arxiv: v1 [physics.optics] 14 May 2013

Transcription

1 Parametric seedig of a microresoator optical frequecy comb Scott B. Papp, Pascal Del Haye, ad Scott A. Diddams Natioal Istitute of Stadards ad Techology, Boulder, Colorado 835, USA scott.papp@ist.gov arxiv: v1 [physics.optics] 14 May 213 Abstract: We have ivestigated parametric seedig of a microresoator frequecy comb (microcomb) by way of a pump laser with two electrooptic-modulatio sidebads. We show that the pump-sidebad spacig is precisely replicated throughout the microcomb s optical spectrum, ad we demostrate a record absolute lie-spacig stability for microcombs of at 1 s. The spectrum of a parametric comb is complex, ad ofte o-equidistat subcombs are observed. Our results demostrate that parametric seedig ca ot oly cotrol the subcombs, but ca lead to the geeratio of a strictly equidistat microcomb spectrum. 218 Optical Society of America Refereces ad liks 1. V. Gergiov, C. E. Taer, S. A. Diddams, A. Bartels, ad L. Hollberg, High-resolutio spectroscopy with a femtosecod laser frequecy comb, Opt. Lett. 3, (25). 2. M. J. Thorpe, K. D. Moll, R. J. Joes, B. Safdi, ad J. Ye, Broadbad cavity rigdow spectroscopy for sesitive ad rapid molecular detectio, Sciece 311, (26). 3. T. Steimetz, T. Wilke, C. Araujo-Hauck, R. Holzwarth, T. W. Hasch, L. Pasquii, A. Maescau, S. D Odorico, M. T. Murphy, T. Ketischer, W. Schmidt, ad T. Udem, Laser frequecy combs for astroomical observatios, Sciece 321, (28). 4. G. G. Ycas, F. Quila, S. A. Diddams, S. Osterma, S. Mahadeva, S. Redma, R. Terrie, L. Ramsey, C. F. Beder, B. Botzer, ad S. Sigurdsso, Demostratio of o-sky calibratio of astroomical spectra usig a 25 ghz ear-ir laser frequecy comb, Opt. Express 2, (212). 5. P. Del Haye, A. Schliesser, O. Arcizet, T. Wilke, R. Holzwarth, ad T. J. Kippeberg, Optical frequecy comb geeratio from a moolithic microresoator, Nature 45, (27). 6. A. A. Savchekov, A. B. Matsko, V. S. Ilcheko, I. Solomatie, D. Seidel, ad L. Maleki, Tuable optical frequecy comb with a crystallie whisperig gallery mode resoator, Phys. Rev. Lett. 11, (28). 7. I. S. Grudii, N. Yu, ad L. Maleki, Geeratio of optical frequecy combs with a caf2 resoator, Opt. Lett. 34, (29). 8. S. B. Papp ad S. A. Diddams, Spectral ad temporal characterizatio of a fused-quartz-microresoator optical frequecy comb, Phys. Rev. A 84, (211). 9. S. B. Papp, P. Del Haye, ad S. A. Diddams, Mechaical cotrol of a microrod-resoator optical frequecy comb, arxiv: v1 (212). 1. P. Del Haye, S. B. Papp, ad S. A. Diddams, Hybrid electro-optically modulated microcombs, Phys. Rev. Lett. 19, (212). 11. J. Li, H. Lee, T. Che, ad K. J. Vahala, Low-pump-power, low-phase-oise, ad microwave to millimeter-wave repetitio rate operatio i microcombs, Phys. Rev. Lett. (212). 12. J. S. Levy, A. Godareko, M. A. Foster, A. C. Turer-Foster, A. L. Gaeta, ad M. Lipso, Cmos-compatible multiple-wavelegth oscillator for o-chip optical itercoects, Nat Photo 4, 37 4 (21). 13. A. A. Savchekov, E. Rubiola, A. B. Matsko, V. S. Ilcheko, ad L. Maleki, Phase oise of whisperig gallery photoic hyper-parametric microwave oscillators, Optics Express 16, 413 (28). 14. P. Del Haye, O. Arcizet, A. Schliesser, R. Holzwarth, ad T. J. Kippeberg, Full stabilizatio of a microresoator-based optical frequecy comb, Phys. Rev. Lett. 11, (28). 15. F. Ferdous, H. Miao, D. E. Leaird, K. Sriivasa, J. Wag, L. Che, L. T. Varghese, ad A. M. Weier, Spectral lie-by-lie pulse shapig of o-chip microresoator frequecy combs, Nat Photo 5, (211). 16. T. Herr, V. Brasch, J. D. Jost, C. Y. Wag, N. M. Kodratiev, M. L. Gorodetsky, ad T. J. Kippeberg, Modelockig i a optical microresoator via solito formatio, arxiv: (212).

