PRELIMINARY. The following table outlines the specifications of our standard tunable 2D-mirror MR Custom mirror coatings are possible.

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1 Datasheet: MR-1-3 Copyright 212 Optotune Dual axis mirror with position feedback MR-1-3 Optotune s dual axis mirror series MR-1-3 is the ideal choice for applications that require large deflections in a compact form factor. With a mirror size of 1mm the MR-1-3 achieves up to +/- 2 mechanical tilt, which results in up to +/- optical deflection. The mirror includes a position feedback system which allows it to be accurately controlled with a standard PID controller. The actuator is based on proven technologies. In contrast to galvo mirror systems, the virtual rotation point is very close to the mirror surface. The mirror can be fabricated with various coatings such as gold or protected silver. Advantages Applications Large scan angle Compact Precise Automotive (LiDAR, dynamic headlights, ADAS) Vision (field-of-view expansion, zoom) Biometric (eye-tracking) & diagnostic equipment 3D printing The following table outlines the specifications of our standard tunable 2D-mirror MR-1-3. Custom mirror coatings are possible. Specifications Mechanical specifications Actuator Type 4-Quandrant (2 axis, bi-directional) Mechanical tilt angle DC ±2 X axis; ±2 Y axis Mechanical tilt angle dynamic ±2 X axis; ±2 Y axis Mirror diameter 1 mm Center of rotation to mirror surface 1.3 mm External diameter 3.4 mm Height 14. mm Weight 29.3 g Scale drift T.B.D ppm/ C (Max) Zero drift 2 μrad/ C (Max) Resolution (closed loop) < μrad Repeatability RMS (typical) 3-1 μrad Full scale bandwidth 2 Hz Sine wave (±2 ) Small signal bandwidth (< ±.1 ) 3 Hz Large angle step response (2 step) 7. ms Small angle step response (.1 step) 1.4 ms Mechanical clamping screws Magnetic shielding yes Optical specifications Surface finish Reflectivity Gold and protected silver, other coatings available as custom Gold: - Avg >97% (8 nm - 2 μm) - 98% (@1.3 um) Protected Silver: - Avg >94% (4 nm 7nm) Page 1 of 7 Phone info@optotune.com

2 Tilt Angle ( ) Tilt angle ( ) Datasheet: MR-1-3 Copyright 212 Optotune Surface quality 6-4 Scratch-Dig Mirror flatness (ISO Norm 111) Electrical specifications Control interface Analog interface for driver coils and for feedback readout Actuation current <.2 DC, 1 peak A Max actuation power (11 Ohm) <.4 DC W Coil resistance 11 Ohm Coil inductivity 6 mh supply current (@1.V) 3mA ma Typical feedback current.1 ma Temperature sensor LM7B with EEPROM M24C8 Environmental specifications Operating temperature -2 to +8 (temp up to +1 or higher C is possible with a customization) Storage temperature -4 to +8 C Rel. humidity 8 % Shock 2G g Cycle life >M (status : 383 mio) cycles Static Response Current vs Angle Applied current (ma) Figure 1: Mechanical tilt angle versus applied current for single axis Applied power (mw) Figure 2: Tilt angle (mechanical) versus applied power (~8.8 mw/ ) Page 2 of 7 Phone info@optotune.com

3 Angle ( ) Angle ( ) Datasheet: MR-1-3 Copyright 212 Optotune Dynamic response Small step response Figure 3: Small step response (blue curve) of outer axis (.1 step) < 1.4ms. Mirror operated with closed loop PID controller. The yellow curve shows the corresponding current driving signal Figure 4: Small step response (blue curve) of inner axis (.1 step) < 1ms. Mirror operated with closed loop PID controller. The yellow curve shows the corresponding current driving signal. Page 3 of 7 Phone info@optotune.com

4 Angle ( ) Angle ( ) Datasheet: MR-1-3 Copyright 212 Optotune Large step response Figure : Large step response (blue curve) of outer axis (2 step) < 7. ms. Mirror operated with a combination of pinning algorithm and closed loop PID controller. The yellow curve shows the corresponding current driving signal Figure 6: Large step response (blue curve) of inner axis (2 step) < 6.2 ms. Mirror operated with a combination of pinning algorithm and closed loop PID controller. The yellow curve shows the corresponding current driving signal Page 4 of 7 Phone info@optotune.com

5 Speed (Hz) Datasheet: MR-1-3 Copyright 212 Optotune Maximum oscillation frequency y = 11.98x Mechanical half angle ( ) Figure 7: Max. oscillation speed (sinus) as a function of mechanical half angle. The total optical FOV is 4 times the mechanical half-angle. Mounting Figure 8: Mechanical drawing of MR-1-3 (unit: mm) The alu plate in the middle of the mirror is standing out by about 3 m. This ensures that the plate Page of 7 Phone info@optotune.com

6 Datasheet: MR-1-3 Copyright 212 Optotune is in firm contact with the heatsink when screwed in place with the mounting screws. It is recommended that the heatsink dissipates about 2- W. In terms of lateral alignment, it is recommended to use the outer diameter of the housing as an alignment feature. Electrical connection Pin Function Value Pin Function Value 1 supply Cathode 4 ma 11 VDD 3.3V 2 supply Anode 1. V 12 SCL Digital 3.3 V 3 Y Coil + 13 SDA Digital 3.3 V 4 14 GND 1 Anode Y Coil Y2 Cathode ± 1 A ± 1 V 7 17 Y1 Cathode currents X Coil + (μa range) 8 18 X2 Cathode 9 19 X1 Cathode X Coil Anode Table 1: Electrical pinout MR-1-3 Beam clipping Clipping of beam depends on beam diameter and tilt angle. For a beam incident at degrees beam sizes up to 1mm can be used without clipping. Figure 9: The maximum allowed beam diameter depends on input angle and mirror tilt angle. Page 6 of 7 Phone info@optotune.com

7 Datasheet: MR-1-3 Copyright 212 Optotune Optotune can supply by request an EXCEL based calculation tool to evaluate beam clipping. Environmental testing The MR-1-3 is going through environmental and accelerated aging tests as outline in the table below. Test Mechanical cycling: 1 Hz on 1. axis, 9 Hz on 2. axis, room temperature 383 mio cycles reached (status June 14, 218) with no signs of fatigue. Goal: >mio cycles Temperature cycling non-operational 8 C/6h, -4 /6h; 2 cycles, non-operational No significant change in repeatability Temperature cycling operational -2 C... 9 C operational (steady state jumps over entire FOV every sec, 2 cycles 6hours) Temperature drift & heating effects Temperature drift: approx. 2urad/K No significant self-heating at low frequency Temperature & Humidity 8 C / 8% (duration: 1 week) Shock test According to DIN EN Mirror is not affected by shocks up to 2g Vibration test According to DIN EN Preliminary data available on request. MR-1-3 On-going On-going Table 2: Environmental tests performed on the MR-1-3 For more information on optical, mechanical and electrical parameters, please contact sales@optotune.com. Page 7 of 7 Phone info@optotune.com