Multi-Probe Atomic Force Microscopy Using Piezo-Resistive Cantilevers and Interaction between Probes
|
|
- Stanley Rich
- 6 years ago
- Views:
Transcription
1 e-journal of Surface Science and Nanotechnology 26 January 2013 e-j. Surf. Sci. Nanotech. Vol. 11 (2013) Regular Paper Multi-Probe Atomic Force Microscopy Using Piezo-Resistive Cantilevers and Interaction between Probes Nobuo Satoh and Eika Tsunemi Department of Electronic Science and Engineering, Kyoto University, Katsura, Kyoto , Japan Kei Kobayashi Office of Society-Academia Collaboration for Innovation, Kyoto University, Katsura, Kyoto , Japan Kazumi Matsushige and Hirofumi Yamada Department of Electronic Science and Engineering, Kyoto University, Katsura, Kyoto , Japan. (Received 13 September 2012; Accepted 7 January 2013; Published 26 January 2013) We developed a multi-probe atomic force microscopy (MP-AFM) system using piezo-resistive cantilevers. The use of piezo-resistive self-sensing cantilevers with deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Simultaneous observation images can be acquired by the MP-AFM under frequency modulation (FM) detection operations. The minimum distance between these probes was 6.9 µm using the piezoresistive cantilevers fabricated by a focused ion beam. Furthermore, we found that the nanoscale interaction between the probes was detected by determining the change in the amplitude of each cantilever. It was clarified that the interaction effect depended on the vibration amplitude of the cantilever-probe. [DOI: /ejssnt ] Keywords: Mulit-probe; Atomic force microscopy; Piezo-resistive cantilever I. INTRODUCTION Multi-probe atomic force microscopy (MP-AFM) development is in strong demand as an evaluation system on the micrometer and nanometer scales on insulator surfaces [1]. As is well known, in most of the present AFMs, the optical beam deflection method is ordinarily used [2, 3]. With this technique, high-resolution evaluation MP-AFM has also been reported [4, 5]. However, one of the difficulties in development of multi-probe AFM is that the sensing method of the cantilever deflection is quite complicated. On the other hand, it is indispensable to simplify the scheme that detects the position of the AFM cantilever to attempt high performance in multi-probe AFM. The use of a self-sensing cantilever, in which a deflection sensor is integrated, extremely reduces the complexity of the setup [6], achieves the image observation with high resolution [7], accomplishes the practicable application in the nanoscale [8]. We developed and reported an MP-AFM [9] using piezoelectric cantilevers [10] that is unique among such self-sensing cantilevers, which allowed us to not require any complex optical elements [11, 12]. The use of other self-sensing cantilever, MP-AFM can have the multifunctionality. For instance, the functionality expansion in the MP-AFM is that operation mode enables not only the dynamic mode but also the static one. Therefore, the advancement of generality by the instrumental improvement is required. In this study, we chose a piezo-resistive cantilever [13] (a) (b) FIG. 1: Scanning electron micrograph of piezo-resistive cantilever. (a) Before processing by FIB. (b) Magnified image at probe-tip after processing. where the cantilever deflection was measured by using a piezo-resistive sensor with a Wheatstone bridge circuit. The deflection signal is detected as the current from the piezo-resistive effect of the cantilever without a complex optical system. The basic performance of the developed MP-AFM, the estimation of detection sensitivity of the piezo-resistive cantilever, the image data obtained by the instrument, and interaction worked distance of between cantilever-probes depending on vibration amplitude of the cantilever are described. II. EXPERIMENTAL SETUP A. FIB fabricated cantilevers Corresponding author: n-satoh@kuee.kyoto-u.ac.jp; Present address: Department of Electrical, Electronics and Computer Engineering, Chiba Institute of Technology, Tudanuma, Narashino, Chiba , Japan In the displacement detection method of the piezoresistive cantilever that is the self-sensing cantilever, it is a cardinal principle that the swerve stress held in the ISSN c 2013 The Surface Science Society of Japan ( 13
2 Volume 11 (2013) Satoh, et al. Topographic image (1) PI Controller differential AM / FM Detector object lens piezo piezo resistive resistive cantilever cantilever dither (1) (2) dither differential AM / FM Detector Topographic image (2) PI Controller high-voltage x-y-z slider x-y-z slider high-voltage z y x Tube scanner FIG. 2: Schematic diagram of multi-probe atomic force microscope using piezo-resistive cantilevers. base of the cantilever by generating small displacement is detected as a resistance variation. We purchased and used the cantilever PRC120 (resonant frequency 250 to 300 khz, spring constant 30 to 40 N/m, and sensitivity 120 mv/nm) from SII NanoTechnology Inc. In the MP-AFM, one of the important factors is how closely probes can approach each other under a controlled environment. As one solution example, the cantilever of the figuration that has the feature can be commercially purchased [5]. In the case to adopt the piezo-resistive cantilever, the shortest achievable distance between piezoresistive cantilever-probes is required. However, there is no probe-tip in a top-end position in the structure of the piezo-resistive cantilever. Therefore, the micro fabrication of the cantilever tip was conferred by focused ion beam (FIB) equipment according to the cut-line (orange dot line) shown in Fig. 1(a). Even after the cutting process, the cut part was still attached due to some electrostatic interactions. The appearance of the probe tip after it is constructed is shown in Fig. 1(b). Because the length was shortened by the cantilever previously being minutely processed by FIB, it was confirmed that the resonant frequency increased slightly. In addition, given the transformation of the cantilever by the FIB processing and damage with gallium ion, when this cantilever was used, we confirmed there was no effect on the displacement sensing. B. MP-AFM instrumentation The instrument schematic of the developed MP-AFM using piezo-resistive cantilevers is shown in Fig. 2. The variation of the piezo-resistance of this cantilever is detected with a difference based on a homemade Wheatstone bridge circuit. This equipment was constructed under an optical microscope. An object lens was arranged on the probes; the position of each probe could be confirmed visually. The cantilever had a three-axis control slider, and each cantilever-probe could be independently driven. Dynamic mode AFM observation by each cantilever is achieved with this construction. Also, the observation by MP-AFM and evaluation of interaction