2 17. K. Saha, Y. Okawachi, B. Shim, J. S. Levy, R. Salem, A. R. Johso, M. A. Foster, M. R. E. Lamot, M. Lipso, ad A. L. Gaeta, Modelockig ad femtosecod pulse geeratio i chip-based frequecy combs, Opt. Express 21, (213). 18. T. Herr, K. Hartiger, J. Riemesberger, W. C. Y., E. Gavarti, R. L. Holzwarth, M. Gorodetsky, ad T. J. Kippeberg, Uiversal formatio dyamics ad oise of kerr-frequecy combs i microresoators, Nat Photo 6, (212). 19. A. B. Matsko, A. A. Savchekov, D. Strekalov, V. S. Ilcheko, ad L. Maleki, Optical hyperparametric oscillatios i a whisperig-gallery-mode resoator: Threshold ad phase diffusio, Phys. Rev. A 71, 3384 (25). 2. Y. K. Chembo, D. V. Strekalov, ad N. Yu, Spectrum ad dyamics of optical frequecy combs geerated with moolithic whisperig gallery mode resoators, Phys. Rev. Lett. 14, 1392 (21). 21. H. Lee, T. Che, J. Li, K. Y. Yag, S. Jeo, O. Paiter, ad K. J. Vahala, Chemically etched ultrahigh-q wedgeresoator o a silico chip, Nat Photo 6, (212). 22. M. Cai, O. Paiter, ad K. J. Vahala, Observatio of critical couplig i a fiber taper to a silica-microsphere whisperig-gallery mode system, Phys. Rev. Lett. 85, 74 (2). 23. D. V. Strekalov ad N. Yu, Geeratio of optical combs i a whisperig gallery mode resoator from a bichromatic pump, Phys. Rev. A 79, 4185 (29). 24. M. Kourogi, K. Nakagawa, ad M. Ohtsu, Wide-spa optical frequecy comb geerator for accurate optical frequecy differece measuremet, Quatum Electroics, IEEE Joural of 29, (1993). 25. S. Xiao, L. Hollberg, ad S. A. Diddams, Geeratio of a 2 ghz trai of subpicosecod pulses with a stabilized optical-frequecy-comb geerator, Opt. Lett. 34, (29). 26. T. M. Fortier, M. S. Kircher, F. Quila, J. Taylor, J. C. Bergquist, T. Rosebad, N. Lemke, A. Ludlow, Y. Jiag, C. W. Oates, ad S. A. Diddams, Geeratio of ultrastable microwaves via optical frequecy divisio, Nat. Photo. 5, 425 (211). The optical spectrum of a microresoator frequecy comb (microcomb) is geerated via parametric oliear optics, which ca iitiate with oly milliwatts of CW pump laser power due to the high Q ad small mode volume of microresoators. The simplicity of the geeratio mechaism, i combiatio with uiquely large lie spacigs i the 1 s to 1 s of GHz ad the potetial for photoic itegratio, makes microcombs a potetial alterative for applicatios that curretly rely o table-top combs. For example, applicatios such as direct spectroscopy [1], real-time trace detectio [2], ad astroomical spectrograph calibratio [3, 4] call for robust, portable comb operatio. The developmet of portable microcomb techology could also expad the reach of a comb s atural fuctio, as a optical clockwork that leverages the remarkable precisio of optical frequecy measuremets. Microcomb geeratio has bee studied with a rage of microresoators from bulk devices such as microtoroids [5], crystallie resoators [6, 7], ad microrods [8, 9, 1] to itegratiocapable platforms such as silica [11] ad silico itride [12]. A commo observatio i microcomb experimets has bee the lack of a determiistic modelockig mechaism, which eables the type of stable operatio, equidistace of all comb lies, ad ultrashort optical waveforms kow from