Introduction to MEMS. I) Course goals Information sources III) Course outline. Course Goals. Introduction to Micro/nano world.

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1 Introduction to MEMS Instructor: Prof. T.S. Leu ( 呂宗行 ) Department of Aeronautics and Astranautics Course ID: P tsleu@mail.ncku.edu.tw Sep. 2014~Jan Lecture hours: Office hours: Friday afternoon 1:30 ~2:30 I) Course goals II) Information sources III) Course outline IV) Homework and Exam policy Course Goals Introduction to Micro/nano world. Basic IC and micro/nano fabrication. Non IC-based micro/nano machining. MEMS applications: - micro sensors & micro actuators -micro systems Micro/Nano technology applications Global activities around the world! 1

2 Textbook and Paper Collections Textbooks: Fundamental of microfabrication by Marc Madou, CRC press, New York, 2002 Paper collections: Transducers 91, Digest of Technical Papers, 1991, International Conference on solid state sensors and actuators. Microsensors, edited by R. S. Muller et al, IEEE Press 1989 Micromechanics i and MEMS-classic and seminal papers to 1990 edited d by W. S. Trimmer, IEEE Reference Fabrication R.C. Jaeger, Introduction to Microelectronics Fabrication, Addison-Wesley, S.M. Sze, VLSI Technology, MacGraw Hill Inc, 1987 S.M. Sze, Semiconducor Devices Physics and Technology S.M. Sze, Physics of Semiconducor Devices 1981 莊達人, VLSI 製造技術 S.K. Ghandi, VLSI Fabrication Principles. John Wiley & Sons: New York (1983) P.V. Zant, Microchip fabrication S.A. Campbell and H.J. Lewerenz, Semiconductor Micromachining Vol2 Techniques and Industrial Applications Q.Y. Tong and U. Gosele, Semiconductor Wafer Bonding R.S. Muller and T.I. Kamins, "Device Electronics for Integrated Circuits", 2nd edition, Wiley, New York, D. Schroeder, Characterization of Semiconductor Devices and Materials J.P. Uyemura, Physical Design of CMOS Integrated Circuits Using L-EDIT Runyan and Bean, Semiconductor Integrated Circuit Processing Technology Maissel, Handbook of Thin Film Technology Vossen and Kern, Thin Film Processes Ko et al.(eds.), Micromachining and micro packaging Sensors Semiconductor Sensors by S. M. Sze Microsensors- Principles and Applications, by J. W. Gardner, Wiley 1996 Gregory T. A. Kovacs, Micromachined Transducer Sourcebook, 1998 A. Khazan, Transducers and their Elements, PTR Prentice Hall, L. Ristic, Sensors technology and devices, Artec House, 1994 R. Rallas-Areny and J. G. Webster, Sensors and Signal Conditioning, Wiley, S. Middelhoek and Van der Spiegel (eds.), Sensors and Actuators Harashima (ed.), Integrated Micro-motion Systems The AIP Handbook of Modern Sensors Grandke and Ko (Eds.), Sensors, Fundamentals and General Aspects. Volume 1 of the series "Sensors". Series editors G`pel et al. Bau, Kloeck and De Rooij (Eds.), Mechanical Sensors. Volume 7 of the series "Sensors". Series editors G`pel et al. Silicon Sensors and Microstructures, Lucas Novasensor. The Future of Micrcosensors and Microactuators, Sensors and Actuators A (Physical), vol.a56, no

3 Micromachined Transducers Meetings Journals Journals with a primary focus in MEMS(NEMS) areas: Journal of Microelectromechnaical Systems (JMEMS) Journal of Nanotechnology Journal of Micromechanics and Microengineering Microsystem Technologies: Sensors, Actuators, Systems Integration Journal of Smart Materials and Structures Sensors and Actuators A (Physical) Sensors and Actuators B (Chemical) Sensors and Actuators C (Material) Journals with information of interest to the MEMS (NEMS) community: ( ) y IEEE Electron Device Letters Journal of Electrochemical Society Journal of Vacuum Society Proceedings of SPIE International Society for Optical Engineering Journal of Analytical Chemistry 3

4 On-Line Resources - MEMS and Nanotechnology Exchange. - MOSIS foundry service. - MEMS research projects funding source in USA MEMS/Nano clearinghouse BBS at ISI of USC. (Job opening) Analog Devices: MEMS Sensors imems Accelerometers imems Intelligent MicroElectroMechanical Systems at Sandia National Laboratoriess. Fundamentals of Microfabrication Marc Madou Appendix B shows most of MEMS related web page addresses. Introduction to MEMS Course Outline Lecture 1 : Introduction to microscopic world course introduction; scaling; world in microscale; video Lecture 2~6: Basics of IC fabrication and MOS process for IC; thin film coating; lithography; etching; MOS devices Lecture 7~9: Bulk niicromachining crystallography; directional etching; selective etching; applications Lecture 10: Mid-term Examination Lecture 11: Surface micromachining sacrificial layer concept; thin films; selective wet etching; dry etching; non-si machining Lecture 12: Mechanical properties of thin films thin films; residual stress/strain; measurement techniques Lecture 13: Applied techniques combined machining; flip-up p structures; encapsulation; tip sharpening; wafer bonding Lecture 14: Non IC-based micromachining Micro-EDM; Micro-Electroplating; Micro-stereo-lithography Lecture 15 MEMS Applications micro-systems Lecture 16: Activities around the world What and how do they work on? Lecture 17: Final Exam 4

5 Grade Policy Quiz & Assignments 1 40% Midterm exam 30% Final Exam (Jan. 15, 2015) 30% (Total of 100%) 1. Quiz & Assignment includes reading, research, and problem solving. (60% for all late assignments) 2.. Lecture notes can be downloaded from tw/~aeromems/index htm 5