of cantilever-probes were carried out at room temperature in an atmospheric condition. The frequency modulation (FM) detection method [14], where the frequency shift of the cantilever resonance detected by a PLL (phase locked loop) circuit was used [15], was employed in the feedback control of the distance between the probe and the sample surface. The FM detection method has several advantages in terms of the force sensitivity and response time, which is limited by the quality factor in the amplitude modulation (AM) detection method. In addition, we have succeeded in manufacturing the electric circuit to which the AM/FM detection technique is easily switched. In this study, we used the FM detection method that achieves high sensitivity when topography is observed and the AM detection method in evaluation of the interaction between cantilevers. In the MP-AFM, three-dimensional position control of the cantilever-probe is essential. We used a three-axis inertial slider (UMP-1000, Unisoku Corp.) for both coarse and fine positioning of each probe as shown in Fig. 2. This slider had two kinds of move-modes, and was used properly according to the distance. First, a single step motion of 100-1,000 nm is made by a stick-slip movement (SS mode) of the slider. The amount of displacement can be adjusted by the waveform of the driving signal. Second, the slider also produces continuous motion that can be controlled by applying an external DC voltage (DC mode). From the above]mentioned, such two sliders for twin-probes were basically prepared. These were same sliders that had been introduced in our previous study [9]. The sample was scanned by the tube scanner using an SPM controller (RHK Technology Ltd.: SPM-1000). Each topographic image is acquired in taking the signal output corresponding to the cantilever displacement from each FM detector. It is operated by the controller where the error signal from the FM detector had P-Gain and I-Gain, amplified with the high-voltage unit (Mess-tek Corp.: M-2629B) for the distance control between the probe and the sample, and applied to the piezoelectric element of the slider. The DC mode is used for positioning of the tips in the z-direction, which is the main feedback control in the AFM operation. Using these units in our previous study [9], we had already evaluated in terms of practicality for both the scanning control of the tube scanner and distance control of the cantilever-probe (J-Stage:
3 e-journal of Surface Science and Nanotechnology Volume 11 (2013) Deflection noise density [fm/ Hz] Frequency [khz] Experiment Fitting curve Thermal piezoresistive cantilever (1) piezoresistive cantilever (2) 200 µm FIG. 4: Optical microscope image set up on two cantilevers. FIG. 3: Frequency spectrum of the piezo-resistive cantilever in Brownian motion (Q = 511, f 0 = khz, k =40 N/m). B. Simultaneous observation III. RESULTS AND DISCUSSION A. The piezo-resistive cantilever in Brownian motion Figure 3 shows the frequency spectrum of the piezoresistive cantilever in Brownian motion. The points present experimentally measured values and blue-solid line is fitted with them. Moreover, the red-dotted line indicates theoretically calculated values [16]. The resonance-peak found in the spectrum corresponds to Brownian vibration at the cantilever with the background thermal-noise. The quality factor (Q) and the resonant frequency (f 0 ) of the cantilever calculated from the fitting curve were 511 and khz, respectively. The spring constant (k) of the cantilever applied to the calculation was assumed to be 40 N/m. The result revealed that the deflection noise density arising from the cantilever deflection measurement was 150 fm/ Hz at the room temperature in the atmospheric condition. We compared the measurement value with the theoretical deflection noise density. The Johnson noise of the piezo-resistance in the cantilever was 3.15 nv/ Hz and the converted input-voltage noise in the differential was approximately 4 nv/ Hz. By considering these characteristics, a theoretical deflection noise density was calculated with approximately 120 fm/ Hz. It was confirmed that the measurement was roughly corresponding to the theoretically value. The displacement sensitivity as the change-ratio of the piezo-resistance was converted with [nm 1 ]. Thereby, it was clarified that the cantilever deflection measurement had detection sensitivity to be able to acquire high-resolution image by having implemented the piezo-resistive cantilever to the MP- AFM compared with our previous study [9]. In the performance evaluation of multi-probe AFM, it is essential to obtain the information of the absolute coordinate of each probe [17]. We have prepared an address-patterned sample with an array of different microfabricated platinum patterns, each corresponding to a combination of two binary codes. The patterns were made of platinum films with a thickness of 5 nm and deposited on an Si substrate. The left eight and right eight patterns correspond to x and y coordinates, respectively. In addition, four peripheral rectangles give us information about the bit pattern directions without causing confusion. The whole sample consists of patterns separated with a spacing of 700 nm. The absolute position of the probe can be determined within an accuracy of 10 nm. Thus, the distance between the probes can be simply evaluated without microscopes. The performance comparison with the MP-AFM improvement was also facilitated by having used the address-patterned sample as our previous study [9]. Then, it can be visually confirmed by optical microscope that the two cantilevers have not contacted physically. Thereafter, piezo-resistive cantilever (1) and (2) are carefully brought close to the surface of the sample. Figure 4 shows an optical micrograph of two piezo-resistive cantilevers with the FIB fabricated, both of which were brought closer to each other by setting each slider. A simultaneous observation result by MP-AFM using piezo-resistive cantilever (1) and piezo-resistive cantilever (2) under the FM detection operations are shown to be comprehensible in pattern diagram of the address, and a schematic diagram of probe arrangement is shown in the inset of Fig. 5. It was confirmed respectively that the probe tip of piezo-resistive cantilever (1) is in the (131, 149) neighborhood, and it is in the (130, 151) neighborhood the probe tip of piezo-resistive cantilever (2) from Fig. 5. It could be calculated that the distance between probe-tips was 6.9 µm by comparison between these AFM simultaneous observation image and address patterns. (J-Stage: 15