femtosecod modelocked lasers. Still, a umber of iterestig microcomb operatig regimes have bee reported icludig low-oise [13, 14, 9, 1, 11], phaselocked [15, 8], ad stabilized operatio [14, 9, 1], ad the geeratio of solito waveforms [16, 17]. Theoretical models have bee proposed that explai may microcomb behaviors [18, 19, 2]. But at preset, a comprehesive picture of microcomb geeratio, ad specifically a sigular modelockig mechaism, have ot bee idetified. This paper itroduces a coheret cotrol techique, parametric seedig, for microcombs by way of pump-laser electro-optic (EO) itesity modulatio. Whe the seedig frequecy ( f eo ) is tued close to the microresoator free-spectral rage (FSR), the itesity modulatio strogly iflueces the parametric oliear processes resposible for comb geeratio. We observe that the 33 GHz lie spacig ( ν) of the resultig microcomb spectrum is precisely locked to f eo, ad that ν ca be varied over a rage of 1 MHz, ad we measure a record absolute ν stability of at 1 s, which is cosistet with state-of-the-art microwave oscillators. Furthermore, our parametric seedig techique eables systematic ivestigatios of

3 (a) Pump para. osc. W s FWM FWM 1=1 para. osc. EOM 2=2 gai 1=2 2=1 2=2 1=3 2=1 (b) BPF Pump MZ EO laser It. mod m RF bias Pol. EDFA f eo Cotr. Disk D=33 GHz -5 GHz heterodye BRF Referece comb BPF OSA Optical power (db) (c) m x D Wavelegth (m) Fig. 1. Implemetatio of parametric seedig. (a) Model for comb geeratio based o parametric oscillatio ad FWM. A microcomb with a lie spacig close to the resoator FSR is created via a primary parametric process ( 1 ) with spacig Ω s m i FSR i combiatio with a secodary process ( 2 ) active i adjacet resoator modes. All other lies from these iitial oes. Parametric seedig ca ifluece comb geeratio ot oly by iitiatig the secodary process, but via ijectio seedig of the primary oe. (b) The setup for our experimets cosists of a laser, which is itesity modulated i a Mach-Zehder EOM device, amplified, ad coupled ito a silica disk resoator [21] via tapered fiber [22]. To aalyze microcomb spectra, we use photodetectio to record the lie spacig, ad we make lie-by-lie optical frequecy measuremets with respect to a referece comb. BPF: badpass filter, BRF: badreject filter, OSA: optical spectrum aalyzer. (c) Optical spectrum for a microcomb with parametric seedig. the microcomb geeratio process, specifically their o-equidistat sub-comb behavior first described i Ref. [18]. Fially, we demostrate the emergece of a cotiuously equidistat microcomb spectrum tied to f eo that results from amplificatio of the seedig iput sigal. Figure 1a presets a simple model for parametric comb geeratio i microresoators, which is motivated by Ref. [18]. A CW pump laser (ω p ) excites oe microresoator mode. At the threshold power for parametric oscillatio, sigal ad idler waves are geerated at a frequecy offset from the pump laser of Ω s m i FSR, where m i is a iteger that couts by how may FSR the iitial sigal/idler pair are spaced from the pump. The frequecy Ω s is determied by the balace of phase mismatch from dispersio, oliear effects, ad the resoator mode structure; Fig. 1a