Sensors & Actuators. Transduction principles Sensors & Actuators - H.Sarmento
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1 Sensors & Actuators Transduction principles Sensors & Actuators - H.Sarmento
2 Outline Resistive transduction. Photoconductive transduction (resistive). Capacitive transduction. Inductive transduction. Piezoelectric transduction. Pyroelectric transduction. Photovoltaic transduction. Electromagnetic transduction. Thermoelectric transduction Sensors & Actuators - H.Sarmento 1
3 Modulating sensors Resistive Photoconductive Capacitive Inductive Sensors & Actuators - H.Sarmento 2
4 Self generating sensors Piezoelectric Pyroelectric Photovoltaic Electromagnetic Thermoelectric Sensors & Actuators - H.Sarmento 3
5 Sensors & Actuators - H.Sarmento 4 Resistive transduction Stimulus converted to a change in resistance. changes in the electrical resistivity r. changes in geometry: l, w and t. A l R r t t w w l l R R r r t w A
6 Changes in length Changes in the length of the wire by moving a sliding contact: position sensor. R sliding contact l r S l r S 1 R l r S R 2 Resistive transduction also called potentiometric transduction Sensors & Actuators - H.Sarmento 5
7
8 Changes in resistivity (1) Due to temperature: temperature sensors t t r r r 0 resistivity at reference temperature t 0 t0 Due to humidity: humidity sensors. [Source: Jyoti Shah, CSIR] Sensors & Actuators - H.Sarmento 7
9 Change in resistivity (2) Due to a mechanical stress: strain gauges, pressure sensors, accelerometers. Piezoresistivity: in semiconductors resistivity highly depends on carriers (electrons and holes) mobility. when a semiconductor is stretched or compressed, the mobility of carriers changes. Resistive/piezoresistive transduction Sensors & Actuators - H.Sarmento 8
10 Photoconductive transduction Changes in resistivity due to incident electromagnetic radiation: photocell. r k E v E v light intensity (lux) k and depend on the material: 0.7 < < 0.9 for CdS (cadmium sulphide) Sensors & Actuators - H.Sarmento 9
11 Capacitive transduction Stimulus converted to a change of capacitance. C r0 A d ε o is the absolute permittivity ε r is the relative permittivity changes in the permittivity of the dielectric changes in the area of the plates changes in the spacing between plates r 0 A d Sensors & Actuators - H.Sarmento 10
12 Changes in permittivity (1) Due to displacement of the dielectric: position, displacement, and level sensors. C r0 A d Moveable dielectric Sensors & Actuators - H.Sarmento 11
13 Changes in permittivity (2) Due to amount of water: humidity (air) and moisture sensors. C r0 A d pourous metallic membrane hygroscopic polymer pourous metallic membrane Due to polymer s polarization: glucose (bio) sensors. Due to biochemical reactions: DNA (bio) sensors Sensors & Actuators - H.Sarmento 12
14 Changes in the area of plates Due to displacement of a plate: position, displacement sensor. Moveable plate Sensors & Actuators - H.Sarmento 13
15 Changes in the spacing between plates Due to displacement of a plate: position, pressure sensors. Moveable plate C r0 A d [Source: sensata] Sensors & Actuators - H.Sarmento 14
16 Inductive transduction Stimulus converted to a change of self (or mutual) inductance. L n o r 2 Al changes in the number of turns changes in the permeability of the core Sensors & Actuators - H.Sarmento 15
17 Changes in the number of turns Due to displacement of a wiper: position, displacement sensors. Self inductance displacement. L L n o r 2 Al linear rotary Sensors & Actuators - H.Sarmento 16
18 Changes in permeability (1) Due to the displacement of the core: displacement sensor. Self inductance L n 2 o Al r r1 L 1 L 1 r 2 r1 L2 L Sensors & Actuators - H.Sarmento 17
19 Changes in permeability (2) Due to the displacement of the core: displacement sensor. Self inductance L 1 r1 L 2 r1 r 2 r1 L2 L Sensors & Actuators - H.Sarmento 18
