Gen-1 Nanoprobes for Ephys

Transcription

1 Caltech / CEA-LETI Gen-1 Nanoprobes for Ephys ( Details of Run ) California Institute of Technology California Institute of Technology

2 A. General images. 1. INITIAL LAYOUTS (with new probe-architecture identifier) N.A. G1-P11 G1-P06 G1-P07 G1-P09 G1-P01 G1-P10 N.A. G1-P03 G1-P08 N.B. Above, N.A. denotes a pattern that was not used for the Gen-1 run California Institute of Technology 1

3 2. FINAL STEPPER FIELD EMPLOYED G1-P01 G1-P06 G1-P09 G1-P11 G1-P07 G1-P10 G1-P03 G1-P08 Reticle size = 21.7 mm 21.7 mm California Institute of Technology 2

4 3. PROBE HEAD / 256-CONTACT-PAD ARRAY 256 contacts in a array; total size of field = 3.1mm 3.1mm 4. MAGNIFIED VIEW / CONTACT PAD ARRAY contact pad diameter = 100μm; array pitch = 200μm California Institute of Technology 3

5 3. MISCELLANEOUS IMAGES Magnified views: Shank tip detail: California Institute of Technology 4

6 B. Electrode Details. 6μm 14μm; ovoid California Institute of Technology 5

7 C. Probe Layouts. G1-P01 (Original ID: Probe_LETI_001) Single shank; shank length = 6.5mm; single line of edge electrodes ~5.5μm from edge; electrodes distributed over 5.126mm of shank length; electrode dimensions = 6μm 14μm; 256 electrodes; electrode pitch = 20μm California Institute of Technology 6

8 G1-P03 (Original ID: Probe_LETI_003) 4-shank array; shank length = 6mm; inter-shank separation = 1.0mm Each shank: single line of edge electrodes 5.0μm from edge; over 3.2mm length; electrode dimensions = 6μm 14μm; electrode pitch = 50μm California Institute of Technology 7

9 G1-P06 (Original ID: Probe_LETI_006) 4-shank array; shank length = 5mm; inter-shank spacing = 500μm Each shank: single line of edge electrodes 5.0μm from edge; over 3.2mm length; electrode dimensions = 6μm 14μm; electrode pitch = 30.5μm California Institute of Technology 8

10 G1-P07 (Original ID: Probe_LETI_007) 4-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 64 electrodes as an interleaved double column of edge electrodes; 5.0μm and 21μm from edge; spanning 782μm length; electrode dimensions = 6μm 14μm; electrode pitch = 24.0μm in column, 16μm between columns California Institute of Technology 9

11 G1-P07, cont d (Original ID: Probe_LETI_007) California Institute of Technology 10

12 G1-P08 (Original ID: Probe_LETI_008) 8-shank array; shank length = 5mm; shank pitch = 500μm Each shank: single line of edge electrodes 5.0μm from edge; over 1.567mm length; 32 electrodes/shank; electrode dimensions = 6μm 14μm; electrode pitch = 50μm California Institute of Technology 11

13 G1-P09 (Original ID: Probe_LETI_009) 8-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 32 electrodes as an interleaved double column of edge electrodes; 5.0μm and 21μm from edge; spanning 376μm length; electrode dimensions = 6μm 14μm; electrode pitch = 24.0μm in column, 16μm between column; staggered California Institute of Technology 12

14 G1-P10 (Original ID: Probe_LETI_010) 4-shank array; shank length = 5mm; shank pitch = 500μm. Each shank: Alternating electrode patterns on each shank. Specifically, from the tip: a) a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed over an 864μm length; followed by a 82μm gap between the next pattern. b) Pattern a (above) is then followed by a pair of offset electrode columns, each with 22 electrodes that are distributed over a 504μm length with a 24μm pitch. The electrode pattern for b above has the following layout: California Institute of Technology 13

15 c) After pattern b above, there is a 90.5μm gap to next pattern d, shown below. d) Pattern b above is followed by a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed over an 878μm length. e) A detailed view of the third and final electrode pattern California Institute of Technology 14

16 G1-P11 (Original ID: Probe_LETI_011) 4-shank array; shank length = 6mm; shank pitch = 500μm Each shank: single line of 64 edge electrodes 5.0μm from edge; over 4.109mm length; electrode dimensions = 6μm 14μm; electrode pitch = 65μm California Institute of Technology 15