Capacitive sensing CEE575

Transcription

1 Capacitive sensing CEE575

2 Before we begin Michael Faraday ( )

3 Before we begin Michael Faraday holding a glass bar of the type he used in 1845 to show that magnetism can affect light in a dielectric material Michael Faraday ( )

4 Capacitors It turns out, as you probably guessed, that capacitance, like resistance is affected by an number of physical phenomena. Below are pictures of capacitors, which you may have seen in your personal home electronics. Unfortunately, these capacitors are high quality, which means they do not change easily in respect to changing environmental conditions. To use them as sensors we need to use bad capacitors.

5 Uses of capacitive sensors Proximity Level Displacement or position Pressure/flow Humidity Acceleration

6 Example uses of capacitive sensing Touch screens

7 Accelerometers

8 Humidity and soil moisture Soil moisture Humidity

9 More Pressure Occupancy (determine if patient is in bed)

10 See board Notes More on capacitive sensors CEE575

11 Measuring moisture Air quality Hydrology Ecology

12 Measuring humidity In-air moisture can be measured through a hygrometer Basic electrical principle: Resistance changes as a function of humidity Sir John Leslie ( )

13 Relative Humidity (through resistance) Where Pw is the partial pressure of water vapor and Ps is the pressure of saturated water vapor at a given temperature.

14 Hygristors (hygrometers) Resistances of many nonmetal conductors generally depend on their water content The sensor contains a material of relatively low resistivity which changes significantly under varying humidity conditions. The material is deposited on the top of two interdigitized electrodes to provide a large contact area. When water molecules are absorbed by the upper layer, resistivity between the electrodes changes and can be measured by an electronic circuit (Fradden). The first such sensor was developed by F. W. Dunmore in 1935; it was a hygroscopic film consisting of 2 5% aqueous solution of LiCl. Another example of a conductive humidity sensor is the so- called Pope element, which contains a polystyrene film treated with sulfuric acid to obtain the desired surfaceresistivity characteristics

15 Examples Hygristors

16 Humidity sensor example

17 Humidity sensor response and transfer func.

18 Example We ll get to this later, but this is how we will hook things up when we re ready

19 See board Notes More on capacitive sensors CEE575

20 Properties of capacitive cylinders (see notes)

21 Water level sensor To get the total capacitance of the cylinder, we just add together the dry and wet portions L

22 Capacitive water depth sensor For the simple plate capacitors we ve seen thus far, the geometry factor GF was simply A/d, where A is the area of the capacitor plates, and d is their spacing Simple Geometry factor For more complex geometries it is not much more difficult to derive the geometry factor The geometry factor of a capacitor can be determined easily through first order physical relations (e.g see Gauss Law in your physics textbook)

23 How to derive the capacitance for this geometry To get the capacitance for this geometry, we integrate the charges across these areas and then use our basic capacitance equation If this seems confusing, please come see me or check your physics book

24 Water level sensor The total capacitance flatlines until we reach a water level h0 since there is no water in the capacitor gap (all air).

25 Example capacitive level sensors There are many geometries, but the basic physical principles remain the same Two plate versions

26 See board Notes More on capacitive sensors CEE575

27 Soil moisture The dielectric constant of a soil is directly related to its water content (soil moisture) Most sensors give one main calibration constant/equation, but to get very accurate results you should always calibrate the sensors in lab using soil from the field Source: Dielectric properties of soils (Cihlar 1974)

28 But you may as well just get the digital versions - All the data processing in on board. Simple sensor geometry. - DecagonMPS-1, also used for water potential, but just outputs a digital signal that can be read by a computer

29 Decagon Spoil moisture sensor (analog output) Capacitive sensor whose output is a frequency signal The higher the frequency, the higher the capacitance (more on this later) Vo Capacitor plates V

30 Pressure sensor ds

31 fd

32 Commercial products Mad by Setra

33 Occupancy Sensors See Fraden for more details

34 More occupancy sensing ds Source: Armin Satz, Infineon

35 Occupancy detection in cars

36 Acceleration Inertial navigation - If we are able to obtain the value of the acceleration at every instant, then, given the initial conditions, two time integrations can be done in real time to yield the position Vibration monitoring vibrations can tell us a lot about the health of machine equipment, structures, or even the motion of the earth Event detection safety applications (air bag deployment) Netwon ( ) Robert Hook (Hooke s law)

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39 Applications

40 Use of accelerometers is very common

41 CEE applications Pipe monitoring Structural health monitoring Seismic Monitoring

42 Mass damper model Astronautics/16-07Fall-2004/F232D28F-ECBB-43DF-8252-

43 See course notes Accelerometer fundamentals

44 Capacitive displacement sensor examples Source: Piezo, Nano, Positioning

45 Mass Damper physics Relative Displacement Time Let Natural frequency Think of this as the main center of energy Damping ratio Determines how quickly we stop once the mass begins to move Source: Wiki

