Color X-ray photon counting image sensor
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1 Color X-ray photon counting image sensor B. Dierickx 1,2, B. Dupont 1,3, A. Defernez 1, N. Ahmed 1 1 Caeleste, Antwerp, Belgium 2 Vrije Universiteit Brussel, Belgium 3 Université Paris Nord XIII, France 9 June 2011 Color X-ray photon counting image sensor 1
2 Challenge addressed An X-ray photon counting pixel array Indirect (using a scintillator ) X-ray detection Detecting charge packets of 100 to 500 electrons per X-photon Counts up to Counting speed 100 to Hz Si demonstrator realization as a 92x92 pixel array, 100µm pixel pitch Two channels = COLOR X-ray 45 transistors per pixel Detection threshold noise & variability ~15e - RMS Covered with a GdOS scintillator sheet 9 June 2011 Color X-ray photon counting image sensor 2
3 transmitted [%] BTW What is Color X-ray? 100% 90% 80% 70% 60% 50% 40% transmitted through 1cm layer, normalized to 1g/cm3 after H2 (1) O (8) X-ray spectral absorption depends partly on the atomic composition of material. 30% 20% 10% 0% Photon energy [ev] O=water C=fat 9 June 2011 Color X-ray photon counting image sensor 3 C (6) Ca (20) Fe (26) O&C=proteins, cancer, DNA...
4 Breast carcinoma specimen Poorly differentiated invasive duct type. 10cm blue arrows: normal fat tissue( lobules ) B. Dierickx, N. Buls, C. Bourgain, C. Breucq, J. Demey, B. Dupont, A. Defernez, Multienergy X-ray imaging for mammography, BHPA symposium, Brussels, 5-6 feb 2010 I.Willekens, B.Dierickx, N.Buls, C.Breucq, A.Schiettecatte, J.de Mey, C.Bourgain, Superiority of multi-energy color X-ray for breast specimen radiography, European Society for Radiography, Vienna, March 2011 the tumor is degenerated because the blood supply, though increased, still insufficient to maintain the whole cancer mass alive. Courtesy of and in collaboration with 9 June 2011 Color X-ray photon counting image sensor 4
5 Outline What is color X-ray Direct and indirect X-ray detection Indirect Photon counting pixel concept and layout Pixel key subcircuits Measurement results & performance Future developments and conclusions 9 June 2011 Color X-ray photon counting image sensor 5
6 Direct and Indirect X-ray detection pixel X photon VBIAS X photon Direct detector =semiconductor -Si -α Se -InP -CdTe -CdZnTe - Excited electron Electron-hole cloud Charge collection By electric field Visible photons (fluorescence) Excited electron Electron-hole cloud indirect = Scintillator -CsI -Bi4Ge3O12 -ZnSe -Gd2O2S -NaBiW2O8 -CdWO4 - - ROIC Si charge sensitive amplifier Si photodiode ROIC Electron-hole pairs Si charge sensitive amplifier 9 June 2011 Color X-ray photon counting image sensor 6
7 Outline Direct and indirect X-ray detection Indirect Photon counting pixel concept and layout Pixel key subcircuits Measurement results & performance Future developments and conclusions 9 June 2011 Color X-ray photon counting image sensor 7
8 Photon counting pixel array QX2010: 100 µm pitch 92x90 pixels 9 June 2011 Color X-ray photon counting image sensor 8
9 750µm wafer thickness Pixel sees both direct and indirect X From X-ray source Si photodiodes in 5µm epitaxial layer 100µm From X-ray source GdOS scintillator sheet 100 µm thick Optical glue Visible light flash ROIC e- charge packet ROIC e- charge packet Direct detection: Rare in Si, spurious Localized and large charge packet Indirect detection: efficient in high-z scintillator Indirect charge packet is small and smeared out 9 June 2011 Color X-ray photon counting image sensor 9
10 X-photon counting pixel topology Light flash ΔV C=0.1fF Q=ΔV*C Charge packet Some pixels have an electrical input to inject a precise charge packet, for calibration Pulse shaper = band filter + preamp reference Analog Voltage pulse train Comparator Binary pulse train These pixels can output also a realtime view on the internal comparator signal counter Discrete count multiplexor To imager output Photo diode counter staircase 9 June 2011 Color X-ray photon counting image sensor 10
11 Color X-ray photon counting pixel concept Comparators counter2 Light flash Pulse shaper (band filter + preamp) Charge packet reference2 reference1 counter1 To detector output MUX Photo diode or direct detector Analog Voltage pulse train Binary pulse train Analog counter staircases 9 June 2011 Color X-ray photon counting image sensor 11
12 Outline Direct and indirect X-ray detection Indirect Photon counting pixel concept and layout Pixel key subcircuits Measurement results & performance Future developments and conclusions 9 June 2011 Color X-ray photon counting image sensor 13
13 Charge integrator (CTIA) radiation current -A V General concept charge sensitive amplifier Integrate charges without seeing individual photons High Z out 1 Photo diode or direct detector C feedback 0.1fF I V Actual concept charge sensitive amplifier CTIA with resistive feedback = pulse shaper Q to comparator 9 June 2011 Color X-ray photon counting image sensor 14
14 Very compact analog counter DC Comparator toggle GND Non-overlapping clock C1 C2 Reset counter analog count V ΔV 9 June 2011 Color X-ray photon counting image sensor 15 time
15 analog count signal [AU] Non-linear analog counting Analog counting is valid as long as ΔV is visible by an external ADC s LSB, or photon shot noise > ADC LSB 1 0,5 linear non-linear (exponential) PSN linear PSN exponential 9 June 2011 Color X-ray photon counting image sensor photons counted
16 Outline Direct and indirect X-ray detection Indirect Photon counting pixel concept and layout Pixel key subcircuits Measurement results & performance Future developments and conclusions 9 June 2011 Color X-ray photon counting image sensor 17
17 Counting wide and small LED pulses Counter reset 9 June 2011 Color X-ray photon counting image sensor 18
18 Demonstrating non-linear count Trains of Input Pulses width 1.7µs electrical input 9 June 2011 Color X-ray photon counting image sensor 19
19 (Detail) Input Pulses width 1.7µs ( electrical input) Zoom in 9 June 2011 Color X-ray photon counting image sensor 20
20 X-ray illumination: comparators s real time signal BEAM ON X-ray source: 70kVp, 1mA Beam hardened with 1/2mm Cu Distance 1.5m Scintillator: GdOS 100µm thick Peaks correspond to electrons Photon rate is about 0.5 X-photon/ms BEAM OFF noise corresponds to about 70 electrons p/p, electrons RMS 9 June 2011 Color X-ray photon counting image sensor 21
21 One of the key performance parameters: electrical crosstalk 90x92 pixels under pulsed LED illumination One is covered with metal shield All pixels see the LED and output the same pulse train shielded pixel is quiet 9 June 2011 Color X-ray photon counting image sensor 22
22 Outline Direct and indirect X-ray detection Indirect Photon counting pixel concept and layout Pixel key subcircuits Measurement results & performance Future developments and conclusions 9 June 2011 Color X-ray photon counting image sensor 23
23 Conclusions Indirect color X-ray photon counting demonstrated Pixel has two energy channels Detects and counts charge packets <100e- Pixel has 45 MOSFETs Pixel has ~75..80% fill factor Good suppression of electrical crosstalk Future challenges X-ray illumination images Increasing array size Improving performance (noise, speed) Enhancing functionality (>2Mhz countrate) 9 June 2011 Color X-ray photon counting image sensor 24
24 Thank you Acknowledging for the X-ray experiments 9 June 2011 Color X-ray photon counting image sensor 25
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