CATALOG No. US Roundtest RA-H5000. High-precision Roundness Measuring System

Transcription

1 CATAOG No. US Roundtest RA-H5000 High-precision Roundness Measuring System

2 High-Precision Roundness Measuring System The Roundtest RA-H5000AS/AH has been developed by Mitutoyo to provide the world's greatest degree of accuracy in roundness measurement. High precision has been achieved without sacrificing speed through a process involving constant redesign, prototyping and experimentation. This development is based on Mitutoyo's years of experience in the industry, along with cutting-edge technology in the field of shape measurement. Achieving the World's Most Accurate Measurement Turntable Rotational accuracy: (0.02+6H/10000)µm Vertical column (Z-axis) Straightness: 0.05µm/100mm (0.3µm/350mm) Parallelism with rotating axis: 0.2µm/350mm Horizontal arm (R-axis) Straightness: 0.5µm/200mm Squareness against rotating axis: 0.5µm/200mm Data at April Greatly Reduced Measurement Time Turntable Rotating speed: 20rpm max. (during measurement: 2, 4, 6 or 10rpm) Vertical column (Z-axis) Speed of movement: 30mm/s max. (during measurement: 0.5, 1, 2 or 5mm/s) Horizontal arm (R-axis) Speed of movement: 20mm/s max. (during: 1 or 5mm/s) 2

3 Photo: RA-H5000AS and optional accessories Roundtest RA-H5000 3

4 Using FEM analysis to design a body base The body base is the foundation that supports the turntable, vertical column, horizontal arm and workpiece under measurement. The base needs to be extremely rigid in order to combine these components into an instrument that can achieve the required accuracy. Mitutoyo created its new base by applying the results of the FEM (Finite-Element Method) structural analysis, in which we simulated the distribution of stress throughout the base. The RA-H5000's highly rigid base exhibits little flexure as a result of load fluctuation during measurement and movement. The base design also limits to an extraordinarily minute degree the adverse effects on parallelism between the table's rotating axis and the vertical column, thus ensuring the greatest possible accuracy of measurement. High-precision horizontal (R-axis) arm The straightness of the R-axis is greatly affected by the rigidity of the horizontal arm and the frame supporting the arm. The Mitutoyo arm has been designed to ensure the highest possible rigidity through FEM structural analysis and the simulation of locus at the stylus tip of a driven arm. The use of ceramic material, improved two-dimensional moment through a modified cross-section, and other new technologies have achieved a horizontal arm straightness of 0.5µm/200mm in the RA-H5000 Series. Stress arger Smaller FEM structural analysis of the horizontal arm Stress arger Smaller Motion simulation Sections of the horizontal arms RA-H5000 Series Conventional Roundtest FEM structural analysis of the body base Precision ball screw Extremely precise vertical column for cylindricity/straightness measurement The vertical slider is driven up and down by a precision ball screw along the column-guide surface, which is precisionfinished. This slider has been designed with consideration for the center of gravity during movement, virtually eliminating the effect that the moment of inertia might otherwise have on accuracy. Other design features include a proprietary run-out eliminator that removes minute run-outs during movement, and a counterbalance system featuring air cylinders. Thus the RA- H5000 Series models have the benefit of a high-accuracy column with a straightness of 0.05µm/100mm (within a narrow range). Horizontal arm Z-axis slider 5

5 A VARIETY OF MEASUREMENT/ANAYSIS FEATURES! Mode Analysis item Procedure Result Mode Analysis item Procedure Result ROUNDNESS (SC/MZC/MIC/ MCC) STRAIGHTNESS (VERTICA) FATNESS (SINGE- CIRCUMFERENCE) STRAIGHTNESS (HORIZONTA) FATNESS (MUTIPE- CIRCUMFERENCE) TAPER RATIO (VERTICA) SQUARENESS (AGAINST AXIS) f SQUARENESS (AGAINST PANE) CONCENTRICITY COAXIAITY (OF SECTION) COAXIAITY (OF AXIS) f r Y f p p t R max - R min t1 t2 ±(t1±t2) Axis 2 Axis 1 R Datum axis Squareness R Squareness Datum plane c c c RECTIINEAR MEASUREMENT TAPER RATIO (HORIZONTA) SOPE (VERTICA) SOPE (HORIZONTA) CYINDRICITY SQUARENESS t t2 t1 r2 r1 r1 - r2 Rotation axis ±(t1±t2) s PARAEISM (SINGE-RADIUS) COAXIAITY c ROTATIONA MEASUREMENT PARAEISM (MUTIPE-RADIUS) THICKNESS DEVIATION (RADIA) THICKNESS DEVIATION (AXIA) CYINDRICITY SIMPIFIED CYINDRICITY MEAN CYINDRICITY RADIUS VARIATION MZC d min d max d max d max - d min d min d max - d min Cylindricity Cylindricity SC MZC MCC MIC Cylindricity Mean circle r1 - r2 SPIRA MEASUREMENT PARAEISM (VERTICA) PARAEISM (HORIZONTA) CYINDRICITY FATNESS COAXIAITY SQUARENESS (AGAINST AXIS) SQUARENESS (AGAINST PANE) p Squareness Squareness CIRCUAR RUN-OUT (RADIA) Circular run-out TOTA RUN-OUT (RADIA) Total run-out CIRCUAR RUN-OUT (AXIA) Circular run-out TOTA RUN-OUT (AXIA) Squareness TOTA RUN-OUT (RADIA) Total run-out OCATION OF THE WORKPIECE CENTER ON TURNTABE TOTA RUN-OUT (AXIA) Total run-out ECCENTRICITY COORDINATE Table rotation center Center of workpiece X DIAMETER MEASUREMENT Standard workpiece R d ECCENTRICITY ANGE Center of workpiece Table rotation center C θ 0 Comparison Roundtest RA-H5000 4

