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1 nc. SEMIODUTOR TEHIAL DATA Order this document by MPX2010/D The MPX2010/MPXV2010G series silicon piezoresistive pressure sensors provide a very accurate and linear voltage output directly proportional to the applied pressure. These sensors house a single monolithic silicon die with the strain gauge and thin film resistor network integrated on each chip. The sensor is laser trimmed for precise span, offset calibration and temperature compensation. eatures Temperature ompensated over 0 to +85 Ratiometric to Supply Voltage Differential and Gauge Options Application Examples Respiratory Diagnostics Air Movement ontrol ontrollers Pressure Switching igure 1 shows a block diagram of the internal circuitry on the stand alone pressure sensor chip. igure 1. Temperature ompensated and alibrated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIERETIAL PRESSURE The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). UIBODY PAKAGE MPX2010D ASE 344 MPX2010GP ASE 344B MPX2010DP ASE 344 MPX2010GS ASE 344E MPX2010GSX ASE 344 Motorola Preferred Device OMPESATED PRESSURE SESOR 0 to 10 kpa (0 to 1.45 psi) ULL SALE SPA: 25 mv SMALL OUTLIE PAKAGE SURAE MOUT MPXV2010GP ASE 1369 MPXV2010DP ASE 1351 PI UMBER Gnd +V out V S / / / 4 V out 8 / OTE: Pin 1 is noted by the notch in the lead. Preferred devices are Motorola recommended choices for future use and best overall value. REV PI UMBER Gnd 3 +V out 4 V S V out OTE: Pin 1 is noted by the notch in the lead. Motorola Sensor Device Data Motorola, Inc or More Information On This Product, 1
2 MAXIMUM RATIGS (OTE) Rating Symbol Value Unit nc. Maximum Pressure (P1 > P2) P max 75 kpa Storage Temperature T stg 40 to +125 Operating Temperature T A 40 to +125 OTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATIG HARATERISTIS (V S = 10 Vdc, T A = 25 unless otherwise noted, P1 > P2) haracteristic Symbol Min Typ Max Unit Pressure Range (1) P OP 0 10 kpa Supply Voltage (2) V S Vdc Supply urrent I o 6.0 madc ull Scale Span (3) V SS mv Offset (4) V off mv Sensitivity V/ P 2.5 mv/kpa Linearity (5) %V SS Pressure Hysteresis (5) (0 to 10 kpa) ±0.1 %V SS Temperature Hysteresis (5) ( 40 to +125 ) ±0.5 %V SS Temperature Effect on ull Scale Span (5) TV SS %V SS Temperature Effect on Offset (5) TV off mv Input Impedance Z in Ω Output Impedance Z out Ω Response Time (6) (10% to 90%) t R 1.0 ms Warm Up 20 ms Offset Stability (7) ±0.5 %V SS OTES: kpa (kilopascal) equals psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self heating. 3. ull Scale Span (V SS ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (V off ) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25. TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85, relative to 25. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85, relative to Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature ycling with Bias Test. 2 or More Information On This Product, Motorola Sensor Device Data
3 nc. O HIP TEMPERATURE OMPESATIO and ALIBRATIO igure 2. Output versus Pressure Differential igure 2 shows the output characteristics of the MPX2010/MPXV2010G series at 25. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on full scale span and offset are very small and are shown under Operating haracteristics. ÉÉ ÉÉ ÉÉÉÉ ÉÉÉ ÉÉÉÉ ÉÉÉ ÉÉÉÉÉÉÉÉÉÉ igure 3. Unibody Package ross Sectional Diagram (not to scale) This performance over temperature is achieved by having both the shear stress strain gauge and the thin film resistor circuitry on the same silicon diaphragm. Each chip is dynamically laser trimmed for precise span and offset calibration and temperature compensation. igure 3 illustrates the differential/gauge die in the basic chip carrier (ase 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX2010/MPXV2010G series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. ontact the factory for information regarding media compatibility in your application. Motorola Sensor Device Data or More Information On This Product, 3
