Project-wise Reports of Sectorial Monitoring Committee

Transcription

1 Project-wise Reports of Sectorial Monitoring Committee 1. Project Title: Advanced Microsensors and Microsystems : Design, Development and Applications 2. Project Details: Nodal Lab CSIR-Central Electronics Engineering Research Institute,.Pilani, Rajasthan Participating Labs NIL Nodal Officer Dr Jamil Akhtar Taskforce Director, CSIR-CEERI, Pilani Chairman Total Man Days Mandays (Approx.) Approved Cost Lakh Fund received Lakh Fund utilized Lakh up to December Periodic Key Recommendations of Task Force/RC/Monitoring Committee Proposed Revised S.No Key Action taken on Deliverables Deliverable Recommendati6ns Key (approved by Task of Task Force/RC/ Recommendations Force) Monitoring Committee 1. Satisfactory and N/A As outlined N/A Excellent 2. -do- N/A As outlined N/A 3. Over all progress N/A As outlined N/A was well Appreciated I I 4. Design and better Software tool As outlined N/A understanding usage was prior to fabrication made more was appreciated. reachable to Use of software trainees and tools was found project staff extensively utilized. 1

2 5. Working N/A As Outlined N/A prototypes were appreciated 6. Packaging issues Inter group As Outlined N/A were discussed networking was and More enhanced and emphasis was availability of in given on house sensors Integrated were made electronics for in available to house sensors Circuit team 7. Future of FTI level As Outlined N/A Microsensors was activities were highlighted and identified for Chairman users and suggested industries. towards commercialization of developed sensors 4. Project Achievements: 5. No. Deliverables promised at Deliverables Achieved If not achieved, reasons start thereof 1. Demonstration/Application Ach ieved N/A of ISFET/EGFET ph sensor 2. MEMS Pressure Sensor Achieved N/A for UAV, RO Application 3 Gas Sensor for CH4 & Achieved N/A voc 4. MEMS Accelerometer in Achieved - FTI N/A packaged form 5. MEMS Micro-Mirror Arrays Achieved N/A Chip (Exploratory Activity) 2

3 6. RF-MEMS Achieved at Chip N/A Level- FTT 7. Micro-Fluidics Achieved N /A 8. L TCC Packaging Achieved N/A 9. Signal conditioning Achieved N/A 10. MEMS Magnetometer Achieved at Chip N/A Level. 11. HEMT Bio-Sensor Achieved N/A 12. ph ion meter Achieved N/A 13. Gas Detector Achieved N/A 14. Water and Food: Achieved N/A Application 5. Outcomes and outputs from the projects: a. Outcomes 1. Lead(s) identified: Number and names with TRL i. MEMS Pressure Sensor- TRL 5-6 (BARC, IGCAR, NAL, M/s JK Tire and M/s Samsung) ii. Gas Sensor Platform- TRL-7 (Demo and Industry meet arranged) iii. ISFET ph Meter- TRL-5 (Potential bio-sensor under Mission program) iv. MEMS Accelerometer- TRL-5 (Approved FTT activity, Evaluated with NAL Network project) v. RF-MEMS : (Approved FTI activity, User-SAC Ahmedabad) TRL-5 vi. L TCC technology - TRL- 5/6 (DRDO-DRDE, DIHAR, SSPL) 2. Technology/Product developed: Number and names with TRL level of Development ~ ISFET /EGFET for ph sensor- TRL-5 ~ MEMS Gas Sensor Platform- TRL-7 ~ MEMS Accelerometer- TRL-5 ~ MEMS Pressure sensor for Ro water, Air and Vacuum-TRL-7 ~ MEMS Gyroscope (Single axis)- TRL-4 ~ LTCC for MEMS packaging- TRL-7 3

4 > Microsystems for LPG, Alcohol, Food, water and Fruits-TRL- 7/8 3. Technology/Product transferred: Number and names with name of licensee(s) - NIL 4. Facility created: Number and names with uniqueness & utility > LDV based MEMS Structures Characterizing facility > USM in MEMS- working prototype demonstrated > Laser based dicing of composite structures (Glass bonded silicon) > E-beam assisted Polysilicon thin film as piezoresistive with low TCR- demonstrated 5. Sponsored projects obtained (with details) BARC Mumbai - MEMS Pressure Sensor Lakh ( ) DRDO- DRDE: ( Phase -1 completed) 6. External Cash Flow (ECF) generated - More than Lakh 7. Societal impact created (quantified data) > Real time RO water control system in Shekhawati area > Milk Analyzer > LPG and Alcohol detector b. Outputs: 1. Periodic Reports Submitted: 6 task force meetings were conducted and progress reports in 4 RCs 2. Publications: Total Number of Publications: 212 Type May 2012 April2013 April2014 April2015- Apri12016 March 2013 March 2014 March 2015 March 2016 Oct SCI Journal Non-SCI Journal International Conference National Conference Total number of publications i. Total number 212 4

