Laser printing for micro and nanomanufacturing

Transcription

1 Laser printing for micro and nanomanufacturing Ph. Delaporte Lasers, Plasmas and Photonics Processes Laboratory, CNRS, Aix-Marseille University Marseille, France Contact: Philippe Delaporte

2 Printing in organic electronics Context: smart systems heterogeneous integration Mass printing technologies Digital printing Digital and non contact printing Inkjet: slower, limited to low viscosity inks, solvent compatibility Aerosol printing: higher range of viscosity but complex

3 LIFT Basics Laser-Induced Forward Transfer = Laser printing Typewriter LIFT Key Ribbon Ink Paper Laser Carrier Donor Receiver Ph. Delaporte, J. of Optics & Laser Technology 78, (2016)

4 Laser printing of solids: LIFT Donor thin film Receiver substrate Laser source Mask Distance L Carrier (Transparent) Laser-Induced Forward Transfer Digital and non-contact process Print solid Print liquid with a wide range of viscosities Print inorganic, organic (biomaterials)

5 Distance (mm) LIFT of solid pixels PEDOT in ps regime 400 ns 600 ns 800 ns 1200 ns L. Rapp and al, Proc. SPIE 7131L, (2009) 1 mm Time (ns)

6 LIFT of liquids: Printing droplets E. Biver er al. Optics Express 22 (14), pp (2014) Key parameters: film thickness, laser fluence, liquid viscosity

7 Dynamics of the cavitation bubble Fluence ~ 30 mj/cm²

8 Hydrodynamics of multi-jet E. Biver et al. Appl. Surf. Sci. 302, p (2014) - Stable jets - Very reproducible droplets / second

9 LIFT of liquids: Printing AgNP ink Silver NPs inks From pixels to lines L.Rapp et al., Opt Exp, 19 (22), pp , (2011)

10 Laser printing of organic devices OLEDs, OTFTs

11 PLEDs: Electroluminescent material Electroluminescence spectra of three pixels PFO-based polymers were studied as the electroluminescent material Doping of PFO matrix Plain LEP for blue emission; PFO doped with 5 wt% Ir(Me-ppy) 3 for green and with 5 wt% btp 2 Ir(acac) for red Cathode material (Ag & Al) Architecture: Glass / 140 nm ITO / 60 nm PEDOT:PSS / 40 nm PVK / ~ 50 nm (LEP) / 80 nm cathode

12 LIFT printing of PLED pixels and arrays Single step printing of multilayer films Shaw-Stewart J. et al., Appl. Mater. Interfaces 3 (2), pp , (2011)

13 PLED pixel characteristics J. Shaw-Stewart t al., Appl. Phys. Lett. 100, (2012).

14 Printing OTFTs I d W C 2 L i V G V T V D V D : Source Drain voltage I d : Source Drain current V G : gate voltage 1.4x x10-8 V G =0V; V G =-40V; V G =-80V; V G =-20V V G =-60V V G =-100V (-I D ) (A) 1.0x x x x x10-9 Is LIFT suitable to print OTFTs? x V D (V)

15 OTFTs: OSC with structural cohesion bis(2-phenylethynyl) end-substituted terthiophene (diphac-3t) A. K. Diallo et al., Phys. Chem. Chem. Phys. 12, 3845 (2010). Without DRL Formation mechanisms on donor 3D aspect of the grains and a high structural cohesion of the thin film. No structural change induced by laser printing High mobility value, low threshold voltage and high I on /I off diphac-3t µ = 0.04 cm 2.V -1.s -1 VT = 0 V IOn/IOff = 2.8 x 10 5 LIFT can modify the structure of thin film SC LIFT printing of OTFTs requires the use of OSC with strong structural cohesion L. Rapp et al. Organic Electronic 15 (8), pp , (2014) L. Rapp et al, Organic Electronics 13 (10), 2035, (2012)

16 Laser printing of sensors and biosensors

17 Gas sensor based on SnO 2 Sensor Contact SiO 2 Membrane Si SnO 2 from SnCl 2 (acac) 2 exposed to CH 4 Transfers of Sn (acac) 2 Cl 2 onto the Platinum inter-digitized electrodes T. Mattle et al., Applied Physics A, 2012

18 Electrochemical photosynthetic protein-based biosensors C. Boutopoulos, et al., Appl. Phys. Lett, 98 (9), , LED on LIFT Light on Pipette Light on 300 Light on Current (na) Limuron (10-6 M) LED off x Time (min) Time (min) Herbicide I 50 (M) RSD (%) LOD (M) Diuron Linuron Sensors Characterization LIFT printed photosynthetic biosensors : improve the Detection Limit

19 LIFT induces high impact velocity β) LIFT + high roughness electrode surfaces physical P wetting > P anti-wetting immobilization High impact velocity (>100 m/s) High wetting pressure (MPa) δ) Removal of trapped air active surface area increases Complete wetting Physical adsorption enhancement C. Boutopoulos, et al., Appl. Phys. Lett, 103, , 2013

20 Laser printing of conductive lines and passive compounds

21 Printing Ag NP lines Flexible substrate Line characteristics: 21μm width, 80nm thickness, lengths from 50 μm to 2 mm, average resistivity of 9 μω cm (5 x of bulk silver) after 150 C during 20 mn Silver lines of 20µm width are printed up to 17m/s

22 LIFT of silver paste Depending on the viscosity and surface tension a wide range of structures can laser printed from silver paste film Piqué s group J. Wang and al, Adv. Mater. 2010, 22,

23 Realization of resistors and inductors Different resistance schemes have been successfully printed Both paste and inks can be used Resistivity: 6 µω.cm (Ag Bulk 1.5 µω.cm) LIFT printed inductances Few picohenry

24 Realization of capacitors Donneur: TP (150 nm) + Ag (300 nm) + Parylene (400 nm) or PVP (300nm) Receveur: Pad AgNP on Kapton C. Constantinescu et al., Organic Electronics 20, p. 1-7, (2015) Pixel printed on KAPTON Pixel printed on AgNP pad All the LIFT printed capacitors are functional and their value for a given multilayer film are in the range pf

25 Realization of membrane switches Realization of membrane switch Bottom sheet: 4 interdigitated electrodes, pitch: 400 µm, width: 350 µm Top sheet: square or round contact pad Spacer: 250 µm Electric circuit closed when top and bottom sheets are in contact Characterization over 10 4 test cycles Contact resistance stable over the whole test duration and lower than 0.1

26 Can we print smaller?

27 Printing gold nanodroplets A. I. Kuznetsov et al, Opt. exp. 18 (20), 2010, Opt. exp. 17 (21), 2009, 18820

28 LIFT of metallic nanodots arrays L. Landström, Appl. Phys. A 78, (2004) Ch. Othon and al. Applied Surface Science 255 (2008) Single shot printing of large arrays of nanodots Height = thickness layer; step = particle diameter

29 An industrial LIFT machine?

30 A roll to roll LIFT printing machine for graphic applications 50 mm

31 Conclusion Printing Solid: Detrimental effects of shock wave / pressure print in contact or at reduced pressure Printing liquid: large process window, Deposition of 2D structures with a large range of morphological properties Short term applications: conductive structures from inks or pastes, bioprinting (sensors)

32 Funding and acknowledgment