6 High-speed automatic centering and leveling All adjustment axes of the turntable incorporate Mitutoyo's highaccuracy linear scales, which minimizes positioning error during table adjustment and contributes to high-speed automatic centering and leveling of the workpiece. This facilitates substantial reductions in overall measurement time, starting from the setting of the workpiece and ending with the display of results. This automatic system even operates when measuring notched workpiece. Out of squareness 0.2 Centering and levelong can be completed just in a minute. Eccentricity 2000µm Highly accurate table rotation due to the high-performance air bearing The RA-H5000 Series incorporates a turntable suspended by a high-precision air bearing. Mitutoyo employs "complex restrictor" method for the air bearing, which are known for their superior rigidity and uniform pressure distribution. The turntable's rotational accuracy of (0.02+6H/10000)µm the highest in the world has been achieved by improving the accuracy of the rotor, stator and other components for a greater air-bearing effect, and also by optimizing the orifice and grooves. Moreover, the capacity for load mass has been increased by as much as 30 percent over previous models, thereby permitting the measurement of heavier objects. Porous restrictor A inclination of 0.2 is almost equal to a deviation of 520µm from the axis at 150mm height. Accuracy compensation function Measured data generally includes various error factors, one of which is mechanical error (rotational accuracy and straightness) in the instrument itself. But the RA-H5000 Series has achieved the highest level of mechanical accuracy, and we at Mitutoyo believe it presents no problem in the evaluation of standard workpieces. However, when measuring a precision workpiece that requires an accuracy level equivalent to or greater than the measuring accuracy of the instrument, the mechanical error inherent in the instrument itself can be digitally compensated from the measurement data, thereby achieving to a workpiece shape that's much closer to a true value. Complex restrictor Surface restrictor Orifice restrictor Inherent restrictor Non-dimensional rigidity of air bearings Reference data PTB calibrated glass hemisphere (optional) Pressure Pressure Inherent restrictor (Air outlet: pinhole) Complex restrictor (Air outlet: groove with orifice restrictor) Pressure distribution of air bearings Data without error compensation Data with error compensation 6

7 A variety of optional styli Many optional styli are available for a variety of applications depending on workpiece shape and measuring purpose (See page 15). Wide measuring range due to automatic horizontal R-axis arm displacement Incorporated with a precision linear scale, the horizontal arm automatically moves during rotating workpiece measurement so that the probe stylus can keep tracking the surface of a workpiece. Otherwise, the displacement in roundness/ cylindricity or the amount of taper that measurable through a vertical motion would result in a measurement over range (maximum R-axis following range: ±5mm (±.2")). Spiral measurement Cylindricity and flatness can be measured in a spiral motion, combining table rotation and the rectilinear motions of the vertical column and horizontal arm. One single measurement accomplishes intermittent measurements over multiple crosssections, and the measurement data is saved continuously. Compared to the conventional measurement by sectioning, the measurement time is greatly reduced while permitting detection of flaws on the circumference. Continuous internal/external diameter measurement The horizontal R-axis arm can traverse 25mm past the table rotation center, permitting continuous measurements on both internal and external features without manually changing the measuring direction of the probe. Inside measurement Automatic positioning function for the turntable This function allows the turntable to be rotated over a desired range, thereby permitting automatic rectilinear measurement of a cylindrical workpiece at a predetermined position. A Outside measurement A A (maximum hole diameter: 50mm (2")) A Easy control via joystick operation The vertical and horizontal movements of the probe can be easily controlled by the joystick. Roundtest RA-H5000 7

