Emerging MEMS & Sensor Technologies to Watch MSIG Executive Congress 2017

Transcription

1 Emerging MEMS & Sensor Technologies to Watch MSIG Executive Congress 2017 Alissa M. Fitzgerald, Ph.D. Founder & CEO Keith M. Jackson, Ph.D. Associate 14 th anniversary

2 Outline About AMFitzgerald MEMS technologies through the decades What emerging means in this presentation Emerging MEMS & sensor technologies Summary Page 2

3 AMFitzgerald: Innovations and solutions for performance products MEMS Innovation MEMS Solutions Technology Strategy Creation of novel micro devices and IP Paths to volume manufacturing and market Business insights from micro technology experts Page 3

4 AMFitzgerald: Development services from concept to production AMFitzgerald in-house Strategic partners Custom MEMS development for commercial production Rapid prototyping on state-of-the-art tools Supply chain creation and management Focus on high-performance, specialty applications Headquarters in Burlingame, CA Fab operations at 1,500 m 2 UCB Marvell Nanolab Page 4

5 Our work is at the leading edge in many markets AMFitzgerald revenue breakdown, by market Aircraft, spacecraft sensors Cardiology guidewires, pacemakers, pumps; diagnostic chips Microphones, pollution detectors Atomic sensors, commercial print heads, quantum computers Fiber optic networking, laser system components, infrared detectors Page 5

6 MEMS technologies through the decades

7 Key MEMS technologies through the decades 1980s Alkali etchants selective to Si crystal planes Piezoresistor pressure sensors Inkjet nozzles Source: mems-exchange.org Source: SMI 1990s Sacrificial etch frees thin film mechanical structures TI Digital Light Projection (DLP) Accelerometer Analog Devices ADXL50 Page 7

8 Key MEMS technologies through the decades 2000s Deep reactive ion etch enabled a new generation of devices Mics, accels, gyros Avago FBAR Thin film AlN (piezoelectric) STM C5L24A 3-axis accel 2010s Au-In or Al-Ge, also forms electrical connection Aligned, eutectic wafer bonding with hermetic seal Gyros, resonators, combo sensors CMOS Silicon cap to create vacuum cavity MEMS Source: InvenSense Page 8

9 MEMS industry dynamics the past 10 years 1200 Annual sales, USD M$ 600 Major Players Dominate the high volume markets: consumer, automotive The Long Tail The other 400+ MEMS companies who could create new markets with emerging technology #1 #30 Company ranking by annual sales Page 9

10 Flashback: the MEMS industry in s- 90s technology 90s- 00s technology Major players in 2006 dominated with mature process technology in wellestablished markets New technologies lurking in the Long Tail InvenSense had just started in 2003 Page 10

11 By 2013: MEMS market transformed 80s-90s tech 90s-00s tech 00s-10s tech, from the Long Tail Winners: companies having newer MEMS technology for smartphones Fading: older technologies Page 11

12 What emerging means in this presentation

13 MEMS technology readiness levels (TRL) NASA TRL Scale Where the work is done Production Foundry, Assy/Test House Product Company Funding level required > $ 10M Page 13 Source: NASA KSC Development Service Providers Universities Research Labs $ 1M $ 100K $ 10K

14 Emerging technologies definition for this presentation Pre-commercial: TRL 1-4 University/research lab Proof-of-concept devices Best market application(s) unknown 5-10 years and $10-100M yet needed for full commercialization Why do we care about academic R&D? Where the next $1B+ product will come from! Page 14

15 Research methods Review of recent research and academic conferences Transducers 2017, over 500 papers Filter for: Commercial viability Offers solutions to known/anticipated problems Technology game-changer Representative examples provided Page 15

16 Emerging MEMS & sensors technologies

17 Emerging technologies to watch FBAR- and SAW-based sensors Near-zero power or event-driven sensors Piezoelectric devices CMOS+ sensors Novel piezoelectric materials Paper sensors MATURITY Page 17

18 FBAR- and SAW-based sensors INNOVATION Frequency shift of acoustic resonance in piezoelectric material Resonant circuit with inductive power/readout = battery-free operation APPLICATION Pressure, temp, gas sensing High performance Harsh, remote environments SAW based, battery-free temperature sensor Source: Tsinghua University, Beijing, CHINA MATURITY TRL 4 Some already using commercial processes Other groups working in this space: Page 18