4 Volume 11 (2013) Satoh, et al. 1.2 (132,148) (132,149) 6.9 µm (132,151) (131,151) Amplitude [arb. units] mv p-p 200 mv p-p 300 mv p-p (130,148) (130,149) (130,150) Displacement [nm] 200 (129,148) 3 µm (129,149) (129,150) (129,151) FIG. 6: Distance dependence of cantilever oscillation amplitude signal of cantilever (1). The blue circle, the green square and red triangle correspond to 100 mv p p, 200 mv p p, and 300 mv p p, respectively. FIG. 5: AFM images taken simultaneously using two independent probes. The upper-right image (a) was taken using cantilever (1), whereas cantilever (2) was used for (b). Absolute position identification of images obtained using address pattern. C. Interaction between cantilever-probes In ordinary electrical probe systems and multi-probe STMs, the distance between the probes is controlled manually under another microscope. However, it is significantly difficult to avoid contact of the probes in a manual control condition and to stably make the probe spacing within several nanometers. We have aimed at the application to a single molecular measurement, and are verifying the principle to develop the technique for controlling the probe spacing on the nanoscale. When the vibrating piezoelectric-cantilevers, as with other kinds of selfdetection type cantilevers, were located closely enough, vibration amplitudes can be interfered with because of the interaction forces acting on each other. In the case where the distance between piezoelectric cantilevers approaches 30 nm, we found the vibration amplitude signal of the cantilever decreases because there is mutual interference. Next, the method of making two opposed cantilevers approach each other is described. First, to evaluate only the interaction between two cantilevers, the effect of the sample surface is removed by giving enough separation between the sample and each cantilever. Second, piezoresistive cantilever (1) was vibrated at its resonant frequency. Also, piezo-resistive cantilever (2) was in a fixed position, without excitation vibration. Subsequently, this probe was made to approach roughly by the SS-mode during visual confirmation with the optical microscope. Finally, it was made to approach most by the DC mode, and contact was performed. The graph shown in Fig. 6 is plotted by excitation sig- nal intensity of moving piezo-resistive cantilever (1) as the vertical axis, and by the distance between opposed cantilevers as the horizontal axis. Here, it is assumed to be the contact point (0 nm) at which the amplitude vibration disappeared. The conversion ratio is 3 nm/v. To evaluate and perform the attenuation distance dependency by the vibration amplitude of the cantilever, the amount of vibration amplitude measured 100 mv p p, 200 mv p p, and 300 mv p p, respectively. First of all, it was confirmed that the interaction worked between probes of the piezo-resistive cantilever because the vibration amplitude decreased. It was confirmed that a decrease in the vibration amplitude began from about 40 nm when vibration amplitude was 100 mv p p. That is, it did as well as when the piezoelectric cantilever was used in our previous result [9]. In a word, by the comparison with our previous study, it was experimentally clarified that the interaction was not the phenomenon that depended on the structure and the material of the cantilever. Moreover, when the distance at which the attenuation was started was great, it was confirmed by an increase in the vibration of the piezo-resistive cantilever. It is suggested that the vibration of air by the cantilever causes some kind of interaction between the probes that reduces the vibration. Other possible explanations include the presence of water on the probe tip, which may cause shear force [18]. As future research, the phenomenon will be specified by using the difference of the condition in the liquid and/or vacuum besides the atmosphere while using the static mode operation, and the distance control between precise probes that aggressively use this effect will be achieved. IV. CONCLUSION Piezo-resistive cantilever probes that processed FIB and MP-AFM were developed. Distance between them 16 (J-Stage:
5 e-journal of Surface Science and Nanotechnology Volume 11 (2013) of 6.9 µm was confirmed by comparing the location information from the image acquired by each probe. Interaction was generated from the piezo-resistive cantilevers approaching each other on the nanoscale. The interaction between probes was not the phenomenon that depended on the structure of the cantilever or the material of the cantilever, it was experimentally shown. In addition, it was clarified that the strength of the interaction depended on the vibration amplitude of the cantilever-probe. Acknowledgments This research was partially supported by the Global Centre of Excellence program of Kyoto University (C09), and the Leading Project on the Development of Integrated Control System for Scanning Multiple-Probe Microscopy, MEXT. [1] T. Nakayama, O. Kubo, Y. Shingaya, S. Higuchi, T. Hasegawa, C.-S. Jiang, T. Okuda, Y. Kuwahara, K. Takami, and M. Aono, Adv. Mater. 24, 1675 (2012). [2] S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, and P. K. Hansma, J. Appl. Phys. 65, 164 (1987). [3] G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988). [4] E. Tsunemi, N. Satoh, Y. Miyato, K. Kobayashi, K. Matsushige, and H. Yamada, Jpn. J. Appl. Phys. 46, 5636 (2007). [5] E. Tsunemi, K. Kobayashi, K. Matsushige, and H. Yamada, Rev. Sci. Instrum. 82, (2011). [6] C. Lee, T. Itoh, and T. Suga, Sensors and Actuators A 72, 179 (1999). [7] T. Arai and M. Tomitori, Appl. Phys. A 72, S51 (2001). [8] M. Takihara, T. Igarashi, T. Ujihara, and T. Takahashi, Jpn. J. Appl. Phys. 46, 5548 (2007). [9] N. Satoh, E. Tsunemi, Y. Miyato, K. Kobayashi, S. Watanabe, T. Fujii, K. Matsushige, and H. Yamada, Jpn. J. Appl. Phys. 46, 5543 (2007). [10] T. Fujii and S. Watanabe, Appl. Phys. Lett. 68, 467 (1996). [11] F. Iwata, Y. Mizuguchi, K. Ozawa, and T. Ushiki, Jpn. J. Appl. Phys. 49, 08LB14 (2010). [12] S. Higuchi, H. Kuramochi, O. Kubo, S. Masuda, Y. Shingaya, M. Aono, and T. Nakayama, Rev. Sci. Instrum. 82, (2011). [13] M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993). [14] T. R. Albrecht, P. Grutter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991). [15] K. Kobayashi, H. Yamada, H. Itoh, T. Horiuchi, and K. Matsushige, Rev. Sci. Instrum. 72, 4383 (2001). [16] T. Fukuma, M. Kimura, K. Kobayashi, K. Matsushige, and H. Yamada, Rev. Sci. Instrum. 76, (2004). [17] W. Yashiro, I. Shiraki, and K. Miki, Rev. Sci. Instrum. 74, 2722 (2003). [18] E. Betzig, P. L. Finn, and J. S. Weiner, Appl. Phys. Lett. 60, 2484 (1992). (J-Stage: 17
attosnom I: Topography and Force Images NANOSCOPY APPLICATION NOTE M06 RELATED PRODUCTS G
APPLICATION NOTE M06 attosnom I: Topography and Force Images Scanning near-field optical microscopy is the outstanding technique to simultaneously measure the topography and the optical contrast of a sample.
