Physical Structure of CMOS Integrated Circuits
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1 Physical Structure of CMOS Integrated Circuits Dae Hyun Kim EECS Washington State University
2 References John P. Uyemura, Introduction to VLSI Circuits and Systems, Chapter 3 Neil H. Weste and David M. Harris, CMOS VLSI Design: A Circuits and Systems Perspective, Chapter 1
3 Goal Understand the physical structure of CMOS integrated circuits (ICs)
4 Logical vs. Physical Logical structure bb cc ff aa Physical structure Source:
5 Integrated Circuit Layers Semiconductor Transistors (active elements) Conductor Metal (interconnect) Wire Via Insulator Separators
6 Integrated Circuit Layers Silicon substrate, insulator, and two wires (3D view) Substrate Side view Metal 1 layer Insulator Substrate Top view
7 Integrated Circuit Layers Two metal layers separated by insulator (side view) Insulator Insulator Metal 1 layer Metal 2 layer Via 12 (connecting M1 and M2) Substrate Top view Connected Not connected
8 Integrated Circuit Layers
9 Integrated Circuit Layers Signal transfer speed is affected by the interconnect resistance and capacitance. Resistance => Signal delay Capacitance => Signal delay
10 Integrated Circuit Layers Resistance RR = ρρ ll AA = ρρ tt ll ww = RR ss ll ww RR ss : sheet resistance (constant) Direction of current flows Example ρρ: resistivity (= 1, σσ: conductivity) σσ Material property (constant) Unit: Ω mm tt: thickess (constant) ww: width (variable) ll: length (variable) ρρ: 17.1nnΩ mm, tt: 0.13μμmm, ww: 65nnnn, ll: 1000μμmm tt ww Cross-sectional area AA = tt ww ll RR = Ω mm mm mm mm = 2023Ω
11 Integrated Circuit Layers Capacitance CC = εε tt ll ss εε: permittivity Material property (constant) Unit: F/m ss: distance between two conductors Direction of current flows tt ll Example εε: FF/mm, tt: 0.13μμmm, ss: 65nnnn, ll: 1000μμμμ ss CC = FF/mm mm mm mm = FF = 36ffff
12 MOSFETs Physical Shape What a MOSFET looks like at the physical level LL: Channel length WW: Channel width Gate (G) WW LL : Aspect ratio Current flows WW Source (S) Silicon dioxide = Gate oxide (insulator) LL Substrate (silicon wafer) Drain (D) G WW S G D S LL D Top view Side view
13 MOSFETs Physical Shape Inverter Source: Neil H. Weste and David M. Harris, CMOS VLSI Design: A Circuits and Systems Perspective, 2011
14 MOSFETs Device Physics Atomic density of a silicon crystal NN SSSS Intrinsic carrier density # free electrons (due to thermal excitations) nn ii /cccc 3 (at room temperature) Mass action law when no current flows in pure silicon nn = pp = nn ii nnnn = nn ii 2 nn: # free electrons pp: # free holes
15 MOSFETs Device Physics Doping Add impurity atoms (dopants) to enhance # electrons or # holes. n-type material: if more electrons are added (donors). NN dd : # donors (10 16 ~10 19 /cccc 3 ) # free electrons (majority carriers): nn nn NN dd /cccc 3 # holes (minority carriers): pp nn nn ii 2 NN dd /cccc 3 nn nn pp nn p-type material: if more holes are added (acceptors). NN aa : # acceptors (10 14 ~10 19 /cccc 3 ) # holes (majority carriers): pp pp NN aa /cccc 3 # free electrons (minority carriers): nn pp nn ii 2 pp pp nn pp NN aa /cccc 3
16 MOSFETs Device Physics Conductivity σσ = qq(μμ nn nn + μμ pp pp) qq: The charge of an electron ( ) μμ nn : Electron mobility (1360cccc 2 /VV ss) μμ pp : Hole mobility (480cccc 2 /VV ss) Intrinsic silicon σσ ρρ Quartz glass (insulator) ρρ Mobility μμ nn > μμ pp Impurity scattering Adding a large number of impurity atoms reduces the mobility.
17 PN Junction II > 0 II = 0 p p p n n n II > 0 II = 0 pn junction Forward current Reverse blocking
18 MOSFETs Contact (metal) Contact (metal) G n+ n+ p nfet n+: heavily doped with donors p+ G n-well p+ p pfet p+: heavily doped with acceptors * Contacts are used to connect source/drain/gate to metal 1.
19 MOSFETs Device Physics tt oooo : oxide thickness Typically a few nm Gate material Polysilicon (called poly) Metal Oxide capacitance (Gate(M) Insulator(O) Semiconductor(S)) CC GG = cc oooo AA GG cc oooo = εε oooo tt oooo : unit gate capacitance εε oooo 3.9εε 0 = FF/mm AA GG : gate area (= LL WW) Example tt oooo = 8nnnn, LL = 45nnnn, WW = 70nnnn CC GG 0.013ffff VV GG G tt oooo
20 MOSFETs Device Physics (nfet) VV GG = 0 G VV GG > 0 G electrons n+ LL n+ p n+ n+ p Current Channel charge: QQ cc = CC GG (VV GG VV TTTT ) No charge forms until VV GG reaches VV TTTT. Current flowing the channel: II = QQ cc ττ tt ττ tt = LL : channel transit time (the average time needed for an electron to vv move from S to D). vv = μμ nn EE = μμ nn VV DDDD LL II μμ nn cc oooo WW LL (VV GG VV TTTT ) VV DDDD
21 MOSFETs Device Physics (nfet) Current through the channel II μμ nn cc oooo WW LL ββ nn = μμ nn cc oooo VV GG VV TTTT VV DDDD = ββ nn VV GG VV TTTT VV DDDD WW μμ nn, cc oooo, VV TTTT : constants LL : device transconductance LL, WW: variables (designers can decide) VV GG, VV DDDD : variables (but either 0 or VV DDDD ) Channel resistance RR nn = VV DDDD II = 1 ββ nn (VV GG VV TTTT ) VV GG > VV TTTT G Channel resistance n+ n+ p
22 MOSFETs Device Physics (pfet) VV GG = VV DDDD G VV GG < VV DDDD VV TTTT G holes p+ LL p+ n p+ p+ n Current Channel charge: QQ cc = CC GG (VV GG VV TTTT ) No charge forms until VV GG reaches VV DDDD VV TTTT. Current flowing the channel: II = QQ cc ττ tt ττ tt = LL : channel transit time (the average time needed for an electron to vv move from D to S). vv = μμ pp EE = μμ pp VV SSSS LL II μμ pp cc oooo WW LL (VV GG VV TTTT ) VV SSSS
23 MOSFETs Device Physics Current through the channel II μμ pp cc oooo WW LL ββ pp = μμ pp cc oooo VV GG VV TTpp VV SSSS = ββ pp VV GG VV TTTT VV SSSS WW μμ pp, cc oooo, VV TTTT : constants LL : device transconductance LL, WW: variables (designers can decide) VV GG, VV SSSS : variables (but either 0 or VV DDDD ) Channel resistance RR pp = VV SSSS II = 1 ββ pp (VV GG VV TTTT ) VV GG < VV DDDD VV TTTT G Channel resistance p+ p+ p
24 MOSFETs Device Physics Charging the gate requires current flows. ii = CC GG ddvv GG dddd The transistor itself has a signal delay. If CC GG is large, the delay goes up. Energy EE = PP dddd = VV II dddd = VV CC dddd dddd EE = 1 CC 2 2 GGVV DDDD dddd = 1 2 CCVV2 Driving a transistor consumes energy (power dissipation).
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