shows the basic shape of sigle-pump parametric gai for the material dispersio of fused silica. Without icreased pump power, four-wave mixig of pump, sigal, ad idler creates fields at ω p + 1 Ω s (gray lies), where the iteger 1 idicates the primary spacig. Whe pump power is icreased, secodary parametric oscillatio (ofte i resoator modes adjacet to the first sigal/idler) ad four-wave mixig (FWM) occurs, leadig to a comb spectrum (gree lies) with lie spacig close to the resoator FSR. Withi the framework of this model the microcomb s spectrum is characterized by subcombs [18] that are writte as ν m = 1 Ω s /2π + 2 ν, (1) where ν m is the frequecy differece of ω p /2π ad the comb lie, m = 1 m i + 2 couts the mode umber of the lie relative to the pump, ad 1 ( 2 ) labels the order of the primary (secodary) parametric process. Here the spacig betwee most lies is ν, but the comb is ot equidistat sice a iteger ratio for Ω s /2π ν is ot required. This peculiar spectrum ca be

4 Normalized sigal (a) Cavity trasmissio Microwave power Optical power D- f eo (Hz) Power (arb) (b) (c) Microwave Optical Pump frequecy (GHz) f eo (MHz) MHz Optical spectrum (2 db /div) i=6 i=2 (d) (e) Wavelegth (m) 1-14 Alla deviatio1-13 (f) Avg. time (s) Fig. 2. Cotrol of the microcomb lie spacig via parametric seedig. (a) Disk resoator trasmissio (black), optical power (blue), ad microwave power (red) as the pump laser is tued oto resoace of the microcavity. The optical ad microwave outputs of the comb are measured after filterig out the pump ad sidebads. (b) Near-zero differece betwee the comb s lie spacig ( ν) ad seedig frequecy ( f eo ). (c) Optical (red) ad microwave (poits) power as f eo is scaed. The resoator FSR is (9) GHz. (d, e) Microcomb optical spectra for differet settigs of the seedig frequecy; f eo = i (d) ad f eo =33.3 i (e). (f) Absolute lie spacig Alla deviatio as a fuctio of measuremet time. compared to a completely equidistat oe with lie umber m separated from the pump laser by precisely ν m = m ν (blue axis markers). We expect parametric seedig with itesity modulatio sidebads will impact microcomb geeratio i three ways. First, a few lies ear the pump laser are created by way of FWM of the pump ad sidebads. These lies are strictly equidistat from the pump laser due to eergy coservatio of FWM; such a bichromatic pump was explored i Ref. [23]. However, parametric gai ear the pump is low, which limits the umber ad output power of these ew comb lies. Secod, pump itesity modulatio creates sidebads of the parametric oscillatio sigal/idler waves at Ω s. Sice parametric gai is largest ear the first sigal/idler pair, the modulatio-iduced sidebads ear Ω s ca rapidly grow, ad further FWM processes also create ew comb compoets, which importatly are all spaced by f eo. Third, the equidistat series of lies emaatig from pump-sidebad mixig ca ifluece parametric oscillatio at Ω s, ad at best ca completely ijectio-lock the primary process. Our paper explores these three impacts of parametric seedig, ad we idetify some commo behaviors i microcomb geeratio, specifically that a sigle microcomb mode is ofte a composite of multiple subcombs.

