Low Energy Nanolayer Sensors. Thermal reactivation
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1 Low Energy Nanolayer Sensors W. Moritz 1, M. Milstrey 2 1 Humboldt University of Berlin, Brook-Taylor-Str.2, Berlin, Germany; werner.moritz@rz.hu-berlin.de 2 Swissbit Germany AG Sensor structure Hydrogen response Thermal reactivation Mechanistic investigations Fire detection LOE Explosion alarm 1
2 Disadvantages of available hydrogen sensors: energy consumption too high for battery powered systems due to elevated working temperature price to high for mass products poor selectivity 2
3 Sensor structure Palladium Si 3 N 4 SiO 2 Si Similar to an oxygen sensor described earlier 3
4 Si LaF 3 Electrochemical mechanism ((different to Lundström type)) Palladium CV-measurement 4
5 Response of the Pd/LaF 3 /Si 3 N 4 /SiO 2 /Si field effect structure (solid line and left scale) to different concentrations of hydrogen (doted line and right scale) in synthetic air; room temperature; measurement 1 hour after preparation of the Pd layer 5
6 6 days after preparation Gate voltage shift (mv) Time (s) Hydrogen concentration (ppm) Similar to oxygen sensor 6
7 Heating and temperature measurement No method for fast surface temperature measurement 1 - Pt; 2 - LaF 3 ; 3 - SiO 2 /Si 3 N 4 ; 4 - n-si; 5 - ohmic contact 7
8 Power pulse source Triggersignal Control voltage -5V Surface temperature measurement Computer TTL Low voltage impulse High voltage 2-15V IEEE 488 Control voltage RS232 Transformed hig voltage impulse Gas 1 Differential probes R = 1Ω I Sample holder Optics TTL Gas exhaust Relais photo current measurement + voltage out Gas 2 Sensitivity measurement IR-LED R Mess signal in sin out 8
9 Calculations of temperature distribution 1 s 1 W 1Ws LaF 3 24 nm SiO 2 /Si 3 N 4 8nm 1 µs 1W 1mWs 1ns 1W 1µWS 9
10 Surface heating current/a voltage/v resitance/ohm temperature/k 5 1 time/µs time/µs 3 1
11 Constant surface temperature ns T<5K temperatur/k t/ns power/w time/ns Parameters of the electrical heating pulse used in Fig. above Max. current 8,4A Cur. dens. 2,8*1 7 Acm -2 Max. voltage 293 V Max. power 2365 W Total energy 1,82*1-3 J T Si =,25 K ((average 2x1-8 W)) 5 activations simulating 2 years 11
12 Hydrogen signal in air after thermal reactivation Low concentration range Gate voltage shift (mv) room temperature 1 1 Hydrogen concentration (ppm) Activation similar to oxygen sensor Gate voltage shift (mv) mv/decade 1 Limit of detection 5 ppb Time (min) Hydrogen concentration (ppm)
13 A Fire Experiment in a Wooden House... T- Amamoto et al., Sensors and Actuators, B1 (199)
14 Early state of Fire (smoldering) TF 2 wood on electrical heater signal/mv TF 2 Start Heater hydrogensensor 9 sec earlier ventilation on t/s smoke-sensor CO-conc 3,5 6 3, 5 2,5 4 2, 3 1,5 2 1, 1,5, 14
15 High concentration range LOE Limit of explosion 4% Hydrogen in air Mass markets Fuell cells Hydrogen cars in garages 15
16 High concentration range Gate voltage shift (mv) mv/decade Time (s) Hydrogen concentration (%) gate voltage at the base line concentration of 1% was set to V 16
17 Mechanism Hydrogen measurements in argon 1,4 1,2 - air - argon - 1 ppm H 2 in argon Capacitance (nf) 1,,8,6,4 4 mv shift due to 1 ppm H 2, Gate voltage (mv) 17
18 Mechanism Oxygen sensor O 2 + A* O 2 (A*) (1) O 2 (A*) + H 2 O + e - HO 2 (A*) + OH - (2) OH - + (F*) OH - (F*) (3) Additional hydrogen action O 2 (A*) + H 2 H 2 O (A*) (4) 18
19 Conclusions - room temperature hydrogen sensor in ppm range and for high concentration - thermal reactivation is possible - Low energy consumption for heating impuls - early fire detection - alarm at lower explosion level - Battery power application for long time - Combination with energy harvesting technology possible 19
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