20 Change of permeability(3) Due to the displacement o the core : displacement sensor. Mutual inductance [Source: Jacob Fraden, 2010] Sensors & Actuators - H.Sarmento 19
21 Piezoelectric transduction (1) Due to mechanical stress: microphones, accelerometers, ultrasonic detectors. Stimulus converted to a change in electrostatic charge (or voltage). [Source: Jacob Fraden, 2010] Separation of electric charge across the crystal lattice Sensors & Actuators - H.Sarmento 20
22 Piezoelectric transduction (2) [Source: Jacob Fraden, 2010] The charge produced depends on the piezoelectric constant of the device. Q k f The capacitance is determined by the area, the width, and the dielectric constant of the material. V kf C k f o r x A Sensors & Actuators - H.Sarmento 21
23 Piezoelectric model A charge source with a shunt capacitor or a voltage source with a series capacitor. [Source: Texas Instruments] The resistance accounts for the dissipation of static charge Sensors & Actuators - H.Sarmento 22
24 Pyroelectric transduction (1) Due to a temperature gradient in a pyroelectric material (PEM): motion, temperature, chemical and bio sensors. Stimulus converted to a change in electrostatic charge (or voltage). Change in temperature causes change in spontaneous polarization and results in change in electric charge Sensors & Actuators - H.Sarmento 23
25 Pyroelectric transduction (2) When the detector absorbs radiation, its temperature and hence its polarization changes, thus resulting in a surface charge on the capacitor plates. The charge produced depends on the piezoelectric constant of the device. L V P T C PL T o r A [Source: Jacob Fraden, 2010] Q PT P - pyroelectric coefficient Sensors & Actuators - H.Sarmento 24
26 Pyroelectric model A charge source with a shunt capacitor. Q PT V P T C PL T o r A The resistance accounts for the dissipation of static charge Sensors & Actuators - H.Sarmento 25
27 Photovoltaic transduction Due to incident light radiation in a junction: photodiodes. Stimulus converted in a voltage induced by the absorbed photons n-type semiconductor p-type semiconductor Sensors & Actuators - H.Sarmento 26
28 Photovoltaic transduction Due to incident light radiation in a junction: photodiodes. Stimulus converted in a voltage induced by the absorbed photons n-type semiconductor p-type semiconductor Sensors & Actuators - H.Sarmento 27
29 Photovoltaic transduction Due to incident light radiation in a junction: photodiodes. Stimulus converted in a voltage induced by the absorbed photons n-type semiconductor p-type semiconductor Sensors & Actuators - H.Sarmento 28
30 Electromagnetic transduction Due to magnetic flux: magnetic fields, position, and displacement sensors. Stimulus converted to a voltage (electromotive force) induced in a conductor by a change in the magnetic flux Sensors & Actuators - H.Sarmento 29
31 Thermoelectric transduction Due to a difference of temperature between the junction of two dissimilar materials (Seebeck effect): temperature sensors. Stimulus converted to a change in a voltage. Material A Material B [Source: Jacob Fraden, 2010] Sensors & Actuators - H.Sarmento 30
32 Bibliography Jacob Fraden, Handbook of modern sensors: physics, designs, and applications, Springer, 4 th edition, 2010 JonWilson, Sensor Technology Handbook, Jeffrey Fortin, Chapter 2 - Transduction Principles, Springer, c1.pdf?sgwid= p Winncy Y. Du, Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies, CRC Press, 2015 Jeffrey Fortin, Chapter 2 transduction principles, Functional Thin Films and Nanostructures for Sensors Chapter 2: Sensor Characteristics and Physical Effects, ohiri.pdf V. Tsoutia, C. Boutopoulosb, I. Zergioti b, S. Chatzandroulisa, Capacitive microsystems for biological sensing, Biosensors and Bioelectronics, 2011 Jacob Richter, Piezoresistivity in Microsystems, PhD Thesis, Technical University of Denmark, Sensors & Actuators - H.Sarmento 31
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