19 Near-zero power or event-driven sensors INNOVATION Low (< 1pW) standby power consumption Event-driven sensing Very clever use of coupled physics IR signature detector with nearzero standby power APPLICATION Internet of Things Security sentinel Large arrays of sensors Switch Plasmonic IR absorber MATURITY TRL 4 New embodiments of existing process technologies Source: Northeastern University, USA Other groups working in this space: Page 19

20 Piezoelectric devices INNOVATION Thin-film AlN or PZT becoming mainstream, displacing electrostatic designs Micro-speakers Magnetometers, transformers, etc. Micro-speaker with tweeter and woofer, active area 1 cm 2 APPLICATION Consumer electronics Internet of Things MATURITY TRL 3-4 Leverages mature processes Source: Fraunhofer ISIT, GERMANY Page 20

21 CMOS+ devices INNOVATION Electrical instead of optical readout of DNA to identify pathogens Spatial resolution of ion concentration in living tissue APPLICATION Point of care diagnostics Biotechnology MATURITY TRL 3-4 Based on mature CMOS technology Surface functional materials and processes still in development Source: National Tsing Hua University, TAIWAN 1024 x 1024 ph-image sensor pixel ph image sensor CMOS array for capacitive readout of DNA Source: Toyohashi University of Technology, JAPAN Page 21

22 Novel piezoelectric materials INNOVATION Thin film LiNbO 3, thin film electroactive polymers, Ge-doped AlN Piezoelectric transformer for wake-up functions APPLICATION Consumer electronics Internet of Things MATURITY TRL 2-3 Scalable manufacturing methods not yet demonstrated Source: University of Illinois at Urbana-Champaign, USA Flexible, printed microspeaker Source: CEA-LETI, FRANCE Page 22

23 Paper?!

24 Research on silicon-based MEMS has been decreasing steadily Academic research is moving to paper and plastic Funds for silicon research decreasing Percentage of oral presentations featuring silicon microdevices at the biannual Hilton Head Workshop Historically, MEMS industry leveraged academic research when developing new products Who will be the engine of silicon MEMS innovation now? Source: AMFitzgerald Page 24

25 Ultra low cost sensors will leave silicon, an expensive material 0.01 Sapphire Raw Substrate Cost ($/mm 2 ) LED Interposer Silicon Glass Some sensors must stay on silicon, if they require: Dimensional accuracy or stability Semiconducting properties Microfluidics RFID Plastic/Paper Page 25 Time (Years) Adapted from Paul Werbaneth

26 Paper-based manufacturing No cleanroom Large format substrate High throughput ULTRA LOW COST Sensors that could potentially move to paper or plastic: Temperature Humidity Pressure Selective gases Point of care diagnostics Page 26

27 Paper sensors: pathogen detection INNOVATION Surface functionalized to change color when exposed to specific bacteria or chemicals Rapid (5 min) screening for bacteria types to guide drug choice APPLICATION Low-resource, point-of-care diagnostics MATURITY TRL 1-2 Paper process not yet scalable Source: National Tsing Hua University, TAIWAN Page 27

28 Paper sensors: food spoilage INNOVATION Inorganic nanostructures on paper attract certain molecules Color change proportional to concentration Redox reaction; no power source needed APPLICATION Smart labels for food packaging Quality control of consumables MATURITY TRL 1-2 Paper process not yet scalable Source: Clarkson University, USA Page 28

29 Technology forecast: the upcoming decades in MEMS & sensors? 2020s Improved thin film piezoelectrics Event-driven sensors Higher precision, lower power mics, motion sensors Particle and mass detectors RF filters and components 2030s New paper and plastic technologies Biodegradable sensors Point of care diagnostics Disposable packaging sensors Smart clothing, wearables Large format sensor arrays: vehicle wraps, wall coverings, rooftops, etc. Page 29

30 Summary Key recent trends in R&D: Ultra low-power, event-driven and/or battery-free operation Piezoelectric sensors and actuators Notable shift away from capacitive MEMS designs dependent on precision deep silicon etch (DRIE) Paper and plastic sensor technologies continue to evolve steadily Silicon sensor technology at risk of stagnation due to waning research efforts Page 30