4 LIEARITY Linearity refers to how well a transducer s output follows the equation: V out = V off + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see igure 5) or (2) a least squares best line fit. While a least squares fit gives the best case linearity error (lower numerical value), the calculations required are burdensome. onversely, an end point fit will give the worst case error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. nc. igure 4. Linearity Specification omparison PRESSURE (P1)/VAUUM (P2) SIDE IDETIIATIO TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Part umber ase Type Pressure (P1) Side Identifier MPX2010D 344 Stainless Steel ap MPX2010DP 344 Side with Part Marking MPX2010GP 344B Side with Port Attached MPX2010GS 344E Side with Port Attached MPX2010GSX 344 Side with Port Attached MPXV2010GP 1369 Side with Port Attached MPXV2010DP 1351 Side with Part Marking ORDERIG IORMATIO UIBODY PAKAGE (MPX2010 SERIES) MPX Series Device Type Options ase Type Order umber Device Marking Basic Element Differential 344 MPX2010D MPX2010D Ported Elements Differential, Dual Port 344 MPX2010DP MPX2010DP Gauge 344B MPX2010GP MPX2010GP Gauge, Axial 344E MPX2010GS MPX2010D Gauge, Axial P Mount 344 MPX2010GSX MPX2010D ORDERIG IORMATIO SMALL OUTLIE PAKAGE (MPXV2010G SERIES) Device Type Options ase o. MPX Series Order o. Packing Options Marking Ported Elements Gauge, Side Port, SMT 1369 MPXV2010GP Trays MPXV2010G Differential, Dual Port, SMT 1351 MPXV2010DP Trays MPXV2010G 4 or More Information On This Product, Motorola Sensor Device Data
5 nc. SMALL OUTLIE PAKAGE DIMESIOS A E e e/2 D.014 (0.35) θ L DETAIL G A1 B E1 b P T DETAIL G A M K ASE ISSUE O θ Motorola Sensor Device Data or More Information On This Product, 5
6 nc. SMALL OUTLIE PAKAGE DIMESIOS OTIUED A E e e/2 D.014 (0.35) θ L DETAIL G A1 B E1 b P DETAIL G A M T K ASE ISSUE O θ 6 or More Information On This Product, Motorola Sensor Device Data
7 nc. UIBODY PAKAGE DIMESIOS B J M A R PI 1 T D 4 PL G L DAMBAR TRIM ZOE: THIS IS ILUDED WITHI DIM. 8 PL Y Z J T R B P PORT #1 POSITIVE PRESSURE (P1) PI 1 ASE ISSUE Z H A U L G D 4 PL ASE 344B 01 ISSUE B S K Q Motorola Sensor Device Data or More Information On This Product, 7
8 nc. UIBODY PAKAGE DIMESIOS OTIUED R PORT #2 B PORT #1 PORT #2 VAUUM (P2) PI 1 P T T J PORT #1 POSITIVE PRESSURE (P1) B V V R T J BAK SIDE VAUUM (P2) K W G D 4 PL G A U S ASE ISSUE B A S L H PORT #1 POSITIVE PRESSURE (P1) PI 1 D 4 PL Q K ASE 344E 01 ISSUE B 8 or More Information On This Product, Motorola Sensor Device Data
9 nc. UIBODY PAKAGE DIMESIOS OTIUED V PORT #1 POSITIVE PRESSURE (P1) J E T P D 4 PL A U G K ASE ISSUE B PI 1 S Q R B Motorola Sensor Device Data or More Information On This Product, 9
10 nc. OTES 10 or More Information On This Product, Motorola Sensor Device Data
11 nc. OTES Motorola Sensor Device Data or More Information On This Product, 11
12 nc. Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different applications and actual performance may vary over time. All operating parameters, including Typicals must be validated for each customer application by customer s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners. Motorola, Inc How to reach us: USA/EUROPE/Locations ot Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, olorado or JAPA: Motorola Japan Ltd.; SPS, Technical Information enter, , Minami Azabu. Minato ku, Tokyo Japan ASIA/PAII: Motorola Semiconductors H.K. Ltd.; Silicon Harbour entre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po,.T., Hong Kong Technical Information enter: HOME PAGE: 12 Motorola Sensor Device Data or More Information On This Product, MPX2010/D
Distributed by: www.jameco.com 1-800-831-4242 The content and copyrights of the attached material are the property of its owner. nc. SEMICONDUCTOR TECHNICAL DATA The MPX2050 series device is a silicon
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