8 ROUNDPAK V4.0 Dedicated Data-processing Software for the Roundtest ROUNDPAK V4.0 is a Windows -based software package for the analysis of roundness and cylindricity, requiring only simple manipulation using a mouse and icons. The great variety of items available for evaluation allows analysis along numerous geometric deviations. Multiple displays of analysis results Graphics of multiple sections can be displayed on the monitor. The zoom function allows image expansion for easy viewing. Multiple analysis/recalculation function ROUNDPAK V4.0 can also be used in the simultaneous analysis of multiple items, permitting changes in filter cutoff values, the deletion of unnecessary data, re-application of data for the analysis of different items, and other recalculation functions based on the data already collected. A variety of 3D displays 3D data displays are available from multiple view points. Digital filter function Roughness (or waviness) components of specific wavelengths on the workpiece surface can be removed from the recording profile with the digital filters, thereby yielding better analysis. Part program generation function A series of process, ranging from centering/leveling and measurement of the workpiece to evaluating and printing out the result, are stored as a part program, which can be executed at any time. This function is especially convenient for repeatedly measuring identical workpiece forms. Recalling part program Auto centering/leveling Measurement Analysis Print out 8

9 Harmonic-analysis function The analysis of frequency components in measurement data facilitates the location of worn or damaged parts in a machine tool, workpiece deformation due to chucking, and other fabrication problems. Data deletion is possible at a desired frequency (= undulations per revolution) level. Data layout function A simplified data layout function facilitates the quick preparation of easy-to-understand reports, which can be output on A3- or A4-size paper. (Several items and drawings can be printed on a single sheet.) Narrow-range roundness analysis This function provides for data extraction within a specified angular range from a set of measurements, thereby obtaining the maximum, minimum and average values in a roundness evaluation at a certain pitch. Gear-analysis function Gear analysis allows the evaluation of roundness by obtaining the peak or bottom points within a specific range of pitches. Tolerance-zone measurement function against design values The tolerance-zone function allows the measurement of stored measurement data against design values, and measurement data on the workpiece before and after a test. Measurement data can be positioned to accommodate the design value, through the combination of rotation and movement in the X- and Y- directions of the center coordinates. Accordingly, tolerance-zone measurement can be made with no regard to whether the position of workpiece is off. The function may also be used to analyze the shape of a piston. Data output via TEXT format The analysis results and data can be stored and output via the TEXT format which is compatible with application PC software on the market. Roundtest RA-H5000 9

10 ROUNDTEST TERMINOOGY Controlling roundness is becoming more and more vital in various industries for improved performance and extended durability of products. Rotating shafts that are required to rotate smoothly, rollers that are required to provide a constant feed, and pressure cylinders that are required to be air-tight all require strict roundness control through precision measurement. Mitutoyo's Roundtest Series is the most advanced means of measuring/analyzing roundness and cylindricity of cylindrical forms. It precisely measures the inside or outside of a cylindrical part, using the most advanced technologies, and displays various measuring features, including roundness, cylindricity, flatness, parallelism, run-out, etc. ROUNDNESS (SC/ MZC/MIC/MCC) The roundness (or out of roundness) of a workpiece is defined as the departure of the traced/modified profile from a geometric true circle. To assess the roundness a reference circle (SC/MZC/MIC/MCC) is determined and the measured profile data is enclosed with two circles concentric to the reference circle. The radial separation of the two circles (Rmax - Rmin) is the roundness of the measured workpiece. SC (least squares mean circle) A geometric circle determined so that the sum of the squares of the distance between it and the measured profile of a workpiece is minimized. MIC (maximum inscribed circle) argest circle that can be fitted inside the measured profile of a hole. MCC (minimum circumscribed circle) Smallest circle that can be fitted around the measured profile of a shaft. MZC (minimum zone circle) Two concentric circles enclosing the measured profile and having a minimal difference in radius values. h If roundness is assessed based on the SC, the following data can be obtained from the calculation using radius R0 of the reference circle. Peak height: Maximum deviation (Rmax - R0) of the measured profile that projects outside (positive) the reference circle. Valley depth: Maximum deviation (R0 - Rmin) of the measured profile that projects inside (negative) the reference circle. Mean roundness: The arithmetical mean of the absolute values of the deviation of the measured profile from the reference circle. Peak count: Number of peaks that are outside the reference circle. a R0 Peak height Mean roundness Valley depth 1 FATNESS Flatness is defined as the deviation of a plane from a geometrical plane. To determine the deviation, first determine the reference plane from the measured data (vertical displacement of the circumference). The flatness is determined from the distance between the two planes that are parallel to the reference plane and that enclose the measured data. 2 d 3 Peak count 4 The Roundtest RA-H5000 Series can also measure the flatness of the surface of a workpiece over a desired range including multiple circumferences. The flatness is the maximum value of all data in the range. PARAEISM Parallelism is defined as "where two planes are designed to be parallel, the deviation of an objective plane from a geometrical plane which is made at the position of the objective plane and is parallel to the datum plane as selected so from the two plane components". To assess the deviation, first determine the datum plane for each plane component from the measured data (vertical displacement of the circumference). Select one of the datum planes as a reference plane and provide two planes that are parallel to the reference plane and that bound the other datum plane. The parallelism is the distance between these bounding planes. The Roundtest RA-H5000 Series can also measure the parallelism of the two planes of a workpiece over a desired range including multiple circumferences. The parallelism is the maximum value of all data in the range. f p f SC r (Rmax - Rmin) MIC p MCC MZC 10