More informationPhase modulation atomic force microscope with true atomic resolution
REVIEW OF SCIENTIFIC INSTRUMENTS 77, 123703 2006 Phase modulation atomic force microscope with true atomic resolution Takeshi Fukuma, a Jason I. Kilpatrick, and Suzanne P. Jarvis Centre for Research on
More informationStudy of shear force as a distance regulation mechanism for scanning near-field optical microscopy
Study of shear force as a distance regulation mechanism for scanning near-field optical microscopy C. Durkan a) and I. V. Shvets Department of Physics, Trinity College Dublin, Ireland Received 31 May 1995;
More informationA scanning tunneling microscopy based potentiometry technique and its application to the local sensing of the spin Hall effect
A scanning tunneling microscopy based potentiometry technique and its application to the local sensing of the spin Hall effect Ting Xie 1, a), Michael Dreyer 2, David Bowen 3, Dan Hinkel 3, R. E. Butera
More information- Near Field Scanning Optical Microscopy - Electrostatic Force Microscopy - Magnetic Force Microscopy
- Near Field Scanning Optical Microscopy - Electrostatic Force Microscopy - Magnetic Force Microscopy Yongho Seo Near-field Photonics Group Leader Wonho Jhe Director School of Physics and Center for Near-field
More informationBasic methods in imaging of micro and nano structures with atomic force microscopy (AFM)
Basic methods in imaging of micro and nano P2538000 AFM Theory The basic principle of AFM is very simple. The AFM detects the force interaction between a sample and a very tiny tip (
More informationAkiyama-Probe (A-Probe) guide
Akiyama-Probe (A-Probe) guide This guide presents: what is Akiyama-Probe, how it works, and what you can do Dynamic mode AFM Version: 2.0 Introduction NANOSENSORS Akiyama-Probe (A-Probe) is a self-sensing
More informationPACS Nos v, Fc, Yd, Fs
A Shear Force Feedback Control System for Near-field Scanning Optical Microscopes without Lock-in Detection J. W. P. Hsu *,a, A. A. McDaniel a, and H. D. Hallen b a Department of Physics, University of
More informationConstant Frequency / Lock-In (AM-AFM) Constant Excitation (FM-AFM) Constant Amplitude (FM-AFM)
HF2PLL Phase-locked Loop Connecting an HF2PLL to a Bruker Icon AFM / Nanoscope V Controller Zurich Instruments Technical Note Keywords: AM-AFM, FM-AFM, AFM control Release date: February 2012 Introduction
More informationAkiyama-Probe (A-Probe) guide
Akiyama-Probe (A-Probe) guide This guide presents: what is Akiyama-Probe, how it works, and its performance. Akiyama-Probe is a patented technology. Version: 2009-03-23 Introduction NANOSENSORS Akiyama-Probe
More informationXYZ Stage. Surface Profile Image. Generator. Servo System. Driving Signal. Scanning Data. Contact Signal. Probe. Workpiece.
Jpn. J. Appl. Phys. Vol. 40 (2001) pp. 3646 3651 Part 1, No. 5B, May 2001 c 2001 The Japan Society of Applied Physics Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION Piezoresistive AFM cantilevers surpassing standard optical beam detection in low noise topography imaging Maja Dukic, Jonathan D. Adams and Georg E. Fantner Contents I Dependence
More informationFukuma, Takeshi; Kimura, Masayuki; Matsushige, Kazumi; Yamada, Hirofum. Citation REVIEW OF SCIENTIFIC INSTRUMENTS (2.
Development of low noise cantilever Titlemultienvironment frequency-modulati microscopy Author(s) Fukuma, Takeshi; Kimura, Masayuki; Matsushige, Kazumi; Yamada, Hirofum Citation REVIEW OF SCIENTIFIC INSTRUMENTS
More informationINDIAN INSTITUTE OF TECHNOLOGY BOMBAY
IIT Bombay requests quotations for a high frequency conducting-atomic Force Microscope (c-afm) instrument to be set up as a Central Facility for a wide range of experimental requirements. The instrument
More informationAdvanced Nanoscale Metrology with AFM
Advanced Nanoscale Metrology with AFM Sang-il Park Corp. SPM: the Key to the Nano World Initiated by the invention of STM in 1982. By G. Binnig, H. Rohrer, Ch. Gerber at IBM Zürich. Expanded by the invention
More informationPark NX-Hivac: Phase-lock Loop for Frequency Modulation Non-Contact AFM
Park Atomic Force Microscopy Application note #21 www.parkafm.com Hosung Seo, Dan Goo and Gordon Jung, Park Systems Corporation Romain Stomp and James Wei Zurich Instruments Park NX-Hivac: Phase-lock Loop
More informationScanning force microscopy in the dynamic mode using microfabricated capacitive sensors
Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors N. Blanc, a) J. Brugger, b) and N. F. de Rooij Institute of Microtechnology (IMT), University of Neuchâtel, Jaquet-Droz
More informationA Project Report Submitted to the Faculty of the Graduate School of the University of Minnesota By
Observation and Manipulation of Gold Clusters with Scanning Tunneling Microscopy A Project Report Submitted to the Faculty of the Graduate School of the University of Minnesota By Dogukan Deniz In Partial
More informationPrepare Sample 3.1. Place Sample in Stage. Replace Probe (optional) Align Laser 3.2. Probe Approach 3.3. Optimize Feedback 3.4. Scan Sample 3.
