SCME s Microsystems and MEMS Educational Resources

Transcription

1 SCME s Microsystems and MEMS Educational Resources Dr. Matthias Pleil University of New Mexico, Albuquerque, NM Made possible through a grant from the National Science Foundation DUE

2 MEMS in STEM The Southwest Center for Microsystems Education (SCME) strives to increase the educational capacity to produce technologists skilled in assisting microsystem research, design, and commercialization activities.

3 Why Teach About Microsystems?

4 What are MEMS? MEMS = Micro-electro-mechanical-systems Microsystems is all encompassing MEMS Micro-optics Microfluidics Biomolecular Semiconductors Microfluidics Channels and chambers [Courtesy of Luke UC-Berkeley] Waveguides for RF and microwaves, optics and fluids [Courtesy of Sandia National Laboratories] MEMS 3-axes accelerometer with electronic interface, used for airbag deployment [Courtesy of Sandia National Laboratories]

5 What are MEMS? Micro-Optics: Digital Mirror Device (DMD) Digital projection, optical metrology, and optical networking [Images courtesy of Texas Instruments] Microfluidics: Cell Culture Environments A microenvironment for growing cells in vitro and in parallel, allowing for the analysis of multiple cell growth conditions. [Developed by and courtesy of BioPOETS Lab, UC-Berkeley] See the MEMS Applications Overview Learning Module

6 Why Do We Care?

7 Industry Tech Demand New Hires/Positions projected Large scale enterprises: 10% Medium scale enterprises: 20-50% Small scale (startups): 100% Supports evolving STEM programs to include MEMS elements.

8 Heat Map of MNT Industries

9 How are MEMS made? In a Clean Room Cleaner than an operating room! With High Tech Equipment! Requiring all kinds of STEM skills!

10 How are MEMS Made? Three major methods: Surface Micro Machining Bulk Micromachining LIGA Additional technologies Laser machining Plastic injection molding Micro machining Biochip slide for testing protein arrays [Image courtesy of Argonne National Laboratories]

11 What do you need to know? SCME used a reverse engineering approach: What does a MEMS Technologist need to know to fabricate a MEMS device and understand how it works? We leveraged the fabrication process of a simple micro-pressure sensor as a guide to constructing a series of educational modules!

12 Picked a classic device! Pressure Sensor Classic Theory of operation Wheatstone Bridge, strain, pressure Electronics, Physics, Materials Surface & Bulk Fabrication MEMS Blood Pressure Sensors on the head of a pin. [Photo courtesy of Lucas NovaSensor, Fremont, CA] SCME Pressure Sensor

13 Pressure Sensor Used to construct a series of educational modules to teach MEMS fabrication technologies and applied electronics (Wheatstone Bridge) Simple two-mask process includes: Thin Film Deposition Photolithography & Etch Liftoff Evaporation DRIE and Anisotropic Wet Etch

14 Pressure Sensor Process

15 Fabrication Topics Understanding the fabrication of a pressure sensor requires these learning modules: Cleanroom Fabrication Process Photolithography Dry and Wet Etch Thin Film Deposition & Oxidation Materials Electronics Wheatstone Bridge Transducer principals Safety Hazardous Materials Chemical Lab Safety Material Safety Data Sheet Interpreting Labels Personal Protective Equipment MTTC Safety Course

16 Some Additional Topics What are MEMS and where are they used? Application Overview BioMEMS Overview How do they Work? Micro-Cantilever & Pressure Sensor Micro-pumps What is the history of microsystems? History of MEMS

17 SCME Resources

18 SCME s Approach Learning Modules made up of SCO s

19 Classic Education Materials We create Educational Materials in a modular format to facilitate scaling, loosely based on a SCORM concept. Learning Modules consist of Instructor and Student guides. Primary Knowledge SCO s PK s Reading materials Activity SCO s Worksheets, homework, Assessment SCO s Quizes.

20 KITS The kits were developed initially to bring the cleanroom concepts into the classroom and give students as much hands-on experiences as possible.

21 Not just theory!

22 Crystallography Activities

23 Application: Anisotropic Etching It s a Kit! To Understand this, you need to understand Crystallography!

24 Liftoff

25 PS Model Kit

26 Science of Thin Films: Rainbow Wafer Oxide Growth Thin Film Etch Etch Rate, Graphing Thin Film Interference

27 PS Process Pressure sensor process from bare silicon to a finished device! Die from 10 steps for students to match to the documentation

28 Other Kits Gene Chip Cantilever Kit Frequency Vs L, W, T & Materials Data Acquisition & Analysis Writing, Team work LIGA - Lithography & Electroplating MEMS Innovators

29 Professional Development HOLA - Online Short Courses! 4 & 5-day cleanroom workshops 2-day workshops 1-day workshop Conference Presentations and workshops Created hubs at other colleges to teach workshops Webinars Mentoring

30 SCME Hands-online Academy HOLA is a venue to train and develop a broader learning community 2016 Hands-online course offerings Career Pathways for MicroTechnology Crystallography w/bulk Micromachining Microcantilevers BioMEMS Applications Micro Pressure Sensors Science of Thin Films More to come in 2017! (HOLA)