11 CONCENTRICITY Concentricity is the deviation of the centers of two reference circles determined from the two circular features of a cylindrical workpiece in the same plane and square against the rotation axis. To determine the concentricity, obtain the roundness of each circle, and double the distance between the centers of the two reference circles. c SQUARENESS Squareness can be obtained with axis reference or plane reference. To assess the squareness of R a plane against the reference axis, first log the measurement data on the objective plane, as well as on two sections of the cylinder, excluding the objective plane. Using these two sections determine the datum axis with an appropriate reference circle. The squareness is determined from the distance between the two geometrical planes that are square against the datum axis and that enclose the objective plane data. THICKNESS DEVIATION The Roundtest can assess the thickness deviation of a workpiece radially or vertically. The wall (radial) thickness deviation of a cylindrical workpiece, such as a doughnut, can be measured by logging the circumference data of inside and outside circles that are in the same plane. The thickness deviation is defined as the maximum form deviation (maximum thickness - minimum thickness) of the wall. d max COAXIAITY Suppose that a workpiece consists of cylinders of different radii, as with a cam shaft. Coaxiality is defined as the deviation of the center of one sectional circle of one cylinder, from the datum axis, which is determined as the center axis of the other cylinder. To assess the deviation, set the center axis of one cylinder as the datum axis, then assess the roundness of a section on the other cylinder. The coaxiality is double the distance between this center and the datum axis. The Roundtest RA-H5000 Series can also measure the coaxiality of the other cylinder itself to the datum axis totally. The coaxiality is Axis 2 Axis 1 double the maximum distance between the axis of the cylinder and the datum axis in a desired range. c To assess the squareness of a cylinder against the reference plane, first set the datum plane with an appropriate reference circle, and from it, create two geometrical lines square against to the plane. Obtain the axis from two sections of the objective cylinder so that it passes through the center of each measured section. The squareness is determined from the distance between the two additional lines and that enclose the obtained axis. Datum axis R Squareness Squareness Datum plane The vertical thickness deviation of a disk or a flange, in the same way, can be measured by logging the circumference data of upside and underside circles that are in the same radius. d max d min CYINDRICITY (MINIMUM ZONE CYINDRICITY) d max - d min d min d max - d min Cylindricity is defined as the deviation of a cylindrical form from a geometrically true cylinder. To assess the cylindricity of a cylinder, several sections are measured to determine a reference axis using the minimum zone circle method, then all the measured data are enclosed between two datum cylinders which are coaxial to the reference axis. The cylindricity is the difference of radius values (Rmax - Rmin) of the two cylinders. c MZC Cylindricity Roundtest RA-H

12 SIMPIFIED CYINDRICITY Simplified cylindricity is defined as the almost same way as the cylindricity. To assess the simplified cylindricity of a cylinder, several sections are measured and the upper and the lower sections of them are extracted to determine a reference axis using an appropriate reference circle, then all the measured data are enclosed between two datum cylinders which are coaxial to the reference axis. The simplified cylindricity is the difference of radius values of the two cylinders. Cylindricity CIRCUAR RUN- OUT By preliminarily determining the reference axis of a cylinder, the Roundtest can measure the radial or axial circular run-out of the cylinder (i.e. the maximum variation of the radius if measured from the reference axis to the circumference). Radial circular run-out DIAMETER MEASUREMENT The Roundtest can determine a workpiece diameter to a high degree of accuracy by using the function to compare the measured data with the diameter of the reference circle, which has been determined with the master workpiece using the least squares method. d SC MZC MCC MIC MEAN CYINDRICITY To assess the mean cylindricity of a cylinder, several sections are measured and the arithmetical mean circles are obtained from them. Desired two circles are extracted to determine a reference axis, then all the mean circles are enclosed between two datum cylinders which are coaxial to the reference axis. The mean cylindricity is the difference of radius values of the two cylinders. Cylindricity Mean circle TOTA RUN-OUT The Roundtest doesn't only measure the circular runout, but also the radial or axial total run-out of the cylindrical workpiece by tracing multiple sections. Axial circular run-out SPIRA MEASUREMENT The Roundtest RA-H5000 Series has a spiral-scanning function by which the cylindricity can be assessed with one measuring sequence. The surface of the cylinder is traced by spiral scanning, instead of tracing multiple circular sections on the cylinder. This completes the cylindricity measurement in minutes. (If the cylindricity is assessed by the spiral measurement function, the reference axis is determined based on the least squares circle.) Cylindricity SC Radial total run-out RADIUS VARIATION The radius variation of a tapered cylinder can be measured with the Roundtest. To do this the Roundtest determines two reference circles at two desired sections, then calculates the difference in the radius of two reference circle. r1 - r2 Axial total run-out STRAIGHTNESS (RECTIINEAR MEASUREMENT) Straightness is defined as the distance between two geometrical lines which are parallel to the least squares mean line of the traced profile of a workpiece and bound the profile. 12