5 SCI Journals - 57; International Conferences- 1 05; Book Chapters - 2 Non-SCI Journals- 27 National Conferences - 23 ii. Cumulative IF (as per 2015 figures) (Approx.) iii. Average IF iv. Average IF/scientist Patents Filed 8 Patents 4. Human Resource generated i. PhD fellows: 25 No No. PhDs completed 12 No. pursuing ii. Project fellows: 50 Project Fellows (PF + SPF) iii. Skills imparted: 35 M.Tech and B. Tech Trainees involved in MEMS processes, packaging and characterization More than 20 contract workers were trained in fabline 5. External collaborations established );> BARC Mumbai...:. MEMS Si-Pressure Sensor );> Tezpur University Assam- Consultancy for MEMS facility );> IGCAR Kalpakkam- MEMS SiC Pressure Sensors );> DRDO-DRDE & SSPL- L TCC Technology );> SAC Ahmedabad, SCL Chandigarh - RF-MEMS );> M/s JK Tyre -MEMS Pressure Sensor );> M/s S.S. Engineers Jaipur, MEMS Pressure Sensor for RO );> M/s Wacwin India );> M/s Solid Block semiconductor Solutions ( );> M/s Plenumtek, Nagpur- MEMS Pressure Sensor );> MIT Singapore - MEMS gauge for vacuum );> Da Pro, Singapore - Rubber Diaphragm for RO water sensor );> M/s Chemicot Scientific Gases ( NOIDA) 6. Sectoral Monitoring Committee Recommendations on Lead/Technology/Product (listed above): For each Lead/Technology/Product provide details separately: Criteria Name of Lead IT echnology /Product SMC Recommendations 1. Sensors: Pressure Sensor Gas sensor 5

6 Is the Lead/ Technology/Product worth taking up further? What is the further R&D efforts that need to be put by CSIR/ CSIR laboratories? MEMS Accelerometer and Gyroscope ISFET ph-meter II. RF-MEMS Ill. L TCC packaging technology as continuing activity Yes Customization and tuning of the technologies as per the application specific industry requirements Global benchmarking of the MPXY 8000 series (Motorola), cost Currently available commercial products have a price range Lead/Technology/Product between Rs 1000 to 30,000 depending on the specifically wrt specifications application. and cost Figaro TGS2444, TGS3870 and TGS2602, Cost: Currently available commercial products have a price range between Rs 1000 to 30,000 depending on the application and system performance. Is the Lead/Technology/Product worthy of commissioning a DPR at this stage? What are the likely resources and time duration required for taking forward the identified Lead/ Technology/Product to the desired TRL? SeaFET (Sea-Bird Scientific, Washington, USA), Cost: Cost of Competing technologies available in the market varies from Rs. 60, to Rs. 100, based on its resolution. Silicon designs, Cost: Approx.: Rs. 70,000 Yes -3 Years Potential stake holders who may JK Tyres, Samsung, BARC, IGCAR, Chemicot, DIHAR, be appropriate to partner DRDE, DLJ, SAC, IISU technically as well as financially The development should be in close collaboration with Suggestion for plausible road map towards further user/ industry development of lead/technology/product for achieving desired TRL GO GO/NO GO further development Other suggestions, if any, related to benefits/usage/ commercialization 7. Identified "lessons to be learnt", especially from shortcomings/failures. NIL. 4 6

7 8. Comments on financial progress on the project fund availability and utilization of fund in the project: Financial progress is satisfactory and investment made is justified. Sectoral Monitoring Committee Recommendations on Facility creation or other outcomes: Purchase of Laser Doppler Vibrometer has been extensively used for dynamic characterization of 3-D moving MEMS structures. The creation of this crucial facility is relevant to meet the objectives of the project. Characterization of Gyroscope, Gyro-Accelerometer, RF-MEMS Switches, Accelerometers and Magnetometer has been carried out on LDV. The expenditure made for this facility creation is justified. This facility should be made available to users from other Institutions. 9. Grading of Project Execution: Outstanding/ Excellent/ Very Good/ Good/ Satisfactory/ Unsatisfactory Excellent 10. Additional comments, if any: Indian Foundries available at STAR-C, SCL should be used for future realization of sensors fabrication. Sign clture of Chairman & all Members of Sectoral Monitoring Committee Prof. G. K. Ananthasuresh Prof Subir Kumar Saha Dr. R. K. Sharma ~<-,S h4/\~ G~~ - Dr. Debashis Dutta Dr. C. P. Ravikumar Dr. Aravind S. Bharadwaj s~..a4y)~~ Dr. S. Srikanth DrSC ~ Shri S. K. Sharma Chairman, SMC 7