A 2-in-1 Temperature and Humidity Sensor Achieving 62 fj K 2 and 0.83 pj (%RH) 2
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1 Session 22 Sensors and Integration A 2-in-1 Temperature and Humidity Sensor Achieving 62 fj K 2 and 0.83 pj (%RH) 2 Haowei Jiang, Chih-Cheng Huang, Matthew Chan, and Drew A. Hall University of California, San Diego La Jolla, CA, USA 1
2 Motivation: Environmental Sensing Relative humidity and temperature (RH/T) monitoring applications: Climate control systems RFID tags in food chain Weather stations Need: distributed Internet-of-things (IoT) environmental sensors 2
3 Motivation: IoT Applications Desired features: Low energy/measurement High sensitivity Monolithic and low-cost Wide supply range and supply insensitive 3
4 Transducers Selection: Temperature High energy efficiency High resolution High accuracy & small spread Fully-integrated Temp transducer: Resistor K. A. Makinwa, Smart temperature sensor survey, 2010 to date. 4
5 Transducers Selection: RH Mechanism: Interdigitated top layer metal Gaps filled with polyimide (PI) ε PI RH Metal-PI-metal capacitance RH Benefit: CMOS compatible + fully integrated Farahani et al. Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review, Sensors, 2014 RH transducer: Capacitor 5
6 Prior RH/T Sensors Example: Sharp-QM1H0P00, ADI-AD7747, TI-HDC2080, ST-HTS221, TE-HTU21, etc. Widely used in commercial products Require two distinct AFEs that need extra Power Area Complexity 6
7 Proposed RH/T Sensor Architecture Monolithic, CMOS-compatible transducers Require only one unified AFE that saves Power Area Complexity 7
8 Proposed RH/T Sensor Architecture Monolithic, CMOS-compatible transducers Require only one unified AFE that saves Power Area Complexity Closed-loop R&C-to-T conversion High linearity & robustness Incomplete-settling SC-based WhB High sensitivity & energy efficiency 8
9 Prior RC-Based Front-Ends RC band-pass-filter-based [P. Park, JSSC, 2015] [S. Pan, ISSCC, 2017] [W. Choi, ISSCC, 2018] [S. Pan, ISSCC, 2019] Problems: C parasitic degrades the sensitivity Sensitive to in-band supply noise 4 CV 2 f power due to the I/Q generation Need multiple matched components 9
10 Prior RC-Based Front-Ends Switched-capacitor-based I Switched-capacitor-based II [T. Jang, Low-power timer, ISSCC, 2016] [R. Yang, High resolution CDC, JSSC, 2017] Problems: Need active drivers (LDOs or high-bandwidth, low-output-impedance OpAmp) and reference voltages extra power overhead Extra noise sources 10
11 Revisit the SC-Resistor Assuming C is fully charged to V s & fully discharged to ground Q = CV s R = 1 (the well-known conclusion) fc Problem: Need a voltage source (i.e., low impedance) as a SC driver prior work uses either LDO or active integrator (virtual ground) Can we avoid the SC driver at the cost of incomplete-settling? 11
12 Incomplete-Settling SC-Based WhB Q1: Assuming R 1 = R 2, is f = 1/RC when the bridge is balanced (V A,mean = V B )? A1: No. f = 1+e D 0.684, assuming 50% dutycycle e RC RC Q2: Why do I care if f 1/RC? A2: Because the error is hard to calibrate: Not constant, but depends on duty-cycle Highly sensitive to C parasitic at node A 12
13 Proposed Incomplete-Settling SC-Based WhB V A,mean = 1 + ε fcr V DD fcr V DD C f minimizes the incomplete-settling error 13
14 Proposed Incomplete-Settling SC-Based WhB Benefits: Integrate R-transducer & C-transducer Reduce the settling error by ~5200 (choosing C f = 60C) at no static power cost Insensitive to C parasitic & switching imperfections High sensitivity & inherent supply rejection Low swing relax readout circuit linearity requirement R 1 & R 2 branch costs little power & area 14