13 t When straightness is assessed, the following data can be obtained from the calculation using the mean line. Peak height: Maximum deviation of the measured profile that projects outside the mean line. Valley depth: Maximum deviation of the measured profile that projects inside the mean line Mean height: The arithmetical mean of the absolute values of the deviation of the measured profile from the mean line. Peak count: Number of peaks that are outside the mean line. Inclination: Maximum deviation of the mean line against the reference axis of the vertical column or the horizontal arm. d h Peak height SOPE (RECTIINEAR MEASUREMENT) Slope is defined as the distance between two geometrical lines which are parallel to the rectilinear motion of the Z-axis column (when performing a vertical measurement) or the R-axis arm (when performing a horizontal measurement) of the Roundtest and bound the traced profile of a workpiece ECCENTRICITY OF THE WORKPIECE (OUT OF THE ROTATING CENTER) The Roundtest can display the location of an off-centered workpiece on the turntable from the rotating center as the values of eccentricity coordinates, distance, and eccentricity angle. Center of workpiece NOTCHED WORKPIECE MEASUREMENT Even on a notched workpiece the correct roundness can be obtained by setting the effective data range beforehand and eliminating the abnormal range value. CENTERING OF THE WORKPIECE If a cylindrical workpiece is not correctly centered on the turntable, the resultant measurement values may vary significantly and may greatly exceed the measuring range. To avoid this problem, centering the workpiece axis with the axis of table rotation is essential. Axis of workpiece Table rotational axis Valley depth Table rotation center Y Mean height P2 P1 Peak count Inclination i a Center of workpiece Table rotation center X C θ 0 EVEING OF THE WORKPIECE If the axis of the cylinder being measured is not perpendicular, the locus of points traced by the stylus tip will result in an ellipse. To avoid this problem and achieve accurate measurements, leveling the workpiece is essential. Axis of workpiece Table rotational axis TAPER RATIO (RECTIINEAR MEASUREMENT) Taper ratio is defined as the inclination difference per unit length of two contour lines against the datum axis. The contour lines should be measured on two sides which are opposite each other and have the same evaluation length on a conical workpiece. t1 t2 ROUGHNESS COMPONENT REDUCTION Generally, in roundness measurement, the roughness components included in the measured profile are removed so that the waviness data can be used for form evaluation. The rate of roughness component elimination (= cut-off value) is usually expressed in "undulation per revolution". For example, a 15 upr low-pass filter will remove peak and valley components which appear more than 15 times per revolution. PARTIA CIRCE MEASUREMENT If a workpiece cannot be measured by physically rotating it by a full-turn due to some obstruction (projection), segments of the circumference can be measured in order to evaluate the cylindrical form. This measurement is called "partial circle measurement". ± (t1±t2) Roundtest RA-H

14 OPTIONA ACCESSORIES Gages Cylindrical square Used for checking and aligning table rotation axis parallel to the Z- axis column. Squareness: 3µm Straightness: 1µm Cylindricity: 2µm Roundness: 0.5µm Mass: 7.5kg (16.5 lbs.) Reference hemisphere with error compensation data Used for checking accuracy. Roundness: 0.08µm Mass: 0.65kg (1.43 lbs.) Magnification checking gage Used for checking and adjusting the probe sensitivity. Range: 400µm Micrometer reading: 0.2µm Mass: 4kg (8.8 lbs.) Dynamic calibration gage Allows to perform quick calibration of the probe sensitivity. Roundness: 20-30µm Mass: 0.5kg (1.1 lbs.) AAB AAB596 Quick chuck Reversible jaws for external and internal chucking. Used for centering and clamping a small diameter workpiece. Easy clamping with a knurled clamp ring. External range: 1 to 75mm (.04" to 2.95") Internal range: 14 to 70mm (.55" to 2.75") Mounting fange: Ø118mm (4.65") Height: 34mm (1.34") Mass: 1.2kg (2.64 lbs.) Chucks Three jaw chuck Reversible jaws for external and internal chucking. Used for centering and clamping a small diameter workpiece such as clank shafts or pins. Heavy-duty type With a clamping wrench. External range: 1 to 85mm (.04" to 3.34") Internal range: 33 to 85mm (1.3" to 3.34") Mounting flange: Ø157mm (6.18") Height: 76mm (2.99") Mass: 3.8kg (8.36 lbs.) Micro chuck Used for clamping extra-small diameter workpieces such as pins or wires. External range: Up to 1.5mm (.06") Mounting flange: Ø118mm (4.65") Height: 48.5mm (1.91") Mass: 620g (1.36 lbs.) Arm/Holder Extension Extension probe holder (3X higher) Used for measuring a tall workpiece. Mass: 1.3kg 12AAB (10.35") 250 (9.84") 211 (8.31") Extension probe holder (2X higher) 2X-longer type stylus is possible. Mass: 1.1kg 12AAB (7.20") 170 (6.69") 131 (5.16") Auxiriary probe holder for a large diameter workpiece Allows to measure a workpece which has an outside diameter from 70mm (2.76") up to 520mm (20.47"). Mass: 0.9kg 103 (4.06") 51 (2.01") 17 (.67") 12AAB (1.69") Unit: mm (inch) 77 (3.02") 43 (1.69") 77 (3.02") Air cover Used for keeping out the influence of air blow on accuracy during measurement. Others External emergency box Allows to halt the performance of Roundtest apart from the instrument. 12AAB598 12AAB599 14