CHAPTER 3 Measuring AFM Images Learning to operate an AFM well enough to get an image usually takes a few hours of instruction and practice. It takes 5 to 10 minutes to measure an image if the sample is
More informationMEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications
MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications Part I: RF Applications Introductions and Motivations What are RF MEMS? Example Devices RFIC RFIC consists of Active components
More informationMeasurement of Microscopic Three-dimensional Profiles with High Accuracy and Simple Operation
238 Hitachi Review Vol. 65 (2016), No. 7 Featured Articles Measurement of Microscopic Three-dimensional Profiles with High Accuracy and Simple Operation AFM5500M Scanning Probe Microscope Satoshi Hasumura
More informationCONSTRUCTING A SCANNING TUNNELING MICROSCOPE FOR THE STUDY OF SUPERCONDUCTIVITY
CONSTRUCTING A SCANNING TUNNELING MICROSCOPE FOR THE STUDY OF SUPERCONDUCTIVITY CHRISTOPHER STEINER 2012 NSF/REU Program Physics Department, University of Notre Dame Advisors: DR. MORTEN ESKILDSEN CORNELIUS
More informationComparison of resolution specifications for micro- and nanometer measurement techniques
P4.5 Comparison of resolution specifications for micro- and nanometer measurement techniques Weckenmann/Albert, Tan/Özgür, Shaw/Laura, Zschiegner/Nils Chair Quality Management and Manufacturing Metrology
More informationFigure for the aim4np Report
Figure for the aim4np Report This file contains the figures to which reference is made in the text submitted to SESAM. There is one page per figure. At the beginning of the document, there is the front-page
More informationCONSIDERATIONS FOR CRYOGENIC AFM OPERATION
White Paper MK-WP101_01 Sept 2017 CONSIDERATIONS FOR CRYOGENIC AFM OPERATION Authors: Ryan A. Murdick, Ph.D. Product Development Scientist at Montana Instruments Cryogenic environments increase the Q-factor
More informationNoise in combined optical microscopy and dynamic force spectroscopy: Toward in vivo hydration measurements
Noise in combined optical microscopy and dynamic force spectroscopy: Toward in vivo hydration measurements J. M. LeDue, a M. Lopez-Ayon, Y. Miyahara, S. A. Burke, b and P. Grütter The Department of Physics
More informationTip-induced band bending and its effect on local barrier height measurement studied by light-modulated scanning tunneling spectroscopy
e-journal of Surface Science and Nanotechnology 10 February 2006 e-j. Surf. Sci. Nanotech. Vol. 4 (2006) 192-196 Conference - ISSS-4 - Tip-induced band bending and its effect on local barrier height measurement
More information2D Asymmetric Silicon Micro-Mirrors for Ranging Measurements
D Asymmetric Silicon Micro-Mirrors for Ranging Measurements Takaki Itoh * (Industrial Technology Center of Wakayama Prefecture) Toshihide Kuriyama (Kinki University) Toshiyuki Nakaie,Jun Matsui,Yoshiaki
More informationAuthor(s) Issue Date Text Version author. DOI / /18/9/095501
Title Author(s) Citation Refinement of Conditions of Point-Contact Current Imaging Atomic Force Microscopy for Molecular-Scale Conduction Measurements Yajima, Takashi; Tanaka, Hirofumi; Matsumoto, Takuya;
More informationNanoscale Material Characterization with Differential Interferometric Atomic Force Microscopy
Nanoscale Material Characterization with Differential Interferometric Atomic Force Microscopy F. Sarioglu, M. Liu, K. Vijayraghavan, A. Gellineau, O. Solgaard E. L. Ginzton Laboratory University Tip-sample
More informationATOMIC FORCE MICROSCOPY
B47 Physikalisches Praktikum für Fortgeschrittene Supervision: Prof. Dr. Sabine Maier sabine.maier@physik.uni-erlangen.de ATOMIC FORCE MICROSCOPY Version: E1.4 first edit: 15/09/2015 last edit: 05/10/2018
More informationPreliminary study of the vibration displacement measurement by using strain gauge
Songklanakarin J. Sci. Technol. 32 (5), 453-459, Sep. - Oct. 2010 Original Article Preliminary study of the vibration displacement measurement by using strain gauge Siripong Eamchaimongkol* Department
More informationState of the Art Room Temperature Scanning Hall Probe Microscopy using High Performance micro-hall Probes
State of the Art Room Temperature Scanning Hall Probe Microscopy using High Performance micro-hall Probes A. Sandhu 1, 4, H. Masuda 2, A. Yamada 1, M. Konagai 3, A. Oral 5, S.J Bending 6 RCQEE, Tokyo Inst.
More informationUncertainty in measurements of micro-patterned thin film thickness using Nanometrological AFM - Reliability of parameters for base straight line -
Uncertainty in measurements of micro-patterned thin film thickness using Nanometrological AFM - Reliability of parameters for base straight line - Ichiko Misumi,, Satoshi Gonda, Tomizo Kurosawa, Yasushi
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION Supplementary Information Real-space imaging of transient carrier dynamics by nanoscale pump-probe microscopy Yasuhiko Terada, Shoji Yoshida, Osamu Takeuchi, and Hidemi Shigekawa*
More informationSENSOR+TEST Conference SENSOR 2009 Proceedings II
B8.4 Optical 3D Measurement of Micro Structures Ettemeyer, Andreas; Marxer, Michael; Keferstein, Claus NTB Interstaatliche Hochschule für Technik Buchs Werdenbergstr. 4, 8471 Buchs, Switzerland Introduction
More informationRealization of a Liquid Atomic Force Microscope
Realization of a Liquid Atomic Force Microscope Ivo de Rijk DCT 2008.004 Traineeship report Supervisor: prof. dr. H. Kawakatsu prof. dr. ir. M. Steinbuch Technische Universiteit Eindhoven Department Mechanical
More informationInvestigate in magnetic micro and nano structures by Magnetic Force Microscopy (MFM)
Investigate in magnetic micro and nano 5.3.85- Related Topics Magnetic Forces, Magnetic Force Microscopy (MFM), phase contrast imaging, vibration amplitude, resonance shift, force Principle Caution! -
More informationOutline: Introduction: What is SPM, history STM AFM Image treatment Advanced SPM techniques Applications in semiconductor research and industry