5 1. Cotrol of microcomb lie spacig via parametric seedig A schematic of our system is show i Fig. 1b. To derive the parametric seedig sigal, a CW laser s itesity is modulated at frequecy f eo 1 with a stadard Mach-Zehder electrooptic modulator. The relative power of the carrier ad seedig sidebads is cotrolled by a bias voltage, ad is typically set to > 1% of the carrier. The secod-order sidebads have 4 db less power tha the first-order oes. After amplificatio to a maximum of 14 mw, the light is coupled ito a disk resoator usig a tapered fiber. The 2 mm diameter, 8 µm thick silica disk resoator is fabricated o a silico chip usig the procedure described i Ref. [21]. The particular optical mode we use offers amog the widest comb spa ( 4 m) observed with this device. By tuig the pump-laser frequecy toward cavity resoace, we geerate the gap-free optical spectrum show i Fig. 1b that covers sigificatly more tha 12 m. We aalyze the microcomb spectrum with two techiques: Direct photodetectio to characterize the microwave lie spacig, ad by use of a referece comb (described below) to uderstad the frequecy spacig betwee the pump ad microcomb lies. For all of the data i this paper except optical spectra, the cetral 2 m of the comb is blocked to reveal iformatio about oly the parametrically geerated comb. Parametric seedig ca sigificatly reduce the dramatic chages i optical ad microwave outputs that are typically observed i sigle-pump microcombs [8]. Fig. 2a shows how the total cavity trasmissio (black lie), itegrated optical power (blue lie), ad itegrated microwave power ear 33 GHz (red lie) of the comb evolve as the pump laser frequecy is scaed. Importatly at the 1 mw parametric threshold, both the optical ad microwave power switch o. I cotrast, without f eo the lies spacig at threshold would be 6 FSR ad udetectable electroically. I additio, the optical ad microwave power outputs are stabilized by the parametric seedig, ad they grow smoothly as the pump frequecy tues toward the microcavity resoace. By tuig the seedig frequecy f eo, differet aspects of parametric comb geeratio process ca be explored. Specifically, we discovered that distict microcomb operatig regimes exist, but that the lie spacig is always precisely f eo. The red lie i Fig. 2c shows the comb s optical power (cetral 2 m about pump removed) as a fuctio of f eo. Here the pump power is maitaied below parametric threshold, ad the comb s output is zero uless f eo is tued oto resoace of modes adjacet to the pump. Qualitatively differet combs are geerated for f eo settigs oly a few MHz apart: At f eo GHz, the primary parametric process occurs at m i 6 modes from the pump, while at f eo GHz, the comb is characterized by the smaller primary spacig m i 2; ad at the itermediate settig of f eo GHz o comb is geerated. For referece the resoator s FSR is (9) GHz, which is measured at low power ad calibrated with the modulatio sidebads [11]. Parametric phase matchig depeds o umerous parameters, ad is apparetly iflueced by the lie spacig of the emerget comb. Whe we icrease itracavity power to above parametric threshold, the clea distictio betwee the two regimes is lost. The black poits i Fig. 2c show the complicated depedece of microwave output power o f eo. At the high ad low f eo frequecy tails of microwave power, we observe combs with either m i 6 or m i 2; the optical spectra of these cases (Fig. 2d ad e) clearly show the differet primary spacigs. But i betwee these extremes is a trasitio regio i which both m i type combs are simultaeously possible. Still, as show i Fig. 2b, for every f eo data poit the ν we measure (via frequecy coutig) is locked to f eo withi ±.5 Hz. Hece, o lie-spacig stabilizatio post-geeratio is required. For a sigle f eo settig, we measured the absolute Alla deviatio of ν by comparig it to a idepedet hydroge maser referece; see Fig. 2f. The stability we achieve exceeds by 1x previous 1 The microwave sythesizer that geerates f eo is refereced to a hydroge-maser oscillator with sec fractioal frequecy stability.