15 Stylus for notched workpiece Stylus tip: Ø3mm carbide ball Minimum hole diameter: 8mm (.32") Maximum hole depth: 50mm (1.96") 7 (.28") 9.5 (.37") Ø3 (.12") Carbide Stylus for groove Stylus tip: 0.25mm radius sapphire Minimum hole diameter: 13mm (.52") Maximum hole depth: 50mm (1.96") 12AAB682 Sapphire 12AAB683 Stylus for corner Stylus tip: 0.25mm radius sapphire Minimum hole diameter: 9mm (.36") Maximum hole depth: 50mm (1.96") 9.5 (.37") Sapphire 12AAB684 Stylus for removing asperity (cutter mark) Stylus tip: 15mm radius carbide blade Minimum hole diameter: 14mm (.56") Maximum hole depth: 50mm (1.96") 9.5 (.37") Ø2 (.08") Stylus for small hole Stylus tip: Ø1mm carbide ball Minimum hole diameter: 15mm (.59") Maximum hole depth: 50mm (1.96") Ø1 (.04") Carbide 12AAB685 Stylus for extra small hole Stylus tip: Ø0.5mm carbide ball Minimum hole diameter: 1mm (.04") Maximum hole depth: 2.5mm (.1") Ø0.5 (.02") Carbide 12AAB686 12AAB688 2X-long type stylus for notched workpiece Stylus tip: Ø3mm carbide ball Minimum hole diameter: 8mm (.28") Maximum hole depth: 130mm (5.11") Vertical use only 9.5 (.37") 5.5 (.22") 7 (.28") 9.5 (.37") 9.5 (.37") Ø2 (.08") Interchangeable Styli 2X-long type stylus Stylus tip: Ø1.6mm carbide ball Minimum hole diameter: 7mm (.28") Maximum hole depth: 130mm (5.11") Vertical use only Ø1.6 (.06") Carbide Ø3 (.12") Carbide 146 (5.75") 146 (5.75") 12AAB689 12AAB690 12AAB691 2X-long type stylus for groove Stylus tip: 0.25mm radius sapphire Minimum hole diameter: 13mm (.52") Maximum hole depth: 130mm (5.11") Vertical use only Sapphire 146 (5.75") 2X-long type stylus for corner Stylus tip: 0.25mm radius sapphire Minimum hole diameter: 9mm (.36") Maximum hole depth: 130mm (5.11") Vertical use only Sapphire 146 (5.75") 2X-long type stylus for removing asperity (cutter mark) Stylus tip: 15mm radius carbide blade Minimum hole diameter: 14mm (.56") Maximum hole depth: 130mm (5.11") Vertical use only 146 (5.75") 12AAB692 2X-long type stylus for small hole Stylus tip: Ø1mm carbide ball Minimum hole diameter: 15mm (.59") Maximum hole depth: 130mm (5.11") Vertical use only Ø1 (.04") Carbide M2 tapped shank for CMM stylus Maximum hole depth: 50mm (1.96") Ø12 (.47") M2X0.4, depth (.37") 6.5 (.26") 0.5 (.02") 5.5 (.22") 2.5 (.1") Ø0.5 (.02") Carbide 20 (.79") 56 (2.2") Ruby ball stylus for CMM (Mounting screw thread: M2) 12AAB676 Applicable ruby ball styli for CMM: Ø0.5mm (.02"), = 10mm (.39") Ø1.0mm (.04"), = 10mm (.39") Ø2.0mm (.08"), = 10mm (.39") Ø3.0mm (.12"), = 10mm (.39") mm, = 10mm (.39") Ø5.0mm (.20"), = 10mm (.39") Ø6.0mm (.24"), = 10mm (.39") Ø8.0mm (.32"), = 12mm (.47") The above ruby ball styli are optional. Disk stylus Stylus tip: Ø12mm carbide disk Minimum hole diameter: 14mm (.55") Maximum hole depth: 50mm (1.96") Crank stylus (Ø1) Stylus tip: Ø1mm carbide ball Horizontal use only 12AAB694 Ø1 (.04") Carbide 12AAB695 Crank stylus (Ø0.5) Stylus tip: Ø0.5mm carbide ball Horizontal use only Ø1.6 ball stylus Stylus tip: Ø1.6mm carbide ball Minimum hole diameter: 2mm (.08") Maximum hole depth: 18mm (.70") Unit: mm (inch) 12AAB696 12AAB (5.75") 12AAB693 Ø1.6 (.06") Carbide 12AAB674 Roundtest RA-H