1 Outline: Introduction: What is SPM, history STM AFM Image treatment Advanced SPM techniques Applications in semiconductor research and industry 2 Back to our solutions: The main problem: How to get nm
More informationLiquid sensor probe using reflecting SH-SAW delay line
Sensors and Actuators B 91 (2003) 298 302 Liquid sensor probe using reflecting SH-SAW delay line T. Nomura *, A. Saitoh, T. Miyazaki Faculty of Engineering, Shibaura Institute of Technology, 3-9-14 Shibaura,
More informationSupplementary Figure S1. Schematic representation of different functionalities that could be
Supplementary Figure S1. Schematic representation of different functionalities that could be obtained using the fiber-bundle approach This schematic representation shows some example of the possible functions
More informationReal-time displacement measurement using VCSEL interferometer
Real-time displacement measurement using VCSEL interferometer Takamasa Suzuki, Noriaki Yamada, Osami Sasaki, and Samuel Choi Graduate School of Science and Technology, Niigata University, 8050, Igarashi
More informationModal Analysis of Microcantilever using Vibration Speaker
Modal Analysis of Microcantilever using Vibration Speaker M SATTHIYARAJU* 1, T RAMESH 2 1 Research Scholar, 2 Assistant Professor Department of Mechanical Engineering, National Institute of Technology,
More informationAnalysis of the process of anodization with AFM
Ultramicroscopy 105 (2005) 57 61 www.elsevier.com/locate/ultramic Analysis of the process of anodization with AFM Xiaodong Hu, Xiaotang Hu State Key Lab of Precision Measuring Techniques and Instruments,
More informationDevelopment of a Vibration Measurement Method for Cryocoolers
REVTEX 3.1 Released September 2 Development of a Vibration Measurement Method for Cryocoolers Takayuki Tomaru, Toshikazu Suzuki, Tomiyoshi Haruyama, Takakazu Shintomi, Akira Yamamoto High Energy Accelerator
More informationRHK Technology. Application Note: Kelvin Probe Force Microscopy with the RHK R9. ω mod allows to fully nullify any contact potential difference
Peter Milde 1 and Steffen Porthun 2 1-Institut für Angewandte Photophysik, TU Dresden, D-01069 Dresden, Germany 2-RHK Technology, Inc. Introduction Kelvin-probe force microscopy (KPFM) is an operation
More informationLarge Signal Displacement Measurement with an MTI Photonic Sensor Rev B
Radiant Technologies, Inc. 2835D Pan American Freeway NE Albuquerque, NM 8717 Tel: 55-842-87 Fax: 55-842-366 e-mail: radiant@ferrodevices.com www.ferrodevices.com Large Signal Displacement Measurement
More informationFundamental limits to force detection using quartz tuning forks
REVIEW OF SCIENTIFIC INSTRUMENTS VOLUME 71, NUMBER 7 JULY 000 Fundamental limits to force detection using quartz tuning forks Robert D. Grober, a) Jason Acimovic, Jim Schuck, Dan Hessman, Peter J. Kindlemann,
More informationNanonics Systems are the Only SPMs that Allow for On-line Integration with Standard MicroRaman Geometries
Nanonics Systems are the Only SPMs that Allow for On-line Integration with Standard MicroRaman Geometries 2002 Photonics Circle of Excellence Award PLC Ltd, England, a premier provider of Raman microspectral
More informationLOW TEMPERATURE STM/AFM
* CreaTec STM of Au(111) using a CO-terminated tip, 20mV bias, 0.6nA* LOW TEMPERATURE STM/AFM High end atomic imaging, spectroscopy and manipulation Designed and manufactured in Germany by CreaTec Fischer
More informationAkiyama-Probe (A-Probe) technical guide This technical guide presents: how to make a proper setup for operation of Akiyama-Probe.
Akiyama-Probe (A-Probe) technical guide This technical guide presents: how to make a proper setup for operation of Akiyama-Probe. Version: 2.0 Introduction To benefit from the advantages of Akiyama-Probe,
More informationPart 2: Second order systems: cantilever response
- cantilever response slide 1 Part 2: Second order systems: cantilever response Goals: Understand the behavior and how to characterize second order measurement systems Learn how to operate: function generator,
More informationIMAGING P-N JUNCTIONS BY SCANNING NEAR-FIELD OPTICAL, ATOMIC FORCE AND ELECTRICAL CONTRAST MICROSCOPY. G. Tallarida Laboratorio MDM-INFM
Laboratorio MDM - INFM Via C.Olivetti 2, I-20041 Agrate Brianza (MI) M D M Materiali e Dispositivi per la Microelettronica IMAGING P-N JUNCTIONS BY SCANNING NEAR-FIELD OPTICAL, ATOMIC FORCE AND ELECTRICAL
More informationElectric polarization properties of single bacteria measured with electrostatic force microscopy
Electric polarization properties of single bacteria measured with electrostatic force microscopy Theoretical and practical studies of Dielectric constant of single bacteria and smaller elements Daniel
More information; A=4π(2m) 1/2 /h. exp (Fowler Nordheim Eq.) 2 const
Scanning Tunneling Microscopy (STM) Brief background: In 1981, G. Binnig, H. Rohrer, Ch. Gerber and J. Weibel observed vacuum tunneling of electrons between a sharp tip and a platinum surface. The tunnel
More informationPhase Coherent Effect of UHV Dynamic Force Microscopy with Phase Locked. Oscillator
Phase Coherent Effect of UHV Dynamic Force Microscopy with Phase Locked Oscillator B. I. Kim, and S. S. Perry Department of Chemistry University of Houston Revised ( 09 14 99 ) Abstract Phase locked oscillator(plo)
More informationProfile Measurement of Resist Surface Using Multi-Array-Probe System
Sensors & Transducers 2014 by IFSA Publishing, S. L. http://www.sensorsportal.com Profile Measurement of Resist Surface Using Multi-Array-Probe System Shujie LIU, Yuanliang ZHANG and Zuolan YUAN School
More informationNear-field Optical Microscopy
Near-field Optical Microscopy R. Fernandez, X. Wang, N. Li, K. Parker, and A. La Rosa Physics Department Portland State University Portland, Oregon Near-Field SPIE Optics Microscopy East 2005 Group PSU