46 More on the natural frequency Amplification Natural frequency Think of this as the main center of energy Natural Frequency In an accelerometer, resonance frequency can mask developing faults More on this later

47 See course notes Accelerometer fundamentals

48 Commercial units (there are many) Kistler Memsic ST Analog Devices

49 Conceptual example Depending on its physical characteristics, the amplitude of the output of an accelerometer may be affected by the input frequency We need to be careful about this, because we don t want our acceleration (or nearby vibrations) to be attenuated or amplified More:

50 Conceptual example Depending on its physical characteristics, the amplitude of the output of an accelerometer may be affected by the input frequency We need to be careful about this, because we don t want our acceleration (or nearby vibrations) to be attenuated or amplified Amplifies input Attenuates input Flat/linear region (nice) Attenuates input More:

51 Bandwidth Manufacturers often refer to this nice/reliable region as the bandwidth You need to first decide which frequencies you will expect to see in your application Then chose an accelerate and make sure to stay within this bandwidth Bandwidth Example (ADXL50 obsolete): More datasheets: ADXL50

52 How to pick accelerometers Highly dependent on application (more in this later), but always consider Frequency Range Maximum vibration amplitude Operating temperature range Environment (fluids, gases, chemicals) Mounting method Frequencies Force Source: Thesis MEHMET AKİF ERİŞMİŞ

53 MEMS How it s made

54 The mother of them all (Analog ADXL50) The effort at Analog is particularly interesting, partially because it has been well-publicized, and partially because it has been based on a large departure from the techniques and approaches of the competition. The approach taken by Analog relies upon the commercial development of a silicon micromachining. This approach relies on the deposition and patterning of a series of polycrystalline silicon and silicon dioxide layers on the surface of a wafer. After the patterning is complete, hydrofluoric acid is used to etch away all of the oxide layers, leaving behind the polysilicon structural layers. This fabrication technology emerged from academia in the last two decades, and has been looked at for anything from miniaturized motors to medical sensors. Source:

55 Comb drive architecture We can maximize the output capacitance by putting together one big capacitor as an assembly of two combs. Each comb blade pair can act as a capacitor

56 ADXL50 Analog devices - game changer

57 Measuring X Y and Z How do we actually fabricate a MEMS accelerometer to get all three axes? We don t need three accelerometers. Instead make the accelerometer sensitive in three directions: pers/petsch.pdf

58 ADXL50 Everything in one package. Digital output options.

59 More MEMS Micro-Electro-Mechanical Systems MEMS fabrication is not just for accelerometers Chemical and biological sensors Gyroscopes Light and ambient conditions Optical gas sensor Glucose monitor

60 How it s fabricated Silicon + potassium hydroxide

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62 Basic MEMS process

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64 pdfs/lecture2.bulkmicromachining.pdf

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66 Photolithography What are the details of the UV step in the MEMS process? Good start:

67 Fun side-note before we continue Touch Screens

68 Demystifying touchscreens System design: a low power multitouch interface A number of systems are proprietary, but some companies give away a good amount of info to help us piece together the system Example: The Microchip mtouch Capacitive Touch Screen Sensing Technology Useful in CEE as well Transportation (car interaction) Building automation (user inputs) Construction (management and equipment interaction)

69 Touchscreen structure Consists of: Two layers (close proximity), each having a multitude of conductive electrodes arranged parallel to each other.

70 The electrodes are the active conductive elements of the sensor. They are often made of Indium Tin Oxide (ITO) for its transparent and conductive properties. Side view Close up A common pattern for the electrodes is a series of dia- monds interconnected with narrow neck sections. The pattern allows for interleaving of the diamonds on the front and back panel layers, such that only a small portion of the back panel electrodes are blocked by those on the front panel.

71 Detecting touch events ds Capacitive Sensor module (CSM) The CSM measures the capacitance of each electrode, and outputs a frequency signal. The higher the capacitance, the higher this frequency. We will learn later what this means in more details.

72 Finding the intersection of the touch event ds

73 Example use (detecting the X,Y locations of a touch) ds

74 ds By detecting which strip has been touched, we can triangulate each individual touch event

75 Roadmap for CEE575 For your project, pick something related to one or more of the topics covered in the course. Resistive Sensors Interface Physics Technology Math Physical phenomenon Capacitive Sensors Inductive Sensors Piezo-electric sensors Interface Interface Interface Voltage Signal Analog to digital conversion Signal processing and analysis Misc sensors Interface

76 Roadmap for CEE575 Done Resistive Sensors Interface Physics Technology Math Today Physical phenomenon Capacitive Sensors Inductive Sensors Piezo-electric sensors Interface Interface Interface Voltage Signal Analog to digital conversion Signal processing and analysis Misc sensors Interface