31 Face-to-Face Professional Development vs. HOLA Year Instructors 4 year Instructors Secondary Instructors Total Face-to-Face Instruction HOLA Instruction

32 Hands-online Academy HOLA All six courses are asynchronous 24/7 access to any of the open courses Courses are free of charge Participants are provided with educational materials needed to teach STEM concepts using microsystems applications 5 of the 6 courses utilize a SCME kit Participants can request a kit for free The course provides training on how to perform the kit activity SCME provides coaching on implementing the kit activity in the STEM classroom Moodle Distance Learning Platform

33 Who is using Hands-online Academy? HOLA has over 650 registered participants 33 states 12 countries outside US: Canada, Mexico, Germany, Ireland, Norway, Slovakia, India, Singapore, Korea, & Malaysia, Spain, Vietnam 483 registered in 2 or more courses 192 unique individuals registered in HOLA courses 171 unique US registrants 21 unique International registrants

34 Who is using Hands-online Academy? 1

35 PS Cleanroom Workshop Educators 4-5 Day Workshop Cleanroom Safety and Protocol Processing Kits to bring to the classroom Cleanroom Sites: UNM s MTTC CVTC USF NREC NDSCS UM LNF SLCC (UofU)

36 Art Wafer Simple ½ day activity - Make a mask - Pattern/etch an oxide wafer - Cleanroom Protocol and Safety - Basic processing

37 What can SCME do for you? Shareable Content Objects (SCOs) Informational Units / lessons Supporting activities Supporting assessments 40 + Learning Modules Safety Microsystems Introduction Microsystems Applications Bio MEMS Microsystems Fabrication 12 Instructional Kits + refills All are scme-nm.org

38 Main Website - Educational Materials - Kits - Events - Main Menu - Industry Mapping & Career Links - Social Media links - Other Links Centers, Industry, YouTube

39 Hands-on Kit Store Applications Concepts Series Hands-on Kits SCME Website Industry Maps Educational Materials Therapuetics Diagnostics BioMEMS NEW: Hands-online Career Links Events Calendar Overview MNT Conference Bioterrorism Apps MSDS ATMAE - MNT Focus Group Online Meetings Hazerdous Materials PPE Cleanoom Safety & Protocol UA MEMS Design Competition Online Mentoring & Education Webinars on Demand Moodle Courses Photolithography Workshops Etch Learning Modules Duncan's Blog LIGA Problem Solving MEMS Fabrication Social Media Matt's Twitter MEMS HS Facebook Deposition Crystallography MEMS Applications/History Units of Weights & Measures Sensors/Actuators Making Micro Machines Pressure Sensor Fabrication Introductory SCME Resources Matt's Blog Matt's LinkedIn SCME YouTube Video Matt's YouTube SCME - Not just a Website

40 Educational Materials Downloads Over 250 documents 38 Learning Modules 12 Kits For a complete listing, see Learning Modules Catalogue SCME Document Downloads by Month Corrected for Repeated Downloads Through October k Unique Downloads Total Downloads/Month by Year Monthly Download Average 2010 Average 2011 Average 2012 Average 2013 Average 2014 Average Nov-09 Nov-09 Dec-09 Jan-10 Feb-10 Mar-10 Mar-10 Apr-10 May-10 Jun-10 Jul-10 Aug-10 Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Dec-10 Jan-11 Feb-11 Mar-11 Apr-11 May-11 May-11 Jun-11 Jul-11 Aug-11 Sep-11 Oct-11 Oct-11 Nov-11 Dec-11 Jan-12 Feb-12 Feb-12 Mar-12 Apr-12 May-12 Jun-12 Jul-12 Jul-12 Aug-12 Sep-12 Oct-12 Nov-12 Nov-12 Dec-12 Jan-13 Feb-13 Mar-13 Apr-13 Apr-13 May-13 Jun-13 Jul-13 Aug-13 Sep-13 Sep-13 Oct-13 Nov-13 Dec-13 Jan-14 Jan-14 Feb-14 Mar-14 Apr-14 May-14 Jun-14 Jun-14 Jul-14 Aug-14 Sep-14 Oct-14 Oct-14 Nov-14 Dec-14 Jan-15 Feb-15 Mar-15 Mar-15 Apr-15 May-15 Jun-15 Jul-15 Aug-15 Aug-15 Sep-15 Oct-15 Nov-15 Dec-15 Dec-15 Jan-16 Feb-16 Mar-16 Apr-16 May-16 May-16 Jun-16 Jul-16 Aug-16 Sep-16 Sep-16

41 Who s Downloading? IP Heat Map ~6k Downloads/month 40k Unique IP addresses

42 YouTube Channel

43 YouTube Views #2 search engine on the planet Subscribers Matt s YouTube

44 Industry Clickable Map

45 Online Resources Skills and Needs

46 Take a Tour!

47 Questions? Matthias W. Pleil (505) Find me on LinkedIn too!