More informationLecture 20: Optical Tools for MEMS Imaging
MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 20: Optical Tools for MEMS Imaging 1 Overview Optical Microscopes Video Microscopes Scanning Electron
More informationNANOSCOPIC EVALUATION OF MICRO-SYSTEMS
NANOSCOPIC EVALUATION OF MICRO-SYSTEMS A. Altes 1, L.J. Balk 1, H.L. Hartnagel 2, R. Heiderhoff 1, K. Mutamba 2, and Ch. Thomas 1 1 Bergische Universität Wuppertal, Lehrstuhl für Elektronik, Wuppertal,
More informationApplications of Piezoelectric Actuator
MAMIYA Yoichi Abstract The piezoelectric actuator is a device that features high displacement accuracy, high response speed and high force generation. It has mainly been applied in support of industrial
More informationRadio-frequency scanning tunneling microscopy
doi: 10.1038/nature06238 SUPPLEMENARY INFORMAION Radio-frequency scanning tunneling microscopy U. Kemiktarak 1,. Ndukum 2, K.C. Schwab 2, K.L. Ekinci 3 1 Department of Physics, Boston University, Boston,
More informationKeysight Technologies Using Non-Contact AFM to Image Liquid Topographies. Application Note
Keysight Technologies Using Non-Contact AFM to Image Liquid Topographies Application Note Introduction High resolution images of patterned liquid surfaces have been acquired without inducing either capillary
More informationThree DOF parallel link mechanism utilizing smooth impact drive mechanism
Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 26 (2002) 289 295 Three DOF parallel link mechanism utilizing smooth impact drive mechanism Takeshi
More informationOptical Microscope. Active anti-vibration table. Mechanical Head. Computer and Software. Acoustic/Electrical Shield Enclosure
Optical Microscope On-axis optical view with max. X magnification Motorized zoom and focus Max Field of view: mm x mm (depends on zoom) Resolution : um Working Distance : mm Magnification : max. X Zoom
More informationSUPPLEMENTARY INFORMATION
Figure S. Experimental set-up www.nature.com/nature Figure S2. Dependence of ESR frequencies (GHz) on a magnetic field (G) applied in different directions with respect to NV axis ( θ 2π). The angle with
More informationControl of Induction Thermal Plasmas by Coil Current Modulation in Arbitrary-waveform
J. Plasma Fusion Res. SERIES, Vol. 8 (29) Control of Induction Thermal Plasmas by Coil Current Modulation in Arbitrary-waveform Yuki TSUBOKAWA, Farees EZWAN, Yasunori TANAKA and Yoshihiko UESUGI Division
More informationScanning Tunneling Microscopy
EMSE-515 02 Scanning Tunneling Microscopy EMSE-515 F. Ernst 1 Scanning Tunneling Microscope: Working Principle 2 Scanning Tunneling Microscope: Construction Principle 1 sample 2 sample holder 3 clamps
More informationHigh resolution measurements The differential approach
Electrical characterisation of nanoscale samples & biochemical interfaces: methods and electronic instrumentation High resolution measurements The differential approach Giorgio Ferrari Dipartimento di
More informationController Design for Z Axis Movement of STM Using SPM Control Software
Controller Design for Z Axis Movement of STM Using SPM Control Software Neena Tom, Rini Jones S. B Abstract Scanning probe microscopy is a branch of microscopy that forms images of surfaces using a physical
More informationSelf-navigation of STM tip toward a micron sized sample
Self-navigation of STM tip toward a micron sized sample Guohong Li, Adina Luican, and Eva Y. Andrei Department of Physics & Astronomy, Rutgers University, Piscataway, New Jersey 08854, USA We demonstrate
More informationIII III 0 IIOI DID IIO 1101 I II 0II II 100 III IID II DI II
(19) United States III III 0 IIOI DID IIO 1101 I0 1101 0II 0II II 100 III IID II DI II US 200902 19549A1 (12) Patent Application Publication (10) Pub. No.: US 2009/0219549 Al Nishizaka et al. (43) Pub.
More informationPhysics Faculty Publications and Presentations
Boise State University ScholarWorks Physics Faculty Publications and Presentations Department of Physics 5-1-1 Effects of Long-Range Tip-Sample Interaction on Magnetic Force Imaging: A omparative Study
More informationPotential sensitivities in frequency modulation and heterodyne amplitude modulation Kelvin probe force microscopes
Ma et al. Nanoscale Research Letters 2013, 8:532 NANO COMMENTARY Open Access Potential sensitivities in frequency modulation and heterodyne amplitude modulation Kelvin probe force microscopes Zong-Min
More informationMicroscopic Structures
Microscopic Structures Image Analysis Metal, 3D Image (Red-Green) The microscopic methods range from dark field / bright field microscopy through polarisation- and inverse microscopy to techniques like
More informationFabrication of a submicron patterned using an electrospun single fiber as mask. Author(s)Ishii, Yuya; Sakai, Heisuke; Murata,
JAIST Reposi https://dspace.j Title Fabrication of a submicron patterned using an electrospun single fiber as mask Author(s)Ishii, Yuya; Sakai, Heisuke; Murata, Citation Thin Solid Films, 518(2): 647-650
More informationChapter 30: Principles of Active Vibration Control: Piezoelectric Accelerometers
Chapter 30: Principles of Active Vibration Control: Piezoelectric Accelerometers Introduction: Active vibration control is defined as a technique in which the vibration of a structure is reduced or controlled
More informationJournal of Advanced Mechanical Design, Systems, and Manufacturing
Vol. 4, No. 1, 1 Improvement of Self-sensing Piezoelectric Actuator Control Using Permittivity Change Detection* Yusuke ISHIKIRIYAMA ** and Takeshi MORITA ** **Graduate School of Frontier Sciences, The
More informationDesign, Fabrication and Characterization of Very Small Aperture Lasers
372 Progress In Electromagnetics Research Symposium 2005, Hangzhou, China, August 22-26 Design, Fabrication and Characterization of Very Small Aperture Lasers Jiying Xu, Jia Wang, and Qian Tian Tsinghua