6 (MHz) (a) d( m ) / d( ) (b) (MHz) Mode umber, m (c) f eo (MHz) GHz Fig. 3. Subcomb behavior i microcombs. (a) Lie frequecy diagram (ν vs. m) for a spectrum with three idepedet subcombs. The black poits represet FWM of the pump ad seedig sidebads, ad the red (blue) poits represet the m i 2 (m i 6) subcomb. (b) Comb lie tuig rate verses m. Here f eo is set so oly the m i 6 subcomb is preset. (c) Tuig of the idepedet subcomb offset frequecies with f eo. For the ope triagles, the pump laser frequecy was adjusted to shift the ν of all the poits. results obtaied with microcombs [9]. 2. Optical frequecy spectra of parametric subcombs Parametric seedig via itesity modulatio has a impact ot oly o the microcomb lie spacig, but also o the subcomb behavior described by Eq. 1. Here we preset direct tests of how subcomb lies deped o f eo. To characterize the optical frequecy spectrum of our microcomb, we derive a referece comb from the pump laser; see the schematic i Fig. 1a. After exitig the disk microresoator ad tapered fiber, the pump laser is separated from the rest of the microcomb spectrum with a optical filter. This pump light geerates a comb coverig 154 m to 158 m with 1 GHz spacig usig a Fabry-Perot EO modulator [24, 25]. By photodetectio of the iterferece betwee the microcomb ad referece comb, we obtai a series of RF sigals betwee zero ad 5 GHz. Each RF sigal is associated with a specific optical heterodye beatote betwee microcomb ad referece lies. Usig the two combs precisely kow lie spacigs, we determie the absolute differece betwee the pump ad microcomb lie (ν m ), ad the offset of the microcomb lie from equidistace: ν = ν m m ν = 1 (Ω s /2π ν m i ). (2) Figure 3a shows ν versus microcomb mode umber at f eo = GHz. This microcomb lie frequecy diagram idicates the presece of three combs all with the same lie spacig.

7 2 Oe comb (black poits) origiates directly from FWM of the pump laser ad modulatio sidebads, hece it has Ω s = ad is strictly equidistat with offset -.6 (12) khz. But it is oly composed of 13 lies ear the pump. The other two subcombs have offsets of -1.6 MHz ad 5.93 MHz from equidistace, ad they origiate from idepedet parametric oscillatio processes with m i 2 (red poits) ad m i 6 (blue poits), respectively. These data show that for this settig of f eo, the microcomb operates i the trasitio betwee the two m i regimes, ad that multiple idepedet parametric processes are active. We aalyze the subcombs optical frequecy spectrum by varyig their lie spacig with parametric seedig. First, we focus o settigs of f eo GHz for which the m i 6 compoet is domiat. To measure the tuig rate d(ν m) d( ν) = 2, we vary f eo over a total rage of 12 khz ad observe all the comb lie frequecies for m = {,7}; Fig. 3b shows the tuig rate versus mode umber. The blue poits coverig m = {35,65} have a tuig rate characteristic of the 1 = 1, m i 6 subcomb, hece they have the expected 2 = m m i depedece give by the blue lies. This observatio is strog evidece i support of the subcomb model, ad future applicatios of microcomb techology could take advatage of the reduced sesitivity to ν of some lies. Coversely, the black poits at small m result from FWM of the modulatio sidebads ad pump. The liear icrease i tuig rate with m further cofirms that the spectrum of this comb has Ω s = ad its 2 equals m. Secod, we extract ν (Eq. 2) from lie-frequecy diagrams take over a wide rage of f eo. Here both the m i 2 ad m i 6 subcombs are excited. The data showig offset from equidistace (Fig. 3c) for both the subcombs varies liearly with f eo with a slope of m i ad they are cotiuous through zero, as expected from the subcomb model. Moreover, the f eo settig to realize ν is differet for the two subcombs. Here the ability to systematically vary ν is primarily due to cotrol of ν, as opposed to a more fudametal ability to ifluece the parametric phase-matchig coditio, which determies Ω s. Hece, whe we chage the itracavity power via the pump-laser frequecy, which is expected to modify Ω s, we observe a shift i the ν = itercept; see the ope triagles i Fig. 3c. However the uderlyig depedece of ν o f eo is uchaged. 3. Emergece of a cotiuously equidistat microcomb By tuig the subcomb offset to specific values ear zero, we observe the emergece of a cotiuously equidistat comb spectrum to at least microcomb mode 54 (±1.8 THz from pump). The offset-free comb lies, which are seeded by the itesity modulatio sidebads, experiece sigificat parametric amplificatio. Such a equidistat comb appears eve i the presece of the other m i subcombs that we described i Sec. 2, ad multiple lies are observed i a sigle m-mode of the microcomb. Figure 4a shows the heterodye beat spectrum of the microcomb ad referece comb for several m values. Here the frequecy axis is precisely calibrated (at the Hz level o the uderlyig THz pump-comb frequecy differece) to represet the offset from equidistace. Each trace is composed of several peaks, icludig a peak for the equidistat comb, a peak for the m i 6 subcomb, ad their oliear mixig products. The peaks cetered at ν = have a arrow spectral width sice pump laser frequecy oise is commo mode to both the equidistat microcomb ad the referece comb. Moreover the ν frequecy of these peaks does ot vary from zero whe the pump frequecy is tued. These factors help sigificatly i idetificatio of the equidistat comb. As expected, the ν frequecy of lies show here, which belog to the m i 6 subcomb, do chage with pump frequecy. The microwave lie spacig spectrum we obtai via photodetectio also provides iformatio about the equidistat ad offset microcomb compoets; see Fig. 4b. Here the frequecy axis covers the same rage as i Fig. 4a to highlight their correspodece. This sigal is com- 2 If the combs spacig were ot the same, the ν would vary with m.