16 RA-H5000AS/AH MAIN UNIT SPECIFICATIONS Model RA-H5000AS Type inch/mm Order No. RA-H5000AH inch/mm A A A A-2 Machine stand equipped Turntable Vertical column (Z-axis) Horizontal arm (R-axis) Air supply Probe and stylus Electronic unit Set w/standard stand Set w/vibration damping stand Rotational accuracy (radial)* Rotational accuracy (axial)* Rotating speed Working diameter Centering range eveling range Maximum probing diameter Maximum workpiece diameter Maximum workpiece weight Straightness (in narrow range)** Straightness (in entire range)** Parallelism with rotating axis Vertical travel Positioning speed Measuring speed Maximum probing height (OD) Maximum probing height (ID) Maximum probing depth Straightness** Squareness against rotating axis Horizontal travel Positioning speed Measuring speed Air pressure Air consumption Measuring range Measuring force Standard stylus (12AAB681) Measuring direction Stylus angle adjustment Data sampling dots Measuring modes and functions Power supply Power consumption Dimensions (WxDxH)/mass Dimensions Set w/standard stand (WxDxH) Set w/vibration damping stand Mass Set w/standard stand Set w/vibration damping stand Standard accessories (0.02+6H/10000)µm [( H)µinch], H= Probing height (mm [inch]) (0.02+6R/10000)µm [( R)µinch], R= Probing radius (mm [inch]) 2rpm, 4rpm, 6rpm, 10rpm (20rpm during automatic centering) Ø300mm (11.81") ±5mm (.2") ±1 00mm (15.75") Ø680mm (26.77") 80kg (176 lbs.) (65kg (143 lbs.) during automatic centering) 0.05µm/100mm (2µinch/3.93") 0.3µm/350mm (12µinch/13.77") 0.47µm/550mm (19µinch/21.65") 0.2µm/350mm (8µinch/13.77") 0.32µm/550mm (13µinch/21.65") 350mm (13.77") 550mm (21.65") Up to 30mm/s (1.18"/s) with joystick operation (Manual feed available) 0.5mm/s (.02"/s), 1mm/s (.04"/s), 2mm/s (.08"/s), 5mm/s (.2"/s) 350mm (13.77") 550mm (21.65") 350mm (13.77") 550mm (21.65") 100mm (3.93") when using a standard stylus (12AAB681) 0.5µm/200mm (20µinch/7.87") 0.5µm/200mm (20µinch/7.87") 225mm (8.85")*** Up to 20mm/s (.78"/s) with joystick operation (Manual feed available) 1mm/s (.04"/s), 5mm/s (.2"/s) 390kPa (4kgf/cm 2 ) 45 liters per minute ±300µm (±.012") 7 to 10mN (0.7 to 1gf) Carbide ball, Ø1.6mm (.06") Two-directional ±45 (with graduations) 7200 dots/rotation Rotational measurement, rotational measurement with R-axis displacement, R-axis rectilinear measurement, Z-axis rectilinear measurement, partial circle measurement, automatic R-axis arm/z-axis column motion control, automatic turntable positioning, automatic centering, turntable position resetting 120V AC, 50/60Hz 200VA max (without personal computer) 480x325x180mm (18.90"x12.80"x7.09")/15kg (33 lbs.) 944x672x1700mm (37.17"x26.46"x66.93") 944x672x1900mm (37.17"x26.46"x74.80") 980x710x1700mm (38.58"x27.95"x66.93") 980x710x1700mm (38.58"x27.95"x74.80") 750kg (1650 lbs.) 770kg (1694 lbs.) 820kg (1804 lbs.) 840kg (1848 lbs.) Optical flat and gauge block set (997090), standard stylus (12AAB681), origin point gage (998382), auxiliary workpiece stand (356038), machine cover, training kit (12BAB958), air filter set ( ), lubricant (352637), connecting cables, user's manual, screw drivers, key wrenches, power cord, grounding lead wire *According to JIS B **Roughness component cutoff value: 2.5mm ***Including a protrusion of 25mm (1") over the turntable rotation center. Note: Use an optional auxiliary workpiece stand (356038) for measuring a workpiece whose diameter is 20mm (.8") or shorter and whose height is 20mm (.8") or lower. 16