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32 References FBAR- and SAW-based sensors Wang, W. et.al., ALN/6H-SIC SAW RESONATOR FOR HIGH TEMPERATURE WIRELESS SAW SENSOR, Transducers 2017, Taiwan Müller, A. et.al., PRESSURE AND TEMPERATURE DETERMINATION WITH MICROMACHINED GAN/SI SAW BASED RESONATORS OPERATING IN THE GHZ FREQUENCY RANGE, Transducers 2017, Taiwan Wang, Y. et.al., FILM BULK ACOUSTIC RESONATOR BASED GAS SENSOR: A SENSITIVE DETECTOR FOR GAS CHROMATOGRAPHY, Transducers 2017, Taiwan Le, X., et.al., A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER, Transducers 2017, Taiwan Near-zero power or event-driven sensors Rajaram, V. et.al., MICROELECTROMECHANICAL DETECTOR OF INFRARED SPECTRAL SIGNATURES WITH NEAR-ZERO STANDBY POWER CONSUMPTION, Transducers 2017, Taiwan Yeh, P. et.al., A NOVEL SELF-POWERED PIEZOELECTRIC THREE-AXIS MEMS MAGNETIC SENSOR, Transducers 2017, Taiwan Kang, K. et.al., SELF-POWERED GAS SENSOR USING THIN-FILM PHOTOVOLTAIC CELL AND MICROSTRUCTURED COLORIMETRIC FILM, Transducers 2017, Taiwan Piezoelectric devices Stoppel, F. et.al., NOVEL MEMBRANE-LESS TWO-WAY MEMS LOUDSPEAKER BASED ON PIEZOELECTRIC DUAL-CONCENTRIC ACTUATORS, Transducers 2017, Taiwan Ghosh, S. et al., A LORENTZ FORCE MAGNETOMETER BASED ON A PIEZOELECTRIC-ON-SILICON RADIAL-CONTOUR MODE DISK, Transducers 2017, Taiwan Page 32

33 References CMOS+ devices Nanasaki, S. et.al., DEVELOPMENT OF NOVEL PH IMAGE SENSOR FOR IN-VIVO APPRICATION, Transducers 2017, Taiwan Chen, C. et.al., A CMOS CAPACITIVE BIOSENSOR ARRAY FOR HIGHLY SENSITIVE DETECTION OF PATHOGENIC AVIAN INFLUENZA DNA, Transducers 2017, Taiwan Sawada, K. et.al., CMOS BASED ION IMAGE SENSOR - FUSION OF BIO SENSOR TECHNOLOGY AND IMAGE SENSOR TECHNOLOGY -, Transducers 2017, Taiwan Novel piezoelectric materials Manzaneque, T. et.al., A HIGH FOM LITHIUM NIOBATE RESONANT TRANSFORMER FOR PASSIVE VOLTAGE AMPLIFICATION, Transducers 2017, Taiwan Casset, F. et.al., ULTRA-THIN POLYMER LOUDSPEAKER BASED ON ELECTRO ACTIVE POLYMER ACTUATION, Transducers 2017, Taiwan Mizuno, T., et. al., GERMANIUM ALUMINUM NITRIDE THIN FILMS FOR PIEZO-MEMS DEVICES, Transducers 2017, Taiwan Paper sensors Wang, C-H. et.al., USING BACTERIAL SELEX TO SELECT HIGHLY-SPECIFIC APTAMERS AND THEIR APPLICATIONS IN PAPER-BASED MICROFLUIDIC CHIPS FOR RAPID DIAGNOSIS OF MULTIPLE BACTERIA, Transducers 2017, Taiwan Chen, Y. et.al., DISPOSABLE COLORIMETRIC GEOMETRIC BARCODE SENSOR FOR FOOD QUALITY MONITORING, Transducers 2017, Taiwan Andreescu, E., et. al., Easy-to-use, portable and inexpensive nano-engineered sensors for assessing food quality and safety, 254th National Meeting & Exposition of the American Chemical Society (ACS), Washington, D.C Page 33