15 System Architecture WhB front-end: Two SC cells in time-multiplexed fashion R 1 = R 2 ensures the maximum sensitivity 15
16 System Architecture Active loop LPF: Chopping removes 1/f noise & offset Clock divider 8 lower g m -cell BW & power 16
17 System Architecture VCO & TDC: A VCO closes the FLL f = 1/RC w/ high loop gain A TDC samples the VCO phases & achieves 1 st order noise-shaping 17
18 System Architecture Temp. mode: T Temp = RC RH mode: T RH = RC RH Temperature effect on RH can be removed by correlating the two results 18
19 Chopper-Stabilized Active Filter Choose g m -C over closed-loop options due to High energy efficiency Relaxed linearity requirement Telescopic + chopping >80dB gain over PVT & 2.4 noise efficiency factor Down-converting at cascode-nodes ~100 lower impedance & higher bandwidth 19
20 VCO & TDC VCO noise attenuated by active filter gain 1-z -1 restores the f-to-phase integration & shapes the quantization noise 2MHz sampling rate (OSR=1000) 116dB SQNR 20
21 System Linearity Verification Simulated w/ ideal R & C >92dB loop gain over PVT <±10ppm linearity error from -40 C to 85 C FLL provides 16-b RC-to-T linearity across industrial temperature range 21
22 Implementation Power breakdown (µw) 2.2µW 2.5µW 3.4µW 7.5µW Implemented in TSMC 180nm process Active area: 0.72mm 2 (RH transducer: 0.21mm 2 ) Power consumption: 1.5V (RT) WhB (22%) Active LPF (48%) VCO (14%) Digital (16%) 22
23 Measurements: FLL & TDC FLL RMS jitter: TDC bitstream shows 20dB/dec. noise shaping 23
24 Measurements: Resolution vs. Time Resolution was measured at 300K & 35%RH Normalized to temperature and RH inputs 2mK temperature resolution & %RH humidity resolution achieved in 1ms 24
25 Measurements: Mode Switching Transient FLL settles in 0.6ms to re-balance the WhB V A settles back to V DD /2 VCO settles to a different operating point 25
26 Measurements: Temp. Transfer Curve & Error 1 st order calibration; no high-order polynomial fit due to FLL s high linearity 3σ error: 0.55K in the industrial temperature range 26
27 Measurements: RH Transfer Curve & Error 1 st order calibration; no high-order polynomial fit due to FLL s high linearity 3σ error: 2.2%RH from 10%RH ~ 95%RH (limited by instrumentation) 27
28 Landscape: Temperature Sensors Lowest energy/conv. that exceeds 0.1pJ K 2 FOM 28
29 Landscape: Capacitive Sensors Better than 1µJ ppm 2 resolution (Schreier) FOM 29
30 RH sensor Temp. sensor System Comparison w/ Prior Environmental Sensor Parameter P.Park JSSC 15 S. Pan ISSCC 19 S.Pan ISSCC 19 W. Choi ISSCC 18 Z. Tan JSSC 13 S. Park VLSI 18 Maruyama JSSC 18 This Work Sensor type Temperature RH RH & Temperature Tech. (nm) Active area (mm 2 ) Supply (V) 1.7/1 1.6~2 1.6~2 0.85~ ~2 Conversion time (ms) Power (µw) Temp. range ( C) -40~85-40~180-55~125-40~85 25 only N/A -20~85-40~85 3σ error (K) [trim points] 0.12[3] 0.1[2] 0.14[2] 0.7[2] [NA] 0.55[2] Resol. (mk) FOM(fJ K 2 ) 8, , RH range (%) ~95 30~90 0~100 10~95 3σ error (%) [trim points] >2[2] 5.6[NA] 4[NA] 2.2[2] Resol. (%RH) FOM(pJ % 2 )
31 Conclusion Target: A compact, energy-efficient & robust environmental sensor for IoT applications Techniques: Incomplete-settling SC-based WhB High sensitivity & low power FLL + noise-shaping TDC high linearity & high DR Results: Fully integrated temperature & humidity sensor consisting of a unified R&C-to-D converter, achieving: 62fJ K 2 & 0.83pJ (%RH) 2 FOMs normalized to temp. & RH 0.12K/V & 0.43%RH/V supply insensitivity 31
32 Acknowledgement This work was supported in part by equipment purchased through a DURIP award from the Office of Naval Research (award no. N ). The authors thank Xiahan Zhou for digital synthesis. 32
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