8 Heterodye (25 db/div) RF power (db) (a) (MHz) (b) 3 khz RBW m = 1 m = 3 m = 4 m = 47 m = 5 m = 53 RF (MHz) - f eo Heterodye (1 db/div) (c) RF power (2 db/div) (d) (MHz) RF (MHz) - f eo Fig. 4. Oset of a cotiuously equidistat microcomb. (a) Optical heterodye of various microcomb m-lies ad the referece comb. The arrow peak i each trace at ν idicates the presece of a equidistat microcomb lie, while the other peaks belog to the m i 6 subcomb. (b) Microcomb lie spacig spectrum for data i (a). The equidistat ad subcomb lies have the same spacig, but the subcomb offset appears here at ±.5 Hz. (c) Black trace is the optical heterodye sigal for microcomb lie m = 4 showig the 1 = 2, m i 2 subcomb at -2 MHz, ad the 1 = 1, m i 6 subcomb at 5 MHz. Apparetly the microcomb s spectrum ca cosist of lies separated by more tha the resoator s liewidth. Tuig the pump laser frequecy shifts the subcomb lies ν. The upper (red) ad lower (blue) traces show ijectio lockig of the two subcombs, which is obtaied by tuig their ν toward zero. (d) Microcomb output of the comb for the traces i (c). posed of a strog peak at f eo due to pairwise iterferece of adjacet lies amog all the subcombs, ad also of a series of peaks at multiples of.5 MHz from f eo. Previous microcomb experimets idetified these additioal peaks i the lie-spacig spectrum as iterferece of overlappig subcomb lies with, for example, 1 = 1 ad 2 = 2 [18]. However, i our case they also clearly idicate the presece of a cotiuously equidistat microcomb spectrum amog separate, offset subcombs. I fact, icreasig the power i the additioal peaks leads to a stroger equidistat comb. We iterpret the spectra i Fig. 4a ad b as evidece for parametric-gai competitio betwee differet processes that geerate the composite microcomb spectrum. While the parametric gai spectrum is extremely broad, sigal/idler fields ca oly be efficietly created withi the resoace spectrum of the optical microcavity. Naturally, to geerate a completely equidistat comb the resoator modes must roughly lie up with a fixed spacig; whereas for a offset subcomb, Ω s of sigal/idler fields chages with the resoator modes. Hece, a subcomb lie

9 1 (a) 5 (b) (Hz) 5-5 d( m ) / d(d) Mode umber, m Mode umber, m Fig. 5. Properties of the equidistat microcomb spectrum. (a) Measuremets showig o offset from equidistace at the 2 Hz level for select m values up to 54. Error bars are the stadard deviatio of the mea for each poit. (b) Equidistat comb lie tuig versus m with slope of oe. provides a coarse i-situ marker of the resoator mode. For a fixed settig of f eo, we explore the competitio betwee parametric processes by varyig the pump laser frequecy. Fig. 4c shows heterodye beatote spectra of the m = 4 microcomb with ν calibrated based o f eo ; the three traces are differet settigs of the pump laser frequecy, ad i Fig. 4d are the correspodig lie-spacig sigals. The black trace (middle) demostrates the complicated geeratio mechaism of parametric combs: The peaks at positive (egative) ν origiate from a m i 6 (m i 2) subcomb, ad their 1 MHz side peaks are associated with oliear mixig of their subcomb offset. For the black trace, the pump frequecy is set such that the equidistat m = 4 lie is betwee the two subcomb lies. All the characteristics of this optical heterodye sigal are mirrored i the lie spacig spectrum we measure, amely peaks at f eo ± 8 MHz ad ±1 MHz correspodig to the subcomb offsets. Coversely, whe