Solenoid valve for high vacuum. Orifice: 1, 2, 3, 4.5, 6. NC (normally closed) type. Cv flow factor (*4) Working pressure range Pa (abs)

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1 V 1 V 1 Series Orifice: 1,,,., N (normally closed) type IS symbol N (normally closed) type ommon specifications escriptions Working fluid Withstanding pressure MPa luid temperature mbient temperature eat proof class llowable voltage fluctuation tmosphere Valve structure Valve seat leakage Pa m /se xternal leakage Pa m /se Mounting attitude Number of endurance times V*1 ir, vacuum, inert gas (*1).0 to 0 to (no freezing) Rated voltage 10% Not in explosive or corrosive environment irect acting poppet structure 1.0 x 10-9 or less 1.0 x 10-9 or less ree,000,000 times Individual specifications escriptions Port size N (normally closed) type V1 1/" joint 1/" double barbed joint 1/ V1 1/" joint 1/" double barbed joint 1/, 1/ V1 1/" joint 1/" double barbed joint 1/ /" joint /" double barbed joint / V1 1/" joint 1/" double barbed joint 1/ /" joint /" double barbed joint / Orifice (mm) 1.. v flow factor (*) Working pressure range Pa (abs) 1.0 x 10 - to 1.0 x x 10 - to 0. x x 10 - to 0. x x 10 - to 0. x x 10 - to 1.0 x x 10 - to 0. x x 10 - to 0. x x 10 - to 0. x x 10 - to 0. x 10 Max. working pressure (*) (MPa) ack pressure (*) (MPa) Rated voltage 100 V 0/0z 00 V 0/0z V 1 V *1: The durability may drop remarkably depending on the degree of dryness. *: The XR joint can be connected with the VR joint. *: Keep the leakage current at value below or less. *: The listed v values are for the connection. *: The maximum working pressure difference indicates the difference of the port (high pressure side) and port (low pressure side). *: Pressurizing from the port with the port released to atmosphere is possible. *7: 1 V is. (W). *: The listed weights are for the grommet lead wire and connection. Power consumption (W) Weight (*) (kg) (*7) Leakage current Voltage V*1 100 V 00 V V 1 V m or less 1m or less 1m or less m or less 1

2 V 1 ow to order V 1 RM V V1 V1 V1 V1 RM S N RM S N N RM RM S S N 10N RM RM S S N 10N Series size (oil width) onnection oint type onnection Table 1: oint type and orifice combinations Size 1/" 1/" 1/" 1/" 1/" 1/" 1/" 1/" /" 1/" /" 1/" /" 1/" /" 1/" /" 1/" /" Orifice Orifice Z 1 <xample of model number> V1-RM---V Series: V1 Series size : mm onnection : 1/" joint Orifice : oil option : rommet lead wire Other options : Mounting plate Voltage : V Other.P. Voltage systems Option oil option *1 * *1: The surge suppressor is incorporated as a standard with the full wave rectifier type. *: The compact terminal box (Pg9) is used when V1 () /S is selected.. V1 V1 Symbol escriptions Series size mm mm mm 0mm onnection method (Refer to Table 1) RM 1/" joint RM /" joint S 1/" double barbed joint S /" double barbed joint N 1/ N 1/ 10N / Orifice (Refer to Table 1) Z 1. oil option or With grommet lead wire R and all wave rectifier or Standard rommet lead wire rommet lead wire S Surge suppressor IN terminal box (Pg11) IN terminal box + light S Surge suppressor (Pg11) Other options lank Standard lank Mounting plate Standard Option Option Voltage 100 V 100 V 0/0z 00 V 00 V 0/0z V V 1 V 1 V Select from the combinations marked with a above. V1 V1 19 N/ US/ / / V W/ L P/ PK/ K or dry air xplosion proof V/ VL S/ SV NP/NP/ NVP / MX/ Other.P. systems P// P V/ VS P/ P Medical analysis ustom order

3 V 1 Internal structure and main parts materials 1 Port Port No. Parts name Material 1 oil assembly ore assembly tightening torque Plunger assembly (Molded coil) SUS0, SUS1L SUS0, KM Stainless steel Stainless steel, fluoro rubber No. Parts name Material O ring Spring ody KM SUS0 SUS0 or SS1 luoro rubber Stainless steel Stainless steel imensions rommet lead wire (voltage: type) and joint type V*1- RM -*- RM Port Port L K Lead wire length 00 mm V1-RM V1-RM V1-RM V1-RM V1-RM V1-RM K L M x 0.7 depth M x 0. depth M x 0. depth M x 0. depth M x 0. depth M x 0. depth 0

4 V 1 imensions rommet lead wire (voltage: type) and double barbed joint type V*1- S -*- S N/ US/ / Port Port / V W/ L Lead wire length 00 mm P/ V1-S V1-S V1-S V1-S V1-S V1-S rommet lead wire (voltage: type) and type V*1- N -*- N 10N M x 0.7 depth M x 0. depth M x 0. depth M x 0. depth M x 0. depth M x 0. depth PK/ K or dry air xplosion proof V/ VL S/ SV NP/NP/ NVP / MX/ Other.P. systems Port Port P// P V/ VS P/ P Medical analysis ustom order V1-N V1- N V1-10N V1-10N Lead wire length 00 mm 1/ 1 1/, 1/ 1 1/, / 1 1/, / 1 M x 0.7 depth M x 0. depth M x 0. depth M x 0. depth 1

5 V 1 Optional dimensions rommet lead wire (voltage: type) and all wave rectifier V*1-*-*- R Refer to grommet lead wire ( type) dimensions on the previous page for the common dimensions. Port Port V1 V1 V1 V IN terminal box (with light and surge suppressor) V*1-*-*- S (oil width) Port Port joint: RM and RM Port Port Port Port joint: S and S joint: N, N and 10N V1 V1 V1 V Pg9 Pg11 Pg11 Pg

6 V 1 Optional dimensions Mounting plate V1-*-*-* N/ US/ / / 1 V W/ 1 -. L t1. P/ PK/ K or dry air Mounting plate V 1-*-*-* 0 xplosion proof V/ VL S/ SV NP/NP/ NVP / MX/ Other.P. systems P// P V/ VS P/ P Medical analysis ustom order t