AVI family The modular concept
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1 AVI350/LP AVI350LT/LP AVI400/LP AVI400LT/LP AVI600/LP AVI600LT/LP AVI350/LP AVI400/LP AVI600/LP Load (per unit) kg kg kg Load (2 units) kg kg kg Static compliance vertically 3.4 µm/n horizontally 6.8 µm/n vertically 1.7 µm/n horizontally 3.4 µm/n vertically 1.2 µm/n horizontally 2.4 µm/n Correction force ± 8N ± 4N ± 16N ± 8N ± 24N ± 12N Correction (max) ± 20 µm ± 20 µm ± 20 µm ± 20 µm ± 20 µm ± 20 µm Weight (per unit) 10 kg 20 kg 30 kg Power consumption < 0.7 W < 1.4 W < 2.1 W (per unit) Power consumption (total system) min 7 W max 9 W min 11 W max 15 W min 22 W max 24 W AVI350LT/LP AVI400LT/LP AVI600LT/LP Load (2 units) kg kg kg Static compliance vertically 9 µm/n horizontally 18 µm/n vertically 4.5 µm/n horizontally 9 µm/n vertically 3 3 µm/n horizontally 6 µm/n correction force ± 8N ± 4N ± 16N ± 8N ± 24N ± 12N Correction (max) ± 20 µm ± 20 µm ± 20 µm ± 20 µm ± 20 µm ± 20 µm Weight (per unit) 10 kg 20 kg 30 kg power consumption < 0.7 W < 1.4 W < 2.1 W (per unit) Power consumption (total system) min 7 W max 9 W min 11 W max 15 W min 22 W max 24 W AVI series (technical details) HWL Scientific Instruments.com Page 1 of 15
2 Overview These moderately priced dynamic vibration isolation systems achieve in a very small volume better isolation than is possible with the biggest and most expensive passive systems. Inertial feedback is used via force transducers to provide not only isolation from building vibrations, but also isolation from vibration sources placed on the system itself. This means, for example, that a delicate microscope isolated by the system will remain at rest despite forces being applied via the operator's hands. The inherent stiffness of the system, typically 500 times greater than that of a 1 Hz resonance passive isolator, imparts excellent directional and positional stability (response time = 10 ms). The lack of any low frequency resonance, a resonance which plagues all passive systems, allows the systems to be stacked for super-isolation in severe environments. The AVI series is based on a modular concept consisting of different sized modules. There are single elements (AVI350/LP-modules), double elements (AVI400/LP-modules), and triple elements (AVI600/LP-modules). Each type is available with two different length (S & M). The standard version consists of two modules and is expandable to 3 or more elements depending on the size and weight of each individual application. Each module by itself isolates against vertical and horizontal translations and against rotations about one horizontal axis. The combination of two modules or more isolate against all six possible translational and rotational vibrations. The modules cannot be used separately but is expandable to a system with more than 2 elements. Even different types (AVI350, AVI400, and AVI600) can be mixed in one specific application to get the best configuration for an individual application. Isolation of the AVI-systems begins at about 1Hz, increasing rapidly to at least 35dB beyond 10Hz. This system offers excellent isolation in the typical laboratory environment. The isolation caracterisic at the low frequencies is displayed in the table below and the transmissibility curves on the next page. The new Low Power Technology (LP) does not consist of voice coil actuators. This lead to no electromagnetic disturbances to upset delicate instruments (no electromagnetic pollution and a complete absence of magnetic stray fields). No heating up by strongly reduced power consumption. The isolation has been