17 Dimensions Unit: mm (inch) RA-H5000 set with a standard stand 672 (26.46") 944 (37.17") RA-H5000 set with a vibration damping stand 710 (27.95") 980 (38.58") max.1240 (48.82") max.1260 (49.61") RA-H5000AH: 1900 (74.80") RA-H5000AS: 1700 (66.93") 900 (35.43") 325 (12.80") 180 (7.09") Electronic unit 480 (18.90") RA-H5000AH: 1900 (74.80") RA-H5000AS: 1700 (66.93") 900 (35.43") 350 (13.78") RA-H5000AS 00 (15.75") 550 (21.65") RA-H5000AH 00 (15.75") Vibration damping stand Maximum loading weight: 200kg Damping method: Diaphragm type air spring Designed natural frequency: 2.0 to 3.0Hz Air pressure control: Orifice Air supply: 400 to 600kPa STANDARD ACCESSORIES Standard stylus Stylus tip: Ø1.6mm carbide ball Minimum hole diameter: 7mm (.28") Maximum hole depth: 50mm (1.96") 5.5 (.22") Ø1.6 (.06") Carbide ball 12AAB681 Origin point gage Used for setting an origin point when performing absolute measurements in the R-axis and the Z-axis directions Auxiliary workpiece stand Used for measuring a workpiece whose diameter is 20mm (.8") or shorter and whose height is 20mm (.8") or lower Optical flat and gauge block set Used for checking the probe sensitivity. Consists of 10.00mm and 10.02mm gauge blocks and an optical flat Air filter set Used for revoming micro dusts and mist from the air supplied. Consumable parts: Air filter element (354320) Mist separator element (354321) Micro mist separator element (354322) Roundtest RA-H

18 ROUNDPAK V4.0 SPECIFICATIONS Data analysis items Rotational measurement Rectilinear measurement Sprial measurement Reference circles for roundness evaluation Variation of analysis views Recording device Recording magnification Roughness component reduction Waviness component reduction Filter type Cutoff value Functions Hardware requirements Rotational/spiral measurement Rectilinear measurement Roundness, concentricity, coaxiality (of section), coaxiality (of axis), radius variation, cylindricity, simplified cylindricity, mean cylindricity, thickness deviation (radial), thickness deviation (axial), parallelism (single-radius), parallelism (multiple-radius), diameter measurement, squareness (against plane), squareness (against axis), flatness (single-circumference), flatness (multiple-circumference), circular run-out (radial), circular run-out (axial), total run-out (radial), total run-out (axial), power spectrum analysis Straightness (vertical), straightness (horizontal), slope (vertical), slope (horizontal), coaxiality, taper ratio, cylindricity, squareness, parallelism (vertical), parallelism (horizontal), power spectrum analysis Cylindricity, flatness, coaxiality, squareness, total run-out SC, MZC, MIC, MCC Top view, opened view, side view, inclined view, overlooked view External printer with the driver for Windows OS (optional) 100X to 100,000X auto (Desired magnification can be specified manually.) ow pass filter, band pass filter High pass filter 2CR-75%, 2CR-50%, 2CR-75% (phase-corrected), 2CR-50% (phase-corrected), Gaussian, filter OFF 15upr, 50upr, 150upr, 500upr, 1500upr (Desired value can be specified manually.) 0.25mm, 0.8mm, 2.5mm, 8mm, 25mm,.01",.03",.1",.3", 1" (Desired value can be specified manually.) Automatic calculation from measured data Total analysis of multiple items Recalculation of datum/measured data Part program setting (from measurement to analysis) Automatic concentricity measurement (without manual switching of the probe measuring direction) Tolerancing (GO/NG judgment) Rotation of 3D display Real-time display Simplified layout (divided layout) Hair line, auxiliary line, hidden line, fill line Color setting of measured data Multi-color display of cross-sections Offsetting of recorded profile generation Zooming of recorded profile Data detetion Graph analysis (displacement/angle between measured points) Harmonic analysis Gear tooth analysis Text data output (via CSV format) Comparison to designed data Narrow range roundness/flatness analysis Rotational/straightness error compensation Computer: IBM PC compatible Processor: Intel Pentium II 300MHz or faster Harddisk: 2GB or more Memory: 64MB or more OS: Windows 95/98/NT4.0 Data I/O port: GP-IB board (Manufacturer: National Instruments) Monitor: Color SVGA (800x600 dot or finer) Windows is a registered trademark of Microsoft Corporation. Specifications are subject to change without notice. DISTRIBUTED BY: Mitutoyo America Corporation NEW JERSEY 18 Essex Road, Paramus, NJ Phone (201) Fax No MICHIGAN Five Mile Rd., Plymouth, MI Phone (734) Fax No IINOIS 965 Corporate Blvd., Aurora, I Phone (630) Fax No CAIFORNIA Gale Ave., City of Industry, CA Phone (626) Fax No Printed in Japan 7YA (1) EPR