we use the pump laser to tue the m i 2 lie close to ν = (upper, red trace), the m = 4 equidistat compoet is strogly amplified, the m i 2 subcomb compoet disappears, but the m i 6 subcomb remais. Tuig the pump frequecy i the opposite directio (lower, blue trace) results i amplificatio of the equidistat lie, reductio of the m i 6 subcomb, ad complete disappearace of the m i 2 oe. Agai, the microwave lie spacig spectra we obtai mirror the behavior of correspodig red ad blue optical heterodye traces. Geeratig a equidistat spectrum is importat for may future applicatios of microcombs, particularly oes that leverage frequecy divisio from the optical to microwave domais [26]. To characterize its equidistace, we perform high-resolutio measuremets of the microcomb optical frequecy spectrum usig the referece comb. Here we use a microwave spectrum aalyzer to repeatedly measure the microcomb-referece beat frequecies. Figure 5a shows measuremets of ν for up to mode 54 from the pump laser. The offset we observe for all the studied m values is withi the 2 Hz ucertaity of our measuremets. Specifically, for m = 54 the fractioal ucertaity i our offset measuremet is By varyig f eo ad moitorig the frequecy of each comb lie, we characterize the tuig behavior of the equidistat comb; see Fig. 5b. I cotrast to the subcomb measuremets preseted i Sec. 2, the equidistat comb tues precisely with the expected depedece o m. These data demostrate that, eve for the weak -6 dbm optical lie powers of our referece comb, the equidistat microcomb we create is capable of precisio optical frequecy metrology across a sigificat fractio of its spa. 4. Coclusio I this paper, we have itroduced a ew parametric seedig techique for microcombs that provides for determiistic geeratio of the comb spectrum with kow spacig. Our measuremets of the absolute lie-spacig stability reach a record level commesurate with state-of-the-

10 art electroic oscillators. Moreover, the data i this paper demostrate that parametric seedig is a importat tool for uderstadig the geeratio of microcombs. Our simplified geeratio model (Fig. 1) is based o primary ad secodary parametric oscillatio processes, ad we observe that at least three pairs of these processes ca be active i creatig a composite microcomb spectrum. Importatly, parametric seedig ca ifluece all aspects of microcomb geeratio. We verified the depedece of subcomb lies o the microcomb s fudametal lie spacig, ad we demostrated that subcomb offsets ca be tued through zero by chagig the lie spacig. However, simply tuig the subcomb offset to zero with ν does ot ecessarily yield the type of equidistat comb that will be importat for future applicatios. O the other had, eve i the presece of multiple subcombs, we observe the emergece of a cotiuously equidistat spectrum that results from amplificatio of the parametric seedig sigal, ad we show that its offset from equidistace ca be as low as Future experimets will focus o seedig with more tha two sidebads, ad o ivestigatig picosecod optical waveforms associated with the microcomb spectra preseted here. We are grateful to Hasuek Lee, Jiag Li, ad Kerry Vahala for providig the silica disk resoator. We thak Lora Nuget-Gladorf ad Frak Quila for providig helpful commets o this mauscript. This work is supported by the DARPA QuASAR program ad NASA. It is a cotributio of the US govermet (NIST) ad is ot subject to copyright i the Uited States.