further improved. Isolation of the AVI-series Vertical Horizontal db Transmisson Absorption db Transmisson Absorption 2 Hz 7,5 0,422 57,8 % 3,7 0,656 34,4 % 2,3 Hz 10 0,316 68,4 % 4,9 0,570 43,0 % 3 Hz 13,8 0,205 79,5 % 8,7 0,369 63,1 % 3,2 Hz 14,5 0,188 81,2 % 9,4 0,337 66,3 % 3,9 Hz 19 0,112 88,8 % 13,8 0,205 79,5 % 4 Hz 22,5 0,075 92,5 % 14,2 0,196 80,4 % 10 Hz 33 0,022 97,8 % 28,8 0,036 96,4 % 20 Hz 35 0,018 98,2 % 30,2 0,031 96,9 % : : : : : : : db = -20 log(t) AVI series (technical details) HWL Scientific Instruments.com Page 2 of 15
3 Transmissibility AVI-Elements Vertical dbmag, V / V Hz Horizontal dbmag, V / V Hz AVI series (technical details) HWL Scientific Instruments.com Page 3 of 15
4 Dimensions Single elements Length [mm] Width [mm] Height [mm] Self-weight [kg] AVI350S/LP AVI350M/LP AVI400S/LP AVI400M/LP AVI400EM/LP AVI600S/LP AVI600M/LP Comparison active versus passive Advantages of active vibration isolation compared with soft & passive solutions: small size lack of any low frequency resonance inherently stiff (500x greater than that of a 1 Hz passive isolator) rapid recovery time from shock (10 ms) no air required no set up time & calibration necessary includes all six translational and rotational vibration modes superior to any passive system Unique feature: Low Power Technology no electromagnetic pollution to upset delicate instruments no heating up by strongly reduced consumption Key applications Scanning Electron Microscopy (SEM & FIB) Transmission Electron Microscopy (TEM) Scanning Tunnel Microscopy (STM) Interferometry Wafer Inspection Systems Profilometry Stationary Roughness Measuring Stations Nanolithography & Nanoengineering etc. AVI series (technical details) HWL Scientific Instruments.com Page 4 of 15
5 Dimensions AVI-350S/LP ,5 10 ø6, M5 64 AVI series (technical details) HWL Scientific Instruments.com Page 5 of 15
6 Dimensions AVI-350M/LP 110, Ø6,5 M M AVI series (technical details) HWL Scientific Instruments.com Page 6 of 15
7 Dimensions AVI-400S/LP 112, ø6, AVI series (technical details) HWL Scientific Instruments.com Page 7 of 15
8 Dimensions AVI-400M/LP 114, Ø7 10 Ø6,5 M AVI series (technical details) HWL Scientific Instruments.com Page 8 of 15
9 Dimensions AVI-400EM/LP 117, Ø7 10 Ø6,5 M AVI series (technical details) HWL Scientific Instruments.com Page 9 of 15
10 Dimensions AVI-600S/LP 112, ø6,5 AVI series (technical details) HWL Scientific Instruments.com Page 10 of 15
11 Dimensions AVI-600M/LP 114,5 Ø6,5 M Ø7 10 M AVI series (technical details) HWL Scientific Instruments.com Page 11 of 15
12 AVI350/LP Arrangement of sensor-actuator-units A A A V = Vertical H = Horizontal A B B B B A B Diagnostic out A/B Oscilloscope Display A B V3 V4 H3 H4 V AVI series (technical details) HWL Scientific Instruments.com Page 12 of 15
13 AVI400/LP Arrangement of sensor-actuator-units C A V = Vertical H = Horizontal B D C C A A B B D D C A B D C A B D Diagnostic out A/B C/D A B Oscilloscope Display V3 V4 C D H3 H4 Front Panel LEDs AVI series (technical details) HWL Scientific Instruments.com Page 13 of 15
14 AVI600/LP AVI family Arrangement of sensor-actuator-units V = Vertical H = Horizontal E C A C F F D B E C A A B F D B E C A E D F D B E C A F D B Diagnostic out A/B C/D E/F A B Oscilloscope Display C D V3 V4 E F H3 H4 Front Panel LEDs AVI series (technical details) HWL Scientific Instruments.com Page 14 of 15
15 HWL Scientific Instruments GmbH Georgstrasse Ammerbuch Deutschland Telefon: Fax: Internet: AVI series (technical details) HWL Scientific Instruments.com Page 15 of 15
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