-IG-MS-MMMT0MC. () 0. (.) 0. (.) LVV-IG-MS-MMMT0MC. (). (.) 0.90 (.) 9 LVV-IG-MS-MMMT09MC. (99). (.).0 (.) 0 LVV-IG-MS-MMMT0MC. (9).9 (9.). (.) 0. (.9) Butt Weld-to-Butt Weld 0. (.) Surface rea LVV-IG-MS-MCMT0MC. (0.9). (0.0) 0. (.0) LVV-IG-MS-MCMT0MC. (.).09 (9.9) 0. (.9) LVV-IG-MS-MCMT0MC. (). (9.9) 0. (.) LVV-IG-MS-MCMT0MC. (). (9.) 0. (.) LVV-IG-MS-MCMT0MC.0 (0). (9.) 0.9 (9.) LVV-IG-MS-MCMT0MC 9. () 9. (9.) 0. (.) LVV-IG-MS-MCMT0MC. () 0. (9.) 0. (.) LVV-IG-MS-MCMT0MC. (). (9.) 0.9 (.) 9 LVV-IG-MS-MCMT09MC. (). (9.).0 (.) 0 LVV-IG-MS-MCMT0MC.0 (0). (99.). (9.).0 (0.) 0. (0.) 0. (9.) 0. (.9)
11 IGC II Integrated Gas Components: Substrates, s, Mounting Components, ssembly Hardware Parallel Channels Dimensions, in inches (millimeters), are for reference only are subject to change. Ordering Number. (.9) -IG-PB-0. () -IG-PB-0.00 () -IG-PB-0. (9) -IG-PB (0) -IG-PB-0 0. (9) -IG-PB-0. (0) 9 -IG-PB-09. () 0 -IG-PB-0. () -IG-PB-. () -IG-PB-. () 0. (.). (.) Parallel Components Port B Port Jumper Tube Connectors 0. (.9) Dimensions, Surface rea B LVV-IG-MS-MEPT0ME LVV-IG-MS-MEPT0ME.0 (.9).0 ().0 (.).9 ().00 (9.). (.) 0. (.) 0. (.) LVV-IG-MS-MEPT0ME LVV-IG-MS-MEPT0ME. ().09 (0). (). (9).9 (.). (.) 0. (.) 0. (9.0) LVV-IG-MS-MEPT0ME 9. () 9. (). (.) 0. (0.) LVV-IG-MS-MEPT0ME. () 0. () 0. (.) 0. (.) 9 LVV-IG-MS-MEPT0ME. (). (0). (.) 0. (.) 0 LVV-IG-MS-MEPT0ME. (). (0). (.).0 (.) LVV-IG-MS-MEPT09ME. (99). (9). (9.). (.) LVV-IG-MS-MEPT0ME. (9). (). (0). (0.0) 0. (.) Caps Conversion Plate Item Description Function Material Conversion plate LVV-IG-DM-0 Provides mounting capability for Substrate cap LVV-IG-DM-0 Covers unused position on substrate cap LVV-IG-DM-0 Covers unused position on L VIM/VR SS Substrate tube port LVV-IG-DM-0 Provides a vertical tube port on a substrate tube port LVV-IG-DM-0 Provides a vertical tube port on a
12 Support Blocks Item Description Function Material Support -IG-MH-0 Bolts to bottom of a substrate to provide mid-line support to a substrate channel with five or more positions Foot -IG-MH-0 Bolts to each end of a gas stick to provide mounting capability to the base plate luminum alloy 0-T Tube support -IG-MH- dapts the Swagelok tube support system to the centerline of the substrate ➀ The base plate is a customer-supplied plate to which the assembled gas stick(s) is mounted. ssembly Hardware Item Description Function Hex socket cap screw Torx head cap screw Lock-down plate Substrate clip clip # clip # C-ring gasket assembly Hex socket cap screw, in. Torx head cap screw, 0-0. in. Hex socket cap screw, in. Torx head cap screw, 0-. in. Hex socket cap screw, 0-. in. Torx head cap screw, 0-.0 in. Hex socket cap screw, /-0 0. in. SS-IG-MH-0 PES-IG-MH-0 PES-IG-MH-0 PES-IG-MH- SS-IG-MH-0 -IG-MH-0 -IG-MH- -IG-MH- -IG-MH- -IG-MH-0 -IG-MH- SS-IG-MH- Secures the substrate components at each end of the substrate channel Provides horizontal alignment of substrate components in a channel Provides horizontal alignment of components in a channel Provides horizontal alignment of end connections parallel components in a channel Provides seal between a substrate drop-down component the Secures conversion plate to substrate assembly Secures surface mount➁ to substrate assembly Secures substrate assembly to assembly Secures component with or mm flange thickness to conversion plate Secures substrate assembly to foot Secures component with mm flange thickness to conversion plate Secures foot to base plate Material 0 SS Polyethersulfone Polyethersulfone Polyethersulfone L SS lloy 0 SS ➁ Designed for use with. in. (. mm) c-ring surface mount components with a 0. in. (.9 mm) base thickness. Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, maintenance are the responsibilities of the system designer user. Swagelok, IGC, VCR TM Swagelok Company Torx TM Textron Inc. 00, 00 Swagelok Company Printed in U.S.. GLL July 00, R MS-0-
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