More informationattocfm I for Surface Quality Inspection NANOSCOPY APPLICATION NOTE M01 RELATED PRODUCTS G
APPLICATION NOTE M01 attocfm I for Surface Quality Inspection Confocal microscopes work by scanning a tiny light spot on a sample and by measuring the scattered light in the illuminated volume. First,
More informationAtomic Force Microscopy (Bruker MultiMode Nanoscope IIIA)
Atomic Force Microscopy (Bruker MultiMode Nanoscope IIIA) This operating procedure intends to provide guidance for general measurements with the AFM. For more advanced measurements or measurements with
More informationNanoFocus Inc. Next Generation Scanning Probe Technology. Tel : Fax:
NanoFocus Inc. Next Generation Scanning Probe Technology www.nanofocus.kr Tel : 82-2-864-3955 Fax: 82-2-864-3956 Albatross SPM is Multi functional research grade system Flexure scanner and closed-loop
More informationLateral Force: F L = k L * x
Scanning Force Microscopy (SFM): Conventional SFM Application: Topography measurements Force: F N = k N * k N Ppring constant: Spring deflection: Pieo Scanner Interaction or force dampening field Contact
More informationMEMS Optical Scanner "ECO SCAN" Application Notes. Ver.0
MEMS Optical Scanner "ECO SCAN" Application Notes Ver.0 Micro Electro Mechanical Systems Promotion Dept., Visionary Business Center The Nippon Signal Co., Ltd. 1 Preface This document summarizes precautions
More informationConductance switching in Ag 2 S devices fabricated by sulphurization
3 Conductance switching in Ag S devices fabricated by sulphurization The electrical characterization and switching properties of the α-ag S thin films fabricated by sulfurization are presented in this
More informationUnderground M3 progress meeting 16 th month --- Strain sensors development IMM Bologna
Underground M3 progress meeting 16 th month --- Strain sensors development IMM Bologna Matteo Ferri, Alberto Roncaglia Institute of Microelectronics and Microsystems (IMM) Bologna Unit OUTLINE MEMS Action
More informationNano Beam Position Monitor
Introduction Transparent X-ray beam monitoring and imaging is a new enabling technology that will become the gold standard tool for beam characterisation at synchrotron radiation facilities. It allows
More informationSchool of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei, China 2
59 th ILMENAU SCIENTIFIC COLLOQUIUM Technische Universität Ilmenau, 11 15 September 2017 URN: urn:nbn:de:gbv:ilm1-2017iwk-009:9 Low-Frequency Micro/Nano-vibration Generator Using a Piezoelectric Actuator
More informationNovel piezoresistive e-nose sensor array cell
4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria Novel piezoresistive e-nose sensor array cell V.Stavrov a, P.Vitanov b, E.Tomerov a, E.Goranova b, G.Stavreva a
More informationeasypll UHV Preamplifier Reference Manual
easypll UHV Preamplifier Reference Manual 1 Table of Contents easypll UHV-Pre-Amplifier for Tuning Fork 2 Theory... 2 Wiring of the pre-amplifier... 4 Technical specifications... 5 Version 1.1 BT 00536
More informationActive mechanical noise cancellation scanning tunneling microscope
REVIEW OF SCIENTIFIC INSTRUMENTS 78, 073705 2007 Active mechanical noise cancellation scanning tunneling microscope H. Liu, Y. Meng, H. W. Zhao, and D. M. Chen a Beijing National Laboratory for Condensed
More informationDevelopment of innovative fringe locking strategies for vibration-resistant white light vertical scanning interferometry (VSI)
Development of innovative fringe locking strategies for vibration-resistant white light vertical scanning interferometry (VSI) Liang-Chia Chen 1), Abraham Mario Tapilouw 1), Sheng-Lih Yeh 2), Shih-Tsong
More informationDesign and experimental validation of a linear piezoelectric micromotor for dual slider positioning
DOI.7/s5-6-88-8 TECHNICAL PAPER Design and experimental validation of a linear piezoelectric micromotor for dual slider positioning Yuxin Peng, Huiying Wang Shu Wang Jian Wang Jie Cao Haoyong Yu Received:
More informationCharacterization of Silicon-based Ultrasonic Nozzles
Tamkang Journal of Science and Engineering, Vol. 7, No. 2, pp. 123 127 (24) 123 Characterization of licon-based Ultrasonic Nozzles Y. L. Song 1,2 *, S. C. Tsai 1,3, Y. F. Chou 4, W. J. Chen 1, T. K. Tseng
More informationCutting-edge Atomic Force Microscopy techniques for large and multiple samples
Cutting-edge Atomic Force Microscopy techniques for large and multiple samples Study of up to 200 mm samples using the widest set of AFM modes Industrial standards of automation A unique combination of
More informationThree-dimensional imaging with optical tweezers
Three-dimensional imaging with optical tweezers M. E. J. Friese, A. G. Truscott, H. Rubinsztein-Dunlop, and N. R. Heckenberg We demonstrate a three-dimensional scanning probe microscope in which the extremely
More informationSupporting Information
Strength of recluse spider s silk originates from nanofibrils Supporting Information Qijue Wang, Hannes C. Schniepp* Applied Science Department, The College of William & Mary, P.O. Box 8795, Williamsburg,
More informationNOISE IN MEMS PIEZORESISTIVE CANTILEVER
NOISE IN MEMS PIEZORESISTIVE CANTILEVER Udit Narayan Bera Mechatronics, IIITDM Jabalpur, (India) ABSTRACT Though pezoresistive cantilevers are very popular for various reasons, they are prone to noise
More informationMEMS-based Micro Coriolis mass flow sensor
MEMS-based Micro Coriolis mass flow sensor J. Haneveld 1, D.M. Brouwer 2,3, A. Mehendale 2,3, R. Zwikker 3, T.S.J. Lammerink 1, M.J. de Boer 1, and R.J. Wiegerink 1. 1 MESA+ Institute for Nanotechnology,
More informationOptimal Preamp for Tuning Fork signal detection Scanning Force Microscopy. Kristen Fellows and C.L. Jahncke St. Lawrence University
Optimal Preamp for Tuning Fork signal detection Scanning Force Microscopy Kristen Fellows and C.L. Jahncke St. Lawrence University H. D. Hallen North Carolina State University Abstract In scanning probe
More information